critical barriers associated with copper bonding wireimapsne.net/2015 presentations/g/g1.pdf ·...
TRANSCRIPT
Critical Barriers Associated with
Copper Bonding Wire
William (Bud) Crockett Jr.
May 2015
In Global Electronics the most emphasizedIn Global Electronics the most emphasized
precious metal is Goldprecious metal is Gold
VehiclesMobile phones
PCsLCD TVs
etc.
RuRu
PtPt
Au
RhRh
AgAg
Pd
Electrical properties, high corrosion resistance
Electronic devices
Preciousmetal
Question is how to cut the device cost while using Gold (Au) metal?
11Reduce the thickness of Au plating on the substrate
Reduce the material cost of PKGReduce the material cost of PKG
Target is to optimize the combination between the Surface finish material and Wire bond material
22Use alternative metals instead of Au wire
Challenges of Bare Copper Wire
Challenges of Bare Copper Wire
� Copper Wire is Hard
� Die pad crack
� Al pad splash
� Narrow process windows (Short tail, fish tail, lifted bonds)
� FAB (Forming Gas N2H2)
� Capillary life
� Reliability (PCT/HAST Failures, Oxidation)
First Bond Second Bond
High ParametersNarrow Range
Cu Wire ParametersNarrow Range
Low ParametersWide Range
Std ParametersWide Range
Bo
nd
ing
Pa
ram
ete
rs
Parameter Range
Low
High
Au
Cu
Cu Wire Bonding Process Window Comparison
1) Copper wire is harder than Gold wire2) Copper processes have work hardening issues
Bondin
g P
ara
mete
rs
Parameter Range
Low
High
Cu Optimum Parameters
Low Parameters
High Parameters
Existing Common problem in Cu bonding
Short tail / No tail issue
Cu
Bondin
g P
ara
mete
rs
Parameter Range
Low
High
Optimum Parameters
Low Parameters
High Parameters
Aluminum splashingshorting to adjacent pad
Lifted Metal
More Common problems in Cu bonding
1) Lifted metal occurs at lower side of optimum parameters
(Gen I) Palladium Coated(Gen I) Palladium Coated Wire: CLRWire: CLR--11
CCopper bonding wire, opper bonding wire, LLong life & ong life & RRobust stitch bondobust stitch bond
Comparison with Bare Copper wire
Advantage DisadvantageLonger Spool Lengths (1km – 5km/spool)
Wider 2nd bond window/Higher 2nd bond pull
Chemical Stability
Better HAST (BGA)
Longer shelf life; 6 months after
manufacturing date, 1 month after opening
package (bare Cu 1-week after opening)
Price is higher than bare copper
(Au relative value 1.0, bare Cu 0.2,
PdCu 0.4 in HVM)
FAB is harder (possible pad damage)
Capillary Life
Comparison with Bare Copper wire
Advantage DisadvantageLonger Spool Lengths (1km – 5km/spool)
Wider 2nd bond window/Higher 2nd bond pull
Chemical Stability
Better HAST (BGA)
Longer shelf life; 6 months after
manufacturing date, 1 month after opening
package (bare Cu 1-week after opening)
Price is higher than bare copper
(Au relative value 1.0, bare Cu 0.2,
PdCu 0.4 in HVM)
FAB is harder (possible pad damage)
Capillary Life
4N Bare Cu wire
Thin Coated layer
4N Bare Cu wire
Thin Coated layer
CLR-1 φ20umCLR-1 φ20um
Palladium CoatedPalladium Coated wire: CLRwire: CLR--1A1A
Compare with CLR-1 (Gen I)
Advantage DisadvantageWider 2nd bond window/Higher 2nd bond pull
Slightly softer FAB
Reduce capillary drag
Fine pitch applications
SSB bonding
**Same Cost as CLR-1 (Gen I)
New Qualification
PCN
Compare with CLR-1 (Gen I)
Advantage DisadvantageWider 2nd bond window/Higher 2nd bond pull
Slightly softer FAB
Reduce capillary drag
Fine pitch applications
SSB bonding
**Same Cost as CLR-1 (Gen I)
New Qualification
PCN
4N Bare Cu wire
Pd Coated layer
Thin Au layer
CLR-1 (Gen I)
(Gen II)(Gen II)
+
PCC 1
PCC 2
FAB make
・Wire: PCC 1, PCC 2 φ20um
・FAB: φ38um
・Bonder: UTC-3000
・EFO: 80mA, 0.12ms
・Gas: N2+5%H2, 0.5L/min
・Measurement count n=3
Molded by epoxy resin
Polish and buff
EPMA-1600
SHIMADZU
FAB EPMA Mapping
1) Pd remains more on the FAB surface of PCC 1 than that of PCC 2 wire type2) Pd element diffused in FAB which makes it harder. Pad damage risk3) Pd element on perimeter of ball more effective for retarding Halogen attack??
