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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DEPFET Readout and Control Electronics
Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Outline
- Module Electronics - Introduction- Principle of DEPFET readout- Switcher with LV transistors (Switcher 3)- Switcher with HV transistors- DCD Chip- Bumping technologies
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DEPFET readout and control-ASICS
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DEPFET readout and control-ASICS
DCD#0 – DCD#5Switcher#0
Switcher#4
ACTIVE AREA
Sensor – active area
Sensor balcony
Chip
Switcher – row control chip with high voltage line drivers
0.35 μm technology
DCD – DEPFET current receiver and digitizer chip
0.18 μm technology
DHP – Digital data handling and readout control chip
0.09 μm technology
960X512
(160 channels each)
(32 channels each)
Bump bonding
Fan-out
Switcher
DCD
DHP
DHP
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Layout (Preliminary)
DCDs
Switcher
Width =1.6mm!
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Principle of DEPFET readout
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Readout principle 1 – signal collection – internal gate
p+ p+
Internal gate (n+)
PMOS
n+
DEPFET pixeln-(depleted)
G
DS Clr
DHP
DCD#0 – DCD#5SWITCHER#0
SWITCHER#4
ACTIVE AREA
Signal generation
Signal collection
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Readout principle – start of the readout
p+ p+
Internal gate (n+)
PMOS
n+
DEPFET pixeln-(depleted)
G
DS Clr
DHP
DCD#0 – DCD#5SWITCHER#0
SWITCHER#4
ACTIVE AREA
Signal collection
Signal generation
Read out
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
G
DHP
DCD#0 – DCD#5SWITCHER#0
SWITCHER#4
ACTIVE AREA
Readout principle – switcher generates high voltage – row on
p+ p+
Internal gate (n+)
PMOS
n+
DEPFET pixeln-(depleted)
DS Clr
Signal collection
Signal generation
Read out
Row on
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Readout principle – drain current is stored in DCD
DHP
DCD#0 – DCD#5SWITCHER#0
SWITCHER#4
ACTIVE AREA
p+ p+
Internal gate (n+)
PMOS
n+
DEPFET pixeln-(depleted)
DS Clr
Signal collection
Signal generation
Read out
Row on
Signal memorizing
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Readout principle – start of clearing
DHP
DCD#0 – DCD#5SWITCHER#0
SWITCHER#4
ACTIVE AREA
p+ p+
Internal gate (n+)
PMOS
n+
DEPFET pixeln-(depleted)
DS Clr
Signal collection
Signal generation
Read out
Row on
Signal memorizing
Clearing
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Readout principle – clearing, offset current subtracted in DCD
DHP
DCD#0 – DCD#5SWITCHER#0
SWITCHER#4
ACTIVE AREA
p+ p+
Internal gate (n+)
PMOS
n+
DEPFET pixeln-(depleted)
DS Clr
Signal collection
Signal generation
Read out
Row on
Signal memorizing
Clearing
Signal – offest subtraction
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Readout principle – A/D conversion
p+ p+
Internal gate (n+)
PMOS
n+
DEPFET pixeln-(depleted)
G
DS Clr
DHP
DCD#0 – DCD#5SWITCHER#0
SWITCHER#4
ACTIVE AREA
00110
Signal collection
Signal generation
Read out
Row on
Signal memorizing
Clearing
Signal – offest subtractionA/D conversion
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Row control “Switcher” chip
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Switcher with LV transistors – Switcher 3
Switcher 3
Radiation tolerant layout in 0.35 μm technology
128 channels
+ Very fast
- Operation up to 11.5 V
Novel design: Uses stacked LV transistors, HV twin-wells and capacitors as level-shifters
+ No DC power consumption
HV channel with 3+3 Switch transistors and 4 AC coupling stages (180x180µm, M4 not shown)
interdigitatedAC coupling caps
Ivan Peric, Mannheim
80µmopenin
g
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Switcher 3 – output driver
Use an SRAM cell flipped by a transient voltageNo dc power consumption!
