cse/ee 462 l12 rom and pla first look.1

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CSE/EE 462 L12 ROM and PLA First Look.1 Brockman, ND, 2006 CSE/EE 462: VLSI Design Fall 2006 A First Look at ROMs and PLAs Jay Brockman [Adapted from Mary Jane Irwin and Vijay Narananan, CSE Penn State adaptation of Rabaey’s Digital Integrated Circuits, ©2002, J. Rabaey et al.]

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Page 1: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.1 Brockman, ND, 2006

CSE/EE 462: VLSI DesignFall 2006

A First Look at ROMs and PLAs

Jay Brockman

[Adapted from Mary Jane Irwin and Vijay Narananan, CSE Penn State

adaptation of Rabaey’s Digital Integrated Circuits, ©2002, J. Rabaey et al.]

Page 2: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.2 Brockman, ND, 2006

Array-Structured Memory Architecture

column decode

sense amplifiers

row

dec

ode

row address

column address

Din/Dout

All cells on selected row sensed simultaneously

Page 3: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.3 Brockman, ND, 2006

MOS NOR ROM Cell Array

WL [0]

BL [0]

WL [1]

WL [2]

WL [3]

VDD

BL [1]

Pull-up devices

BL [2] BL [3]

Page 4: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.4 Brockman, ND, 2006

MOS NOR ROM Layer Assignments

WL [0]

GND

BL [0]

WL [1]

WL [2]

WL [3]

VDD

BL [1]

Pull-up devices

BL [2] BL [3]

GND

Poly and diffusion is patterned for all cells

Use contacts to connect cells with zeros to metal columns

mirroringalternate rowssaves area

Page 5: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.5 Brockman, ND, 2006

Contact Programmable NOR ROM Layout

+ =

Page 6: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.6 Brockman, ND, 2006

Row Decoder

WL [0]

BL [0]

WL [1]

WL [2]

WL [3]

VDD

BL [1]

Pull-up devices

BL [2] BL [3]

A1

A0

A1

A0

A1

A0

A1

A0

Page 7: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.7 Brockman, ND, 2006

Row Decoder

WL [0]

BL [0]

WL [1]

WL [2]

WL [3]

VDD

BL [1]

Pull-up devices

BL [2] BL [3]

NOR

A1

A0NOR

NOR

NOR

A1 A0 A0

look familiar?

Page 8: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.8 Brockman, ND, 2006

Row Decoders

Collection of 2M complex logic gatesOrganized in regular and dense fashion

(N)AND Decoder

NOR Decoder

Page 9: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.9 Brockman, ND, 2006

4-input pass-transistor based column decoder

Advantages: speed (tpd does not add to overall memory access time) Only one extra transistor in signal pathDisadvantage: Large transistor count

A0S0

BL 0 BL 1 BL 2 BL 3

A1

S1

S2

S3

D

Page 10: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.10 Brockman, ND, 2006

Non-Volatile Memories The Floating-gate transistor (FAMOS)

Floating gate

Source

Substrate

Gate

Drain

n+ n+_p

tox

tox

Device cross-section Schematic symbol

G

S

D

Page 11: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.11 Brockman, ND, 2006

MOS NAND ROM

All word lines high by default with exception of selected row

WL [0]

WL [1]

WL [2]

WL [3]

VDD

Pull-up devices

BL[3]BL [2]BL [1]BL [0]

Page 12: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.12 Brockman, ND, 2006

NAND Flash Memory

Unit Cell

Word line(poly)

Source line(Diff. Layer)

Courtesy Toshiba

Gate

ONO

FGGateOxide

Page 13: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.13 Brockman, ND, 2006

NAND Flash Memory

Word linesSelect transistor

Bit line contact Source line contact

Active area

STI

Courtesy Toshiba

Page 14: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.14 Brockman, ND, 2006

6-transistor CMOS SRAM Cell

WL

BL

VDD

M5M6

M4

M1

M2

M3

BL

QQ

Page 15: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.15 Brockman, ND, 2006

6T-SRAM — Layout

VDD

GND

QQ

WL

BLBL

M1 M3

M4M2

M5 M6

Page 16: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.16 Brockman, ND, 2006

1-Transistor DRAM Cell

Write: CS is charged or discharged by asserting WL and BL.Read: Charge redistribution takes places between bit line and storage capacitance

Voltage swing is small; typically around 250 mV.

M1

CS

WL

BL

CBL

VDD2VT

WL

X

sensing

BL

GND

Write 1 Read 1

VDD

VDD /2 V

V BL VPRE– VBIT VPRE–CS

CS CBL+------------= =V

Page 17: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.17 Brockman, ND, 2006

1-T DRAM Cell

Uses Polysilicon-Diffusion Capacitance

Expensive in Area

M1 wordline

Diffusedbit line

Polysilicongate

Polysiliconplate

Capacitor

Cross-section Layout

Metal word line

Poly

SiO2

Field Oxiden+ n+

Inversion layerinduced byplate bias

Poly

Page 18: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.18 Brockman, ND, 2006

SEM of poly-diffusion capacitor 1T-DRAM

Page 19: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.19 Brockman, ND, 2006

Advanced 1T DRAM Cells

Cell Plate Si

Capacitor Insulator

Storage Node Poly

2nd Field Oxide

Refilling Poly

Si Substrate

Trench Cell Stacked-capacitor Cell

Capacitor dielectric layerCell plateWord line

Insulating Layer

IsolationTransfer gate

Storage electrode

Page 20: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.20 Brockman, ND, 2006

MRAM

Page 21: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.21 Brockman, ND, 2006

The Radical Fringe: Carbon Nanotubes

Scientific American,Feb. 2005

Page 22: CSE/EE 462 L12 ROM and PLA First Look.1

CSE/EE 462 L12 ROM and PLA First Look.22 Brockman, ND, 2006

The Radical Fringe: Carbon Nanotubes

Developed by Nantera, being commercialized by LSI Logic