colibrysacceleration - colibrys - mems accelerometers

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ColibrysAccelerationTS1000T High Temperature MEMS

ColibrysVIBRATION

ColibrysGYRO

ColibrysACCELERATION

ColibrysCUSTOM

TS1000T – AGENDA

Company Brief

Product Presentation

Architecure

Performances

Tests and Qualification

Long term Stability Qualification

Angle Accuracy

Bench mark with competition

Integration _ ceramic

Support ColibrysGYRO

ColibrysCUSTOM

BORN FROM TECHNOLOGY AND GROWN

TO AN INDUSTRIAL LEADER

Colibrys started in 2001 as a spin-off from a Swiss

technological incubator CSEM and matured as a SAFRAN

Group company from 2013

3 /

ColibrysVIBRATIONMEMS For Low To Medium Frequency

• Vibration Sensor

• Seismic Sensor

ColibrysACCELERATIONReference in Accuracy

• Inertial Sensor

• Inclinometer

ColibrysCUSTOMMEMS Experts At Your Service

• Foundry Services

• Custom Solutions

• Design on Demand

• Test on Demand

4 /

COLIBRYS MEMS CAPACITIVE TECHNOLOGY

ADC

MEMS ASIC

MEMS • Silicon micro-machined sensor chip

• High-end dual side alignment and photolitho

• 3 wafers assembly by silicon fusion bonding (SFB) 3D

Bulk Technology

Mechanics

• Spring-mass system

• Large mass and small gap

• Controlled gas damping

5 /

COLIBRYS PRODUCTS FOR DRILLING

Colibrys has a long heritage for drilling system

More than 60 000 sensors in the «field» from 2000

Name Range T° Package Remarks

MS7000 +/- 2 g, 10g-55°C to

125°CT08

From 2001Historical

metallic package

MS9000+/- 2, 5, 10 g

-55°C to

125°C LCC20From 2008 Versatile

product

TS8000 +/- 2 g -40°C to

125°C

LCC48 New Cost effective

TS9000+/- 1 g

LCC20 New Cost effective

TS1000T+/- 2,5,10 g

-55°C to

150°C(175°C)

LCC20New High Performances

And High-Temp

CONFIDENTIAL / Feb-16

• Logging Survey

• Borehole Survey

• Wireline

• Measuring while drilling


NEW TS1000T -

ACCELEROMETER

1 axis Accel – low size LCC20

Key Features

• 3 Ranges : +/-2, 5 and 10 g

• High temperature capability up to 175°C

• Operating temperature 150°C > 1000hours

• Excellent Bias performances

• Bias residual : < 300ppmFS

• Long term stability : < 1000 ppmFS

• Environnement Resistance

• Shock Survability : 6000g

• Shock endurance : 1500g * 500 times

• New Electonic function

• Self test

• Over Load detection

• Differential Analog Output

• High Resolution < 7 µg

• Low Consumption : <10mW

• Non ITAR

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TS1000T IDEAL ACCELEROMETER FOR DRILLING

Harsh environment exploration

Oil

Gas

Fracking

Mining…

Targeted Applications

MWD (Measurement While Drilling)

Directionnal Drilling

Wireline Logging Suryey

Orientation of borehole logging instruments

WHAT IS INSIDE THE INNOVATIVE TS1000T3 YEARS OF DEVELOPMENT

MEMS SENSOR

• 3D MEMS Bulk-Die

• Optimized for Bias Stability

• Patented Soft Die attach process

for high temperature and

resistance to shock

New High temperature

175°C ASICs

• Improved Noise and Non-linearity

• Analog differential output

• Sef-Test, overload detection

• Temperature sensor for thermal

compensation

LCC20 SUBSTRATELeadless Ceramic Package• 8.9 mm x 8.9 mm

• Finishing : Ni/Au

• Hermetically Sealed

TS1000T INTRODUCTIONFUNCTIONAL BLOCK DIAGRAM

Analogue chain

• High performance analogue

outputs : Acceleration (differential)

& Temperature

New Digital chain

• Digital inputs : Self-test & Reset

• Digital output : POR & Error flag

INITIAL PERFORMANCES Calibration

Frequency

response

Bias

Scale factor

Non linearity

Each product is fully calibrated and

tested before delivery.


