variable micro- inspection system - qioptiq1].pdfvariable micro-inspection system mag.x system 125...
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Variable micro- inspection system
Modular System
High resolution inspection is being used in
many applications. Each application has its own
requirements and constraints. In order to cater for
all these diverse needs the mag.x system 125 is as
modular as possible. Numerous modules are already
available and additional components are being
developed. Customized elements are readily available
and easily integrated with the system, to provide
enhanced performance optimization.
Base unitsHeart of the system is always the base unit. There are
four different units available with additional options.
All other components are attached to these base
units. Mounting of the system to the surrounding
equipment is also provided by the base unit.
Objective lenses The optical performance of the system is mainly
defined by the objective lenses. These are the
components that make the mag.x system 125 really
unique. All of Qioptiq’s highest end technology is
being used in manufacturing and testing of these
lenses.
Tube lensesSystem magnification and maximum sensor size
are the result of the combination of tube lens and
objective lens. The current selection of tube lenses
allows the use of sensors with a diagonal of up to
56 mm. All tube lenses are also telecentric on image
side.
AutofocusHigh resolution systems always feature small depth
of field. Autofocus systems enable high resolution
inspection of objects that are not perfectly flat. The
optional Piezo Unit is the active part for focusing. It can
be combined either with the AF base unit that enables
through-the-lens AF or with any other solution that
detects the object position. The AF base unit offers
a universal port that is compatible to a variety of AF
sensors.
Variable micro-inspection system
mag.x system 125
02 03
Designed for large Sensors
The mag.x system 125 is the first microscope system
that is specifically designed for the use with large
sensors to achieve large field-of-view with high
resolution. Inspection of extended objects is often
done using line sensors due to the high speed of
these sensors and the continuous object movement
that becomes possible with these sensors. mag.x
system 125 supports up to 56 mm image circle and
is therefore a perfect match for 8k TDI line sensors.
Optical Performance
High NA mag.x system 125 stands out from conventional
microscope systems by virtue of its low overall
magnifications that transmit large object fields in high
quality. This is achieved through numerical aperture
(NA) values far higher than those of other systems.
High optical quality is not only ensured on the optical
axis, but also is maintained over the entire sensor
format.
Object space telecentricityExact object space telecentricity is precisely maintained,
preventing flawed measurement results resulting
from objects with height variations or because of a
variation in object position.
Chromatic correctionThe optics are highly chromatically corrected in
the spectral range of 430–700 nm. High contrast
is maintained over the entire spectrum and no
refocusing is required if the illumination wavelength
is changed. Multispectral imaging becomes possible
without any additional focus needs.
Long distance lensesThanks to long working distances and correction
of the lenses without cover glasses, this system
can be universally employed in technical inspection
applications. The parfocal distance of the lenses is
125 mm and is origin of the name mag.x system 125.
Modular System
High resolution inspection is being used in
many applications. Each application has its own
requirements and constraints. In order to cater for
all these diverse needs the mag.x system 125 is as
modular as possible. Numerous modules are already
available and additional components are being
developed. Customized elements are readily available
and easily integrated with the system, to provide
enhanced performance optimization.
Base unitsHeart of the system is always the base unit. There are
four different units available with additional options.
All other components are attached to these base
units. Mounting of the system to the surrounding
equipment is also provided by the base unit.
Objective lenses The optical performance of the system is mainly
defined by the objective lenses. These are the
components that make the mag.x system 125 really
unique. All of Qioptiq’s highest end technology is
being used in manufacturing and testing of these
lenses.
Tube lensesSystem magnification and maximum sensor size
are the result of the combination of tube lens and
objective lens. The current selection of tube lenses
allows the use of sensors with a diagonal of up to
56 mm. All tube lenses are also telecentric on image
side.
AutofocusHigh resolution systems always feature small depth
of field. Autofocus systems enable high resolution
inspection of objects that are not perfectly flat. The
optional Piezo Unit is the active part for focusing. It can
be combined either with the AF base unit that enables
through-the-lens AF or with any other solution that
detects the object position. The AF base unit offers
a universal port that is compatible to a variety of AF
sensors.
Variable micro-inspection system
mag.x system 125
02 03
Designed for large Sensors
The mag.x system 125 is the first microscope system
that is specifically designed for the use with large
sensors to achieve large field-of-view with high
resolution. Inspection of extended objects is often
done using line sensors due to the high speed of
these sensors and the continuous object movement
that becomes possible with these sensors. mag.x
system 125 supports up to 56 mm image circle and
is therefore a perfect match for 8k TDI line sensors.
Optical Performance
High NA mag.x system 125 stands out from conventional
microscope systems by virtue of its low overall
magnifications that transmit large object fields in high
quality. This is achieved through numerical aperture
(NA) values far higher than those of other systems.
