digital evaluation of tfets in scaled nodes€¦ · voltage-transfer characteristics. low-leakage...
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Digital evaluation of TFETs in scaled nodes
D. Yakimets, M. Garcia Bardon, Y. Xiang,
imec DETEx team
Final Workshop – 10 November 2017
Energy Efficient Tunnel FET Switches and Circuits
imec
Ground Rules Scaling
2Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
Contacted gate pitch reduction necessary for continuing
density scaling, but Lgate scaling is limited by device
electrostatics out of space for contact and gate
Vertical Device to Continue Area Scaling
3Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
FinFET Vertical FET
MOSFETs Face Power Limit
4Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
[ Economist.com ]
𝑃 = 𝐶𝑉𝐷𝐷2 𝑓 + 𝑃𝑙𝑒𝑎𝑘
𝑓 = 𝐼/𝐶𝑉𝐷𝐷
Power
Frequency
Solutions:
• Multi core architecture
• Dynamic voltage-frequency scaling
• Sleep transistors
• ...
IoT Is Growing → Leakage Control Is Crucial
5Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
[ Cisco VNI Global IP Traffic Forecast, 2016–2021 ]
* M2M – Machine to Machine (IoT)
Tunnel FETs to Overcome Power Limit
6Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
Log(IDS)
VGS
VT
MOSFET
Ideal deviceTFET
MOSFET’s SSmin = 60 mV/dec
Because of steep slope, TFET allow:
• Smaller VT at same leakage
• VDD reduction
But TFETs do not provide much current
Can TFET be a next generation transistor?
Outline
• Introduction
• TFET Peculiarities
• V(T)FET Parasitics
• Benchmarking with MOSFET:
– Experimental TFET
– TCAD-based TFET
• Conclusion
7Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
Outline
• Introduction
• TFET Peculiarities
• V(T)FET Parasitics
• Benchmarking with MOSFET:
– Experimental TFET
– TCAD-based TFET
• Conclusion
8Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
Source ≠ Drain (1)
• Tricky serial connection: area penalty for lateral devices
9Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
S D/S DG G
S D SG
Du
mm
y
DG
Conventional MOSFET
TFET: additional contact
region is needed
Source ≠ Drain (2)
• Tricky serial connection: complex routing for vertical devices
10Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
DA
DB
SB
Bo
tto
m t
o t
op
via
Out
GB
SA
GA
nTFETA
nTFETB
Bottom to top via is not
needed for conventional
MOSFETs, as SB = DB.
The output for a MOSFET
would be on the top
Ambipolarity
• Low leakage may become not achievable
• Solutions to suppress ambipolarity are not so easy:
– Heterostructures
– Drain underlap
11Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
imec TFETs
(A. Verhulst)
Super-linear Onset (1)
• Id-Vg and Id-Vd should be co-optimized (doping / geometry)
12Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
|Vds| [V]
Vgs
-0.6V-0.5V-0.4V-0.3V-0.2V
TF
ET
BT
BT
cu
rre
nt I d
s
[10
-3A
/μm
]
imec TFETs
(A. Verhulst)
TF
ET
BT
BT
cu
rre
nt
I ds
[A/μ
m]
Vgs [V]
|Vds
|0.5V0.3V0.2V0.1V0.05V
Optimized
Original
Optimized
Original
Super-linear Onset (2)
13Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
• Undesired leakage current during
switching operations
• Loss of signal integrity, with Vdd
and ground never attained
• Long settling times and settling
time-propagation delay
Based on early, non-optimized Jülich Si TFET
data from the e2switch project
Outline
• Introduction
• TFET Peculiarities
• V(T)FET Parasitics
• Benchmarking with MOSFET:
– Experimental TFET
– TCAD-based TFET
• Conclusion
14Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
Overview of Parasitic Capacitances
15Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
Core device-related parasitics
• A lot of parasitic capacitances are defined through layouts
3D Parasitic Capacitances
16Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
Tsp = 4nm .. 14nm
Channel
Top view on gate
Gate oxide
Electrode
extension
length
• Analytical modeling is mostly based on elliptic integrals
Impact of Drain Underlap in TFETs
17Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
a = electrode
extension length
• Parasitic capacitance to the undoped part is not computed
Resistance of Bottom Electrode
18Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
pc = 1e-9, 5e-9,
1e-8, 2e-8 Ωcm2
Current flow
Bottom electrode
Channel
Contact resistance analytical formula accounts for:
• resistivity of bottom electrode metal (calibrated to measurements);
• semiconductor resistivity (doping-dependent, literature based);
• interface (user-defined);
Outline
• Introduction
• TFET Peculiarities
• V(T)FET Parasitics
• Benchmarking with MOSFET:
– Experimental TFET
– TCAD-based TFET
• Conclusion
19Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
Lund Vertical III-V TFET – best in class
20Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
ETHZ TCAD well
calibrated to
experimental data
• DNW = 20 nm
• SSmin = 48 mV/dec @ VDS = 0.3 V
• Sub-60 mV/dec operation over two orders
of magnitude (VDS = 0.1 – 0.5 V)
• IDS = 92 uA/um at VDD = 0.5 V
• pTFET = nTFET (fabricated)
16 nm FinFET – Fair Competitor
21Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
16 nm ground rules
Fin pitch [nm] 48
Metal pitch [nm] 64
Gate pitch [nm] 90
Cell height 9 tracks
Number of fins 4
VTFET-based standard cells may
be extended up to 15 tracks,
which implies 6 NWs per device
Layered view of NAND2 layout
Test Bench – Ring Oscillator
• Ring oscillator made of INV with FO=3
with BEOL load
• BEOL wire length is equivalent of mobile
SoC critical paths: 50 CGP
• Simulations are run in SPICE with
calibrated compact models accounting for
FEOL parasitics
22Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
BEOL properties:
• R = 25 Ω/µm;
• C = 195 aF/µm.
