do not open the tf analyzer 2000 system under … do not open the tf analyzer 2000 system under any...

i

Do not open the TF Analyzer 2000 system under any circum-stances!!! Neither the Basic Unit nor the Probe Head. It existsdanger to life because of the supply voltage. No adjustments arepossible by the user.

If you find out malfunctioning of the system, please contact:

aixACCT Systems GmbHDennewartstr. 25 - 27

D-52068 AachenGermany

phone ++49 241 963 1410fax ++49 241 963 1411e-mail [email protected]

Information furnished in this manual by aixACCT is believed to be accurate andreliable. aixACCT assumes no liability for the user or misuse of the informationprovided herein.

aixACCT is not liable for any damages or injuries incurred as the result of open-ing the Basic Unit or the Probe Head of the TF Analyzer 2000 system by anyperson or the operation of this system in a manner inconsistent with the proce-dures and recommendations in the operation manual of the TF Analyzer 2000system. Any changes or modifications not expressly approved by aixACCT willvoid the users authority to operate the equipment.

Note: This equipment has been tested and found to comply with the limits for a Class A digital device,pursuant to Part 15 of the FCC Rules. These limits are designed to provide reasonable protection againstharmful interference when the equipment is operated in a commercial environment. This equipment gen-erates, uses, and can radiate radio frequency energy and, if not installed and used in accordance with theinstruction manual, may cause harmful interference to radio communications. Operation of this equipmentin a residential area is likely to cause harmful interference in which case the user will be required to correctthe interference at his own expense.

ii

Licenses, Warranty, Export Restrictions

Hardware and software licensesaixACCT will repair or replace, at its location of business, within the period of one year fromdelivery at no expense to the purchaser faulty or damaged hardware or software where suchfaults or damage are the direct result of design or manufacture of the TF Analyzer 2000 sys-tem and / or its measurement software.

Limitations on warrantyThe warranty set forth above does not extend to and shall not apply to:

1. TF Analyzer 2000 systems which have been repaired or altered by other than aixACCTpersonnel, unless the user have properly altered or repaired the TF Analyzer 2000 sys-temin accordance with procedures previously approved in writing by the aixACCT Sys-tems GmbH.

2. TF Analyzer 2000 system which have been subject to misuse, neglect, accident, or im-proper installation.

Export limitationsThe TF Analyzer 2000 system contains subsystems whose export are governed by the Bundes-ausfuhramt of the Federal Republic of Germany concerning commodities of this type. Neitherthe TF Analyzer 2000 system nor its subcomponents may be exported without first contactingaixACCT and the Bundesausfuhramt.

Trademarks used in this manualProducts and company names listed are trademarks or trade names of their respective compa-nies: Pentium, IBM, WinNT.

