an integrated capacitive array biosensor for the selective and real-time detection of whole...
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An Integrated Capacitive Array Biosensor for the Selective and
Real-Time Detection of Whole Bacterial Cells
Numa Couniot, Laurent A. Francis, D. Flandre
4th International Symposium on Sensor Science July 13-15, 2015, Basel
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Problem definition and Challenges
Matrix Detec+on levels In 27 nL
Blood 1 bacteria/mL 1 bacterium (p = 0.003%)
Breast milk 103 bacteria/mL 1 bacterium (p = 3%)
Urine samples 105 bacteria/mL 3 bacteria
• How can we detect such a little amount of bacteria?
For a 300 µm x 300 µm sensor in a 300 µm-thick channel
• Selectivity?
• How to deal with different solutions?
1 Staphylococcus aureus/mL must be detected among:
• 109 red blood cells/mL • Possibly other non-pathogen bacteria
Known problem for electronic biosensors (FET, impedance, etc.): à the screening from the surface properties (e.g. electrical double layer) at high salinity
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Problem definition and Challenges
Electrode Double Layer (DL)
~ 1-30 nm
Bacterial cell ~ 1 µm Electrolyte
• How to deal with different type of solutions/electrolytes?
Electrical potential
- - - - - - - - - + + + + + + + + + + + + + - - - - - - - -
- - - + + +
Strongly depend on the ionic strength!!!
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Problem definition and Challenges
Electrode Double Layer (DL)
~ 1-30 nm
Bacterial cell ~ 1 µm Electrolyte
Surface effects à Low sensitivity
Volume effects à High sensitivity
Go to High Frequency!
1 bact. = ~70 aF
• How to deal with different type of solutions/electrolytes?
Strongly depend on the ionic strength!!!
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1 µm
Bacteria
Transducer
Selective agent
Readout interface
Staphylococcus epidermidis
à Similar to S. aureus à Non-pathogenic
Interdigitated microelectrodes à High active area à Similar size as bacteria à Electric field in surface
Lysostaphin à Selectively destroys
bacterial cell wall à Extendable to most
bacteria with lysins
CMOS à Low-cost à Miniaturization à System integration
BIOLOGY
SENSOR
BIO/CHEM.
ELECTRONICS
CMOS capacitive array biosensor
Our approach
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Electrolyte capacitance monitoring
Interdigitated microelectrodes
(IDE)
Integrated pixels
Integrated oscillator
Electrokinetic effects
Four steps to get to bacterium detection
1
2 3
4
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Interdigitated microelectrodes
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Interdigitated microelectrodes (IDE)
[Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015]
TOP VIEW CROSS SECTION
+50 mV
-50 mV
+I0
-I0
+50 mV
-50 mV
Cins Rsol Cins
Csol
ALD-alumina passivated electrodes
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Time [min]
Y/ω
[pF]
# Ba
cter
ia [#
/mm
2 ] Optical
Electrical
[Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015]
Real-time monitoring of S. epidermidis
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No background noise Low-cost Robust to wash
Advantages:
Selectivity based on lytic enzymes (lysostaphin)
[Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015]
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Destroyed S. epidermidis causes decrease in capacitance
Selectivity means based on lytic enzymes Urine with S. epidermidis (target) and E. faecium (control -)
[Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015]
1. Naked 2. Ef 3. Ef + Se 4. Ef + Se(killed)
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Same number of E. faecium, no impedance shift
[Couniot et al., Biosensors and Bioelectronics, 67, pp. 154-161, 2015]
Selectivity means based on lytic enzymes Urine with E. faecium only (control -)
1. Naked 2. Ef 3. Ef(not killed)
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Selectivity means based on lytic enzymes Reproducibility of the normalized shift
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Integrating electrokinetic effects
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~ 1% of bacteria captured
~ 99% of bacteria lost
~ 1% of bacteria captured
~ 99% of bacteria captured
Trap bacterial cells with electrokinetics
How to decrease the LoD?