9V
out
‘SRAM’
3V
‘SRAM’
6V
‘SRAM’
‘SRAM’
0V
3V
6V
ResetReset
~200 fF
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Switcher with LV transistors – Switcher 3
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Rising/Falling Edge vs. Cload
2ns !
9V !
0pF (1.8ns
)
10pF (4ns)
22pF (8ns)
47pF (18ns)
0pF (1.5ns)
10pF (3.8ns
)
22pF (6.5ns)
47pF (14ns)
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Switcher 3 chip irradiation up to 22 MRad
Only degradation in speed which can be avoided using larger transistors
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Switcher 4
Switcher 3
Uses radiation tolerant high voltage transistors in HV 0.35 μm technology
64 channels
+ fast enough
+ Possible operation up to 50 V (30V tested)
+ low DC power consumption
Enclosed design of NMOS HV transistors
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Switcher 4 chip – high voltage transistors
Hi voltage Hi voltage Hi voltage Hi voltage
20V 0V17-20V 0-3V0-20VThin oxide
Thick oxide
n-
p-
p-
n-
Vertical NMOSPMOS
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
D
S
D
S
Thick oxid Leakage current
Standard NMOSAnnular gate NMOS
G
G
Annular gate vertical NMOS
S
B
G
D
Difefrent types of radiation-soft and -hard NMOS transistors
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
logic out
20V
17V
3V
0V
in
Switcher 4 chip output driver
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
logic out
20V
17V
3V
0V
in
Switcher 4 chip output driver
30V amplitude
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Irradiation of NMOS transistors
0,0 0,1 0,2 0,3 0,4 0,50
20
40
60
80
100
120
140
160
Cu
rre
nt [
µA
]
Gate Voltage [V]
X-ray irradiation up to ~600 kradNo threshold shift or leakage current for annular structures
0,0 0,1 0,2 0,3 0,4 0,50
10
20
30
40
50
60
70
80
90
100
Cu
rre
nt [
µA
]
Gate Voltage [V]0,0 0,1 0,2 0,3 0,4 0,5
0
10
20
30
40
50
Cur
rent
[µA
]
Gate Voltage [V]
600 krad
before
stacked ‘normal’annular NMOS
‘HV’ NMOS: thin gate oxide,
extended thick drain, enclosed gate
‘HV’ NMOS, normal layout
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DEPFET signal digitizer chip - DCD
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD3 chip
- Technology 0.18 μm- 72 Channels - 2 ADCs and regulated
cascode/channel- 6 channels multiplexed to one digital
LVDS output- ADC sampling period 160 ns (8 bits)- Channel sampling period 80 ns - LVDS output: 600 M bits/s- Chip: 7.2 G bits/s (12 outputs)- Radiation tolerant design- ~ 1mW/ADC
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD3 chip
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD3 ADC
Reg. cascode
Double sampling
DEPFET
W
NC
R
R
R
R
L
L
NC
R
R
W R
R
L
L
W
R
1234567
1234567
7 7
7
7 76 65 5
543
543
6 67 7
3
Gate On
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD 3 measurements
-8 -6 -4 -2 0 2 4 6 8
0
50
100
150
200
250
300Mean value for 62 measurements
ADC outputDeviation from fit
AD
C o
utp
ut
Input current/mA
-1,5
-1,0
-0,5
0,0
0,5
1,0
1,5
De
viatio
n fro
m line
ar fit
-2 -1 0 1 20
2000
4000
6000
8000
10000
12000slow cellsigma noise = 0,60
Num
ber
of m
eas
ure
men
tsDeviation from mean/LSB
ADC characteristic Noise
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD 3 irradiation up to 7 MRad
No significant changes after 7 Mrad and 6 days of annealing
ADC characteristic Analog characteristic of CSC
Noise – channel 1 Noise – channel 2
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Chip Geometry: 1525 µm x 5000 µmTechnology 0.18 μmAnalog circuits in upper pixelsDigital circuits on the bottom
10 x 16 ANALOG parts(bump + cascode +
