bruce mayer, pe dir. system engineering 17oct02
DESCRIPTION
Engr/Math/Phys 25. 3x00 XY-Stage Transit/Settling Time. Bruce Mayer, PE Dir. System Engineering 17Oct02. Effecting Planer Motion. An XY Stage. Executive Summary. Test Procedure Attach Accelerometer to 3xxx Stage Move Stage in Short, Medium, Long Runs - PowerPoint PPT PresentationTRANSCRIPT
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt1
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
Bruce Mayer, PEDir. System Engineering
17Oct02
3x00 XY-StageTransit/Settling Time
Engr/Math/Phys 25
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt2
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
Effecting Planer Motion
An XYStage
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt3
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
Executive Summary Test Procedure
• Attach Accelerometer to 3xxx Stage• Move Stage in Short, Medium, Long Runs• Record Accelerometer OutPut With Oscope
Estimated SETTLING TIME: <15ms Olympus Stage Transit-Time Model
mS5.46mmmS37.4 dTt• d Travel Distance in mm • Tt Transit Time in mS
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt4
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
Goals & Logistics
Goals → For 3xxx XY-Stage Determine• Typical AntiVibration-Table Settling Time• Model: Transit-Time vs. Transit-Distance
Logistics• Test Date = 15-Oct-2002• Experimenters = B. Mayer, CEE• Test System = YYY-3xxx
– Hi-Accuracy XY-Stage– Mechanical (i.e., spring-based)
AntiVibration Table
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt5
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
Test Design Attach Accelerometer to XY-Stage Measure Accelerometer Output w/ Oscope Program System for Die Jumps on 200mm
wafer with KLARRF Map Die Patterns• X-Pitch = 7.8408280000e+03 µm (7.8408 mm)• Y-Pitch = 1.4138693000e+04 µm (14.1387 mm)
Die Jumps: L↔R, T↔B, UL↔LR, UR↔LL• Full Cross-Wafer (long) Moves• 4-Die Moves• Single-Die Moves
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt6
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
AcceleroMeter Mounting
Wafer & Chuck
OTA-3xxxStage
Major Axis = Z
Omega ACC-102 Accelerometer(100 mV/g)
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt7
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
Instrumentation
Fluke-199 200 MHz ScopeMeter
Omega ACC-PS1AcceleroMeterPower Supply
Cables To/FromAcceleroMeter
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt8
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
Stage-Move Profiles – 200mm WaferLEGEND
LONG MOVE4-DIE MOVESINGLE-DIE MOVE
174.4 mm
12.7mm50.9 mm
AVG. DISTANCE
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt9
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
Results & Analysis - Plots on Next Slides
AntiVibe Table Settling Time 15ms• Time Beyond Motor-Stop• S-Curve Accel & Decel Improves Settling
Time mS5.46mmmS37.4 dTt Transit-Time Model Determined by
Linear-Regression:– d Travel Distance in mm – Tt Transit Time in mS
• Full Speed = 1/[4.37 mS/mm] = 229 mm/S• Very-Short Move Time Const 47 mS
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt10
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
Results & Analysiscont.1
Max Z-Acceleration = 5.92g Y-Axis “Rattles” about 4-TIMES More
than the X-Axis• Suggests inquiry into the source of the
added Settling Time
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt11
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
OTA-3220 Stage Transit-Time Test • Oct02
t = 4.3725d + 46.494
R2 = 0.9871
0
100
200
300
400
500
600
700
800
900
0 20 40 60 80 100 120 140 160 180
Stage Travel Distance (mm)
Sta
ge
Tra
ve
l Tim
e (
mS
)
Travel-Time (mS)
Linear (Travel-Time (mS))
file = OTA3200_Stage-Settling_Time_0210.XLS
Velocity/Slope = 229 mm/S
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt12
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
OTA-3220 Stage Settling • Long +X Move
-125
-100
-75
-50
-25
0
25
50
75
100
125
150
-0.4 -0.2 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6
Time (s)
Ac
ce
lero
Me
ter
Ou
tpu
t (m
Vd
c)
Vlo (Vdc)
Vhi (Vdc)
file = OTA3200_Stage-Settling_Time_0210.XLS