FLOW
FLOW
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Macroelectrode For electrokinetic actuation
Capacitive Sensor
+7 V
- 7 V
50 mV
à Generate electrokinetics (EK) effects
Design of the device
[Couniot et al., Lab on chip, submitted, 2015]
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LoD : 3.5.105 CFU/mL in 20 min à 11x better than without EK
AC-Electroosmosis @ 10 kHz
[Couniot et al., Lab on chip, in Press, 2015]
Bacterial incubation
0 20 40 60 803.15
3.2
3 .25
3.3
3 .35
T im e [m in ]||Y
/ω||
[pF] w/ AC-EO
w/o AC-EO
7.10 CFU/mL6
1.6 . 10 CFU/mL7
~ 5
fF/m
in
~ 1 fF/min
PBS 1:1000 PBS 1:1000
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LoD : 105 CFU/mL in 20 min à 38x better than without EK
OFF/ON Steps
0 20 40 60 803.15
3.2
3 .25
3.3
3 .35
3.4
3 .45
3.5
3 .55
T im e [m in ]||Y
/ω||
[pF]
w/ DEP & ET
w/o DEP & ET
Bacterial incubationPBS 1:1000 PBS 1:1000
7.10 CFU/mL6
1.6 . 10 CFU/mL7
Δ1
Δ2
Δ3
Δ4
Δ5
[Couniot et al., Lab on chip, in Press, 2015]
Electrothermal + Dielectrophoresis @ 63 MHz
à Flow-based method to direct bacteria from edge to the sensor center
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VHF Capacitance-to-Frequency converter
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VHF Capacitance-to-Frequency converter
[Couniot et al., IEEE TCAS II, vol. 62, 2, 2015]
Cins
CDL
Cins
CDL
Zbact
Csol
Rsol
Cpar
M5VHF GND
M4
M3
M2
M1 SiO2
CMOS
Al2O3DL
Electrolyte
VIA45
VIA
Si
Bacteria
VHF GND
CplCcyt
RcytCwall
CROSS SECTION
Sensing Part
Electronics
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VHF Capacitance-to-Frequency converter
[Couniot et al., IEEE TCAS II, vol. 62, 2, 2015]
TOP VIEW
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VHF Capacitance-to-Frequency converter
en
Vdd
Vdd Vdd Vdd
CL=10 pF
Five-stage ring oscillator Ten-stage frequency divider
Sub-interdigitated microelectrode arrays (M5)
Vout
fIDE
Five-stage ring oscillator
5 sub-interdigitated electrodes (M5)
Medium capacitance
[Couniot et al., IEEE TCAS II, vol. 62, 2, 2015]
Frequency divider
~ 300 MHz
÷ 1024
~ 300 kHz
OUTPUT
0 0 0 1 1 1 0 1 0 1
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Intrinsic and extrinsic capacitances
A factor 2 of difference despite the same coverage…
f200 µm−1 ∝ 1pF + 0.77*Csol,200 µm( )f100 µm−1 ∝ 0.8pF + 0.77*Csol,100 µm( )
3.5 ± 0.1 pF
1 ± 0.025 pF
The capacitance decreases à Assessed by simulations/models
since cytoplasm dominates @ VHF à εr,cyto ≈ 70 < εr,PBS = 80
Before After
Bacterial sensing in pure PBS
1060
Sens
itivi
ty [%
]
200 μm-sided: exp. #1exp. #2mean
100 μm-sided: exp. #1exp. #2mean
4
8
12
107 108 109
fIDE [Hz]~ 150 MHz
[Couniot et al., IEEE TCAS II, vol. 62, 2, 2015]
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Capacitive biosensor array
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Single bacterial cell
Reduce the sensor size
Bacterial binding
Δ1 Nominal sensor capacitance: 100%
Single bacterial cell
Δ2
[Couniot et al., IEEE TBCAS, in Press, 2015]
How to improve sensitivity & multiplexing?
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Single bacterial cell
Problem: the bacterial cell can
be outside the sensor
Bacterial binding
Δ1 Nominal sensor capacitance: 100%
How to improve sensitivity & multiplexing?