iii

Contents

Licenses, Warranty, Export Restrictions

1 General

1.1 Concept of the TF Analyzer 2000 system . . . . . . . . . . . . . . . . . . . 1

1.2 Basic unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

1.3 Probe head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

2 System installation

2.1 Package contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

2.2 Hardware installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

2.3 TF Analyzer in combination with high voltage amplifiers (optional) . . . . . 9

2.3.1 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

2.3.2 Testing the high voltage option . . . . . . . . . . . . . . . . . . . . 9

2.4 TF Analyzer with displacement sensors for piezo measurements (optional) . . 13

2.5 TF Analyzer with oscilloscopes for high-speed measurements (optional) . . . 17

2.6 TF Analyzer in combination with a Racal switch box (optional) . . . . . . . . 21

2.6.1 Switch box installation . . . . . . . . . . . . . . . . . . . . . . . . . 21

2.7 TF Analyzer in combination with an Agilent switch box E5250A (optional) . 25

2.7.1 Switch box installation . . . . . . . . . . . . . . . . . . . . . . . . . 25

3 Measuring with the TF Analyzer

3.1 General program overview . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

3.1.1 Measurement dialog . . . . . . . . . . . . . . . . . . . . . . . . . . 30

3.1.2 Setting of the measurement temperature (optional) . . . . . . . . . . 31

3.1.3 Manual waveform dialog . . . . . . . . . . . . . . . . . . . . . . . . 32

3.1.4 Settings dialog box . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

3.1.5 Compensation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

3.1.6 Description of the graph windows . . . . . . . . . . . . . . . . . . . 39

3.1.7 Data Formats . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

3.1.8 Multi-sample measurements with a switch box (optional) . . . . . . . 43

3.2 Dynamic Hysteresis Measurement - DHM . . . . . . . . . . . . . . . . . . . 47

iv

3.2.1 Measurement procedure and typical measurement . . . . . . . . . . 47

3.2.2 The characteristic parameters of the hysteresis loop . . . . . . . . . . 48

3.2.3 Execution of a hysteresis measurement . . . . . . . . . . . . . . . . 49

3.2.4 ASCII-File of the Hysteresis Program . . . . . . . . . . . . . . . . . 50

3.3 Pulse Measurement - PM . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53


3.3.2 Execution of a PM measurement . . . . . . . . . . . . . . . . . . . . 54

3.3.3 ASCII-format of the Pund measurement . . . . . . . . . . . . . . . . 56

3.4 Static Hysteresis Measurement - SHM . . . . . . . . . . . . . . . . . . . . . 59


3.4.2 Execution of a static hysteresis measurement . . . . . . . . . . . . . 60

3.4.3 ASCII-File of the Static Hysteresis Program . . . . . . . . . . . . . 61

3.5 Leakage Measurement - LM . . . . . . . . . . . . . . . . . . . . . . . . . . 63


3.5.2 Description of the leakage measurement method . . . . . . . . . . . 63

3.5.3 ASCII file format of the Leakage measurement . . . . . . . . . . . . 65

3.6 Piezo Measurement - PZM (optional) . . . . . . . . . . . . . . . . . . . . . 67


3.6.2 Execution of a Piezo measurement . . . . . . . . . . . . . . . . . . . 68

3.6.3 ASCII-format of the piezo program . . . . . . . . . . . . . . . . . . 70

3.7 CV and piezo coefficient Measurement - CVM (optional) . . . . . . . . . . . 73


3.7.2 Execution of a CV measurement . . . . . . . . . . . . . . . . . . . . 73

3.7.3 ASCII-format of the CVM program . . . . . . . . . . . . . . . . . . 76

3.8 Thermo Measurement - THM (optional) . . . . . . . . . . . . . . . . . . . . 77


3.8.2 Execution of a Thermo measurement . . . . . . . . . . . . . . . . . 77

3.8.3 ASCII-File of the Thermo Program . . . . . . . . . . . . . . . . . . 79

3.9 Fatigue Measurement - FM . . . . . . . . . . . . . . . . . . . . . . . . . . . 83


3.9.2 Execution of a fatigue measurement . . . . . . . . . . . . . . . . . . 84

v

3.9.3 ASCII-File of the Fatigue Measurement . . . . . . . . . . . . . . . . 86

3.10 Imprint Measurement - IM . . . . . . . . . . . . . . . . . . . . . . . . . . . 89


3.10.2 Executing an Imprint measurement . . . . . . . . . . . . . . . . . . 91

3.10.3 ASCII-File of the Imprint Program . . . . . . . . . . . . . . . . . . 93

3.11 Retention Measurement - RM . . . . . . . . . . . . . . . . . . . . . . . . . 95


3.11.2 Executing a retention measurement . . . . . . . . . . . . . . . . . . 96

3.11.3 ASCII-File of the Retention program . . . . . . . . . . . . . . . . . 98

3.12 Access Time Measurement - ATM (optional) . . . . . . . . . . . . . . . . . 101


3.12.2 Execution of an Access Time measurement . . . . . . . . . . . . . . 102

3.12.3 ASCII-format of the Access Time program . . . . . . . . . . . . . . 104

4 GPIB control of the TF Analyzer (optional)

4.1 Setup of the system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 107

4.2 GPIB commands for the TF Analyzer . . . . . . . . . . . . . . . . . . . . . 108

4.2.1 General commands . . . . . . . . . . . . . . . . . . . . . . . . . . . 108

4.2.2 File operation commands . . . . . . . . . . . . . . . . . . . . . . . 109

4.2.3 Option commands . . . . . . . . . . . . . . . . . . . . . . . . . . . 109

4.2.4 Sampledata commands . . . . . . . . . . . . . . . . . . . . . . . . . 110

4.2.5 Hysteresis module commands . . . . . . . . . . . . . . . . . . . . . 111

4.2.6 PUND module commands . . . . . . . . . . . . . . . . . . . . . . . 112

4.2.7 Static hysteresis module commands . . . . . . . . . . . . . . . . . . 112

4.2.8 Leakage module commands . . . . . . . . . . . . . . . . . . . . . . 113

4.2.9 Piezo module commands . . . . . . . . . . . . . . . . . . . . . . . . 113

4.2.10 CV module commands . . . . . . . . . . . . . . . . . . . . . . . . . 114

4.2.11 Thermo module commands . . . . . . . . . . . . . . . . . . . . . . 114

4.2.12 Fatigue module commands . . . . . . . . . . . . . . . . . . . . . . . 115

4.2.13 Imprint module commands . . . . . . . . . . . . . . . . . . . . . . . 115

4.2.14 Retention module commands . . . . . . . . . . . . . . . . . . . . . 116

4.2.15 Accesstime module . . . . . . . . . . . . . . . . . . . . . . . . . . . 117

4.2.16 Graph commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . 118

vi

5 Troubleshooting

5.1 Measurement problems and possible solutions . . . . . . . . . . . . . . . . . 119

1

1 General

1.1 Concept of the TF Analyzer 2000 system

The TF Analyzer 2000 system is the first modular designed electrical characterization system

for electroceramic thin films and bulk ceramic samples. Comprehensive material characteriza-

tion by small expense is the intention of this setup. aixACCT is able to offer a system both with

excellent electrical performance and unique test methods.

Within the TF Analyzer 2000 system four modules are offered:

FE-module to investigate the ferroelectric hysteresis loop

PS-module to investigate the switching kinetics of ferroelectric materials

RX-module to investigate the relaxation behavior of electroceramic materials

DR-module to investigate the self discharge behaviour

The different modules are optimized for special measurement requirements and complement

each other. For example completes the pulse switching module the investigation of the fre-

quency dependence of the hysteresis loop very well. So, the investigation of this effect can

be observed from the mHz range, using the static hysteresis and the dynamic hysteresis mea-

surement of the FE module to the MHz range, using the PS module. Newest characterization

methods are implemented like static hysteresis measurement. This method helps to separate re-

versible and irreversible parts of the polarization. In correlation with the data from the imprint

measurement the user is able to perform a life time extrapolation for his material in view of

memory application.

The specific amplifiers are located in a so called Probe Head. Since it can be placed very close

to the sample the loop between drive and return is much reduced and so the signal to noise ration

is increased significantly. The computer and the high precision power supplies are located in

the Basic Unit. Changing the Probe Head means to change the characterization method. To do

this you simply have to solve and reconnect four cables.

1.2 Basic unit

The TF Analyzer 2000 System consists of the Basic Unit and the Probe Head. The Basic Unit

contains the whole of the computer and the power supplies.

The computer is build of an IBM compatible computer, containing a Pentium class processor, at

least 32 Mbyte memory, a hard disk with more than 2 GByte capacity, and a VGA color graphic

2 1 General

card. The TF Analyzer 2000 system offers an efficient personal computer system. Several

interface cards which control the interaction with the Probe Head will complete the PC unit. A

digital I/O-card provides 48 bit to control the amplification of the current to voltage converter

and the electrometer. The analog input card is a high speed, high resolution data acquisition

board. The maximum sample rate amounts to 1 MHz and the resolution is 12 bit at a voltage

range of 10 V, equivalent to 4.88 mV resolution. The arbitrary waveform generator applies the

selected pulse train to the device under test. The vertical resolution amounts to 12 bit at 10 Vpp,

(2.44 mV = LSB) and the sample frequency is up to 80 MHz.

The second part of the Basic Unit contains the power supplies for the Probe Head and additional

circuit parts to handle the different Probe Heads. Electromagnetic shielding is realized and

separates the two parts of the Basic Unit. This guarantees the performance of the high precision

analog power supplies and fits in the overall concept of the TF Analyzer 2000 system to fulfill

the requirements of the EMC.

1.3 Probe head

The concept of the TF Analyzer 2000 system includes the minimization of the incoupling loop

between drive and return, because the Probe Head of the system contains the necessary ampli-

fiers to drive a capacitive load and to record the data of the measuring cycle. So, this setup can

be used with any professional probe station without the need of long cables, because the Probe

Head can be placed close to the device under test. This concept guarantees an optimum signal

to noise ratio. Three amplifiers are located in the FE-module. To drive the capacitive load two

different amplifiers are used depending on the selected program, e. g. Dynamic Hysteresis or

Fatigue. The hysteresis program allows cycletimes between one second and 1 ms, respectively

1 microsecond depending on the configuration. In this case the TF Analyzer 2000 system offers

an amplifier which provides voltage amplitudes up to 58 Vpp. In the case of a fatigue measure-

ment the amplifier is changed to offer the user frequencies up to 20 MHz driving a 100 pF linear

Styroflex-capacitor by an amplitude of 10 Vpp. The third amplifier detects the current response

of the device under test. The method used to collect the data is the feedback method, which is

realized by a current to voltage converter. This method reduces the influence of parasitic capac-

itance and back voltage known from the Sawyer Tower measurement drastically and enable for

the first time direct hysteresis measurements on nanosized samples with submicron square area.

Fig. 1.3.1 shows the circuit design in principle.

Fig. 1.3.1: Principle of the feed-back method.

2.2 Hardware installation 3

2 System installation

2.1 Package contents

After receiving the TF Analyzer 2000 system please unpack the system and inspect it for any

damage.

The delivery consists of the following items:

1. TF Analyzer 2000 Basic Unit

2. TF Analyzer 2000 FE-Probe Head

3. PS 2 mouse

4. Keyboard

5. Power cable

6. 2 BNC cables male to male

7. Lemo cable 18 pins male to male

8. Lemo cable 16 pins male to male

9. Windows NT 4.0 software

10. Hysteresis software version 1.44

11. TREK high voltage amplifier (optional)

12. Manual of the TREK amplifier (optional)

13. High voltage cable (optional)

14. 2 BNC cables male to male (optional)

15. Certificate with the license key

16. This manual

If any item is damaged or missing, please contact the aixACCT Systems GmbH immediately at


2.2 Hardware installation

Please proceed with the following steps for installation:

1. Connect the monitor cable to the VGA plug on the rear plane.

2. Connect the PS 2 mouse to plug socket on the rear panel.

3. Connect the keyboard to plug socket on the rear panel.

4 2 System installation

Make sure that the power switch of the Basic Unit is turned off.

4. Connect the power cable to the Basic Unit.

5. Connect the power cable of the Basic Unit to mains.

It is very important for personal safety and orderly operation of the system that the

ground connection is established!

6. Connect the power cable of the monitor to mains.

7. Connect the Probe Head to the Basic Unit:

(a) Connect lemo cables from the Basic Unit to the Probe Head. These cables cannot

be mixed up with each other.

(b) Connect BNC cables from Basic Unit to the Probe Head. To avoid wrong connection

both Basic Unit and Probe Head have one BNC plug which is marked by a red

border. Connect the red BNC cable to these two plugs. Connect the black BNC

cable to the other two plugs.

(c) Connect the BNC connectors at the narrow side of the Probe Head to the device

under test.

Please notice that no cabling longer than 3 m is allowed between Probe Head and Basic Unit

to operate this system pursuant to Part 15 of the FCC Rules or the CE standard. Furthermore

the user is responsible for a proper shielding of the sample or probe station according to these

standards.

For additional information to the LEDs and to the other connectors refer to Fig. 2.2.1 to Fig. 2.2.3.

On the right hand of the front panel there are the usual switches of a personal computer. The

Power LED indicates the supply power of the PC unit. On the left of the power LED there is

the ON/OFF switch of the system in addition to the main switch at the rear. The hard disk LED

lights when the hard disk is accessed by the PC. On the right of the hard disk LED is the RESET

switch of the PC located. Above the BNC connectors on the front panel four LEDs indicate the

measurement method correlated with the connected Probe Head.