High optical quality is not only ensured on the optical
axis, but also is maintained over the entire sensor
format.
Object space telecentricityExact object space telecentricity is precisely maintained,
preventing flawed measurement results resulting
from objects with height variations or because of a
variation in object position.
Chromatic correctionThe optics are highly chromatically corrected in
the spectral range of 430–700 nm. High contrast
is maintained over the entire spectrum and no
refocusing is required if the illumination wavelength
is changed. Multispectral imaging becomes possible
without any additional focus needs.
Long distance lensesThanks to long working distances and correction
of the lenses without cover glasses, this system
can be universally employed in technical inspection
applications. The parfocal distance of the lenses is
125 mm and is origin of the name mag.x system 125.
04
Variable micro-inspection system
G405-524-000
G192-043-000 G192-045-000
Light source
Fiber guide
Fiber adapters
Filters
Base units w/ illumination Direct Adapter Base units w/o illumination
Tube lenses
Camera adapters
Piezo Unit
Darkfield illumination adapterObjective lenses
Illumination tubes
Fiber adapters
Fiber guide
Light source
G192-001-000 G192-006-000 G192-003-000
G192-071-000 G192-073-000 G192-074-000
G192-032-000 G192-031-000
G192-009-000 G192-080-000 G192-081-000 G192-080-905
G405-607-000
G192-012-000 G192-011-000 G192-044-901
4401-535-822-00
G192-062-0001:1
11
Filterschieber, drehbar
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012649.DFT
Bearb.
Gepr.
Verantw.
Maßstab: Gewicht: 0,101 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
restrictednot export controlled
HM192062000
11.12.13 so
11.12.2013 pv
Version: 0
G192-063-0001:1
11
Filterschieber lang, drehbar
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012651.DFT
Bearb.
Gepr.
Verantw.
Maßstab: Gewicht: 0,186 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
restrictednot export controlled
HM192063000
11.12.13 so
11.12.2013 pv
Version: 0
1:3
11
LD 125 (ohne Revolver)
Werkstoff:
Rohteil Nr.:
Urspr.:Ers. f.:
Ers. d.:
Verwendung
Zust.Änderung
DatumName
Dateiname012653.DFT
Bearb.
Gepr.
Verantw.
Maßstab:
Gewicht:11,998 kg
EU-D:AL-T1 A:
US-D:US-ML:
OberflächeRa 1,6μmOberflächen-angaben nachISO 1302W
erkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
DatumName
Benennung
Blatt
Q internal usenot export controlled
HM192001000
11.12.13so
11.12.2013pv
Version:0
1:3
11
mag.x 125 (mit mot. Revolver)
Werkstoff:
Rohteil Nr.:
Urspr.:Ers. f.:
Ers. d.:
Verwendung
Zust.Änderung
DatumName
Dateiname012654.DFT
Bearb.
Gepr.
Verantw.
Maßstab:
Gewicht:12,761 kg
EU-D:AL-T1 A:
US-D:US-ML:
OberflächeRa 1,6μmOberflächen-angaben nachISO 1302W
erkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
DatumName
Benennung
Blatt
Q internal usenot export controlled
HM192003000
11.12.13so
11.12.2013pv
Version:0
1:1
11
mag.x Zwischentubus
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012655.DFT
Bearb.
Gepr.
Verantw.
Maßstab: Gewicht: 0,350 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
Q internal usenot export controlled
HM192009000
11.12.13 so
11.12.2013 pv
Version: 0
1:1
11
Adapter Dunkelfeldbel. Volpi4-Seg.Ringlicht
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012656.DFT
Bearb.
Gepr.
Verantw.
Maßstab: Gewicht: 0,135 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
Q internal usenot export controlled
HM192044901
11.12.13 so
11.12.2013 pv
Version: 0
1:3
11
mag.x 125 (mit mot. Revolver)
Werkstoff:
Rohteil Nr.:
Urspr.:Ers. f.:
Ers. d.:
Verwendung
Zust.Änderung
DatumName
Dateiname012654.DFT
Bearb.
Gepr.
Verantw.
