DBH Analog and Power Technology

Oct 10, 2012

Heungsoo Park, SVP Head of Process Development Center

Dongbu HiTek

DBH Confidential

Agenda

Analog in Our World Today

DBH Diverse Technologies to Needs of the Analog

Market

Overall Review on DBH Analog & Power Technologies

Conclusions

DBH Confidential

Agenda

Analog in Our World Today

. Analog and Power Management IC Market

. Where DBH stands in Analog Semiconductor World

as Foundry

DBH Diverse Technologies to Needs of the Analog Market

Overall Review on DBH Analog & Power Technologies

Conclusions

DBH Confidential

Apple iPhone4 - A Closer Look

Power

Audio

Video

Display

Transmitters

Touch

Compass

Gyroscopes

Accelerometer

9 Chips

Analog Logic/Memory

4 Chips

Apps Processor

+ DRAM

NAND Flash

NOR Flash

Quad Baseband Sensors

DBH Confidential

Analog is Everywhere

Analog Semiconductor

ICs

DBH Confidential

308 312 312 340

359 378

400 32.8%

1.3% -0.1%

8.4%

5.2% 4.9% 5.5%

-10%

0%

10%

20%

30%

40%

0

100

200

300

400

500

2010 2011 2012 2013 2014 2015 2016

Semiconductor Growth

33 33 36

39 41

45

50 47.7%

0.4%

9.8% 6.7% 5.3%

11.4% 10.3%

0%

20%

40%

60%

0

20

40

60

2010 2011 2012 2013 2014 2015 2016

Foundry Growth

(unit: $B) (unit: $B)

Total Semiconductor Market growth 5.1% (CAGR 2012 ~ 2016)

Foundry market growth 9% (CAGR 2012 ~ 2016)

<Total Semiconductor Market> <Foundry Market>

Semiconductor & Foundry Market Forecast

(isuppli 3Q ’12)

DBH Confidential

Analog & Power Management IC Market

0

5

10

15

20

25

2011 2012 2013 2014 2015

Amplifier/Comparator Data Converter/Switch

Interface Other Analog

Voltage Regulator

0

2

4

6

8

10

12

14

2011 2012 2013 2014 2015

Low-voltage LDOs Portable Switch-Mode

AC-DC High-current Linear

Non-isolated DC-DC Battery Charger/ Monitor

Controller/supervisor/Reference

(Gartner 3Q ’12)

<Analog IC Market> <Power Management IC Market>

(unit: $B) (unit: $B)

Analog market annually increases by 3.6% (up to 2016) but down to $19.7B in 2012. DC-DC is key growth factor with 11.7% CAGR, followed by ‘AC-DC’ with 7.1% CAGR

20.3 19.7 21.1

22.5 23.4

10.0 10.1 10.8

11.5 12.1

DBH Confidential

Analog & Power Devices : Applications

Devic

e C

urr

ent

Rating

Device Blocking Voltage Rating [V]

Lighting Computer

Consumer

• Battery Charger • Battery management

5V 12V 18V 30V 40V 60V 100V 350V 700V 3.3V 24V

10A

1A

3A

5A

Lighting

Automotive

Mobile

Display • Haptic motor • Audio CODEC • Single LDO • Linear Regulator

• PMIC for Mobile • Switching regulator • Mobile LED driver

• Integrated PMU • Integrated Regulator • Audio amplifier (mobile)

• Hall Effect sensor • Bridge Driver • DC-DC converter • Motor driver

• Mid Current LDO • Mid DC-DC converter • High Frequency DC-DC

• MOSFET Driver

• LED driver

• DC-DC • Panel Bias IC • PFC collector

• Server Power • Battery Charger

• POE (PD, PSE)

• Consumer, Computer LDO

Medical Network

• Class D Audio Amplifier

DBH Confidential

DBH Positioning in Foundry Semiconductor

Device Performance

X-FAB

Feature Size

HHNEC

TSMC

VIS

Silterra

UMC

Magna

Global Foundry

SMIC

Analog & Power Mixed Signal

CIS NVM

High Density Logic Memory

ASMC

CSMC

Revenue (2011)

Dongbu

Tower Jazz

Fu

ture

DBH Confidential

Agenda

Analog in Our World Today

. Analog and Power Management IC Market

. Where DBH stands in Analog Semiconductor World as Foundry

DBH Diverse Technologies to Needs of the Analog

Market

Overall Review on DBH Analog & Power Technologies

Conclusions

DBH Confidential

Analog & Power Technology..What We Planned

Performance Analog CMOS

• Logic & Analog CMOS

• Focus on Performance

• Low 1/f Noise

• Thin Film Resistor

• Low-DA MIM Capacitor

Power BiCMOS

• Bipolar, CMOS, and LDMOS

• Logic & Analog CMOS

• HV (80V) and LV (20V) Flavors

• LDMOS, DECMOS

• Poly Resistor, MIM Cap

Density Analog CMOS

• Logic & Analog CMOS

• Low VT CMOS Option

• Poly Resistor, MIM Cap

• DECMOS

• Focus on Density

Should Be Modular Process Diversity with Simplicity including Passives Should Be Robust Cost Effective Design Friendly Environment

