UIT - Faculty of Computer Engineering IC fabrication techniques

CE404, @2015

ASSIGNMENT 1

Ass 1.1:

Do these exercises:

- Exercises 1.3, 1.12, 1.14, 2.1, 2.5, 2.7, 2.8 in Richard C. Jaeger’s book: “Introduction to Microelectronic

Fabrication, 2nd Edition”.

- Exercises 1, 2, 3, Chapter 11 (Etching), Sami Fransilla’s book: “Introduction to Microfabrication”.

Ass 1.2:

- Why use polysilicon as gate in MOS transistor instead of metal?

- Method to manufacture polysilicon (or: polysilicon production process)?

************* Dealine to hand in Assigment 1: 12:00 am, 9/10/2015 **************************