On the rear panel of the Basic Unit the power plug and the connectors of the interfaces of a

personal computer are placed:

serial ports (two)

parallel port and

monitor interface

mouse connector

keyboard connector.


Fig. 2.2.1: FE Probe Head of the TF Analyzer.

Fig. 2.2.2: Front panel of the TF Analyzer 2000.


Fig. 2.2.3: Rear panel of the TF Analyzer 2000.

Now you can start to get familiar with the software of the TF Analyzer 2000. The software has

already been installed by aixACCT Systems.

To check, if the system works perfectly right, please follow the given instructions:

1. Turn on the power switch of the Basic Unit. First the main switch at the rear and after-

wards the ON/OFF switch at the front (e.g. with the tip of a pencil).

2. Turn on the power switch of the monitor.

3. The system starts Windows NT automatically.

4. To login press CTRL+Alt+Del when required.

5. Use TFA as username in the login dialog box and press enter. There is no password

required by delivery, so this line can be left empty.

6. Now the operating system continues booting and finally the main graphical user interface

of Windows NT comes up.

7. Move the cursor on the hysteresis icon on the desktop and double-click on the left mouse

button.

8. The window with the main menu of the FE-software opens up.

9. Open the measurement dialog window (entry in the Options menu or button in the tool

bar).

10. Click on Hysteresis measurement (default).

11. Interconnect the In and Out BNC connectors on the front panel of the Basic Unit with a

BNC cable and press Start.

12. When the measurement is finished an ellipsoid is displayed in the appearing graph win-

dow.

13. Remove the short circuit between plug In and Out and connect the BNC and Lemo cables


to the FE-Probe Head as mentioned before.

14. Connect a linear capacitor to the BNC plugs at the narrow side of the Probe Head.

15. Choose 5 V amplitude and 100 Hz frequency in the Input Parameters of the hysteresis

program.

16. Press AutoRange and wait until the Start button is enabled again.

17. Press Start.

18. Now nearly a line should be showed in the graph window. The reason for the slight

opening in the line is the output resistance of the amplifier driving the capacitive load.

These tests ensure that Basic Unit and FE-Probe Head are working perfectly right.

In case the system has been reinstalled or the license file is corrupted, a window appears at

program start which allows the restoration of the license file. Please type in the license key

which can be found on the hard disc (c:\Program Files\TFAnalyzer\Licensekey.txt) or printedon the certificate delivered with the system. In any other case please contact aixACCT Systems

GmbH immediately at



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2.3 TF Analyzer in combination with high voltage amplifiers (optional) 9

2.3 TF Analyzer in combination with high voltage amplifiers (optional)

2.3.1 Installation

The TF Analyzer 2000 system can be used in combination with miscellaneous high voltage

amplifiers. Standard HV amplifier ranges provided with the system are 200 V, 500 V, 1 kV,

2 kV, 4 kV, or 10 kV. The resolution of the high voltage system will be: Maximum Output

Voltage 2 4096. The connection between the power supply and the high voltage amplifier

is described in the wiring scheme in Fig. 2.3.2.

Connect the earth terminal of the Basic Unit and the High Voltage Amplifier.

Connect the enable BNC connector on the rear panel of the TF Analyzer to the digital

enable input on the front panel of the high voltage amplifier. This connection ensures that

voltage is applied only during measurements controlled by the software. An interlock

switch can be optionally wired in series.

In order to select between the external high voltage amplifier and the built-in amplifier of the

TF Analyzer 2000, choose the Options - Settings menu item of the main menu (see Fig. 2.3.1).

The external high voltage amplifier is selected if the enable checkbox is checked. In case the

user has more than one high voltage amplifier installed, the connected model can be selected in

the selection box beside the enable button. A message box is used to confirm the selection of

the high voltage option after the Settings dialog is closed with the OK button.

Notice that in case of use of the high voltage amplifier, the output of the high voltage amplifier

is directly connected to the sample holder which contacts the top electrode of the device under

test.

Please ensure that the cable connection corresponds to the wiring diagram in Fig. 2.3.2.

Notice to turn off the high voltage in any case before you change the cabling and ensure that the

device under test is discharged.

There is danger to life if you touch the high voltage line or a charged sample !

Dont press the Start button before the connection corresponding to the wiring diagram is en-

sured. At any time the sample should be protected from touching during operation.

2.3.2 Testing the high voltage option

To test the high voltage option, please follow the steps below. Refer to the wiring diagram

in Fig. 2.3.2 to connect the Basic Unit and the Probe Head, the high voltage amplifier (e. g.

TREK) and the positioner unit.


Fig. 2.3.1: How to select the external high voltage amplifier.

The sample must be protected from touching in any case, when high voltage is applied to

the sample !

Connect a linear capacitor which maximum voltage parameter exceeds the maximum applied

voltage of 500 V to the positioner unit. Start the Hysteresis main program and select Options

- Settings out of the main menu and enable the high voltage amplifier. Select Hysteresis in the

Measurement dialog, choose appropriate parameters and a sufficient current range and press the

Start button. After the measurement is done, a rising line for the linear capacitor can be seen in

the P (V ) diagram of the graph window.

This test ensures that Basic Unit and Probe Head are working perfectly right together with the

high voltage amplifier.

In any other case contact aixACCT Systems GmbH immediately at


2.3 TF Analyzer in combination with high voltage amplifiers (optional) 11

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2.4 TF Analyzer with displacement sensors for piezo measurements (optional) 13

2.4 TF Analyzer with displacement sensors for piezo measurements (op-tional)

The TF ANALYZER 2000 system can be combined with various displacement sensors for large

and small signal characterization of piezoelectric and electrostrictive materials. An analog sig-

nal output, which is proportional to the displacement, can directly be connected to the TF An-

alyzer as an additional input channel. The input has a resolution of 12 bit which equals with

Vpp = 10 V to 4.88 mV. For measurements including a high voltage amplifier please refer to

chapter 2.3. Simultaneous measurements of polarization and displacement and of capacitance

and piezoelectric coefficient versus an applied bias voltage range can be performed.

Notice that in case of use of the high voltage unit, the output of the high voltage amplifier is

directly connected to the sample holder which contacts the top electrode of the device under

test. To select between the external high voltage amplifier and the build in amplifier of the

TF Analyzer 2000, access the Options - Settings menu item of the main menu. Select Output

amplifier and choose HV Amplifier. You will be requested to ensure the cable connection

corresponding to the wiring scheme in this chapter. Notice to turn off the high voltage in any

case and ensure that the device under test is discharged before you change the cabling. In

the same menu (see Fig. 2.4.1) the Piezo Factor can be specified. It correlates the output voltage

of the displacement sensor to the change in length of the sample. The Piezo Factor should be in

the unit nm/V.

There is danger to life if you touch the high voltage line or a charged sample!

Dont press the Start button before the connection corresponding to the wiring diagram is en-

sured.

For displacement measurements with an additional high voltage amplifier, please refer to the

wiring scheme in Fig. 2.4.3 to connect the Basic Unit and the Probe Head, the TREK High

Voltage Amplifier and the positioner unit.

The sample must be protected from touching in any case, when high voltage is applied to

the sample.

In case fo any malfunction please contact aixACCT Systems GmbH immediately at



Fig. 2.4.1: Setting of the Piezo Factor to connect the displacement sensor to the TF Analyzer2000 system.

