CC-1164A

ABC of Vacuum Valves ABC of Vacuum ValvesAn easy-to-follow introduction to CKD's vacuum valves

We support your vacuum control requirement with our wide-ranging lineup.

Applicable vacuum pump (example)

Type of device vs. degree of vacuum

Vacuum Control Device Classification by Application

2

High vacuum

Medium vacuum

Low vacuum

Oil diffusion pumpCryopumpOil diffusion pumpCryopump

PressurePa(abs)

Dry pump(Multistage Roots pump)(Screw pump)(Dry vane pump)

Dry pump(Multistage Roots pump)(Screw pump)(Dry vane pump)

1.3×10-5

1.3×10-1

1.3×102

1.3×105

Thin

film

fo

rmat

ion

Vacu

um

depo

sitio

n

Ele

ctro

n m

icro

scop

e

Met

al

proc

essi

ng

Liqu

id

dega

ssin

g

Vacu

um

dryi

ng

Sucti

on

trans

porta

tion

Vacu

um tu

be

manu

factur

ing

Ana

lyze

r

Turbo molecular pumpTurbo molecular pump

Oil diffusion ejector pumpOil diffusion ejector pumpRoots

pumpRoots pump

Oil ejector pumpOil ejector pump

Vacuum Exhaust System Basic Configuration and CKD Devices

3

[Gas supply]AGD-R

[Instrument protection]AVB/MVB

[ON/OFF valve]AVB

[Leak valve]HVL

[Pressure control]VEC

[Solenoid valve for release to atmosphere]HVB

Vacuum vessel (chamber)

Mainpump

Auxiliary pump

•Can be used in vacuum

•Standard air operated valve with a proven track record

•Wide range of operations from closing to pressure control accommodated with a single unit

•Circuit can be simplified by reducing incidental equipment

*Custom order

•Solenoid vacuum valve with excellent vacuum maintaining capability and durability

•Wide lineup including NW 16 size

•Manual operating types available

•Long service life combined with high durability and adoption of proprietary molded bellows for high reliability

•High cleanliness ensured by bellows structure

•Delay control possible with simple setting

•Effective for preventing entry of oil into piping of pumps

Count on CKD, “the Expert on Vacuum”★Wide lineup

Valve for High Vacuum: AVB**7

4

AVB*17 Series AVB**7 Series (high temperature type)

AVB*47 Series AVB*37 SeriesUnshakable reliability

Overview

Applications ●Semiconductors ●FPDs ●Solar panel ●Other vacuum control circuits

[Prevention of bending]

[Mitigation of impact]

Atmosphere release valve

Position: sideways (horizontal)

Operating air

Vacuum pump

50

100

150

200

250

300

0Times of operation

(10,000 times)

*The CKD's guaranteed value based on the durability test specified by the company standards is 1 million times. For details, see the specification.

Unprecedented service life achieved by special structure with CKD's proprietary molded bellows

[Number of corrugations, thickness and shape]Appropriate number of corrugations, thickness and shape selected by stress analysis.Dedicated design to suit respective bore diameter.

The guide location well thought out and bending of bellows prevented to minimize concentration of stress.

•Actuator end made lightweight.

•Mechanism to reduce the impact stress of valve opening/closing adopted.

CKD guaranteed value

CKD performance value

★Two-stage type with a simple structure also available!　AVB*47 Series

Simple flow channel structure for eliminating problems including dust emission and attachment of products

Simple flow channel structure for eliminating problems including dust emission and attachment of products

■ Durability test circuit

■ Realization of high durability Highlight

☞■ Durability test result

★Horizontal installation★Repetition of changes between

atmospheric and vacuum conditions　Rigorous test

conditions endured

Over 3 million

times

High durability to endure practically over 3 million times of operation!

Custom orderCustom orderCustom order

Wide-ranging Demands Served!

5

We meet your requests.

