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CONCENTRATION METER B32 PRODUCT INFORMATION
Concentration Meter B32 for
quaternary liquid TMAH+PR+CO3
CONTINUOUS IN-LINE MONITORING AND PROCESS CONTROL
INTRODUCTION
Rhosonics introduces the Concentration Meter
model B32. This smart and compact measuring
instrument can distinguish three components of
the quaternary liquid solution TMAH+C03+PR
which is formed after photoresist (PR) is dissolved
by Tetramethylammonium hydroxide (TMAH).
All concentrations are monitored real-time with
the highest accuracy, shown in weight percent
(wt%) on the B32 display and transferred via a
RS232/Modbus RTU signal for communication
with a PLC or control room.
The B32 analyser uses the combined data of
four different measurement technologies for
determination of the three concentrations.
Three technologies are integrated in the B32 and
the fourth is coming from a third-party device.
FEATURES AND BENEFITS
The B32 has many features. The most important
features and benefits are stated below.
• Real-time reading of three concentrations
• Extremely high accuracy up to ±0.0001wt%
• Easy commissioning (DCS independent)
• High stability due to reliable electronics
• High chemical resistance of wetted materials
• Easy installation (installed in four steps)
• Easy user interface
• Touch-sensitive buttons for lab gloves
• RS232/ Modbus RTU protocol
• Input for data of external UV device
• USB connection for data and system log
• Compact and maintenance friendly
modular design with electronics and liquid
parts separated
• No moving parts
UV DATA INPUT
USB INPUT
RS232 / Modbus
RTU
Features of the Concentration Meter B32
TMAH
CO3
PR
2. 377wt%
0. 216wt%
0.181wt%
Real-time monitoring
Concentration Meter B32
INDUSTRIES The B32 can be used in the following industries:
• Flat Panel Displays
• Any other industry where the quaternary
solution TMAH+PR+CO3 is used
Capacitive touch
buttons
INSTALLATION
The B32 consists of four components:
a wall panel, electrical box, sensor box and
communication box.
Installation can be done in four steps:
1. Mount wall panel onto a flat vertical surface
2. Make electrical connection with the wall panel
3. Click the three boxes onto the wall panel
4. Connect the process tube to the analyser
HOW DOES IT WORK?
The B32 measures three different physical
variables in one combined measurement cell.
An external UV measurement device is used for
a fourth variable.
The B32 uses the following measurements:
• Sound velocity
• Electrical conductivity
• Temperature
• UV (data input from an external device)
All variables are used to calculate and define the
concentrations TMAH, CO3 and PR. These
calculations are based on special algorithms
including corrections for the input of the third-
party UV measurement device.
ULTRASONIC MEASUREMENT
An ultrasonic transmitter generates a sound
wave in the tubular measurement cell which is
filled with the liquid. The sound wave
propagates itself over a fixed length of the tube
and is reflected on the other side of the tube.
The speed of sound is calculated from the total
length and time of flight through the liquid.
CALIBRATION MATRIX TMAH+CO3
TMAH + CO3 (at 26°C & 1 wt% PR)
110
85
60
35
10
1480 1505 1530 1555 1580
20
45
70
95
120
1500 1525 1550 1575 1600
Con
du
ctiv
ity(
mS/
cm)
Speed(m/s)
Ca libration matrix of TMAH+CO3+PR with X3= 0.2799981 at 27.5°C
©Rhosonics
Ultrasonic sound velocity measurement
Installation and replacement has never been so easy
Sender & receiver Transmitted wave Reflection
Distance
Cond. in (mS/cm)
Velocity of sound (m/s) CO3 TMAH
TYPICAL APPLICATION
The Concentration Meter B32 can be installed in
systems that are used for chemical supply in the
production process of LCD displays. For example
in a concentration management system.
In the developing process, a substrate can be
wet-chemical treated by TMAH. When the
substrate is treated, the solution of TMAH will
be polluted by dissolved photoresist (PR). The
quaternary liquid solution of TMAH+CO3+PR
will be formed and is collected in a tank.
During the process, the analyser is used to
show the real-time concentrations TMAH, CO3
and PR in wt%. The controlled process ensures
a chemical with the right concentrations.
Real-time determination of three components in a quaternary solution.
Concentrations in wt%
Process chamber
Carry out
Concentration management system
Buffer tank
P
TMAH+CO3+PR
P
TMAH
Concentration Meter B32
Measurement of the concentrations TMAH and CO3 in a concentration management system during the developing process in the FPD industry
PR
APPLICATIONS The Concentration Meter B32 can be used to determine the concentrations of the following three components real-time:
• TMAH (photoresist developer)
• CO3
• Dissolved photoresist (measured by a
third-party technology)
TMAH + CO3 + PR
TECHNICAL DATA
GENERAL SPECIFICATIONS
Process conditions
Max. pressure: 4 bar
Max. temperature: 50°C (122°F)
Wetted materials: Ceramics sensor and PVDF Optional: PFA
Electrical specifications
Power supply: 18 … 32 VDC, 8 Watt Optional: Power supply/converter for 90 … 240 VAC
Communication: Modbus RTU via RS232 protocol to DCS 4-20 mA input for third-party UV meter
Data logging: via USB memory stick
Ambient conditions
Ambient temperature:
5 … 60 °C (41…140°F)
Humidity: < 95% at 40°C (noncondensing)
Dimensions and weights
Weight: Approx. 6,9 kg
Housing materials: POM / Stainless steel
Housing dimensions: 292 (L) x 229 (W) x 141,5 mm (H)
Process connection: PVDF Flexible Tube Connector ⌀ 12x10 mm. Other sizes on request.
PERFORMANCE SPECIFICATIONS
Method:
Ultrasonic sound velocity Inductive electrical conductivity Temperature (input/connection for UV meter)
Range process temperature:
5 … 50 °C (41…122°F)
Readings: Concentration (wt%), Sound velocity (m/s), Conductivity (mS/cm), Temperature (°C)
Accuracy: Up to +/- 0.0001 wt% (= 1 ppm)
Decay time: < 1 to 60 s (adjustable)
Display: Monochrome display with RGB backlight
Operation: Capacitive touch buttons, Modbus, Computer.
CONCENTRATION METER
© 2019 Rhosonics | Specifications are subject to change without notice.
Input 4-20 mA (UV meter)
Liquid in
Liquid out
RS232 / Modbus RTU
MEASURING BEYOND LIMITS
Rhosonics is based in the Netherlands in Putten.
We design, produce and supply state-of-the-art
measuring instruments for virtually any industry.
The company cooperates with partners
worldwide to offer the best technology
solutions. We use craftmanship, capability and
creativity to create measurements beyond limits.
CONTACT US
We proudly meet the requirements
for the ISO9001 standard since 2010.
We work with a global network of specialized distributors. Please check our website for distributors in your specific region.
About us
Rhosonics Hoge Eng West 30, 3882 TR Putten, NL +31 341 – 37 00 73 [email protected] www.rhosonics.com
Distributor:
©2019 RHOSONICS ∙ ALL RIGHTS RESERVED ∙ BROCHURE ∙ CONCENTRATION METER ∙ B32 ∙ 03/2019
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