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Cleaning of Hydrocarbon Buildup on Metallic-oxide Thin-Films
Richard SandbergShannon Lunt, Elke Jackson, Kristi
Adamson, Ross Robinson, Guillermo Acosta, Nick Webb, Mike Dheil, Luke Bissell
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Purpose: Will the Opticlean polymer remove hydrocarbon? Does this cleaning process damage our thin films?
Outline1. Sample Creation
&Contamination rate
2. Effects of hydrocarbon “goo” buildup
3. Opticlean Process
4. Opticlean Residue
5. Damage to thin films
6. Removing Opticlean Residue
7. Conclusions
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Sample Creation & Contamination Rate
Creation in vaccum chamber RF Sputtering Evaporation
Rates
Goo Thickness (Ǻ)
Action Performed
Elapsed Time (Hrs)
21 Open Air 425
143 Touch fingers Instantaneous
10 Dipped in Water Instantaneous
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Reflectivity Effects With Goo Thickness
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Opticlean ProcessOpticlean Residue
• Opticlean significantly removes goo, but leaves a residue
• Ellipsometric Results
Goo thickness on two runs:
1. 17 Anstroms2. 22 Anstroms
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Thin Film Damage
Scanning Electron Microscope with EDAX showed no thin film damage
X-Ray Photoelectric Spectroscopy found no metal traces
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Scanning Electron Microscope with EDAX
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X-Ray Photoelectric Spectroscopy
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Conclusions
• Subsequent removal of Opticlean residue with plasma etch
• Conclusion: Opiclean a very effective way to remove hydrocarbon buildup1. Sufficiently removes goo2. Does not damage the surface of thin film samples