department of aeronautics and astronautics ncku nano and mems technology lab. 1 chapter iv june 14,...

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1 Department of Aeronautics and Astronautics NCKU Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. Chapter IV Chapter IV March 27, 2022 March 27, 2022 P-n Junction

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1Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Chapter IVChapter IV

April 18, 2023April 18, 2023

P-n Junction

2Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Fabrication of a p-n JunctionFabrication of a p-n Junction

3Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

4Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

I-V curve of p-n JunctionI-V curve of p-n Junction

5Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Equilibrium Fermi LevelEquilibrium Fermi Level

6Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

7Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

8Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

9Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

10Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

11Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

12Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Should be positive

with DiFi NkTEEnn ]/)exp[(

13Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Space Charge or Depletion RegionSpace Charge or Depletion Region

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Abruption JunctionAbruption Junction

16Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

17Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

18Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

19Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

20Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

21Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

22Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

23Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

24Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

25Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Linearly Graded JunctionLinearly Graded Junction

26Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

27Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

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29Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

30Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Depletion CapacitanceDepletion Capacitance

31Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Depletion CapacitanceDepletion Capacitance

32Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

33Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Evaluation of Impurity Evaluation of Impurity DistributionDistribution

34Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

35Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

36Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Current Voltage Current Voltage Characteristics for Ideal Characteristics for Ideal

DiodeDiode

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Current Voltage Current Voltage Characteristics Characteristics

Electron current flow

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39Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

40Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

41Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

42Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Fig. 17 Injected minority carrier distribution and electron and hole currents. (a) Forward bias. (b) Reverse bias. The figureillustrates idealized currents. For practical devices, the currents are not constant across the space charge layer.

43Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

44Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

45Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Generation and Generation and Recombination and High Recombination and High

Injection EffectInjection Effect

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=ni/τg

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48Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

From continuity equation

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50Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

η=1, diffusion current dominates, η=2, recombination current dominates.

Series resistance or high injection condition, pn(xn)=nn.

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52Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Temperature EffectTemperature Effect

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54Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Generation current dominates

Diffusion current dominates

55Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Charge Storage and Charge Storage and Transient BehaviorTransient Behavior

56Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

57Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

58Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

59Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

60Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

61Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

62Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Junction Breakdown under Junction Breakdown under reverse biasreverse bias

1. Tunneling Effect: it occurs only when the elec1. Tunneling Effect: it occurs only when the electric field is very high and is above 10tric field is very high and is above 1066V/cm for Si V/cm for Si or GaAs. The doping concentration for both p- aor GaAs. The doping concentration for both p- and n-regions must be greater than 5x10nd n-regions must be greater than 5x101717cmcm-3-3. T. The breakdown voltage is less than 4Ehe breakdown voltage is less than 4Egg/q./q.

2. Avalanche Multiplication: for p2. Avalanche Multiplication: for p++-n one sided a-n one sided abrupt junction, the doping concentration of Nbrupt junction, the doping concentration of ND D iis less than 10s less than 101717 cm cm-3-3 and the breakdown voltage and the breakdown voltage is greater than 6Eis greater than 6Egg/q./q.

63Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

64Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

no

nn I

WIM

)(

A multiplication factor Mn is defined as

65Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

66Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

)(1

ppnnA JJq

G

The number of electron-hole pairs generated by an electron per unit distance traveled is called the ionization rate of the electron, αn. The electron-hole pair generation rate GA is given by:

67Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

Using Eqs 19 and 21

68Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

69Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

70Department of Aeronautics and Astronautics NCKUDepartment of Aeronautics and Astronautics NCKUNano and MEMS Technology LAB.

For large a and low NB

For small a and high NB

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HeterojunctionHeterojunction

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Assume that there is a negligible number of traps or generation-Assume that there is a negligible number of traps or generation-recombination centers at the interface. This assumption is valid recombination centers at the interface. This assumption is valid

only for two semiconductors with closely matched lattice only for two semiconductors with closely matched lattice constantsconstants

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