current memory + ADC)
AnalogPowerpads
DigitalPowerPads
DigitalOutputsControl
DIGITAL
10 x 4 outputs+ control
Pitch = 150µm
Chip architecture – (proposed for SBelle prototype)
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Channel layout – (proposed for SBelle prototype)
A AAA AA
Bump-bond pad(Analog In)
Cell1 Cell2
A A
h, l
CmpHi CmpLo Cell3 Cell4CmpHi CmpLo
A
TC TC
MM cap
TCTCTC TC TC TCTC
(Receiver)
Digital output
ADC1ADC2
Sampling cell 1
Sampling cell 2
Reg. cascode
IO line
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Data handling processor - DHP
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DHP architecture
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DHP - block diagram of the data processing block
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Bumping
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Base technology – chip with gold stuts
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
1. Gold Studs2. Buy chips with PbSn bumps or similar
(possible for UMC via SPIL wafer bumping service, IBM,…)3. Get everything done by company
Techno Min.pitch
Bumppad
Max.bumps
Pressure / bump
UBMSensor
WafersNeeded
Rework Cost Who
Au Stud
100 70 (60) 600 >25g no no No LowHD,
(BN, HLL)
BumpedChips
150-200
50 (?) 0 yes No Yes MedHD,
(BN, HLL)
DepositPbSn
~100 70(?) 0 yes No Yes LowPACTEC(HD ?)
Byvendor
50 15 0 yes yes Yes High IZM,…
Bumping possibilities
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Conclusions
- DCD prototype chip has been tested with test signals that correspond to DEPFET currents and irradiated up to 7 Mrad.
The chip works fine and has high enough conversion speed. Operation with matrices still to be tested – we do not expect problems. Only „fine tuning“ of the design for the super KEKB operation is necessary.- Switcher prototype with LV transistors has been tested and irradiated up to 22 MRad. The chip works fine and has adequate speed for SBelle operation.- Another prototype with HV transistors has been designed and tested.- The irradiation of the chip still has to be done but the basic and most critical part (high-
voltage NMOS) has been irradiated up to 600 KRad and no damage has been observed.- DHP chip will be designed using digital design tools in intrinsically radiation hard 90 nm
technology.
- Choice between 4 different bumping technologies – advantages and disadvantages still to be evaluated…
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Thank you
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 2)
Reg. cascode
Double sampling
DEPFET
W
NC
R
R
R
R
L
L
NC
R
R
W R
R
L
L
W
R
1234567
1234567
7 7
7
7 76 65 5
543
543
6 67 7
3
Gate On
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2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 3)
01234567
01234567
Reg. cascode
Double sampling
DEPFET
NC
W
R
R
C
C
L
L
W
R
R
NC C
C
L
L
W
R
Z
7 76 65 54 4
54
54
6 67 7
4
![Page 44: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/44.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 4)
Reg. cascode
Double sampling
DEPFET
R
R
W
NC
L
L
R
R
R
W
NC
R L
L
R
R
W
R
01234567
01234567
C
7 76 65 54 4
54
54
6 67 7
4
![Page 45: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/45.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
Clear On
DCD2 (CNT = 5)
7 7
Reg. cascode
Double sampling
DEPFET
R
R
NC
W
L
L
C
C
R
NC
W
R L
L
C
C
R
W
54321
54321
6 67 7
Z
7 76 65 54 43 3
5 56 67 7
5
![Page 46: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/46.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 6)
Reg. cascode
Double sampling
DEPFET
W
NC
R
R
R
R
L
L
NC