PCC
0
10
20
30
40
50
60
70
80
90
100
0 20 40 60 80 100 120 140 160 180 200
Time(h)
Failu
re r
atio (
%)
Failu
re=in
itia
l re
sis
tannce×
20%up
CLR-1A
CLR-1
Wire E (ref)
K&S MaxumPlus
PCC Comparisons
HTS 220deg C, QFP, Halogen resin
Bonder:K&S Maxum Plus
Forming Gas :N2-5%H2, 0.5l/min
Die-Pad :Al-0.5%Cu (t=0.8um)
(Hitachi 6mm□ Al-Cu0.5%)
Capillary :SPT SI-25130-385E-ZS36
(H:25, T:130, CD:38, FA:8, OR:30)
Wire Dia.:20um
FAB Dia.:40um
Squashed Ball Dia.:50um
TD PCC
PCC 1
PCC 2
0
10
20
30
40
50
60
70
80
90
0 200 400 600 800 1000 1200
Time(h)
不良数(Ω20%up)
PCC Comparisons
HTS 200deg C, QFP, Green resin
Bonder:K&S KnS ICONN
Heat Stage Temperature=200℃
Die-Pad :Al-0.5%Cu-1%Si / SiO2 / Si
(Renesas DG001□ t=0.8um)
Capillary :SPT SU-25080-385F-ZU34TP
(H25,CD38,T80)
Wire Dia.:20um
FAB Dia.:X=39.5um,Y=36
Squashed Ball Dia.:
X=50.5um , Y=50.0 , Z=10.0
X
Y
【1st B’g Parameter】
Tip=7.0(mils) ,CV=0.3(mils/msec)
Contact Threshold=70%、Constant Current
Contact Defect Mode=V Mode
USG Current=85(mA) 、USG Profile=Square
USG Bond Time=10(ms)、
USG Pre Bond=60(mA)、
Force=15(gf)、Force Profiling=On
Init‘l Force=45(gf)、Init'l Force time=33(%)
Force Ramp Time=10%
X-Scrub=3(um) , Y-Scrub=0(um)
Scrub Cycles=2 ,Scrub Phase=90(deg)
1st Scrub mode=Pre USG
▲▲▲▲:PCC 1 ,N2-5%H2 ,90mA (1.60mil)
△△△△:PCC 1 ,N2 ,90mA (1.69mil)
▲▲▲▲:TD PCC ,N2-5%H2 ,90mA (1.65mil)
△△△△:TD PCC ,N2 ,90mA (1.69mil)
1135h (Next page)
1135h (Next page)
HTS 200deg C, QFP, Green resin1135h
Observation is no corrosion in 1st bond cross section
TD
PC
CN
290m
AT
D P
CC
N2H
290m
AP
CC
2N
290m
AP
CC
1
N2H
290m
A
0
10
20
30
40
50
60
70
80
90
0 200 400 600 800 1000 1200
Time(h)
不良数(Ω20%up)
UHAST 130deg C 85%rh, QFP, Halogen resin
Bonder:K&S KnS ICONN
Heat Stage Temperature=200℃
Die-Pad :Al-0.5%Cu-1%Si / SiO2 / Si
(Renesas DG001□ t=0.8um)
Capillary :SPT SU-25080-385F-ZU34TP
(H25,CD38,T80)
Wire Dia.:20um
FAB Dia.:X=39.5um,Y=36
Squashed Ball Dia.:
X=50.5um , Y=50.0 , Z=10.0
【1st B’g Parameter】
Tip=7.0(mils) ,CV=0.3(mils/msec)
Contact Threshold=70%、Constant Current
Contact Defect Mode=V Mode
USG Current=85(mA) 、USG Profile=Square
USG Bond Time=10(ms)、
USG Pre Bond=60(mA)、
Force=15(gf)、Force Profiling=On
Init‘l Force=45(gf)、Init'l Force time=33(%)
Force Ramp Time=10%
X-Scrub=3(um) , Y-Scrub=0(um)
Scrub Cycles=2 ,Scrub Phase=90(deg)
1st Scrub mode=Pre USG
●●●●:PCC 1 ,N2-5%H2 ,45mA (1.52mil)
○○○○:PCC 1 ,N2 ,45mA (1.61mil)
●●●●:TD PCC ,N2-5%H2 ,45mA (1.55mil)
○○○○:TD PCC ,N2 ,45mA (1.67mil)
1085h
1085h
UHAST 130deg C 85%rh, QFP, Halogen resin1085h
TD
PC
CN
245m
AT
D P
CC
N2H
245m
AP
CC
1N
245m
AP
CC
1
N2H
245m
ACorrosion? alloy layer?
Ag alloy
4N Au
Crystal Observation (Vertical Section)
Heat Affected Zone
Heat Affected Zone
Ultra low Loop & Reverse Bonding is possible for Ag alloy wire
Gold Ag alloy Cu alloy Copper PCC
Material Cost High Medium Low Low Medium
Forming Gas - N2 N2+H2 N2+H2
N2+H2
N2
Chip Damage Low Low Med Med High
Process window 1st
Wide Med Med Med Narrow
Process window 2nd
Wide Med Wide Med Med
HTS 2000+hr
ReliabilityPoor Excellent Excellent Fair Fair
Wire Types Summary
Bonding wires material cost can be summarized as:Cu>>Cu alloy>>PCC>>Ag alloy>>Au (LGP used $1200)
Closing Remarks
Alternative (Ag_Cu) alloy wires show good potential as
they offers several advantages compared to bare copper and palladium coated copper wires; good bonding performance and superior reliability.
Alternative (Ag_Cu) alloy wires may not work for all
applications but they can certainly help support many application areas where cost and performance define a product
Ag & Cu alloy wire usage is expected to increase in the next few years in both the LED and Semiconductor industry.