2.4 TF Analyzer with displacement sensors for piezo measurements (optional) 15

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2.5 TF Analyzer with oscilloscopes for high-speed measurements (optional) 17

2.5 TF Analyzer with oscilloscopes for high-speed measurements (optional)

The TF Analyzer 2000 system can optionally be combined with various oscilloscopes for per-

forming high-speed characterization of materials. The oscilloscope is used to perform the data

acquisition at high speeds to increase the frequency range of hysteresis or pulse measurements

in combination with the enhanced version of the FE module. For the connection of oscillo-

scopes refer to the corresponding drawings in this chapter. For the oscilloscope model types,

several types have been tested to work correctly, e.g. Tektronix TDS684, TDS220, TDS1000

or TDS2000 series. Since the number of models that have been tested to work is steadily in-

creasing, please contact aixACCT for further manufacture and model types. Make sure that the

oscilloscope is set-up to be controlled remotely by the TF Analyzer via GPIB and the oscillo-

scope is set to GPIB address 25 by default. All necessary settings of the oscilloscope are then

controlled by the TF Analyzer. By default the current is monitored by channel 1, the voltage is

monitored by channel 2. Use of active probes is recommended to reduce the cabling influence.

The external trigger output on the rear of the TF Analyzer Basic Unit has to be connected to the

auxiliary trigger input of the oscilloscope by a short (


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2.5 TF Analyzer with oscilloscopes for high-speed measurements (optional) 19

Fig. 2.5.2: Wiring scheme for the high speed FE-module together with a Tektronix TDS 220oscilloscope.


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2.6 TF Analyzer in combination with a Racal switch box (optional) 21

2.6 TF Analyzer in combination with a Racal switch box (optional)

For industrial application the TF ANALYZER 2000 standard system can be extended by a

switch box. This enables the user to successively select and measure several samples to the

Probe Head. The switchbox is automatically controlled via GPIB (general purpose interface

bus) by the measurement software of the TF Analyzer.

To perform multi-sample measurements with the switch box choose enable Switchbox in the

Options - Settings - Measurement menu. Additional settings have to be specified to adjust the

hardware of the TF Analyzer, the switch box, and the probe card to contact the samples. This

is done in the mapping file switches.ini to map each switch of the switch matrix to a contact pin

on the probe card (see below).

The selection of the contacts and their measuring sequence is located in the Options - Sam-

pledata menu. If the switch box is enabled, this menu is extended with input lines for top and

bottom contact and buttons for editing a contact list. This is described in detail in the multisam-

ple measureing section 3.1.8.

2.6.1 Switch box installation

Editing the mapping file Instead of directly choosing the switch number of the switch matrix

a mapping file can be used to correlate the physical switch number with a mnemonic name.

This can be the number of the probe needle of a probe card or a text on the measured wafer

itself. The mapping file is named switches.ini and must be located in the directory C:\ProgramFiles\TFAnalyzer. It is a plain ASCII file which can be edited with any text editor (e. g.notepad).

The left column is a mnemonic name which is used in the sampledata menu to specify the top

and bottom contact of a sample to be measured. This can be for example a name of the probe

card tip or a text on the wafer. The rigth column contains the names respectively numbers to

address the switches of the switch box (for details refer to the manual of the switchbox). A

clipping of a mapping file example is listed below.

[Contacts]ModuleAddr1 11Bottom = 311Top = 152Bottom = 302Top = 143Bottom = 293Top = 134Bottom = 284Top = 12


Fig. 2.6.1: View of the Racal switch box rear panel .

Connection of switch box and TF Analyzer 2000 system The switch matrix is controlled

by the TF Analyzer via IEEE. So, an IEEE connection between switch matrix and TF Analyzer

has to be build up. Fig. 2.6.1 shows the rear panel of the switch matrix. In case of a 64 channel

switch box one of the four frames is equipped with a switching matrix.

A detailed drawing of the frame itself and its pin configuration is shown in Fig. 2.6.2. Fig. 2.6.3

illustrates where the cables from the Probe Head and the 64 cables to the probe needles are to

be connected to.

The upper plugs are used to connect the four rows. In this configuration the bottom and top

contact are connected to row 2 and 3 of the matrix. Both cables in the lower plugs connect 64

switches each of them with separate shielding for excellent signal to noise ratio.

Each 64 pins plug offers 32 contacts. Each signal line is used with a separate shielding line.

Row A contains the signal line, row B of the plug represents the shielding lines. As shown in

Fig. 2.6.3 the plug on the left contains switch number 1 - 32, the plug on the right contains

switch 33 - 64. Each cable is signed with the logical switch number which is related to the list

in the mapping file switches.ini.

2.6 TF Analyzer in combination with a Racal switch box (optional) 23

Fig. 2.6.2: Pin configuration of a Racal 64 channel switching frame.


Fig. 2.6.3: Scheme how to connect one switching frame.

2.7 TF Analyzer in combination with an Agilent switch box E5250A (optional) 25

2.7 TF Analyzer in combination with an Agilent switch box E5250A (op-tional)

For industrial application the TF ANALYZER 2000 standard system can be extended by a

switch box. This enables the user to successively select and measure several samples to the

Probe Head. The switchbox is automatically controlled via GPIB (general purpose interface

bus) by the measurement software of the TF Analyzer.

To perform multi-sample measurements with the switch box choose enable Switchbox in the

Options - Settings - Measurement menu. Additional settings have to be specified to adjust the

hardware of the TF Analyzer, the switch box, and the probe card to contact the samples. This

is done in the mapping file switches.ini to map each switch of the switch matrix to a contact pin

on the probe card (see below).

The selection of the contacts and their measuring sequence is located in the Options - Sam-

pledata menu. If the switch box is enabled, this menu is extended with input lines for top and

bottom contact and buttons for editing a contact list. This is described in detail in the multisam-

ple measureing section 3.1.8.

2.7.1 Switch box installation

Editing the mapping file Instead of directly choosing the switch number of the switch matrix

a mapping file can be used to correlate the physical switch number with a mnemonic name.

This can be the number of the probe needle of a probe card or a text on the measured wafer

itself. The mapping file is named switches.ini and must be located in the directory C:\ProgramFiles\TFAnalyzer. It is a plain ASCII file which can be edited with any text editor (e. g.notepad).

The left column is a mnemonic name which is used in the sampledata menu to specify the top

and bottom contact of a sample to be measured. This can be for example a name of the probe

card tip or a text on the wafer. The rigth column contains the names respectively numbers to

address the switches of the switch box (for details refer to the manual of the switchbox). A

clipping of a mapping file example is listed below.

[Contacts]TopRow = 7BottomRow = 81Bottom = 1011Top = 1022Bottom = 1032Top = 1043Bottom = 105


Port 7 and 8

Fig. 2.7.1: View of the Agilent E5250A switch box rear panel.

3Top = 1064Bottom = 1074Top = 1085Bottom = 1095Top = 1106Bottom = 1116Top = 112

Connection of switch box and TF Analyzer The switch matrix is controlled by the TF An-

alyzer via IEEE commands. So, an IEEE connection between switch matrix and TF Analyzer

has to be build up. Fig. 2.7.1 shows the rear panel of the switch matrix. Up to four modules

can be plugged into the mainframe. For the connection of the probe card to the module please

refer to the switch box manual. The Probe Head is connected to the input ports 7 and 8 of the

mainframe.

27

3 Measuring with the TF Analyzer

3.1 General program overview

Within the FE-module of the TF Analyzer 2000 system several types of measurement proce-

dures are implemented to characterize ferroelectric materials. This includes dynamic and quasi

static hysteresis, PUND and leakage measurements. Furthermore, reliability investigations like

fatigue, imprint, and retention measurements can be performed. Some special type measure-

ments, like Piezo, CV, or Access Time measurements, can be obtained on request optionally.

All these measurement procedures can be accessed within the hysteresis software.

In this section general functions and menu entries of the hysteresis software are described. To

start the hysteresis software either double click on the icon Hysteresis on the desktop or launch

it from the Task bar with Start Programs Hysteresis (see Fig. 3.1.1).

Fig. 3.1.1: Graphical user interface (GUI) of WinNT with the icon of the Hysteresis software.

The main program window in Fig. 3.1.2 contains the title bar containing the product name

TF Analyzer 2000 and the module name FE-MODULE, the menu bar and optional a tool bar

below the menu bar and a status bar at the bottom of the window. When placing the cursor

on a specific icon in the tool bar without pressing a button, a short description of the function

appears. The mentioned tool and status bar are only visible if the entries in the View pull down

28 3 Measuring with the TF Analyzer

menu are selected (default setting). All other program functions can be reached by pull down

menus in the menu bar. A detailed description of the contents of the File and Options pull down

menus is given below. Edit contains operations like copy, paste, and cut on open measurement

data. Using Open Compare Graph, which is available for some measurement types, the user is

able to display a second graph in an already open measurement. So, for example it is possible to

compare the dynamic hysteresis data to the static hysteresis data of the same sample in the graph

window. Or, this function can be used for examinations such as the analysis of the influence

of the sample preparation on the electrical properties of a material. To delete this second graph

click on Delete Compare Graph in the menu. The Window menu allows the arrangement of

multiple measurement graphs.

