div class=ts-pagebuttonPage 1button div class=ts-image a href=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5page1jpg target=_blank amp-img class=ts-thumb alt=Page 1: W C Tang T-C H Nguyen and R T Howe Laterally roboticseecsberkeleyedu~pister147fa15ResourcesTangNguyen · Both the average residual Stress in the polysilicon src=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5thumbnails1jpg width=142 height=106 layout=responsive amp-imga divdiv class=annotationTitlectnguyendiv div class=annotationSubjectText Boxdiv div class=annotationContentsW C Tang T-C H Nguyen and R T Howe “Laterally driven polysilicon resonant microstructures” Proceedings IEEE Micro Electromechanical Systems Workshop Salt Lake City Utah Feb 1989 pp 53-59divdivdiv class=ts-pagebuttonPage 2button div class=ts-image a href=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5page2jpg target=_blank amp-img class=ts-thumb alt=Page 2: W C Tang T-C H Nguyen and R T Howe Laterally roboticseecsberkeleyedu~pister147fa15ResourcesTangNguyen · Both the average residual Stress in the polysilicon src=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5thumbnails2jpg width=142 height=106 layout=responsive amp-imga divdivdiv class=ts-pagebuttonPage 3button div class=ts-image a href=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5page3jpg target=_blank amp-img class=ts-thumb alt=Page 3: W C Tang T-C H Nguyen and R T Howe Laterally roboticseecsberkeleyedu~pister147fa15ResourcesTangNguyen · Both the average residual Stress in the polysilicon src=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5thumbnails3jpg width=142 height=106 layout=responsive amp-imga divdivdiv class=ts-pagebuttonPage 4button div class=ts-image a href=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5page4jpg target=_blank amp-img class=ts-thumb alt=Page 4: W C Tang T-C H Nguyen and R T Howe Laterally roboticseecsberkeleyedu~pister147fa15ResourcesTangNguyen · Both the average residual Stress in the polysilicon src=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5thumbnails4jpg width=142 height=106 layout=responsive amp-imga divdivdiv class=ts-pagebuttonPage 5button div class=ts-image a href=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5page5jpg target=_blank amp-img class=ts-thumb alt=Page 5: W C Tang T-C H Nguyen and R T Howe Laterally roboticseecsberkeleyedu~pister147fa15ResourcesTangNguyen · Both the average residual Stress in the polysilicon src=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5thumbnails5jpg width=142 height=106 layout=responsive amp-imga divdivdiv class=ts-pagebuttonPage 6button div class=ts-image a href=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5page6jpg target=_blank amp-img class=ts-thumb alt=Page 6: W C Tang T-C H Nguyen and R T Howe Laterally roboticseecsberkeleyedu~pister147fa15ResourcesTangNguyen · Both the average residual Stress in the polysilicon src=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5thumbnails6jpg width=142 height=106 layout=responsive amp-imga divdivdiv class=ts-pagebuttonPage 7button div class=ts-image a href=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5page7jpg target=_blank amp-img class=ts-thumb alt=Page 7: W C Tang T-C H Nguyen and R T Howe Laterally roboticseecsberkeleyedu~pister147fa15ResourcesTangNguyen · Both the average residual Stress in the polysilicon src=https:reader042vdocumentsusreader042viewer20220304225aaa4b8c7f8b9a90188de5aahtml5thumbnails7jpg width=142 height=106 layout=responsive amp-imga divdiv