Maßstab:
Gewicht:12,761 kg
EU-D:AL-T1 A:
US-D:US-ML:
OberflächeRa 1,6μmOberflächen-angaben nachISO 1302W
erkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
DatumName
Benennung
Blatt
Q internal usenot export controlled
HM192003000
11.12.13so
11.12.2013pv
Version:0
G192-043-000 G192-045-000
G405-607-000
G405-524-000
05
Order number Description
G192-012-000 Objective lens LD-Plan Apo 5x/0.2
G192-011-000 Objective lens LD-Plan Apo 2x/0.08
G192-031-000 Tube lens 1x
G192-032-000 Tube lens 2.25x
G192-001-000 Base unit without turret
G192-006-000 Base unit with manual turret
G192-003-000 Base unit with motorized turret
G192-080-000 Compact Base unit
G192-080-905 Illumination tube 5x
G192-081-000 Base unit AF
4401-535-822-00 Piezo-Unit
G192-009-000 Direct adapter
Order number Description
G192-043-000 Fiber adapter 9 mm
G192-045-000 Fiber adapter 7 mm
G192-071-000 Camera adapter M72 Dalsa
G192-073-000 Camera adapter M42 SVS-Vistek
G192-074-000 Camera adapter M95 e2v
G192-044-901 Darkfield illumination adapter
G405-524-000 Liquid light guide
G405-607-000 Light source CLS-LED
G192-062-000 Polarizing filter slide short
G192-063-000 Polarizing filter slide long
G192-065-000 Dummy slide short
G192-066-000 Dummy slide long
G192-065-0001:1
11
Filterschieber Dummy
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012652.DFT
Bearb.
Gepr.
Verantw.
Maßstab:
POM, schwarz
Gewicht: 0,033 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
HM192065000
11.12.13 so
11.12.2013 pv
Version: 0
G192-066-0001:1
11
Filterschieber lang, drehbar
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012651.DFT
Bearb.
Gepr.
Verantw.
Maßstab: Gewicht: 0,186 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
restrictednot export controlled
HM192063000
11.12.13 so
11.12.2013 pv
Version: 0
04
Variable micro-inspection system
G405-524-000
G192-043-000 G192-045-000
Light source
Fiber guide
Fiber adapters
Filters
Base units w/ illumination Direct Adapter Base units w/o illumination
Tube lenses
Camera adapters
Piezo Unit
Darkfield illumination adapterObjective lenses
Illumination tubes
Fiber adapters
Fiber guide
Light source
G192-001-000 G192-006-000 G192-003-000
G192-071-000 G192-073-000 G192-074-000
G192-032-000 G192-031-000
G192-009-000 G192-080-000 G192-081-000 G192-080-905
G405-607-000
G192-012-000 G192-011-000 G192-044-901
4401-535-822-00
G192-062-0001:1
11
Filterschieber, drehbar
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012649.DFT
Bearb.
Gepr.
Verantw.
Maßstab: Gewicht: 0,101 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
restrictednot export controlled
HM192062000
11.12.13 so
11.12.2013 pv
Version: 0
G192-063-0001:1
11
Filterschieber lang, drehbar
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012651.DFT
Bearb.
Gepr.
Verantw.
Maßstab: Gewicht: 0,186 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
restrictednot export controlled
HM192063000
11.12.13 so
11.12.2013 pv
Version: 0
1:3
11
LD 125 (ohne Revolver)
Werkstoff:
Rohteil Nr.:
Urspr.:Ers. f.:
Ers. d.:
Verwendung
Zust.Änderung
DatumName
Dateiname012653.DFT
Bearb.
Gepr.
Verantw.
Maßstab:
Gewicht:11,998 kg
EU-D:AL-T1 A:
US-D:US-ML:
OberflächeRa 1,6μmOberflächen-angaben nachISO 1302W
erkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
DatumName
Benennung
Blatt
Q internal usenot export controlled
HM192001000
11.12.13so
11.12.2013pv
Version:0
1:3
11
mag.x 125 (mit mot. Revolver)
Werkstoff:
Rohteil Nr.:
Urspr.:Ers. f.:
Ers. d.:
Verwendung
Zust.Änderung
DatumName
Dateiname012654.DFT
Bearb.
Gepr.
Verantw.
Maßstab:
Gewicht:12,761 kg
EU-D:AL-T1 A:
US-D:US-ML:
OberflächeRa 1,6μmOberflächen-angaben nachISO 1302W
erkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
DatumName
Benennung
Blatt
Q internal usenot export controlled
HM192003000
11.12.13so
11.12.2013pv
Version:0
1:1
11
mag.x Zwischentubus
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012655.DFT
Bearb.
Gepr.
Verantw.
Maßstab: Gewicht: 0,350 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
Q internal usenot export controlled
HM192009000
11.12.13 so
11.12.2013 pv
Version: 0
1:1
11
Adapter Dunkelfeldbel. Volpi4-Seg.Ringlicht
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012656.DFT
Bearb.
Gepr.
Verantw.