• RC of the 50 CGP long wire 98.7 fs.
High-performance Flavour (IOFF = 10 nA)
23Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
0.20
0.25
0.30
0.35
0.40
0
2
4
6
8
10
12
14
16
0 20 40 60
Pow
er
[uW
]
Frequency [GHz]
FinFET
Experimental TFET
VTFET are much slower than FinFETs
VTFET consume quite a lot of power:
direct short circuit current due to poor noise margins
0.00
0.10
0.20
0.30
0.40
0.00 0.20 0.40
Vout
[V]
Vin [V]
Voltage-transfer
characteristics
Low-leakage Flavour (IOFF = 10 pA)
24Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
0.20
0.25
0.30
0.35
0.40
0.30
0.35
0.40
0
0.2
0.4
0.6
0.8
1
1.2
0 2 4 6
Pow
er
[uW
]
Frequency [GHz]
FinFET
Ideal TFET
Ideal TFET (without traps) is required to
reach this low leakage
At VDD less than 0.30 V, TFET becomes
competitive
Low-activity Applications (α = 0.1%)
25Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
0.01
0.1
1
0.01 0.1 1 10 100
Energ
y [
aJ]
Frequency [GHz]
No traps (ideal)Bulk traps onlyAll traps (experimental)16nm-like FinFET
𝐸 = 𝛼𝑃𝑎𝑐𝑡𝑖𝑣𝑒 + 𝑃𝑙𝑒𝑎𝑘 ∙ 𝜏
Analysis across various
leakage targets and VDD values
For each frequency,
the minimum energy was selected
To account for poor NMs, (IOFF, VDD) pairs,
where NM is less than 25% of VDD are
filtered out
Outline
• Introduction
• TFET Peculiarities
• V(T)FET Parasitics
• Benchmarking with MOSFET:
– Experimental TFET
– TCAD-based TFET
• Conclusion
26Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
imec vertical TFETs
• 10 x 49 nm channels
• 5 nm like ground rules
27Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
imec TFETs
(A. Verhulst) Ten tracks tall layout
compatible with the SAQP flow
Noise Margins Balancing
28Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
Equal IOFF = 10pA Equally steep SS
Equally poor SSShifted pTFET
Inverter VTC
VDD=0.4V
109 mV shift
Low VT case
High VT case
normalized by W = 49 nm
Ideal TFET Is Competitive with MOSFET
29Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
Two BEOL loads are considered:
50CGP-long and 300CGP-long wire
VDD range is 0.15V to 0.6V
IOFF range is 1 pA to 10 nA
NM > 30% of VDD
𝐸 = 𝛼𝑃𝑎𝑐𝑡𝑖𝑣𝑒 + 𝑃𝑙𝑒𝑎𝑘 ∙ 𝜏
Outline
• Introduction
• TFET Peculiarities
• V(T)FET Parasitics
• Benchmarking with MOSFET:
– Experimental TFET
– TCAD-based TFET
• Conclusion
30Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
Conclusion
• Good TFET device is rather complex:
– SS should be steep
– Ambipolarity should be suppressed
– Super-linear onset should be minimized
• Source ≠ Drain:
– Area penalty for lateral device
– Increased interconnects complexity for vertical device
• VTFET competes with MOSFET at not actively switching, low-speed
applications requiring low power consumption if traps are suppressed
31Final Workshop – 10 November 2017Energy Efficient Tunnel FET Switches and Circuits
III-V heterostructures
with complex geometry
Vertical epi-grown
structures enabling
area scaling
• Cost of introduction?
• Variability