wafer pre aligner eng - semi-ust.com · 2013-05-14 · wafer pre aligner - wafer size (2inch ~...

Wafer Pre Aligner

Universal Semiconductor TechnologyHead Office-sales and Main Facility-R&D Center908, D-dong, Bun-Dang Techno Park, Yatab-dong 151, Seongnam-city, Gyeonggi-do, Korea (463-070)Tel) +82-31-604-1004 Fax)+82-31-711-6344 e-mail) admin@semi-ust.com

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Wafer Pre Aligner

- Wafer Size (2inch ~ 18inch)- Notch, Flat Wafer, Ring Type, Thin Wafer (50um)- Si, Glass, Film, Sapphire - Compact Size- Fast Alignment (< 3.5sec)- High Performance Accuracy and Repeatability- Easy to use and Install- Ethernet , RS-232 Communication- Auto Detect function of Notch and Flat Type - Si, Glass, Sapphire Type Simultaneous use - Wafer Edge Crack and Broken Detect

Wafer Pre Aligner Feature

Wafer Pre Aligner

Edge Crack Detect

- 2inch ~ 18inch Simultaneous use (CCD Stage Moving Type)- Poor Coating and Cracked wafer support alignment - Crack Point's degree and quantity information output function (max. 500ea)- Covered Tape at Notch point by Laminator support alignment

Easy command and monitoring by HyperTerminal

Wafer Pre Aligner

- Compact Embedded System PC (Window XP OS)- Vision Function and Monitoring- Easy Monitoring and Capture Screen

Wafer Vision Function by CCD

Compact Embedded System

Wafer Pre Aligner

ACE–V Series

ACE–XV Series

ACE–XVL Series

ACE–DXV Series

ACE–P Series

ACE–XP Series

ACE–XPL Series

ACE–S Series

ACE–YV Series

(Model List)

Key Features- Fast alignment- High performance accuracy- High performance repeatability- Easy to use and install- Fixed Vacuum Chuck Type- Low-cost Aligner- Output the Align Data to Robot

Model- ACE-V 300N, ACE-V 300NS- ACE-V 200N, ACE-V 200NS- ACE-V 100F, ACE-V 100FS- Option : Sapphire, Glass

ITEM SPECIFICATIONWafer type Ø300 ~ Ø50, Notch, Flat, Si, Film, Sapphire Θ rotation 0.0072 ºNotch alignment accuracy ± < 0.1 ºPositioning time < 3.5 secInterface RS-232, Digital I/OUtility VacuumPower +24VDC

Wafer Pre Aligner (ACE-V Series)

Key Features- Fast alignment- High performance accuracy- High performance repeatability- Easy to use and install- Moving Theta and Y-Axis Chuck Type- Vacuum Chuck Type- Low-cost Aligner- Output the Align Data to Robot

Model- ACE-YV 300N, ACE-YV 300NS- ACE-YV 200N, ACE-YV 200NS- ACE-YV 100F, ACE-YV 100FS- Option : Sapphire, Glass

ITEM SPECIFICATIONWafer type Ø300 ~ Ø50, Notch, Flat, Si, Film, Sapphire Θ rotation 0.0072 ºAxis ϴ , YStage repeatability ± < 3umNotch alignment accuracy ± < 0.1 ºCentering accuracy ± < 20umPositioning time < 3.5 secInterface RS-232, Digital I/OUtility VacuumPower +24VDC

Wafer Pre Aligner (ACE-YV Series)

Key Features- Fast alignment- High performance accuracy- High performance repeatability- Easy to use and install- Moving Three-Axis Vacuum Chuck Type- Output the Align Data to Robot

Model- ACE-XV 300N, ACE-XV 300NS - ACE-XV 200N, ACE-XV 200NS- ACE-XV 100F, ACE-XV 100NS- Option : Sapphire, Glass

ITEM SPECIFICATIONWafer type Ø300 ~ Ø50, Notch, Flat, Si, Film, Sapphire Θ rotation 0.0072 ºAxis ϴ , X, YStage repeatability ± < 3umNotch alignment accuracy ± < 0.1 ºCentering accuracy ± < 20umPositioning time < 3.5 secInterface RS-232, Digital I/OUtility VacuumPower +24VDC

Wafer Pre Aligner (ACE-XV Series)

Key Features- Fast alignment- High performance accuracy- High performance repeatability- Easy to use and install- Moving the X.Y.Z-Axis for Fixed Robot Pan

Model- ACE-XVL 300N, ACE-XVL 300NS- ACE-XVL 200N, ACE-XVL 200NS- ACE-XVL 100F, ACE-XVL 100FS- Option : Sapphire, Glass