Fig. 3.1.2: Main program window of the hysteresis software with two open measurements andthe Measurement dialog.

The File menu In the File menu all kinds of file operations are summarized. Some entries ap-

pear only in case of an open measurement graph. Also, menu entries for printing and the printer

setup can be found in the File menu. Additionally, a list of recently used files (if available) is

displayed and the entry to exit the program can be found here (see Fig. 3.1.3).

Open is used to reload saved measurements of the FE-Module. In case of an open or loaded

measurement additional entries in the file menu exist. These are operations like Save and Save

3.1 General program overview 29

Fig. 3.1.3: Title bar, menu bar with opened File menu and tool bar of the hysteresis software.

As to save measurement data in the TF Analyzer file format and an Export function to save

data in ASCII file format. A description of the ASCII data file format can be found at the end

of each measurement procedure description. Furthermore, Close exits the actual measurement

procedure and Print Preview opens a window with the graph, which will be printed with the

Print menu.

Exit terminates the hysteresis program. The software checks whether measured data has been

saved or not. In the case of unsaved data a dialog box appears and asks the user whether he

wants to save the data or not. This will be done for all open unsaved graph windows.

The Options menu In the pull down menu Options (Fig. 3.1.4) the choices for program set-

tings are summarized. First of all, with the Sampledata entry the user can change parameters

like name, area and thickness according to the sample he wishes to measure. The other Options

menu entries are described in the following sections.

Fig. 3.1.4: Menu choice Options.


3.1.1 Measurement dialog

The Open Measure Dialog opens a dialog window which allows the selection of all available

measurement procedures. One out of twelve measurement procedures can be selected from the

Measurement dialog (see Fig. 3.1.5). Some of the measurement procedures (like Piezo, CV,

Cell Test, AccessTime) are only optional available in the program. Please contact the aixACCT

Systems GmbH for further information. When choosing the card index with the name of the

measurement to be performed the necessary input parameters and control buttons for this mea-

surement will be displayed below. To step through the different edit lines and push buttons one

can use the Tab key to step forward, or SHIFT + Tab for backward stepping. Detailed descrip-

tions on the measurements and their specific parameters are given in the following chapters.

Fig. 3.1.5: Measurement dialog to select the various measurement procedures, to apply therequired parameters, and to control the measurement. In this figure the dialog for the hysteresismeasurement is displayed. This box can also be accessed directly from the tool bar icon.


The Current Amplifier field is located below the Input Parameter field. It is used to select the

current range with which the Probe Head measures. For best measurement results the current

range should be close to the current response of the sample during the measurement. It depends

on input parameters like frequency and amplitude and the measured sample material and geom-

etry. A range between 10 pA and 1 A can be selected for the FE-Probe Head. An automatic

determination of the correct current range can be started with the AutoRange button. The pro-

gram starts a test measurement with the specified input parameters on the connected sample and

detects and selects the best fitting range. It is displayed in the edit line.

The measurement control buttons Start, Stop and Close are located at the bottom of the dialog

boxes. A mouse click on Start runs the selected measurement procedure with the specified

parameters. If the checkbox Append to file (if active) is not selected, a new graph window will

be opened for each measurement. Otherwise the measurement data will be added to an already

open measurement of this type, if this window was active before the Start button was pressed.

This function is not available for all measurement procedures. A running measurement can be

stopped with the Stop button. After clicking on this button it can take some seconds until the

program stops. This depends on the task management of the software and is necessary to ensure

that recorded data does not get lost. All data recorded so far is still accessible. Close is used to

exit the measurement dialog window.

As long as a measurement is running the text Measuring ... is displayed on the left side of the

status bar. In the middle of the status bar a progress bar and the estimated remaining measure-

ment time is displayed. Total is the time to the end of the whole measurement. Next gives the

time to the end of the next hysteresis or PUND measurement, which is of special interest for

long fatigue or retention measurements.

3.1.2 Setting of the measurement temperature (optional)

The toolbar has been extended with a selection box to set the measurement temperature (see

Fig. 3.1.6). This field can be used to constitute a temperatrue which is set by a connected tem-

perature controller before any of the measurements of the measurement dialog is performed.

Except for Thermo measurements in which this field is not evaluated. Temperature values can

be user defined by clicking on and editing the selection box. By default the input tempera-

tures are assumed to be in the unit C. However, if the inserted number is followed by an F

the temperature is accepted in degree Fahrenheit and will be automatically converted into the

C value. Selecting none resets the temperature controller to a default temperature (20C) and

skips the temperature setting for the following measurements. The sample temperature is saved

as additional characteristic value of the measurement and can be viewed in the Graph View.

This feature is only available in systems with an optional temperature controller unit and an


Fig. 3.1.6: Selection box in the tool bar to choose a temperature for the next measurement(optional).

appropriate sample holder.

3.1.3 Manual waveform dialog

For advanced users it is possible to replace the typical triangular, sine, or PUND waveforms by

user specific waveforms with the Manual Waveform dialog.

Fig. 3.1.7: Dialog window to create, edit, and save user defined waveforms to be applied to thesample for measurement.

This dialog provides all necessary functions to define, edit, and save new waveforms. Add

allows the easy creation of standard waveforms like sine, triangle or rectangle with user defined


amplitude, frequency, and number of repetitions. Alternative to the manually edited waveform it

is possible to import an ASCII data file with the Import button. The selected file should contain

the name of the waveform as first line and subsequently lines containing two numeric values

for time and voltage separated by spaces or Tab characters. The edited waveform is displayed

as red curve in the graph of the manual waveform dialog window. Start and duration of the data

recording can be set with the Trigger and Recording Time when the check box is enabled. This

is visualized as green curve in the graph. If both values are set to zero data will be recorded

during the whole duration of the excitation signal. A check function is implemented to control

if the edited waveform matches the hardware specifications of the Basic Unit and FE-Probe

Head. A user defined waveform file (file extension tfw) can be loaded in the Hysteresis and

Piezo measurement procedure. Press Load beside the Waveform selection menu and select a

saved waveform file. The defined waveforms will appear as additional entries in the selection

menu. Please note that the recorded data depend on the polarization state of the sample which

maybe changes if a waveform is applied for a second time or if the Autorange function has been

carried out.

3.1.4 Settings dialog box

Program specific adjustments can be reached via the menu entry Settings or the button with

the hammer symbol in the tool bar. They are grouped under the topics Measurement, Compen-

sation, Default, and View. Some of these fields maybe grayed and cannot be selected. This

depends on the user specific configuration of the TF Analyzer 2000 system, e.g. if it includes

the high speed or high voltage option with an external amplifier or not.

In the Measurement dialog box (see Fig. 3.1.8) the choice Data Aquisition allows to switch be-

tween internal data aquisition with the FE Probe Head and external aquisition with a connected

oscilloscope for high speed measurements. Please note that leakage, leakage compensation,

static, CV, and piezo measurements cannot be performed in external mode. Please refer to

Chapter 2.5 how to connect and set up the system for measurements with an oscilloscope.

The following three fields are used to enable and select external hardware components which

can be connected to the TF Analyzer 2000 system. This include for example high voltage

amplifiers, switchboxes, or temperature controllers. Please refer to Chapter 2.3 how to connect

and set up your system for high voltage measurements properly.

The Piezo Factor in the field Piezo Settings is used to adapt the analog output voltage of a

connected displacement sensor to the change in length of the sample. Its unit has to be in

nm / V . For supplementary information on piezo measurements please refer to Chapter 2.4

and Chapter 3.6.


Fig. 3.1.8: Dialog box to apply measurement specific settings.