Functional tests

• Bias & Scale factor T°

(-40 to 150°C)

coefficient and

residual values

• Temperature sensor

• Self-test function

• Reset function

• POR (Power-On-

Reset) function

• Operating current

consumption

INITIAL PERFORMANCESBIAS AND SF THERMAL PERFORMANCES, TS1002T

CONFIDENTIEL / TS100T

Bias

+/-2 g range

Scale factor

Typ. <150 μg/°C Typ. <600 μg

Typ. 120 ppm/°C Typ. 300 ppm

ASICs Internal temperature

behavior Vs reference sensor

Used for compensation

INITIAL PERFORMANCESMISALIGNMENT AND TEMPERATURE SENSOR – TS1002T


Misalignment Thermal

performances

8 sensors

1st polynomial

INITIAL PERFORMANCES NON LINEARITY- TS1002T

CONFIDENTIAL TS1000T

Non linearity FS (±2g)

at ambient T°CNon linearity ±1g Thermal

performances

Raw

3rd polynomial

8 sensors 8 sensors 8 sensors

INITIAL PERFORMANCES NOISE – ALAN VARIANCE – TS1002T

CONFIDENTIEL TS100T

Output Noise for +/-2g

Typ. : 7 μg/√Hz (0-2kHz)

Alan Variance for +/-2g

In Run Bias : <4 μg (10s)

INITIAL PERFORMANCES BANDWIDTH

Datasheet spec. : >100 Hz (-3dB)

Typ measures from production

@ +/- 5% : 100Hz

@ -3dB : 450Hz

CONFIDENTIAL TS1000T

Frequency response on

150 accelerometers

INITIAL PERFORMANCES THERMAL BEHAVIOR @ 175°C


Initial temperature performance up to 175°C

TS1000T mounted on PCB: 7 sensors (S0 + Sz)

INITIAL PERFORMANCES SUMMARY

CONFIDENTIAL / TS1000T

Parameters Units Value T0 (typical)

Bias temperature coefficient ppmFS/°C 75

Bias residual modeling Error ppmFS 300

SF temperature coefficient ppm/°C 120

SF residual modeling Error ppm 300

Non linearity (IEEE) % FS 0.3

Misalignment mrad 5

Noise [µV/√Hz] 9.4

QUALIFICATION

Sensors Long Term Stability by

ageing and environmental Tests

Pre-qualification

Temperature Robustness

Plan

Shock endurance Plan

Long Term Stability

Qualification plan

T°C storage – burn-in

T°C cycling

Shock

Vibration


ROBUSTNESS PLAN –Proof of concept - Temperature endurance


Evaluation of MEMS performances and Die attach Process, Bonding

Qties units tested : 2 x 24 prototypes

Qualification ageing plan (unpowered)

Temperature cycling: 500 cycles from -55°C to 165°C

Temperature storage: 1’000 hours @ T = 165°C

Test conditions

Initial

Dynamic & Static performance temperature tests

Final

Dynamic & Static performance temperature tests

Leak test, pull test & shear tests

Results

100% of the parts are functional after ageing plan at 165°C.

No glue degradation and all parts remain fully hermetic (glass frit)

Leak, pull and shear test are conform to specification.

ROBUSTNESS PLAN – HIGH TEMPERATURE PROOF OF CONCEPT – SHOCK ENDURANCE

Conditions : 500 shocks at 1’500g / 200µs (@ ambient T°C)

Control of amplitude and pulse with Reference accelerometer

Validation

Qties: 12 accelerometers (3 ranges), Mounted on PCB

“Live” monitoring of the accelerometer during each shock (OUTP, OUTN, VDD,

ERR,…)

Validation of the self test every 20 shocks

All parts survive the shock test campaign

Overload activated during shock

Output valid after shock


LONG TERM STABILITY QUALIFICATION PLAN


Step 1 : Initial full performances sensors measurement Thermal behavior (raw and residual values), Noise, Allan variance ,Warm up Performance evaluation over 3 temperature cycles -40 to 150°C . Hysteresis

Step 2 : Ageing and environmental qualification Plan

Temperature tests (sensors powered)

Burn-in 500 hours @ 150°C

60 x T°C cycles -45°C to 150°C (3°C/min )

2 cycles : -55°C to 175°C, (3°C/min )

Burn-in : 48 h @ 175°C ageing

Shock tests (sensors powered)

100g / 2ms / 12’000 shocks @130°C

Vibration (sensors powered)