ITEM SPECIFICATIONWafer type Ø300 ~ Ø50, Notch, Flat, Si, Film, Sapphire Θ rotation 0.0072 ºAxis ϴ , X, Y, Z Stage repeatability ± <3umNotch alignment accuracy ± < 0.1 ºCentering accuracy ± < 20umPositioning time < 3.5 secLift time < 0.5 sec down , < 0.6 sec upInterface RS-232, Digital I/OUtility Vacuum, AirPower +24VDC

Wafer Pre Aligner (ACE-XVL Series)

Key Features- Fast alignment- Include OCR

(for Reading the Wafer Lot Number)- High performance accuracy- High performance repeatability- Easy to use and install- Automatic wafer classification

Model- ACE-DXV 320N- ACE-DXV 215N- ACE-DXV 150N- Option : Sapphire, Glass

ITEM SPECIFICATIONWafer type Ø300 ~ Ø50, Notch, Flat, Si, Film, Sapphire Measurement Automatic wafer classificationΘ rotation 0.0072 ºAxis ϴ , X, Y Stage repeatability ± <3umNotch alignment accuracy ± < 0.1 ºCentering accuracy ± < 20umPositioning time < 3.5 secInterface RS-232, digital I/OUtility VacuumPower +24VDC

Wafer Pre Aligner (ACE-DVX Series)

Key Features- Fast alignment- High performance accuracy- High performance repeatability- Easy to use and install- Large Vacuum Chuck- For over 300mm Wafer

Model- ACE-P 450N- ACE-P 300N- Option : Sapphire, Glass

ITEM SPECIFICATIONWafer type Ø450,300 Notch, Si, Film

Chuck Size 80Ø

Θ rotation 0.0072 ºNotch alignment accuracy ± < 0.1 ºCentering accuracy ± < 20umPositioning time < 6.0 secInterface RS-232, Digital I/OUtility VacuumPower +24VDC

Wafer Pre Aligner (ACE-P Series)

Key Features- Fast alignment- High performance accuracy- High performance repeatability- Easy to use and install- Large Vacuum Chuck- For over 300mm Wafer

Model- ACE-XP 450N- ACE-XP 300N- ACE-XP 200N- ACE-XP 150N- Option : Sapphire, Glass

ITEM SPECIFICATIONWafer type Ø450,300, Notch, Si, Film Chuck Size 80ØΘ rotation 0.0072 ºAxis ϴ , X, YNotch alignment accuracy ± < 0.1 ºCentering accuracy ± < 20umPositioning time < 6.0 secInterface RS-232, Digital I/OUtility VacuumPower +24VDC

Wafer Pre Aligner (ACE-XP Series)

Key Features- Fast alignment- High performance accuracy- High performance repeatability- Easy to use and install- Safety for Crack Wafer Broken- Moving the X.Y.Z-Axis for Fixed Robot Pan- Passive Type

ITEM SPECIFICATIONWafer type Ø450 ~ Ø50, Notch, Flat, Si, Film, Sapphire Θ rotation 0.0072 ºAxis ϴ , X, Y, Z Stage repeatability ± <3umNotch alignment accuracy ± < 0.1 ºCentering accuracy ± < 20umPositioning time < 3.5 secLift time < 0.5 sec down , < 0.6 sec upInterface RS-232, Digital I/OUtility AirPower +24VDC

Model- ACE-XPL 450N- ACE-XPL 300N- ACE-XPL 200N- Option Sapphire, Glass

Wafer Pre Aligner (ACE-XPL Series)

Key Features- Special Type- Include OCR(for Reading the Wafer Lot Number)

- Auto alignment for All Size Wafer- Output the Align Data to Robot

Mode- ACE-SXVO 450N (include OCR)- ACE-SXVO 300N (include OCR)- ACE-SXVM 450N- ACE-SXVM 300N- Option : Sapphire, Glass

ITEM SPECIFICATIONWafer type Ø450 ~ Ø300, Notch, Flat, Si, Film, Sapphire

Special 1 Include OCR and data transfer

Special 2 Wafer all size alignment

Special 3 Wafer Si - Sapphire double measurement

Special 4 User request

Wafer Pre Aligner (ACE-S Series)

ACE-SXVO 450N(include OCR)

ACE-SXVM 450N

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Universal Semiconductor TechnologyHead Office-sales and Main Facility-R&D Center908, D-dong, Bun-Dang Techno Park, Yatab-dong 151, Seongnam-city, Gyeonggi-do, Korea (463-070)Tel) +82-31-604-1004 Fax)+82-31-711-6344 e-mail) admin@semi-ust.com

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