Atmospheric PlasmaAtmospheric PlasmaAlternative for Metal DegreasingAlternative for Metal Degreasing

Commonwealth of Massachusetts

Office ofTechnical Assistanceand Technology (OTA)

617.626.1060

www.mass.gov/envir/ota

DevalPatrickGovernor

Tim MurrayLt. Governor

Ian BowlesSecretary

Paul RichardDirector

What is Plasma?What is Plasma?

Fourth state of matterFourth state of matter Gas-likeGas-like Consists of neutral atoms/molecules, ions, Consists of neutral atoms/molecules, ions,

and electronsand electrons High energy, highly reactive substanceHigh energy, highly reactive substance

Electrons have 10,000 K worth of energyElectrons have 10,000 K worth of energy Activates surfacesActivates surfaces

Image: http://discovery.nasa.gov/genesis.html

Plasma for Metal Treatment Plasma for Metal Treatment

High Temperature Arc Plasma (up to 16000High Temperature Arc Plasma (up to 16000ººC)C)

Ceramic DepositionCeramic Deposition

Radio Frequency Induction Coupled Plasmas Radio Frequency Induction Coupled Plasmas (5000(5000ººC) Surface treatments for C) Surface treatments for semiconductorssemiconductors

Electrodeless Atmospheric Microwave PlasmasElectrodeless Atmospheric Microwave Plasmas

EAMPEAMP

AtmosphericAtmosphericPlasmaPlasma

Non-equilibrium plasmaNon-equilibrium plasma Electrons at 10-20,000 Electrons at 10-20,000 ºCºC Ions, molecules at 60-80 Ions, molecules at 60-80 ºCºC

Relatively uniform energy distributionRelatively uniform energy distribution Does not require special vacuum Does not require special vacuum

chambers like low pressure plasmachambers like low pressure plasma

≠ ≠ The SunThe Sun

Image: http://www.seas.ucla.edu/prosurf/plasmapro.htm

Atmospheric PlasmaAtmospheric Plasma

Use microwave energy to create gas Use microwave energy to create gas plasma streams at atmospheric pressure plasma streams at atmospheric pressure and moderate temperature (70-200and moderate temperature (70-200ººC)C)

10-20% conversion to active ion and 10-20% conversion to active ion and radical speciesradical species

Flow gas through an orifice to create a Flow gas through an orifice to create a plasma jet or through into an application plasma jet or through into an application chamberchamber

A microwave plasma torch and itsA microwave plasma torch and itsapplicationsapplications

H S Uhm, Y C Hong and D H ShinH S Uhm, Y C Hong and D H ShinDepartment of Molecular Science and Technology, Ajou University, San 5 Wonchon-Dong,Department of Molecular Science and Technology, Ajou University, San 5 Wonchon-Dong,

Youngtong-Gu, Suwon 443-749, KoreaYoungtong-Gu, Suwon 443-749, Korea

Plasma JetPlasma Jet

APNEP ResearchAPNEP ResearchAtmospheric Pressure Non-Equilibrium PlasmasAtmospheric Pressure Non-Equilibrium Plasmas

ELIMINATION OF ORGANIC SOLVENTS ELIMINATION OF ORGANIC SOLVENTS FOR DEGREASING OF METAL FOR DEGREASING OF METAL COMPONENTS BY USE OF A NOVEL COMPONENTS BY USE OF A NOVEL MICROWAVE PLASMAMICROWAVE PLASMA

P. Aguirre, B. San Pedro, N. Wright, W. Hopkins, Global Symposium P. Aguirre, B. San Pedro, N. Wright, W. Hopkins, Global Symposium On Recycling, Waste Treatment and Clean Technology ’04. Madrid.On Recycling, Waste Treatment and Clean Technology ’04. Madrid.

Jointly sponsored by INASMET, Jointly sponsored by INASMET, C-Tech InnovationC-Tech Innovation, Phoenix , Phoenix Scientific IndustriesScientific Industries

APNEP ResearchAPNEP Research

Examined the effects of Atmospheric Non Examined the effects of Atmospheric Non Equilibrium Plasmas of Oxygen, Nitrogen, Equilibrium Plasmas of Oxygen, Nitrogen, Argon, and Mixtures.Argon, and Mixtures.

Treated standard industrial components Treated standard industrial components contaminated with commercial oils and contaminated with commercial oils and lubricants at loadings of 1-5 g/m2lubricants at loadings of 1-5 g/m2

APNEP ResearchAPNEP Research

Varied plasma flow rate, microwave output Varied plasma flow rate, microwave output power, and exposure duration. Plasma jet power, and exposure duration. Plasma jet temperatures averaged 200temperatures averaged 200ººC.C.

Achieved cleanliness equivalent to TCE vapor Achieved cleanliness equivalent to TCE vapor degreasing with an emission profile that met EU degreasing with an emission profile that met EU Industrial limits. Industrial limits.

Claimed 98-100% removal of oils.Claimed 98-100% removal of oils. Paper left out key detail to determine exact Paper left out key detail to determine exact

operation costs.operation costs. Nitrogen plasmas produce NONitrogen plasmas produce NOXX, leading the , leading the

focus to oxygen focus to oxygen

APNEP ResultsAPNEP Results

Elevated gas temperatures -10% evaporation captured Elevated gas temperatures -10% evaporation captured with coalescing filters.with coalescing filters.