Ramp Up/Down
~ConstantVelocity
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt13
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
OTA-3220 Stage Settling • Single-Die UR-Diag Move
-350
-300
-250
-200
-150
-100
-50
0
50
100
150
200
250
300
350
400
-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0.16
Time (s)
Ac
ce
lero
Me
ter
Ou
tpu
t (m
Vd
c)
Vlo (Vdc)
Vhi (Vdc)
file = OTA3200_Stage-Settling_Time_0210.XLS
Ramps Only
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt14
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
OTA-3220 Stage Settling • Single-Die +y Move
-250
-200
-150
-100
-50
0
50
100
150
200
250
-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0.16
Time (s)
Ac
ce
lero
Me
ter
Ou
tpu
t (m
Vd
c)
Vlo (Vdc)Vhi (Vdc)Lt BoundaryRt boundary
file = OTA3200_Stage-Settling_Time_0210.XLS
Se
ttling
time
= ~
12
.8m
s
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt15
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
OTA-3220 Stage Settling • Single-Die +y Move
-200
-150
-100
-50
0
50
100
150
200
0.09 0.10 0.11 0.12 0.13 0.14
Time (s)
Ac
ce
lero
Me
ter
Ou
tpu
t (m
Vd
c)
Vlo (Vdc)Vhi (Vdc)Lt BoundaryRt boundary
file = OTA3200_Stage-Settling_Time_0210.XLS
Settling time = ~12.8ms
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt16
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
OTA-3220 Stage Settling • Single-Die DIAG-LR Move
-250
-200
-150
-100
-50
0
50
100
150
200
250
-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0.16
Time (s)
Ac
ce
lero
Me
ter
Ou
tpu
t (m
Vd
c)
Vlo (Vdc)Vhi (Vdc)Lt BoundaryRt boundary
file = OTA3200_Stage-Settling_Time_0210.XLS
Se
ttling
time
= ~
14
.4m
s
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt17
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
OTA-3220 Stage Settling • Single-Die DIAG-LR Move
-80
-60
-40
-20
0
20
40
60
80
0.110 0.115 0.120 0.125 0.130 0.135 0.140
Time (s)
Ac
ce
lero
Me
ter
Ou
tpu
t (m
Vd
c)
Vlo (Vdc)Vhi (Vdc)Lt BoundaryRt boundary
file = OTA3200_Stage-Settling_Time_0210.XLS
Settling time = ~14.4
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt18
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
OTA-3220 Stage Settling • 4-Die Moves
-600
-500
-400
-300
-200
-100
0
100
200
300
400
500
600
-0.10 -0.05 0.00 0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40
Time (s)
Ac
ce
lero
Me
ter
Ou
tpu
t (m
Vd
c)
4D +x Vlo 4D +x Vhi 4D -y Vlo
4D -y Vhi 4D LL=>UR Vlo 4D LL=>UR Vhi
file = OTA3200_Stage-Settling_Time_0210.XLS
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt19
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
All Done for the COURSE
See You in Fall 13
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt20
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
All Done for Today
An XYStage
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt21
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
Bruce Mayer, PELicensed Electrical & Mechanical Engineer
Engr/Math/Physics 25
Appendix
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt22
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
Bruce Mayer, PEDir. System Engineering
17Oct02
Settling TimeAPPENDIX
Engr/Math/Physics 25
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt23
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
AcceleroMeter Instrumentation
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt24
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
AcceleroMeter Specifications
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[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt25
Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods
KLARFF Map DetailsFileVersion 1 1;
FileTimestamp 08-22-02 13:33:54;
InspectionStationID "NONE" "BITMAP" "ORB102";
SampleType WAFER;
ResultTimestamp 08-22-02 10:14:55;
LotID "QT96B2815340_3";
SampleSize 1 200;
SetupID "T96B_UP" 05-08-02 07:02:28;
StepID "RTP_ANNEAL_2";
SampleOrientationMarkType NOTCH;
OrientationMarkLocation UP;
DiePitch 7.8408280000e+03 1.4138693000e+04;
DieOrigin 0.0000000000e+00 0.0000000000e+00;
WaferID "01";
Slot 1;
SampleCenterLocation 4.3974690000e+03 7.8404710000e+03;