Be aware that the parameter ranges of all measurement types described in the following chapters

may be influenced by the software settings and hardware set-up of the TF Analyzer. x

For a general overview refer to the following Table 3.1.1 for some important dependent param-

eter ranges.


Table 3.1.1: Examples for dependent input parameters. These range limits may further dependon system specific settings, software changes or hardware set-up.

(1) Frequency 1 Hz to 2 kHz standard frequency range of the excitationsignal

1 Hz to 200 kHz high-speed (enhanced FE) option frequencyrange (external mode)

.001 Hz to 2 kHz high-voltage frequency range, dependent onhigh-voltage amplifier

1 Hz to 20 MHz frequency range of the fatigue signal (loadand amplitude dependent)

(2) Pulse Widthor Rise Time

125 s to 1 s standard pulse width range

1 s to 1 s high-speed (enhanced FE) option pulsewidth range (external mode)

125 s to 1 s high-voltage pulse width range, dependenton high-voltage amplifier

25 ns to 1000 s pulse width range of the write pulse (load de-pendent)

(3) Amplitude 0.05 V to 25 V

standard voltage range for frequencies below100 kHz

0.02 V to 12 V

voltage range for frequencies above 100 kHz

10 V to 4000 V

high-voltage (here 4 kV option) range of theexcitation signal, dependent on high-voltageamplifier

The Compensation dialog box is described in the following chapter 3.1.5. In the Default dialog

box shown in Fig. 3.1.9 the user has the possibility to select the input parameter file in which his

specific measurement settings will be saved. Beside the aixACCT default settings several more

settings e. g. for high speed or high voltage can be defined. The selected set will be activated

after the Settings dialog box is closed with the OK button. A new parameter set can be defined

with the New Set dialog box. With save active parameter the currently choosen parameter from

the Measurement dialog are saved into this new set.

A file can be specified with multi sample data information for the use of the TF Analyzer 2000

systemtogether with a switchbox. Use the Browse button to select a *.msd file. Please refer to

Chapter 2.6 for more information on the use of a switchbox.


Fig. 3.1.9: Setting of user defined input parameter sets and the selection path and file name formulti sample data information.

The last dialog box called View allows the user to make changes regarding the graphical ap-

pearance of the measurement data (see Fig. 3.1.10). This includes the definition of symbols to

display the points of measurements (e.g. in fatigue or retention measurements). The size of

these symbols and the thickness of the data curve can be influenced with the dot size parameter.

Also, there are two more checkboxes in this dialog. The first checkbox classic graph style tog-

gles between the new graph display style with axes at the left, right and bottom of the diagram

and the one used in previous versions of the hysteresis software. The second one changes the

default for the checkbox Append to file. A change of this checkbox will take place after closing

and reopening the measurement dialog.


Fig. 3.1.10: Adjustments for the graphical view and data representation.

3.1.5 Compensation

The Compensation menu entry in the Options menu is included to give a quick access to the

Settings - Compensation menu (Fig. 3.1.11) described hereafter.

There are three different types of compensation methods implemented in the hysteresis soft-

ware which can be enabled in the compensation dialog box (see Fig. 3.1.11). The first one is

the compensation of the parasitic capacitance of the measurement setup. Please perform an

open measurement with open contacts by clicking on the do open measurement button. Option-

ally, the open measurement can be exported to make the compensation data available for data

processing in other programs.

The second compensation method is a frequency compensation, which is especially of interest

for high frequency measurements. With this method the decrease of amplitude and phase of the

current amplifier at high frequencies will be compensated.

Third is the leakage compensation which subtracts the leakage current from the current response

of the sample. This is only necessary with samples having high leakage. Frequency and leakage

compensation will be automaticly applied to the measured data, if the check-boxes are enabled.

An optional compensation method is the in-situ parasitic capacitance compensation (lower part


of Fig. 3.1.11). It is similar to the capacitance compensation but performed by hardware. The

compensation can be adjusted automatically according to the open capacitance of the set-up by

hitting the automatic compensation button. Therefore the set-up should be contacted to an open-

contact structure or should be set-up close to the real device open capacitance. The adjustment is

done for each current range separately, so it takes a few seconds. Afterwards, the compensation

can be adjusted manually according to the actual measurements as shown below in Fig. 3.1.12

to Fig. 3.1.14. During hysteresis measurement, a measurement can be adjusted and taken by

hitting the test-button, this will start another hysteresis acquisition and show the change. For

an undercompensated loop (Fig. 3.1.12) the compensation should be increased (move coarse or

fine slider to the right), for an overcompensated loop (Fig. 3.1.13) the compensation should be

decreased (move slider left) until the loop is ok (Fig. 3.1.14). A very strong overcompensation

may even lead to oscillation of the amplifier and no loop will be recorded. The fine slider equals

to approx. 0.05 fF per step. The adjustment has to be repeated, if the current range is changed

in hysteresis measurement. The settings are stored and saved between program starts. Once

adjusted, the compensation is automatically performed on all measurements.

Fig. 3.1.11: Dialog box to fix the compensation methods which are applied in the measurements.This dialog box can directly be accessed from the Options menu, too.


Fig. 3.1.12: under compen-sated hysteresis loop

Fig. 3.1.13: over compen-sated hysteresis loop

Fig. 3.1.14: well compen-sated hysteresis loop

3.1.6 Description of the graph windows

Now a description of the graph windows is given, which are used to display the measurement

data. It is possible to open several graph windows even of different measurement types. So,

various measurements of different type performed on one sample or measurements on differ-

ent samples can easily be compared. A typical graph view window of a Dynamic Hysteresis

Measurement is displayed in Fig. 3.1.15.

On the right hand side of the window below the aixACCT logo informations can be found about

the measurement type and conditions. The first is the acronym of the type of measurement dis-

played (see Table 3.1.2 below). Further data are the measurement frequency, the amplitude, and

the used current range. Data for an optional opened compare graph are displayed in brackets.

If more than one curve is displayed a legend specifying the colors of the curves can be found

below the diagram.


Fig. 3.1.15: Open graph view window of a hysteresis measurement.

Table 3.1.2: Abbreviations for the measurement procedures and their data file extensions

Measurement Procedure Acronym File exten-sion

Dynamic Hysteresis Measurement DHM tfhPUND Measurement PM tfpStatic Hysteresis Measurement SHM tfsLeakage Measurement LM tflPiezo Measurement PZT tfzCV Measurement CVM tfcThermo Measurement THM tftFatigue Measurement FM tffRetention Measurement RM tfrImprint Measurement IM tfiAccess Time Measurement ATM tfq

Directly below the graph are three fields for sample data and characteristic measurement values.

The Sample Data field on the left contains data like the sample name, area, thickness. A double

click with the left mouse button with the mouse-pointer located in this field opens the Sample

data dialog box, which allows the user to change name, thickness and area of this particular dis-


played measurement. A change of the sample area or thickness is only possible in Hysteresis,

Pund, and Piezo measurements. For these the polarization and field values will be recalculated

according to the changed area or thickness values. This functionality is not available for mea-

surements which have been performed with a Hysteresis software version lower than 1.43. By

default the third field at the right is empty. A double click with the left mouse button with the

mouse-pointer located in this field opens the Index Dialog box, which allows the selection of

additional measurement information. One possible selection is the entry named Setting. The

following abbreviations are used to represent special measurement conditions:

Table 3.1.3: Abbreviations used for special measurement settings

Acronym DescriptionNP no prepolarisation pulseSL single loop measurementExt Mon measurement with oscilloscope and voltage monitoringHV Mon high voltage measurement with voltage monitoringUP unipolar voltage amplitudeFC measurement with frequency compensation enabledLC measurement with leakage compensation enabledCC measurement with capacitance compensation enabled

At the top of the graph window a digit is displayed (behind the text Graph). This number

identifies the number of the shown graph out of a set of consecutively performed measurements

of the same type. All the data of one measurement cycle is stored in the same file.

The scroll bar below the preview window allows the user to switch the displayed graph if there

are multiple graphs stored in the measurement. If a compare graph has been opened an ad-

ditional scroll bar appears to select the required data separately. With the X-Axis and Y-Axis

selection boxes at the bottom left it is possible to switch between the displayed data of one

measurement, e.g. the hysteresis of the polarization and the corresponding current response.