20g RMS, 10Hz – 2’000Hz, 30min (3 axis) @ 130°C

Step3 : Final measurement and Long Term Stability datas

Sensors Full performance thermal measurement (Bias, Scale factor, Noise, Linearity) after all

ageing and environmental tests

LONG TERM STABILITY QUALIFICATIONOUTCOMES : BIAS AND SCALE FACTOR


Bias and Scale factor residual modeling error evolution in ppmFS

according to qualification plan

SCALE FACTOR - LTS BIAS - LTS

LONG TERM STABILITY QUALIFICATION

OUTCOMES NON LINEARITY (K2, K3), MISALIGNMENT

Non linearity (K2-K3), Misalignment, Cross axis error evolution according

to qualification plan

CONFIDENTIAL / 21.1.2015 / Colibrys Strategic Map: Technology

K2 - NL K3 - NL

Misalignement Cross-axis sensitivity

LONG TERM STABILITY QUALIFICATIONOUTCOMES : SUMMARY

Status after ageing and environmental tests:

Powered burn-in 500 hours @150°C, 48h storage @ 175°C / 60 temperature cycles -

40 to 150°C / 12’000 shocks @ 130°C - 100g, 2ms / vibration 20 grms @ 130°C 30

min per axis


Parameters Units Value T0 After Ageing

Spec Measure Spec Measure

Bias residual ppm FS 300 200 1000 800

Non Linearity % FS 0.3 0.2 1 0.5

SF Residual ppm 300 200 1000 600

Misalignenent mrad 5 2 10 4

PRODUCT SPECIFICATIONSSUMMARY

CONFIDENTIEL / DR2 TS100T_150

Range Unit ±2g ±5 g ±10 g

Bias residual modeling error [mg] 0.6 1.5 3

Bias Long term residual modeling error

stability

[mg] 2 5 10

Scale Factor mg/V 1350 540 275

Scale Factor Residual modeling error [ppm] 300

Noise [µg/√Hz] 7 17 34

Bandwidth (-3db) [Hz] >100

Non -Linearity (IEEE Norm) [%] Typ < 0.3

Consumption @ 3.3V [mW] 10

Dimension [mm3] 9 x 9 x 3.5

Operating temperature [°C] -40 to 150 > 1000 hours

Intermittent temperature [°C] Up to 175 (intermittent), around 50-75 hours

Shock in temperature [g] 100 , 2 ms (12’000 times at 130°C)

Shock Survival [g] 6000 , 0,2 ms operating

Shock Endurance [g] 1500, 0.2ms ( 500 times)

Misalignement Mrad <10

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PRODUCT PERFORMANCEBIAS FOCUS- ANGLE ACCURACY

Bias performance (over full temp range -40 to 150°C)

CONFIDENTIEL / TS100T_150

Range Unit ±2g ±5 g ±10 g

Bias residual error [mg] 0.6 1.5 3

Long term bias residual

error stability

[mg] 2 4.5 9

Angle (°) accuracy [°] 0.037 0.09 0.17

Long Term Angle (°)

Stability

[°] 0.11 0.29 0.57

Resolution (1Hz) [µg] 7 17.5 35

Angle (°) accuracy for small measure angle (+/-10°)

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PRODUCT PERFORMANCE

GLOBAL ANGLE ACCURACY

3rd order compensation Model

TS1002T Angular (°) Accuracy < +/-0.05 ° typ. over -40 to 150°C including

all parameters : Bias- SF- NL- Misalignement, cross coupling error .


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TS1002T VS MS9002.D PERFORMANCE

Temperature MAX 175 °C

Bias temperature coef 0.15mg/°C max

SF temperature coef 120ppm/°C

Bias long term stability 1.8mg max

SF long term stability 1000ppm typ

Non linearity 0.5 %

Noise 7 ug/sqrt(Hz) rms

Reference range 2 g

MS9002.D

TS1002TA


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TS1000T A NEW REFERENCE FOR HT MEMS


Bias temperature coef0.375 mg/°C max

SF temperature coef 120ppm/°C

Bias long term stability 4.5mg max 1000h

SF long term stability 1000ppm max

Non linearity 0.5 %

Noise 17.5 ug/sqrt(Hz) rms

Reference range 5g

MEMS A

TS1005TA


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TS1000T A NEW REFERENCE FOR HT MEMS

MEMS 125°C, 175°C and Quartz



Bias temperature coef 0.2 mg/°Cmax

Bias long term stability 2.5 mgmax

SF temperature coef 120 ppm/°CSF long term stability 1000 ppm

typ

Non linearity 0.05 %

Noise 13.5 ug/sqrt(Hz) rms

Reference range 5 gMEMS A

MEMS V

TS1005T

MEMS S

QUARTZ J


PACKAGING AND INTEGRATION

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WHY A CERAMIC SUBSTRATE?

