vesta - sci plasma · 2018-09-18 · vesta is a customizable plasma cleaning platform. it includes...
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SCI Automation Pte. Ltd.
210 Tuas South Avenue 2
West Point BizHub
Singapore 637210
Tel: +65 6465 1886 - Fax: +65 6465 1887
www.sciplasma.com
General Enquiries
Email: sales@sciplasma.com
CUSTOMIZABLE PLASMA
PLATFORM
Vesta is a customizable plasma
cleaning platform.
It includes all the subassemblies
necessary to deliver excellent
cleaning and surface
modification results.
The features contained in this
system allow a reliable and
repeatable cycling of the plasma
process for 24/7 operation.
In particular, Vesta is complete with:
A 13.56 MHz RF system inclusive
of an automatic tuning network
Two mass flow controlled gas
input lines
An oil vacuum pump contained in
the body of the machine
(dry pump optional)
A high precision capacitance
pressure gauge
An all-aluminum chamber with no
welded joints, nickel-coated for
maximum performance
A PC controller with an LCD touch
screen user interface.
VESTA
APPLICATIONS
Cleaning of copper lead frames prior to
wire bonding
Organic decontamination prior to wire bonding
Adhesion promoter prior to molding
Adhesion promoter of die attach materials on
lead frames, PBGA strips and flip chip packages
prior to underfill
Flux removal from semiconductor packages
or hybrids
General activation, cleaning and
decontamination
Odd form substrates, Boats, PCBs, Flex,
Hybrid, Custom.
Wafer cleaning and activation
Hard disk and solar applications
Surface activation and cleaning of polyimide flex
substrates, large surface substrates and large
bulky objects
PROCESS GASES
Pure: Ar, He, O2, N2, H2,
Mixtures: N2/H2, Ar/O2, Ar/H2, He/O2
all in various mix ranges
Other gases on request
Version 02-2018
All trademarks (™) listed in this document are the property of their respective owners.
SOFTWARE SPECIFICATIONS
PLC - Omron
User interface on screen
Full manual and automatic operation
File system for recipes
CUSTOMIZABLE ITEMS
Chamber
Product handling
Substrate handling
Electrode configuration
Multiple powered electrodes with equal or
different frequency and power
Software
OPTIONS
H2 Generator
Purge line
System name / type Vesta Customizable plasma platform
System dimensions Footprint (mm) 1020 x 1377 x 1493H (including tower light)
Weight (kg) 500
Chamber Material Nickel-coated aluminum
Dimensions (mm) Custom design according to application
Volume (L) 1 to 300; application dependent
Plasma Type Direct plasma, RIE
RF generator Frequency (MHz) 13.56
Max. Power (Watts) 600
Automatic tuning network Type L/C Network
Functions Auto tuning; preset tuning
Configuration All silver-coated copper conductor
Electrode configuration Geometry Planar
Pressure gauge Type Capacitive
Range (mbar) Application dependent
Gas lines Quantity 2
Max flow rate (mL/min) Application dependent
Pumping system Vacuum Pump Dry pump (application dependent)
Controller PLC CPU; Digital I/Os; DAC and ADC
User Interface 10” Active touch screen
System facilities Electrical power supply Application dependent
Process gas fittings Swagelok 6mm OD
Process gas pressure 1.5 Bar
Process gas purity 99.995 or better
Compressed air CDA 5 - 6 Bar
Compressed air fittings 8mm OD fast connect fitting
Exhaust port 25 mm OD
Standards SEMI S2, S8
Cleanroom ready
Others CE
ISO 9001
Options Hydrogen generator Up to 500 mL/min of H2 with purity above 99.995 %
VESTA CUSTOMIZABLE PLASMA PLATFORM
Version 02-2018
Specifications are subject to change without prior notice. Drawings not to scale.
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