CMP TreatmentSemiconductor CMP Wastewater Treatment
Key features & benefits
• Specialistprocessesdevelopedforthesemiconductor market
• Facilitateswaterreuse
• Designedforlowestchemicalcosts
• Reliablehighqualityresults
Howwecreatevalue
• Savesonwastewaterdisposalcosts
• Savesonrainwatertreatmentcosts
• Facilitatesadditionalcapacity
Semiconductor CMP Wastewater Treatment
Thefabricationofsemiconductordevicesrequireslargevolumeofultra-purewaterandconsiderableamountsofchemicalsandthereforegenerateslargevolumesofwastewater.
Thedifferentfabricationprocesses(ChemicalMechanicalPlanarization(CMP),lithography,etching,strippingandcleaning)generateawidevarietyofwastewatercompositions.Thesewastewaterstreams(CMPWaste,BackgrindingWaste(BG),AcidandAlkalineWaste,MetalsBearingWasteandOrganicWaste)requirepropertreatmenttomeetstringentreclaimanddischargeregulations.
Thecontaminationlevelinthewastewaterischangingduetonewchemicalsusedandtohigherwaterreclaim.Ovivodevelopedseveralstateofthearttreatmentprocessestotreatthedifferentwastewater streams and meet current and future reclaimanddischargerequirements.OvivoisalsoactiveindevelopingwastewatertreatmentprocessestomeettheIndustry’snewchallenges.
CMP Treatment
Ultrapure water
CMPCopper
CMPTungsten
CMPOxide
Concentratewaste
Dilutewaste
BGwaste
Ovivo activities
Processes
Effluent
BGUF / MF
CMPUF
Advancedoxidationprocess
Sludge Recalimtank
ToUPW Plant
Reuse
Backgrind(BG)
CMPWastewaterGenerationfromSemiconductorFabricationFacility
CMP Wastewater StreamsThedifferentCMPwastewaterstreamsaretreatedindedicatedsystemstoachieveeffluentdischargeandreclaimrequirement.
The treatment systems can be listed with relation to the treatment objective as follows:• OxideCMPwastewater• CopperCMPwastewater• TungstenCMPwastewater• AmmoniaBearingCMPwastewater
CMP wastewater treatment and reclaim
Flocculation & sedimentation
H20
2
controlCMP or BGwastewater
Qualitycontrol
Discharge
CMPandBackgrindWastewaterTreatment
CMP Treatment
CMP/BG Wastewater Treatment
ChemicalMechanicalPolishing(CMP)isanessentialprocessinthesemiconductorfabrication.CMPwastewatercanbetreatedbyflocculationandsedimentationinordertoremovetheslurryparticles.
Advantages of Ovivo systems:• H2O2controltoavoidsludgeflotation• Minimalchemicalconsumptionandthereforesludgegeneration
• Treatedwatermeetsthemoststringent dischargerequirement
Qualitycontrol
UltrafiltrationCMP or BGwastewater
Dischargeor reclaim
CMP&BGWastewaterReclaim
Through research and innovation Ovivo develops state of the art technologies and brings the right solution to our customers. Ammonia and water recycle from Oxide CMP and advanced oxidation process for Copper CMP are two examples.
Reuse,recycle,orreclaimoftheCMPwastewaterisbecominganimportantissuebecauseofthehighvolumeofUPWusedintheCMPprocess.TheuseofultrafiltrationtoremoveslurryparticlesdoesnotonlyachievethedischargerequirementbutalsoenhancesthepossibilitytoreclaimorreusetheCMPwastewater.
Advantages of Ovivo systems:• Silicacontroltoavoidclogging• Chemicalfreeprocess• Robustmembraneandtreatmentprocessleadingtolowoperatingcost
• Treatedwatercaneitherbedischargedorreused
Ammoniarecovery
Concentrate Ammonia
wastewater
CMP/UFAmmoniacontaning
CMP
Ammoniaremoval
Neutralization/reclaim
RemovalofAmmoniafromCMPProcess
CMP Treatment
Ammonia(NH3)isawidelyusedchemicalin
thedifferentsemiconductordevicefabricationprocesses.Ammoniumhydroxideiscommonlyusedinchemicalmechanicalplanarization(CMP)asamildetchantinoxideprocess.Ammoniumhydroxidesolutionisusedinpost-CMPcleaningafteroxide,tungstenandcopperCMPprocesses.
Ammoniaisconsideredharmfultoreceivingwaterbodiessuchaslakesandriversandthereforeammoniadischargeishighlyregulated.
Ovivoprovidesstate-of-the-arttreatmenttechnologiesenablingtheremovalandrecovery ofammoniafromsemiconductoreffluents.
Advantages of Ovivo systems:• Robustsystemwithoptimizedprocesswiththelowestoperatingcost
• Ammoniarecovery• Waterrecovery
Dischargeor
Reuse
Sedimentation
Cu-SelectiveIon
Exchange
Copperplatingrinse
CopperPlatingBath
ElectroReclaim
CopperSheet
PrecipitationOxidationpH
ControlTank
CopperCMP
TreatmentofCopperCMPWastewater
CopperCMPwastewaterandothercopperbearingstreamsrequireappropriatetreatmenttoachievedischargerequirements.Ovivo’sadvancedoxidationprocessutilizesatolerantbutadvancedprocesstoremovecopperfromthewastewater.Theprocessutilizestheoxidantpresentinthecopperwasteinadditiontoacatalysttoformastrongoxidizer.Thestrongoxidizerbreaksthecomplexedcopperandreducestheorganicconcentrationinthewastewater.Coppercanthenbeprecipitatedascopperhydroxideandremovedwiththeslurryparticles.
Highlights of Ovivo’s advanced oxidation process:• Achievingwastewaterdischargerequirement• Reducesnotonlycopperbutalsoorganics• Simple,flexibleandcosteffective
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100.X.1012.102010