Ceramic interface substrate is required for the best product performance

To match the Thermal Coefficient of Expansion (7ppm/°C) of the TS1000T LCC

ceramic package. This reduce the stress on the package and improve stress

homogeneity under temperature cycles.

The ceramic substrate will also give the best long-term stability of the product

Example of the Colibrys ceramic

Substrate (CIB_1000) with decoupling capacitor


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CERAMIC DESIGN OPTIONS

Sales Option CIB1000-1

Ceramic Interface board for system

integration

Available : Q3 -2016

CEB1000-1 Available Now

(for test and evaluation purpose)


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SALES OPTION FOR TS1000T – CIB_1000CERAMIC INTERFACE BOARD - AVAILABLE : Q3 -2016

Rectangular Ceramic interface for system integration – Diam. Compatible

with Quartz round diam. 28mm Flange.

Advantages :

Speed-up Design-in integration by customers.

Mechanical interface as reference for insuring axis misalignment and proper tightening

2 fixing holes - M3 screws

Features wires connection : metallized hole for wire AWG24 soldering and security loop


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SALES OPTION FOR TS1000T – CIB_1000CERAMIC INTERFACE BOARD - AVAILABLE : Q3 -2016

CIB with populated components and 3 axis exemple integration

36 /

SALES OPTION FOR TS1000T- CIB_1000CERAMIC INTERFACE BOARD CIB

Mechanical Drawing – Compatible with existing “Round flange” Quartz –

Diam 28.64 mm (1.127 inch)

Quartz MEMS colibrys



New Colibrys TS1000TTS1000T Conclusion

Is becoming the best MEMS accelerometer

high temperature in market place with shock

resistance

With TS1002T (2g) we cover MWD

performances requirements and could be an

alternative to Quartz.

Integration with Ceramic board

CIB_1000

Extend range of performance

achievable by MEMs

38 /

COLIBRYS SUPPORT YOU

Field Application Engineers

(FAE)

Answers to your technical

questions on sensors

Help to your testing &

qualification results

analysis

Help for optimal

electronics components

selection

39 /

Datasheet ±2,5,10,g

• Recommended circuit

Technical Note CEB_1000• Design an evaluation board

• Design recommendations

• Convert a differential output into a

single output

• Handling, mounting & soldering

recommendations

Application notes

• Drilling

All on colibrys.com

ALL DOCUMENTATION YOU NEED IN ONE CLICK

http://www.colibrys.com/

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ATP COMPARAISONACCEPTANCE TESTS PROCEDURE- MORE ROBUST

Tests description MS9000 TS1000T Improvement for TS1000T

Frequency Response

Non Linearity IEEE Norm

Bias and Scale factor calibration

Current consumption

Bias & Scale factor T°C

coefficient

MS9000.D : -40 to 20 °C - 3 positions

TS1000T : -40 to 150°C - 8 positions

Bias & Scale-factor thermal

residual model

100 % parts

Temperature sensor

Self-test function

Reset function

POR (Power-On-Reset) function

Leak test (fine and Gross)


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LONG TERM STABILITY PLAN COMPARISON

Tests description MS9000 TS1002T Improvement for

TS1000T

Repeat Test 3 times. All thermal model

Measurement mode @ 20°C, Bias (So) All Parameters, Full Temp

Range

Bias/SF/Linerarity/KP Thermal Residual

Temperature Burn-in 20°C 50 h

-55°C - 72h

+80°C - 240 h

150°C - 500h

175°C – 48h

Powered

Temperature cycling 10 cycles -40 to 125°C

15 cycles -55 to 85°C

HARASS



Powered

Shocks limit 1000g 1 axis 6000g 1 axis

Shocks in temperature NA 100 g @ 130°C *12 000 2000 times per axis (6 axis)

Vibration 20 g rms @ 20°C 20 G rms @ 130°C In Temperature

Repetitive Shocks NA 500 * 1500 g 500 times

Self-test function in temperature

Reset function in Temperature

POR (Power-On-Reset) function

in temperature


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