data retention extraction methodology for perpendicular
TRANSCRIPT
Data retention extraction
methodology for perpendicular
STT-MRAM
Luc Tillie1,2, E. Nowak1, R. C. Sousa2, M.-C. Cyrille1, B. Delaet1,
T. Magis1,A. Persico1, J. Langer3 ,B. Ocker3 , I-L Prejbeanu2 and L. Perniola1
1CEA-LETI, Minatec Campus, Grenoble, France, email: [email protected], Univ. Grenoble Alpes / CEA / CNRS, Grenoble, France
3Singulus Technologies AG, Kahl am Main, Germany
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IntroductionIn Perp STT-MRAM, retention time ๐ at a given temperature is
related to the Thermal Stability factor ๐ซ [Feng et al. JAP 95] :
Application Retention
Time ๐Bit Error
Rate (N=1)
Thermal
Stability ๐ซ [๐ค๐๐]
Cache 10 ms 10โ9 36 @85ยฐC
Soldering ~9 min 10โ5 38 @260ยฐC
Storage (SCM) 1 month 10โ9 56 @85ยฐC
Automotive 10 years 10โ5 51 @150ยฐC
Consumer 10 years 10โ5 51 @85ยฐC
๐ = ๐๐๐๐๐(๐ซ)
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Each application has a different temperature and retention target
๐ซ = ๐ฅ๐จ๐ โ๐๐๐ต๐
๐๐๐ ๐ โ ๐ฉ๐ฌ๐น
Introduction
5% error ~ factor 10 in retention time
Thermal Stability must be extracted with high precision
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-5% +5%
Outline
โข Perp-STT description
โข Direct retention time measurement
โข Delta extraction methods
โข Accuracy and precision
โข Delta dependence
โข Conclusion
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MAD Leti test chipStandard Foundry Wafer
CMOS 130nm + 4 Cu Metal
TiN Bottom Electrode
Definition
Perpendicular magnetic stack
deposition by Singulus
Ta/FeCoB/MgO/FeCoB/Ta/Co
/5x[Pt/Co]/Ru/Co/13x[Pt/Co]/Pt/Ta
ร100nm Mesa Patterning
Encapsulation and CMP
M5
CMP touch (RMS ~ 2ร ) TiN
AlCu M5
Cu M4
Fixed Layer
Oxide Layer
Free Layer
MAD Leti test chip : Multi back-end
memory platform
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Resistance Hysteresis Cycle
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Switching by current polarity
Parallel state : Low Resistance State
Anti-Parallel state : High Resistance State
Resistance Distribution
7
4kbit matrix shows fully separated distributions
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~๐(๐๐น๐๐ + ๐๐น๐)
๐น๐ [๐] ๐น๐๐[๐]
Average 825 980
๐ 9.53 11.37
TMR Temperature dependence
๐ป๐ด๐น =๐น๐๐ โ ๐น๐
๐น๐
The resistance window stays stable up to 235ยฐC
Good state differentiation
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Sharrockโs Model
Sharrockโs model [Sharrock, IEE Trans. On Magnetism, 35 ,1999] :
Two stable states, Parallel (P) and Anti-Parallel (AP), separated
by an energy barrier ๐๐ฌ
Parallel
StateAnti-Parallel
State
๐๐ฌ๐ท ๐๐ ๐จ๐ท๐๐ฌ๐จ๐ท ๐๐ ๐ท
๐~๐๐ฌ
๐๐๐ป
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Outline
โข Perp-STT description
โข Direct retention time measurement
โ On single devices
โ On matrices
โข Delta extraction methods
โข Accuracy and precision
โข Delta dependence
โข Conclusion
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Switching Time Probability (STP) on single device
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Voltage pulse AP state P state
Objective : How much time before it switches thermally?