DBH Confidential

DBH 0.18um Analog & Power Platform

IP Portability & More

BD180LV ~ 40V Power Process

(Epi)

AN180 ~30V Power Process

(Non-Epi)

BD180X ~85V Power Process

HP180 Precision Analog

*Specialized 5V Design

rule & Low noise

Modular Based Platform

16 Masks for 5V Basic Process

DBH Confidential

DBH 0.18um Analog & Power Modular Process

Base-Line

5V CMOS

HV Device

DECMOS : 12~65V

LDMOS(N/P) : 7~85V

Thick Cu

& Cu Wiring

1.8V

CMOS

NVM

(Poly Fuse/

EEPROM)

Passive Device

Diode (Zener, Schottky,

Body )

Cap (MiM / PiP )

BJT (NPN / PNP)

Resistor (HSR)

Thin Film

Resistor

(SiCr/TaN)

ESD

1.8/5/12/20/

30/40/50/60V

Modular Process with Rich Components

. IP portability and Manufacturing Efficiency

<Very Low Rdson Performance>

DBH Confidential

Analog Requires Diversity.. What We Offer

AN180 1.8V / 5V Analog CMOS

HP180 1.8V / 5V HP Analog CMOS

BD180 1.8V / 5V / 60V

BD180X 1.8V / 5V / 60V

BD180XHV 1.8V / 5V / 85V

BD180LV 1.8V / 5V / 30V (NBL)

BD180LV 1.8V / 5V / 20V (No NBL)

DBH 0.18um Nodes

AN350 3V Analog CMOS

AN350 5V Analog CMOS

BD350 3V / 60V BCD

BD350 5V / 60V BCD

BD350HV 3V / 85V BCD

BD350HV 5V / 85V BCD

BD350LV 5V / 24V BCD

UHV700 5V / 20V / 700V (Epi)

UHV700 5V / 20V / 700V (No NBL)

DBH 0.35um Nodes

DBH Confidential

Analog in Our World Today

DBH Diverse Technologies to Needs of the Analog Market

Overall Review on DBH Analog & Power Technologies

Conclusions

Agenda

DBH Confidential

DBH Technology Roadmap.. 2013 and Beyond

Process Available Technology 2012 2013 2014 2015

BCDMOS

Analog CMOS

HVCMOS

eFlash

CIS

EF130 SONOS

1.5V/3.3V

SE130 2T P-ETox 1.5V/5V

TE130 2T P-ETox 1.5V/3.3V & 8V

IS18SI_Compact 2.8um Pixel

CIF, VGA, 1.3M 1.8V/3.3V

IL13SI_Compact 2.2um Pixel

VGA, 1.3M / 2M 1.5V/3.3V

IL11SI_Compact 1.75um Pixel

1.3M / 2M 1.5V/3.3V

IL11SJ_Smart 1.4um Pixel

3M / 5M 1.5V/3.3V

MS180 1.8V/

3.3V or 5V

TS110 1.2V/

2.5V or 3.3V

TS11SB Low Noise

1.2V/ 2.5 or 3.3V

BD130LV 1.5V/5V

40V LDMOS

BD130X 1.5V/5V

85V LDMOS

BD350_60V 3.3V or 5.0V 60V LDMOS

BD350_85V 3.3V or 5V

85V LDMOS

BD180 1.8V/5V

60V LDMOS

BD180X 1.8V/5V

85V LDMOS

BD180LV 1.8V/5V

40V LDMOS

UHV700 5V/20V

700V LDMOS

AN180 1.8V/5V

30V LDMOS

HP180 1.8V/5V

24V DECMOS

AN130 1.5V/5V

30V LDMOS

HP180_3.3V 1.8V/3.3V

24V DECMOS

AN110 1.5V/5V

30V LDMOS

LD110 Mobile

1.2V/30V

LD350 Mobile 5V/45V

LD160 TV

3.3V(1.8)/ 18V

LD160 IT

3.3V(1.8)/ 13.5V

LD160 IT

2.5V(1.8)/9V

LD110 Mobile 1.5V/30V

LD160 TV

1.8V/20V

Under Development

LD110 TV

1.2V/20V

LD110 IT 1.2V/9V

DBH Confidential

Overall Review on Latest DBH Technologies

AN180 : 0.18um Analog CMOS

BD180LV : 0.18um 40V BCD

BD180X : 0.18um 85V BCD

HP180 : 0.18um High-Performance Analog CMOS

HN/HE35BA : UHV700V Process (No EPI, EPI)