R
R
W R
R
L
L
R
W
7 7
54321
54321
6 67 7
1
7 76 65 54 43 3
5 56 67 7
5
![Page 47: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/47.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 7)
Double sampling
NC
W
R
R
C
C
L
L
W
R
R
NC C
C
L
L
Reg. cascode
DEPFET
R
W
7 76 6
5432
5432
6 67 7
2
7 76 65 54 43 32 2
6 67 7
6
![Page 48: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/48.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 8)
Double sampling
R
R
W
NC
L
L
R
R
R
W
NC
R L
L
R
R
Reg. cascode
DEPFET
R
W
7 76 6
5432
5432
6 67 7
2
7 76 65 54 43 32 2
6 67 7
6
![Page 49: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/49.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 9)
Double sampling
R
R
NC
W
L
L
C
C
R
NC
W
R L
L
C
C
Reg. cascode
DEPFET
R
W
7 76 65 5
543
543
6 67 7
3
7 76 65 54 43 32 21 1
7 7
7
![Page 50: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/50.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 10)
Reg. cascode
Double sampling
DEPFET
W
NC
R
R
R
R
L
L
NC
R
R
W R
R
L
L
W
R
7 76 65 5
543
543
6 67 7
1234567
1234567
7 7
3
7
Gate On
![Page 51: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/51.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 11)
Reg. cascode
Double sampling
DEPFET
NC
W
R
R
C
C
L
L
W
R
R
NC C
C
L
L
W
R
7 76 65 54 4
54
54
6 67 7
4
01234567
01234567
Z
![Page 52: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/52.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 12)
Reg. cascode
Double sampling
DEPFET
R
R
W
NC
L
L
R
R
R
W
NC
R L
L
R
R
W
R
7 76 65 54 4
54
54
6 67 7
4
01234567
01234567
C
![Page 53: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/53.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 13)
Reg. cascode
Double sampling
DEPFET
R
R
NC
W
L
L
C
C
R
NC
W
R L
L
C
C
R
W
7 76 65 54 43 3
5 56 67 7
5
7 7
54321
54321
6 67 7
Z
Clear On
![Page 54: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/54.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 14)
Reg. cascode
Double sampling
DEPFET
W
NC
R
R
R
R
L
L
NC
R
R
W R
R
L
L
R
W
7 76 65 54 43 3
5 56 67 7
5
7 7
54321
54321
6 67 7
1
![Page 55: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/55.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 15)
Double sampling
NC
W
R
R
C
C
L
L
W
R
R
NC C
C
L
L
Reg. cascode
DEPFET
R
W
7 76 65 54 43 32 2
6 67 7
6
7 76 6
5432
5432
6 67 7
2
![Page 56: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/56.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 0)
Double sampling
R
R
W
NC
L
L
R
R
R
W
NC
R L
L
R
R
Reg. cascode
DEPFET
R
W
7 76 65 54 43 32 2
6 67 7
6
7 76 6
5432
5432
6 67 7
2
![Page 57: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/57.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 1)
Double sampling
R
R
NC
W
L
L
C
C
R
NC
W
R L
L
C
C
Reg. cascode
DEPFET
R
W
7 76 65 54 43 32 21 1
7 7
7
7 76 65 5
543
543
6 67 7
3
![Page 58: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/58.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 2)
Reg. cascode
Double sampling
DEPFET
W
NC
R
R
R
R
L
L
NC
R
R
W R
R
L
L
W
R
1234567
1234567
7 7
7
7 76 65 5
543
543
6 67 7
3
Gate On
![Page 59: 2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics DEPFET Readout and Control Electronics Ivan Peric, Peter Fischer, Christian Kreidl Heidelberg University](https://reader036.vdocuments.us/reader036/viewer/2022062423/56649eb25503460f94bb9b06/html5/thumbnails/59.jpg)
2. Super KEKB Meeting, 17-19.3.2009 DEPFET Electronics
DCD2 (CNT = 3)
01234567
01234567
Reg. cascode
Double sampling
DEPFET
NC
W
R
R
C
C
L
L
W
R
R
NC C
C
L
L
W
R
Z
7 76 65 54 4
54
54
6 67 7
4