Switching Time Probability (STP) on single device
๐ท ๐ = ๐ โ ๐๐๐๐
๐๐๐๐๐ ๐ซ
+ Simple Method
+ Exact value of Retention time
- Impractical for long retention time
- Extrapolation for low temperature
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1000 events
Switching Time Probability (STP) on matrix
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+ Simple Method
+ Exact value of Retention time
- Impractical for long retention time
- Extrapolation for low temperature
Outline
โข Perp-STT description
โข Direct retention time measurement
โข Delta extraction methods
1. Switching Current Density
2. Switching Pulse Width
3. Switching Field Density
โข Accuracy and precision
โข Delta dependence
โข Conclusion
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(1/3) Switching Current Density (SCD)
๐บ๐ช๐ซ ๐ฐ =๐ซ
๐๐๐ ๐ซ๐ญ๐ฉ๐๐ฑ๐ฉ โ
๐ญ๐ฉ
๐(๐ซ)[Huai et al, JAP 98, 2005]
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T ฮ [kbT] Ic [mA]
๐๐ยฐ๐
(1/3) Switching Current Density (SCD)
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T ฮ [kbT] Ic [mA]
๐๐ยฐ๐ ๐๐ ๐. ๐
๐บ๐ช๐ซ ๐ฐ =๐ซ
๐๐๐ ๐ซ๐ญ๐ฉ๐๐ฑ๐ฉ โ
๐ญ๐ฉ
๐(๐ซ)[Huai et al, JAP 98, 2005]
(1/3) Switching Current Density (SCD)
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T ฮ [kbT] Ic [mA]
๐๐ยฐ๐ ๐๐ ๐. ๐
๐๐๐ยฐ๐ ๐๐ ๐. ๐
๐บ๐ช๐ซ ๐ฐ =๐ซ
๐๐๐ ๐ซ๐ญ๐ฉ๐๐ฑ๐ฉ โ
๐ญ๐ฉ
๐(๐ซ)[Huai et al, JAP 98, 2005]
(1/3) Switching Current Density (SCD)
T ฮ [kbT] Ic [mA]
๐๐ยฐ๐ ๐๐ ๐. ๐
๐๐๐ยฐ๐ ๐๐ ๐. ๐
๐๐๐ยฐ๐ ๐๐ ๐. ๐
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+ Fast Method
+ Standard measurement
๐บ๐ช๐ซ ๐ฐ =๐ซ
๐๐๐ ๐ซ๐ญ๐ฉ๐๐ฑ๐ฉ โ
๐ญ๐ฉ
๐(๐ซ)[Huai et al, JAP 98, 2005]
(2/3) Switching Pulse Width (SPW)
๐บ๐ท๐พ ๐๐ = ๐ฐ๐ ๐ โ๐
๐ซ๐๐๐
๐๐
๐๐
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In thermally activated regime :
[Koch et al, Phys. Rev. Lett. 92, 2004]
T ฮ [kbT] Ic [mA]
๐๐ยฐ๐
(2/3) Switching Pulse Width (SPW)
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[Koch et al, Phys. Rev. Lett. 92, 2004]
T ฮ [kbT] Ic [mA]
๐๐ยฐ๐ ๐๐ ๐. ๐๐
๐บ๐ท๐พ ๐๐ = ๐ฐ๐ ๐ โ๐
๐ซ๐๐๐
๐๐
๐๐In thermally activated regime :
(2/3) Switching Pulse Width (SPW)
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[Koch et al, Phys. Rev. Lett. 92, 2004]
T ฮ [kbT] Ic [mA]
๐๐ยฐ๐ ๐๐ ๐. ๐๐
๐๐๐ยฐ๐ ๐๐ ๐. ๐๐
๐บ๐ท๐พ ๐๐ = ๐ฐ๐ ๐ โ๐
๐ซ๐๐๐
๐๐
๐๐In thermally activated regime :
(2/3) Switching Pulse Width (SPW)
T ฮ [kbT] Ic [mA]
๐๐ยฐ๐ ๐๐ ๐. ๐๐
๐๐๐ยฐ๐ ๐๐ ๐. ๐๐
๐๐๐ยฐ๐ ๐๐ ๐. ๐๐
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+ Fast Method
+ Requires to be in thermally activated regime
- Degradation due to long pulses
[Koch et al, Phys. Rev. Lett. 92, 2004]
๐บ๐ท๐พ ๐๐ = ๐ฐ๐ ๐ โ๐
๐ซ๐๐๐
๐๐
๐๐In thermally activated regime :
(3/3) Switching Field Density (SFD)
๐บ๐ญ๐ซ ๐ฏ =๐
๐น๐ฏ๐๐๐๐๐ โ
๐ฏ๐
๐๐๐๐น๐ฏ
๐
๐๐๐๐๐ ๐ ๐ โ
๐ฏ
๐ฏ๐๐๐๐ โ๐ ๐ โ
๐ฏ
๐ฏ๐
๐
[Feng et al. J.A.P 95, 2004]
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T ฮ [kbT] Hk [mT]
๐๐ยฐ๐ช
(3/3) Switching Field Density (SFD)
๐บ๐ญ๐ซ ๐ฏ =๐
๐น๐ฏ๐๐๐๐๐ โ
๐ฏ๐
๐๐๐๐น๐ฏ
๐
๐ซ๐๐๐๐ ๐ซ ๐ โ
๐ฏ
๐ฏ๐๐๐๐ โ๐ซ ๐ โ
๐
๐๐ค
๐
[Feng et al. J.A.P 95, 2004]
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T ฮ [kbT] Hk [mT]
๐๐ยฐ๐ช ๐๐ ๐. ๐๐
(3/3) Switching Field Density (SFD)
๐บ๐ญ๐ซ ๐ฏ =๐
๐น๐ฏ๐๐๐๐๐ โ
๐ฏ๐
๐๐๐๐น๐ฏ
๐
๐ซ๐๐๐๐ ๐ซ ๐ โ
๐ฏ
๐ฏ๐๐๐๐ โ๐ซ ๐ โ
๐
๐๐ค
๐
[Feng et al. J.A.P 95, 2004]
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T ฮ [kbT] Hk [mT]
๐๐ยฐ๐ช ๐๐ ๐. ๐๐
๐๐ยฐ๐ช ๐๐ ๐. ๐๐
(3/3) Switching Field Density (SFD)
๐บ๐ญ๐ซ ๐ฏ =๐
๐น๐ฏ๐๐๐๐๐ โ
๐ฏ๐
๐๐๐๐น๐ฏ
๐
๐ซ๐๐๐๐ ๐ซ ๐ โ
๐ฏ
๐ฏ๐๐๐๐ โ๐ซ ๐ โ
๐
๐๐ค
๐
[Feng et al. J.A.P 95, 2004]
T ฮ [kbT] Hk [mT]
๐๐ยฐ๐ช ๐๐ ๐. ๐๐
๐๐ยฐ๐ช ๐๐ ๐. ๐๐
๐๐ยฐ๐ช ๐๐ ๐. ๐๐
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+ No degradation (only for reading)