Emission profile for Oxygen Plasma (10% radicalization) Emission profile for Oxygen Plasma (10% radicalization)

on components at 5g/m2 contamination levelon components at 5g/m2 contamination level

TOC (mg/m3)TOC (mg/m3)

C1-C5C1-C5

CO (ppm)CO (ppm) NOX (ppm)NOX (ppm) SO2 (ppm)SO2 (ppm)

TEMPERING OILTEMPERING OIL 2323 5353 3232 33

BENDING OILBENDING OIL 3030 4141 2828 33

STAMPING LUBESTAMPING LUBE 2121 3838 4242 22

CUTTING OILCUTTING OIL 2121 4545 2323 1313ENVIRONMENTAL ENVIRONMENTAL LIMITS ED 1999/3LIMITS ED 1999/3 50-15050-150 170-250170-250 370370 175175

For immediate release - 10 November 2004C-Tech Lands DTI Grant for APNEP Plasma DevelopmentC-Tech Innovation Limited has successfully obtained funding from the DTI to furtherdevelop its unique, Atmospheric Pressure, Non-Equilibrium Plasma (APNEP), which hasenormous potential in a wide variety of industrial and environmental applications.C-Tech has been awarded a Research and Development grant (formerly SMART award)for the ongoing development of the APNEP plasma. The DTI grants are provided to helpsmall and medium-sized businesses research and develop technologically innovativeproducts and processes, to generate new scientific or technical knowledge that will be…

Commercialization 06/07Commercialization 06/07

Several commercial lab systems Several commercial lab systems

One (?) industrial system supplier in USOne (?) industrial system supplier in US

Plasma-Preen Cleaner/Etcher (Patent Pending)Plasma-Preen Cleaner/Etcher (Patent Pending)

Water-Cooled*Water-Cooled*8" x 6" x 2"100-550W 9505-03-220 $ 5,700.00 8" x 6" x 2"100-550W 9505-03-220 $ 5,700.00

9" x 7" x 3"100-700W 9505-20-220 $ 6,290.009" x 7" x 3"100-700W 9505-20-220 $ 6,290.00

BinConfirm1180045011

Sold for:Sold for: US $189.50 US $189.50 

Auction ended early with Auction ended early with Buy It Now. Buy It Now.

Ended:Ended: Nov-02-06 06:40:11 PSTNov-02-06 06:40:11 PST

Shipping costs:Shipping costs: US $19.70US $19.70UPS GroundUPS GroundService to Service to 02067, United States02067, United States(more (more services)services)CalculateCalculate

Ships to:Ships to: WorldwideWorldwide

Item location:Item location: Niagara Falls, USA or Niagara Falls, USA or Canada, United Canada, United StatesStates

History:History: 1 bid1 bid

Buyer:Buyer: bcnu2bcnu2 (( 293293     )   )

Diener ElectronicsDiener Electronics

German concern with sales office in German concern with sales office in Reading, PAReading, PA

Offers standard and custom systems for Offers standard and custom systems for RF and Microwave plasma treatment RF and Microwave plasma treatment systemssystems

Utilize 40KHz generators to minimize Utilize 40KHz generators to minimize emissions.emissions.

Established marketing, several industrial Established marketing, several industrial placements in US at present.placements in US at present.

Diener Economic ExampleDiener Economic Example

22 liter chamber turn-key system- $27,25022 liter chamber turn-key system- $27,250 40KHz/300W generator40KHz/300W generator One hour treatment with oxygen plasmaOne hour treatment with oxygen plasma Operation cost on “small industrial parts” Operation cost on “small industrial parts”

of “3-5 cents per piece”. of “3-5 cents per piece”.

Technical and Economic HurdlesTechnical and Economic Hurdles

Technology acceptanceTechnology acceptance System capital costSystem capital cost Equipment compatibility with current Equipment compatibility with current

processing linesprocessing lines Throughput limitations; chamber volume, Throughput limitations; chamber volume,

exposure duration.exposure duration. QC and MIL-SPEC requirementsQC and MIL-SPEC requirements Batch consistencyBatch consistency

OPPORTUNITIES for OPPORTUNITIES for IMPLEMENTATIONIMPLEMENTATION

Combination cleaning/degreasing and Combination cleaning/degreasing and sterilization; medical devices.sterilization; medical devices.

Displacing infrequently used vapor Displacing infrequently used vapor degreasers. Relieve regulatory burdens.degreasers. Relieve regulatory burdens.

Low throughput/high finish parts; aviation.Low throughput/high finish parts; aviation. Energy conservationEnergy conservation Solvent use reductionSolvent use reduction

What Can It Do for Textiles and What Can It Do for Textiles and Adhesives ?Adhesives ?

Surface modification and functionalitySurface modification and functionality Hydrophobicity Hydrophobicity Stain resistance Stain resistance Oleophobicity Oleophobicity Hydrophilicity Hydrophilicity Flame retardantsFlame retardants Antimicrobials Antimicrobials Printability of polypropylene/polyesterPrintability of polypropylene/polyester

Pollution preventionPollution prevention Uses significantly lower quantities of chemicalsUses significantly lower quantities of chemicals Plasma treatments can enable conversion from Plasma treatments can enable conversion from

solvents to aqueous coatingssolvents to aqueous coatings

http://enerconind.com/treating/eLibrary/multimedia/plasmaOnly.swf

Can Plasma Be Used to Make a Can Plasma Be Used to Make a Light Saber ?Light Saber ?

At this point maybe a Light DaggerAt this point maybe a Light Dagger

Gerry PodlisnyGerry PodlisnyProcess Engineer/Environmental AnalystProcess Engineer/Environmental Analyst

Mass OTAMass OTAGerald.Podlisny@state.ma.usGerald.Podlisny@state.ma.us