buying a peald reactor for tan deposition for aalto university buying a peald reactor for tan...
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Buying a PEALD reactor for TaN depositionBuying a PEALD reactor for TaN deposition
for Aalto University for Aalto University
9.3.2010
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Outline
• TaN
• Market research
• Supplier
• Budget
• On-site arrangements
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Steps of the process
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Tantalum Nitride
• Applications– Diffusion barrier layers– Gate electrodes– Passivation layers– Protective coatings
• Deposition (ALD vs. PEALD)– Lower resistivity– Higher density– Higher purity– Safety
• Properties– Purity– Density– Resistivity– Stability– Adhesion
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Oxford Instruments• Oxford Instruments
is a global company operating since 1959 with offices and manufacturing sites in over 25 locations.
• Oxford Instruments Head Office Tubney Woods, Abingdon, Oxfordshire, OX13 5QX, UK.
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Picosun• Picosun is an
international equipment manufacturer with a world-wide sales and service organization.
• Has continuously designed ALD systems since 1975.
• Headquarter:• Picosun Oy
Tietotie 3FI-02150 EspooFinland
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Beneq
• Beneq was established in May 2005
• Activity is focused on equipment and technology for functional coatings
• Main office: Beneq OyP.O. Box 262FI-01511 VantaaFinland
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Supplier: Beneq Oy
• Close partnership• Long experience with their equipement in our clean room• Our old ALDs don’t have a standard PEALD option• Easy communication• Easy delivery = lower costs
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Beneq TFS 200 for research
• Direct and remote PEALD• Growth of various films possible• Price 303,600 € for TaN growth
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Budget
• TFS 200 system for TaN growth: 303,600 €• Vacuum pump, other appliances and installation costs:
30 k€• Additional sources: 6900 – 18700 € each• Operating costs: 20 k€ / year
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On-site arrangements
delivery
installation
testing
trainings
TaN processing
HAPPY RESEARCHER