O ring material options(5) With heater

(2) Large bore diameter

(4) With solenoid valve

(3) Electric/multistage control(1) Manual valve

*Custom order *Custom order *Custom order

MVB SeriesManual valve with a stable seal structure offering the performance of the AVB SeriesBore diameter lineup: NW 16 to 50

Large bore diameter types of NW 80 to 160 availableTwo-stage exhaust and high temperature can be accommodated* NW80 to 100: Catalog “High Purity Gas Control System Component”

NW160: Custom order

EVB Series30-position opening adjustment made possible by electric controlMultistage control realizedBore diameter lineup:NW25/40/50

Solenoid valve for operation directly connected to the valve, realizing space conservation and meeting various piping demands

Heater can be provided to prevent material deposition.*Bore diameter available: NW25 to 63

Various O ring material available according to request* For materials available for replacement, contact our sales representative.

Pressure Control Vacuum Pressure Proportional Control System VEC series

6

Overview

Applications ●Various CVD systems ●Experiments/researches (vacuum pressure control)

The VEC Series is a system designed for controlling vacuum pressure in vacuum chambers of semiconductor manufacturing lines.

Wide-range Wide-range Tight shutoff and unrestricted exhaust control

Closed OpenDuring control (low vacuum)

During control (high vacuum)

*Contact our sales representative for details.

Highlight HighlightWide range of control from low to high vacuum

Diverse exhaust control!!AtmosphereLow vacuum

High vacuum

Cont

rol r

ange

of V

ECCo

ntro

l ran

ge o

f VEC

Tight shutoff

Wide-range control from low to high vacuum realized by a single unit

Control range of butterfly system

● Capability of slow exhaust: effective for prevention of stirring of particles in chambers

● Eliminates the need for a shutoff vacuum valve, contributing to space conservation of equipment

pressure control

Unit/Classification of Vacuum and Pressure Conversion

7

-1.00×105

-160

-360

-560

-660

-759

-0.2

-0.5

-0.7

-0.9

-0.999

10 -6

-760 -1.033

0 0 0

0

1.033

-1.96×10 4

-4.90×10 4

-6.86×10 4

-8.83×10 4

-9.80×10 4

0.8

0.5

0.3

0.1

10 -3

10 -7

10 -3

1.3×10 -5

1.3×10 -1

00

760

600

400

200

100

11.3×102

1×10 5

PaG mmHg

Gauge pressure

kgf/cm 2 Gkgf/cm2(abs)Torr(=mmHg)

Pa(abs)

Absolute pressureClassification

Ultra-high vacuum

High vacuum

Medium vacuum

Low vacuum

MPa Pa bar kgf/cm 2 atm mH2O mHg lbf/in2 (psi)1×10-6

1×10-1

9.80665×10 -2

1.01325×10 -1

9.80665×10 -3

1.3332×10 -1

6.895×10-3

11×105

9.80665×10 4

1.01325×10 5

9.80665×10 3

1.3332×10 5

6.895×103

1×10-5

19.80665×10 -1

1.013259.80665×10 -2

1.33326.895×10-2

1.0197×10 -5

1.01971

1.03321.0000×10 -1

1.35957.031×10-2

9.869×10-6

9.869×10-1

9.678×10-1

19.678×10-2

1.31586.805×10-2

1.0197×10 -4

1.0197×101.0000×101.033×10

11.360×107.031×10-1

7.501×10 -6

7.501×10 -1

7.356×10 -1

7.60×10-1

7.355×10-2

15.171×10-2

1.450×10-4

1.450×101.422×101.470×10

1.4222×10-1

1.934×101

Atmospheric pressure

Absolute vacuum

■ Unit and classification of vacuum

■ Pressure conversion table

2014.4.CAC

RecommendationsWXU MN3E/MN4E Air fiberSaves water piping space.Contributes to quality improvement and space conservation of non-piping systems.

Ideal for air operated valve operation.Valve block width: 10 mm or 7 mmCompact pilot operated solenoid valve manifold

Extra-fine tube with an outer diameter of ø1.8Streamlines cumbersome pipe routing.

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