DBH Confidential

AN180 – 0.18um Analog CMOS

Technology Features

Benefits

High Digital Density

Integration of Digital, Analog and Power

Reduction in Die Size

Minimize Metal Resistance, CUP/BOAC

Cost-effective Integration of Power

0.18㎛ Feature Size (1P3M/up to 6M)

Isolated CMOS Transistors (1.8V, 5V)

30V Power Transistors (no-EPI)

. HVCMOS/LDMOS 7V-30V

Focus on Dense Passives

BJT NPN 5/8V, LPNP(10V), SPNP(5/20V)

2.7um Thick Al & 10um Thick Cu

30V Power Transistors (no-EPI)

10 100 1000

1E-15

1E-14

1E-13

1E-12

1E-11

1E-10

Svg (

V2/H

z)

Frequency (Hz)

10/0.5

10/10

HVPMOS (Svg) Vg=Vth-1.0, Vds=-2.5V

5V PMOS Noise Data

T=25C

10 100 1000

1E-14

1E-13

1E-12

1E-11

1E-10

Svg

(V2/H

z)

Frequency (Hz)

10/0.5

10/10

HVNMOS (Svg) Vg=Vth+1.0, Vds=2.5V

5V NMOS Noise Data

T=25C

DBH Confidential

BD180LV – 0.18um Optimized 40V BCD

Technology Features

0.18㎛ Feature Size

Isolated CMOS Transistor

Focus on Dense Passive

2.7um Thick Al & 10um Thick Cu

Low Leakage Option

7V~40V Power Transistors (EPI)

12/20V Fully Isolated nLDMOS

Benefits

High Digital Density

Integration of Digital, Analog and Power

Reduction in Die Size

Minimize Metal Resistance, CUP/BOAC

For Low Power Consumption

Best-in-class Rsp-BVdss under 40V Range

Enable to Swing from Negative to Positive

BD180LV = AN180 + 40V Power

DBH Confidential

BD180X – 0.18um Optimized 85V BCD

Technology Features

0.18㎛ Feature Size

Isolated CMOS Transistor

Focus on Dense Passive

2.7um Thick Al & 10um Thick Cu

Low Leakage Option

12V~35V Fully Isolated nLDMOS

12V~85V Power Transistors (EPI)

Benefits

High Digital Density

Integration of Digital, Analog and Power

Reduction in Die Size

Minimize Metal Resistance, CUP/BOAC

For Low Power Consumption

Enable to Swing from Negative to Positive

Best-in-class Rsp-BVdss under 85V Range

BD180X = AN180 + 85V Power

DBH Confidential

HP180 – 0.18um High Performance Analog

Technology Features Vd= 5.0V, Vg @Id=100uA

0.18㎛ Feature Size

Isolated CMOS Transistor

Focus on Dense Passive

2.7um Thick Al & 10um Thick Cu

Very Low Noise 5V FET

High Precision Passives

- Thin Film Resistor, PIP Capacitor

- Hyper Junction Varactor

Benefits

High Digital Density

Integration of Digital, Analog and Power

Reduction in Die Size

Minimize Metal Resistance, CUP/BOAC

High Signal-to-Noise Ratio (MOS/JFET)

High Precision, Very Low TCR, Low DA,

Low VCC Tuning Ratio (> 2.6) Varactor

DBH Confidential

Backend Process : What We Offer (w Future Plan)

CUP Applicable to 0.35um/0.18um

Pad Structure for Au wiring

Pad Structure for Cu wiring

(Suppliers based)

CUP . Design Guideline (BOAC)

. Multiple Choices w Wiring

DBH CUP (BOAC)

Thick Cu Upto 10um Thickness

Min. Pattern 12umx12um

Typical Rs 1.85mΩ/□

Cu Wiring Available (Suppliers)

Thick Cu . More Choices

. Modular, + Polyimide

Cu Wiring . Guideline (Crack Free)

Thick Cu & Cu Wiring

Cap Metal

Barrier Metal Seed Cu Plate Cu : 10 um

For Top Thin Metal (8kA)

DBH Confidential

Application Semiconductor

Major Applications of DBH Analog Technology

DBH Confidential

Conclusions

The Real World is Analog

Analog is What Gives Products Their ‘Character’

Analog Means ‘Diversity’ and ‘Perfectness’

Dongbu HiTek Understands Analog and Has Leadership

Technologies and a Roadmap to the Future

We Are Working to Reach Our Vision:

“Most Respected Analog Foundry”

Thank You