This function is also available by pressing the right mouse button with the mouse pointer in the

preview window. There are additional functions to copy, delete, and export the displayed mea-

surement. Copy and Copy graph only are used to add the graph to the clipboard. From there

the graph can be added with Paste to another measurement or included as graphic into other

programs. For the function Copy graph only the clipboard graphic contains only the diagram

without Measurement Data, Sample Data, and Characteristic Values.

The Contact Select selection box at the bottom right of the graph view window is only available

if a switchbox is enabled. Then one sample of a multisample measurement can be selected by

choosing its contact pair.


A special feature in Fatigue, Retention, Imprint, and Access Time graph views is the possi-

bility to view the single measurement graphs by a double click on the dots representing the

measurements. To visualize the measurement dots please refer to Fig. 3.1.10. Furthermore, an

additional entry Properties exists for these measurements in the menu which can be accessed by

a right mouse click with the mouse pointer on the graph. With this selection the values which

are displayed as measurement results can be choosen.

3.1.7 Data Formats

Measurement data can be saved in two different formats. Data files of the TF Analyzer 2000

system program use a specific TFA data file format which allows quick access to the data.

The file extensions of the TF Analyzer 2000 system files consist of three characters tf?. The

questionmark in the file extension is a wildcard for a character which represents the different

measurement procedures. (see Table 3.1.2). The acronyms in the table are used in the graph

windows to quickly identify the displayed data.

Hysteresis files (extension tfh) and PUND files (tfp) can be loaded into an already open mea-

surement with the compare graph function mentioned above. This is also possible for Hysteresis

or PUND files in Fatigue measurements.

The second format is used to export measurement data as an user readable ASCII-file (menu

choice File - Export). The file extension in this case is dat. ASCII data files can be imported into

any data presentation program. A detailed description of the contents of the ASCII file format

can be found at the end of each measurement procedure description. Ahead of each data section

text lines are included which describe the type of data, sample data and measurement conditions.

Data values are separated by tab characters. In Hysteresis or PUND measurements characteristic

result data (like the relaxed remanent polarization values in a Hysteresis measurement) which

are extracted from the measured data can be saved, too.

Beside other measurement data and characteristic values the current range of the measurement

is also included as a number after the tag name Current Range. The following table Table 3.1.4

shows the corresponding ranges.


Table 3.1.4: Values corresponding to current ranges

Value Current Range0 1 A1 100 mA2 not used3 not used4 10 mA5 1 mA6 100 A7 10 A8 1 A9 100 nA

10 10 nA11 1 nA12 100 pA13 10 pA

3.1.8 Multi-sample measurements with a switch box (optional)

The multi sample measurement feature of the TF Analyzer 2000 system offers automatic testing

of many samples in parallel using a switch box and probe card system. The differences to the

standard software are quite few.

The first major difference is the declaration of the sample data for each contact pair of the switch

box, which is identical to top and bottom contact of the capacitor under test. The information

for each sample has to be filled into the Multiple Sampledata window (see Fig. 3.1.16). This

is opened via the Sampledata entry in the Options menu when a switch box is enabled in the

Options - Settings dialog box.

Equivalent to the single measurements described before sample name, area, and thickness have

to be filled into the edit lines. This declaration is necessary to calculate the polarization values

of each sample in consideration of their electrode area. E.g. on a wafer test capacitors with

different top electrode areas may be arranged. So, the sample data has to fit to the device

under test to calculate the true polarization value for each sample. In addition for multisample

measurements top and bottom electrode have to be selected, which are connected to the physical

switches of the switch box. The relation between the mnemonic name of the top and bottom

contact to the physical switches of the switch matrix is established by the wafer mapping file

(switches.ini, see Chapter 2.6). In case of names for top and bottom contact which are not

defined in the wafer mapping file, Invalid appears next to the edit line. In case there is no

information in the wafer mapping file the user has to fill in the physical switch numbers of the


Fig. 3.1.16: Input window for the declaration of a multiple sampledata contact list.

switch box in the edit line of the top contact and bottom contact.

Usually, for a specific layout configuration and probe card, the wafer mapping file and the

multisample data is stored, as it is fix for a certain layout on the wafer. To edit the contact

pair configuration the user can double click on any line of the text field. The configuration of

this contact pair will be displayed in the edit lines above. Now, any modification of the contact

configuration can be established by the help of the push buttons explained below:

Add: If a new contact configuration is generated, it will be added to the list by pressing the

Add button. The new contact configuration is added at the bottom of the list.

Insert: If you want to insert a new contact configuration at a certain position of the list, use

the Insert button. It will be included above the highlighted contact configuration in the

list.

Remove: The selected contact configuration in the list will be deleted.

Replace: In this case the generated contact configuration will replace the selected contact

configuration in the list.

Once the configuration is defined, it can be saved and reloaded at any time with Save and Load.


For multisample measurements current ranges need to be specified for every sample beside the

usual measurement parameter. This can be done automatically with the Autorange button in

the measurement dialog or manually by applying a current range using Edit. The current range

selection field in the measurement dialog is disabled in multisample measurements.

The appearance of the graph windows with an enabled switch box is almost the same as in

the case of single sample measurements. The difference is, that the selction box Contact Se-

lect beside the Graph Select box is enabled for Fatigue, Retention, Imprint, and Access Time

measurements. This enables the user to select between the measured samples.

For the four measurements types mentioned above the following data management is used.

After one of these measurement procedures the data of each contact configuration will be saved

in separated files. The text field in the sampledata menu mentions the file names under which

the recorded data is stored. The filename consists of the given filename which is equal for

all contact configurations and is followed by the sample name and the top and bottom contact

notation. Each name element is separated by underscores respectively a minus between top and

bottom. The filename extension (see Table 3.1.2) is added to indicate which data are stored in

the file. So, a typical filename for fatigue data will look like:

filename_samplename_top-bottom.tff

All the data of a multisample measurement will be saved in an automatic created subfolder to

the actual folder. This subfolder is named identical to the given filename. Additionally, a file

named filename.tfm is created, which contains the names of all files of this measurement. This

file can be used to reload the data of the whole measurement. But, single measurements can be

loaded out of the subfolder too.

For the other measurement procedures the measurement data of the multiple samples will be

safed consecutive in one file. The different measurements can be viewed with the scroll bar

below the graph.

3.2 Dynamic Hysteresis Measurement - DHM 47

3.2 Dynamic Hysteresis Measurement - DHM

The dynamic hysteresis program allows a comfortable and comprehensive investigation of the

characteristic values of a hysteresis loop in a frequency range from 1 Hz to 1 kHz. The cor-

relation of several process parameters to the shape of the hysteresis loop can be examined. In

addition, measurement parameters such as excitation signal, frequency, and amplitude of the

excitation signal can be varied.

3.2.1 Measurement procedure and typical measurement

The voltage excitation signal is shown in Fig. 3.2.1 in the case of triangular voltage excitation.

Fig. 3.2.1: Excitation signal for hysteresis measurement.

The prepolarization pulse establishes a defined polarization state, the negative state of relaxed

remanent polarization. The prepolarization pulse is followed by three consecutive bipolar exci-

tation signals, each signal separated by 1 second relaxation time. The corresponding hysteresis

loops to the bipolar excitation signal are shown in Fig. 3.2.2. The hysteresis loop correspond-

ing to pulse no. 1 starts in the negative relaxed remanent polarization state (Prrel) and turns

into the positive saturation (Pmax+). When the voltage is equal to zero the polarization reaches

the positive remanent polarization state (Pr+), afterwards it turns into the negative saturation

(Pmax) and back to the remanent polarization state (Pr). This point is normally not equal to

the starting point (Prrel), because of the polarization loss over time.

