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Page 1: A three-DOF compliant micromotion stage with flexure ...yy582/Papers/Yong_threeDOF.pdf · the compliant micromotion stage is given in equation (4). 759, 063 30.7 x 106 759, 063 759,

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A three-DOF compliant micromotion stage with flexure hingesTien-Fu Lu; Daniel C Handley; Yuen Kuan Yong; Craig EalesThe Industrial Robot; 2004; 31, 4; ABI/INFORM Globalpg. 355

Page 2: A three-DOF compliant micromotion stage with flexure ...yy582/Papers/Yong_threeDOF.pdf · the compliant micromotion stage is given in equation (4). 759, 063 30.7 x 106 759, 063 759,

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 3: A three-DOF compliant micromotion stage with flexure ...yy582/Papers/Yong_threeDOF.pdf · the compliant micromotion stage is given in equation (4). 759, 063 30.7 x 106 759, 063 759,

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 4: A three-DOF compliant micromotion stage with flexure ...yy582/Papers/Yong_threeDOF.pdf · the compliant micromotion stage is given in equation (4). 759, 063 30.7 x 106 759, 063 759,

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 5: A three-DOF compliant micromotion stage with flexure ...yy582/Papers/Yong_threeDOF.pdf · the compliant micromotion stage is given in equation (4). 759, 063 30.7 x 106 759, 063 759,

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 6: A three-DOF compliant micromotion stage with flexure ...yy582/Papers/Yong_threeDOF.pdf · the compliant micromotion stage is given in equation (4). 759, 063 30.7 x 106 759, 063 759,

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.

Page 7: A three-DOF compliant micromotion stage with flexure ...yy582/Papers/Yong_threeDOF.pdf · the compliant micromotion stage is given in equation (4). 759, 063 30.7 x 106 759, 063 759,

Reproduced with permission of the copyright owner. Further reproduction prohibited without permission.


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