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Silicon Substrate

Add nitride

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Silicon Substrate

Add Poly0

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Silicon Substrate

Patterning through1st level mask (Poly0)using Photolithography

PhotoresistPatterned Photoresist

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Silicon Substrate

Patterned Photoresist

Removal of Unwanted Poly0using Reactive Ion Etching

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Silicon Substrate

1st Oxide Depositionusing LPCVD

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Silicon Substrate

Patterning through2nd level mask (Dimple)using Photolithography...

Photoresist

and Deep RIE

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Silicon Substrate

Patterning through3rd level mask (Anchor)using Photolithography

Photoresist

and Deep RIE

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Silicon Substrate

Blanket un-doped polysilicondeposition(Poly1) using LPCVD...

followed by PSG depositionand annealing

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Silicon Substrate

Patterning through 4th level mask (Poly1)

using Photolithography...

Photoresist

and Deep RIE

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Deposition of 2nd Oxide Layer

Silicon Substrate

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Patterning through 5th level mask using photolithography

and deep RIE

Silicon Substrate

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Patterning through 6th level mask using photolithography

and deep RIE

Silicon Substrate

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Deposition of undoped polysilicon,

Silicon Substrate

followed by PSG hardmask layer,

then anneal

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Patterning through 7th level mask using photolithography

and deep RIE

Silicon Substrate

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Patterning through 8th level mask using photolithography and liftoff,

followed by removal of unwantedresist and metal in solvent bath

Silicon Substrate

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Release of structures using HF

Silicon Substrate