The second loop establishes the sample into the positive remanent polarization state without

sampling data. The third loop starts in the positive relaxed remanent polarization state (Prrel+),

turns into the negative saturation (Pmax) crosses the polarization axis at zero volts excitation

signal in the negative remanent polarization state (Pr). Afterwards the sample is driven into the

positive saturation (Pmax+) and ends in the positive remanent polarization state (Pr+) when the

voltage is zero. Afterwards the hysteresis loop is balanced respectively to the values P (+Vmax)

and P (Vmax). From the data of the first loop the parameters Vc, Pr, Prrel are determinedand from the data of the third loop the parameters Vc+ , Pr+ , Prrel+. The closed hysteresis loop


Fig. 3.2.2: Typical hysteresis measurement graph.

(red curve) is calculated from the second half of the first (green curve) and the second half of

the third loop (blue curve).

3.2.2 The characteristic parameters of the hysteresis loop

In the following the nomenclature of characteristic values for the evaluation of the measured

data is introduced (see table below and Fig. 3.2.3).

Pr+ positive state of remanent polarization of the dynamicallymeasured hysteresis loop

Prrel+ positive state of relaxed remanent polarization, relaxedfor one second in the Pr+ state. Equal to the positive stateof remanent polarization of the quasi statically measuredloop (see Chapter 3.4)

Pmax+ state of polarization when the stimulating signal reaches itsmaximum value - positive saturation

Vc+ positive coercive voltage, voltage where the polarizationcrosses the x-axis by increasing voltage values

Pr, Prrel, Pmax, Vc are the corresponding values on the negativefield and polarization direction

Psw (Pmax Prrel) change of polarization when the sampleis switched from the negative state of the relaxed remanentpolarization into the positive saturation - switching case

Pnsw (Pmax Prrel+) change of polarization when the sample isdriven into the positive saturation from the positive state ofthe relaxed remanent polarization - non-switching case

dPsw (Psw Pnsw) detectable polarization difference betweenswitching and non-switching case


Fig. 3.2.3: Nomenclature used within the TF Analyzer 2000 system.

3.2.3 Execution of a hysteresis measurement

In the following table the input parameters of a dynamic hysteresis measurement are listed

including their posssible ranges and values and a short description:

Input Parameters

(1) Frequency edit line 1 Hz to 2 kHz frequency of the excitation sig-nal, (refer also to Chap. 3.1.4)

(2) Waveform selection box triangle, sineor manual

waveform of the excitation sig-nal

(3) Amplitude edit line 0.1 V to 25 V

amplitude of the excitation sig-nal (refer also to Chap. 3.1.4)

(4) No. of points edit line 20 to 1000 number of data points measuredfor one hysteresis loop

(5) No. of aver-ages

edit line 1 to 100 number of measurement cyclesto build the averaged loop

(6) Single loop check box performs a measurement withonly one pulse (instead of three).With No. of averages > 1 therewill be only one prepol pulse.

(7) No prepolpulse

check box performs a measurement withoutprepolarisation pulse (no averag-ing is possible with this optionactivated)


For a general program overview and how to start the hysteresis measurement procedure please

refer to chapter 3.1. To start a hysteresis measurement with values of your choice act as follows:

Check the sample data which you find in the menu choice Options - SampleData. The

window coming up offers three edit lines. Here the user can fill in the sample name,

the area (pad size) and the thickness of the sample. Move the cursor on an edit line you

want to change, click the left mouse button and enter the value of your choice. Press OK

to close this window by saving the changes. The sample data will be shown in a graph

window together with the characteristic values after a measurement.

Now, open the Measurement Dialog and select the card indexed Hysteresis. Check the

values in the box Input Parameters. Move the cursor to an edit line and click on the

left mouse button if you want to change one of these values. The Waveform selection

box enables to select the excitation signal. Click on the right corner of the box and the

selectable values are displayed. As standard excitation triangular and sine signals are

provided.

In the Current Amplifier field a current range for the measurement can be selected. Press

the button AutoRange to start a software routine to automatically find the correct current

range. During this process the other input fields and buttons are disabled.

When the Start button is enabled again, press it to start the measurement. An empty graph

window opens up. In the status bar of the main window (line at the bottom) the status of

the program is displayed, in this case Measure...

Directly, after the measurement is completed the new recorded data are displayed in the

graph window.

If the hysteresis graph is closed, the software checks whether the measured data has been

saved or not. In the case of loosing unsaved data, a dialog box appears and asks the user

whether he wants to save the data are not.

3.2.4 ASCII-File of the Hysteresis Program

A hysteresis measurement can be saved as an ASCII data file with the File - Export function. In

case that the characteristic values have been saved too, the ASCII format of the DHM contains

two parts: The first part starting with the line HysteresisResult contains the characteristic values

which have been extracted from the measurement data. The second part starts with the line

DynamicHysteresis. It contains the measurement data. After the first line (HysteresisResult or

DynamicHysteresis) four more text lines follow which describe the program version, the type


of data which follow (result or data), the TFA-File version, and a time stamp at which time the

file has been created.

After this header section follows a blank line and than the table data. Before the numeric data

there are a variable number of text lines describing the measurement conditions under which

the data where recorded. The first text line contains always the tag Table and the number of the

table, separated with a tabulator. The last text line before the numeric data describe the data

columns contents and their units. The denotation and meaning is listed in Table 3.2.1.

Table 3.2.1: Denotation of the columns of the DHM program

Column Denotation1 t Time2 V+ V+ Voltage (starting

positive)3 V- V- Voltage (starting

negative)4 I1 Current from closed

loop5 P1 Polarization from

closed loop6 I2 Current from pulse

No. 17 P2 Polarization from pulse

No. 18 I3 Current from pulse

No. 39 P3 Polarization from pulse

No. 3

The hysteresis module of the TF Analyzer 2000 system offers a P (V )- and a I(t)- representation

of the data. The I(t) curves display the measured current response of the sample versus time.

Polarization curves are combined from a total of three measurements. The polarization data

determined from the closed loop, the data determined when starting from the negative remanent

polarization state and the data acquired after starting from the positive remanent polarization

state. They all can be displayed versus the excitation voltage.

To display the curve of the current response vs. time column 1 is assigned to the x-axis and col.

4, 6, or 8 is assigned to the y-axis. To display the polarization of the measurement you have

to assign V+ to the x-axis and column 5 or 7 to the y-axis. To display the P (V ) of the curve

starting in the positive relaxed remanent polarization state assign V to the x-axis and col. 9 to

the y-axis.


A clipping of the ASCII-file of the DHM is shown below.

HysteresisResultProgram: Hyster 1.44BasicUnit: BU 313TfaFileType: resultTfaVersion: 3.0TimeStamp: 10/29/2002 17:41:33Table 1Volt [V] Freq[Hz] Pr+[uC/cm2] Pr-[uC/cm2] Prrel+[uC/cm2] Prrel-[uC/cm2] Pmax[uC/cm2] Vc+[V]Vc-[V] Area [mm] Current Range[RESULT DATA, 11 columns]

DynamicHysteresisProgram: Hyster 1.44BasicUnit: BU 313TfaFileType: dataTfaVersion: 3.0TimeStamp: 10/29/2002 17:41:33

Table 1Timestamp: 10/29/2002 17:41:33Averages: 1SampleName: PZTThickness [nm]: 160Area [mm2]: 0.125Current Range: 5Hysteresis Frequency [Hz]: 100Hysteresis Amplitude [V]: 3Vc+ [V]: 1.56671Vc- [V]: -1.20417Pr+ [uC/cm2]: 36.3141Prrel+ [uC/cm2]: 35.5749Prrel- [uC/cm2]: -36.7047Pr- [uC/cm2]: -36.7978Pmax [uC/cm2]: 43.7104Wloss [uJ/cm2]: 0Psw [uC/cm2]: 80.4151Pnsw [uC/cm2]: 8.1355dPsw [uC/cm2]: 72.2796CompensateFrequency: 1CompensateLeakage: 1Waveform: 0CompensateCapacitance: 1Settings: FC LC CCTime[s] V+[V] V-[V] I1[A] P1[uC/cm2] I2[A] P2[uC/cm2] I3[A] P3[uC/cm2][DATA, 9 columns]

3.3 Pulse Measurement - PM 53

3.3 Pulse Measurement - PM

3.3.1 Measur

do not open the tf analyzer 2000 system under … do not open the tf analyzer 2000 system under any...

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