Single bacterial cell
Δ2=0
[Couniot et al., IEEE TBCAS, in Press, 2015]
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Single bacterial cell
Solution: make a sensor array
Bacterial binding
Δ1 Nominal sensor capacitance: 100%
Single bacterial cell
Δ2
[Couniot et al., IEEE TBCAS, in Press, 2015]
How to improve sensitivity & multiplexing?
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System architecture (Top view)
[Couniot et al., IEEE TBCAS, in Press, 2015]
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System architecture (correlated double sampling)
[Couniot et al., IEEE TBCAS, in Press, 2015]
Vdd
Vdd
VddMR
MBUF
MSELCIDE
CD
MC1 MC2
MINIT
Vc1 Vc2
MT
MSHR
Vshr
Vdd
MBUFR
MSELR
MBR
Vselc
CSHR
CLR
MSHS
Vshs
Vdd
MBUFS
MSELS
MBSVselc
CSHS
CLSMB
Vbr
Vbs
Vb
Vsel
Vr
Voutr
Vouts
Pixel(i,j)
ColumnAmplifier(j)
Outputstage
Columnbu
s
Vinit
VIDEVref
Vpix
Vinit
Vinit
VgT
Buffer + Row select.
Charge sharing principle
Subthresh. Gain
Csol
Cins
σsol
Ideal linearity
−50 0 500.12
0.16
0.2
0 .24
0.28
Variation of parameters [%]
VgT
[V]
σsol = 1.8 mS/mCsol = 55.6 fFCins = 500 fFRsol = 7 MΩCDL = 4.5 pF
Csol Rsol
Cins
CDL
CinsCDL
CIDE PIXEL TOP VIEW
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0 10 20 30 40 50−10
−5
0
5
Time [min]
Vou
t[mV
]
13
4
PBS 1:1000w/ bacteria
PBS 1:1000w/o bacteria
2
Pixel (2,7)
Pixel (2,6)
Pixel (2,8)
w/o bacteria w/ bacteria
Real-time monitoring
[Couniot et al., IEEE TBCAS, in Press, 2015]
w/o bacteria
w/ bacteria
Type 1
Type 2
w/o bacteria
w/ bacteria
Type 1
Type 2
*
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w/o bacteria w/ bacteria
[Couniot et al., IEEE TBCAS, in Press, 2015]
Real-time monitoring
*
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[Couniot et al., IEEE TBCAS, in Press, 2015]
Real-time monitoring
0Number of bacteria
Simulation
2 4 6 8 10 120
10
20
30
0
0.23
0.46
0.69
ΔVo
ut [m
V]
ΔC
sol [
fF]
Number of bacteria0
-20
Experimental
#5
ΔVo
ut [m
V]
5 10 15 20
0
20
40
#6
#7
#11#11
#23
#13
#20
#12#9
#10
#3
#8#8
VIDE
Vgnd
VIDE
Vgnd
≠
ΔC ≈ 167 aF ΔC ≈ 38 aF [Couniot et al., Sensors and Actuators B, vol. 189, pp. 43-51, 2013]
VIDE
Vgnd
≠
ΔC ≈ 7 aF
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CMOS capacitive array biosensor
Interdigitated microelectrodes
(IDE)
Integrated pixels
Integrated oscillator
Electrokinetic effects
1
2 3
4
High sensitivity @ high salinity
High sensitivity By bacterial trapping Single Bacteria
Detection
Selectivity
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F.R.S.-‐FNRS Funds D. Bol, J. Mahillon & J-‐L. Gala for their supervision
T. Vanzieleghem & J. Mahillon for their biological exper+se J. Rasson & N. Van-‐Overstraeten benefits for useful discussions
O. Poncelet for ALD deposi+on C.A. Dutu for technical help with PDMS cap micro-‐fabrica+on
D. Spôte for the fabrica+on of the pressure tool UCL WINFAB plaoorm for help with micro-‐fabrica+on
UCL WELCOME plaoorm for help with measurement setup
Thank you for your attention! Questions?
Acknowledgements