- Involves magnetic field (Setup compatibility)
Outline
โข Perp-STT description
โข Direct retention time measurement
โข Delta extraction methods
โข Accuracy and precision
โข Delta dependence
โข Conclusion
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Precision Measurement
SCD
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Low cycle number induces optimistic ๐ซ extraction
and high variability
High number of cycles needed
Measurement parameters
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Two main measurement conditions :
- Number of significant points for curve fitting
- Number of events measured
Delta โ accuracy and precision
Delta extraction requires :
At least 5 points over the distribution
A high number of events measured
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Summary Table
Switching
Mechanism
Significant
points #Events #
Step
speedComments
Accuracy Precision
5% 1% 5% 1%
STPRetention
(thermal)- - โฅ10 โฅ20
1s โ
1 yr
+ Simple method
+ Most precise
- Impractical for long retention time
SCD
Current
pulse
(amplitude)โฅ3 โฅ6 โฅ200 โฅ ๐๐๐ ns
+ Fast method
+ Typically no degradation
SPW
Current
pulse width
(length)
โฅ3
(per
pts)
โฅ5
(per
pts)
โฅ10 โฅ100ns โ
ms
+ Fast method
- Requires to be in thermally
activated regime
- Degradation due to long pulses
SFDMagnetic
Fieldโฅ6 - โฅ300 โฅ ๐๐๐
ยตs โ
ms
+ No degredation
- Involves magnetic field
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Outline
โข Perp-STT description
โข Direct retention time measurement
โข Delta extraction methods
โข Accuracy and precision
โข Delta dependence
โ Diameter dependence
โ Temperature dependence
โข Conclusion
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Stability dependence with diameter
60ยฐC 150ยฐC 210ยฐC
SCD
SPW
Non-quadratic behavior
Coherent with a constant sub-volume nucleation.
[Sun et al, Phys. Rev. B 84โ]
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Stability dependence with temperature
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STP at high temperature : Reference values
Stability dependence with temperature
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SCD on all range : Coherent with reference values
Stability dependence with temperature
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SPW Measurements : Coherent at high temperature,
deviates from SCD below 100ยฐC
Stability dependence with temperature
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SFD at low temperature : noisy but coherent with SCD
Stability dependence with temperature
Thermal stability modeling
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- MacroSpin and Domain-Wall models coherent at high temperature
- MacroSpin deviates below 100ยฐC
- Domain-Wall close to SCD on all range
Up
Down
Uniform Magnetic Reversal
ยซ MacroSpin ยป
Domain-Wall Propagation
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Application Retention
Time ๐Bit Error
Rate (N=1)
Thermal Stability ๐ซ[๐ค๐๐]
Cache 10 ms 10โ9 36 @85ยฐC
Soldering ~9 min 10โ5 38 @260ยฐC
Storage (SCM) 1 month 10โ9 56 @85ยฐC
Automotive 10 years 10โ5 51 @150ยฐC
Consumer 10 years 10โ5 51 @85ยฐC
Stability dependence with temperature
Conclusion
โข 4 retention time methods have been compared in
diameter and temperature
โข Accuracy and precision study showed the need of
measuring enough events with a minimum number of
significant points
โข The 4 extractions gave similar results except the SPW
which deviates significantly below 100ยฐC
โข Extrapolating from high temperature to a certain value
has to be done with care
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