Maßstab: Gewicht: 0,135 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
Q internal usenot export controlled
HM192044901
11.12.13 so
11.12.2013 pv
Version: 0
1:3
11
mag.x 125 (mit mot. Revolver)
Werkstoff:
Rohteil Nr.:
Urspr.:Ers. f.:
Ers. d.:
Verwendung
Zust.Änderung
DatumName
Dateiname012654.DFT
Bearb.
Gepr.
Verantw.
Maßstab:
Gewicht:12,761 kg
EU-D:AL-T1 A:
US-D:US-ML:
OberflächeRa 1,6μmOberflächen-angaben nachISO 1302W
erkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
DatumName
Benennung
Blatt
Q internal usenot export controlled
HM192003000
11.12.13so
11.12.2013pv
Version:0
G192-043-000 G192-045-000
G405-607-000
G405-524-000
05
Order number Description
G192-012-000 Objective lens LD-Plan Apo 5x/0.2
G192-011-000 Objective lens LD-Plan Apo 2x/0.08
G192-031-000 Tube lens 1x
G192-032-000 Tube lens 2.25x
G192-001-000 Base unit without turret
G192-006-000 Base unit with manual turret
G192-003-000 Base unit with motorized turret
G192-080-000 Compact Base unit
G192-080-905 Illumination tube 5x
G192-081-000 Base unit AF
4401-535-822-00 Piezo-Unit
G192-009-000 Direct adapter
Order number Description
G192-043-000 Fiber adapter 9 mm
G192-045-000 Fiber adapter 7 mm
G192-071-000 Camera adapter M72 Dalsa
G192-073-000 Camera adapter M42 SVS-Vistek
G192-074-000 Camera adapter M95 e2v
G192-044-901 Darkfield illumination adapter
G405-524-000 Liquid light guide
G405-607-000 Light source CLS-LED
G192-062-000 Polarizing filter slide short
G192-063-000 Polarizing filter slide long
G192-065-000 Dummy slide short
G192-066-000 Dummy slide long
G192-065-0001:1
11
Filterschieber Dummy
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012652.DFT
Bearb.
Gepr.
Verantw.
Maßstab:
POM, schwarz
Gewicht: 0,033 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
HM192065000
11.12.13 so
11.12.2013 pv
Version: 0
G192-066-0001:1
11
Filterschieber lang, drehbar
Werkstoff:Rohteil Nr.:
Urspr.: Ers. f.: Ers. d.:
Verwendung
Zust. Änderung Datum Name Dateiname 012651.DFT
Bearb.
Gepr.
Verantw.
Maßstab: Gewicht: 0,186 kg
EU-D: AL-T1 A: US-D: US-ML:OberflächeRa 1,6μmOberflächen-angaben nachISO 1302WerkstückkantenDIN ISO 13715
Tolerierung nachISO 2768-mHund ISO 8015Optikdarstellungnach ISO 10110Optiktoleranzennach ISO 10110-11
Datum Name Benennung
Blatt
restrictednot export controlled
HM192063000
11.12.13 so
11.12.2013 pv
Version: 0
Tube system –
Polarizing filter, rotatable
Turret –
Objective –
– Filter
– Polarizing filter, rotatable
– Light guide adapter
Illumination unit
Configuration example: Base unit with integrated illumination
SpecificationsObjective
Plan apochromatTube lens
1x 2.25x
f‘tub = 250 mm f‘tub = 563 mm
2y‘ = 25 mm 2y‘ = 56.25 mm
Magn. / NAWD f‘obj δobj R0, obj
M2y
NA'R0, ima
M2y
NA'R0, ima
mm mm µm lp/mm mm lp/mm mm lp/mm
2x / 0.08 24.8 125.0 ± 42.7 293 2.0 12.5 0.040 147 4.5 12.5 0.018 65
5x / 0.20 13.0 50.0 ± 6.8 733 5.0 5.0 0.040 147 11.25 5.0 0.018 65
–
–
Performance GraphsThe following graph displays the optical performance
of the mag.x system 125 micro inspection system,
showing the polychromatic MTF versus field height.
Values for object y and image heights y’ are given
under the horizontal axis. Note that the high contrast
values close to the diffraction limit are maintained
over the entire field!
06
Variable micro-inspection system
Integrated IlluminationHigh resolution inspection needs defined illumination
that is optimally adjusted. This is why mag.x system 125
sports built-in coupled illumination for coaxial bright
field illumination. The illumination system operates
on the Koehler principle, with adjustable aperture
and field stops. Thus the illumination and coherence
parameters of the image (relationship of illumination
and imaging aperture) can be appropriately adjusted
for individual inspection tasks. If coaxial bright field
illumination is not appropriate the system can be set
up without integrated illumination as well using direct
adapter or customized solutions.
ApplicationsThere are numerous applications that benefit from
the versatility and the high optical performance of the
system. The usage of large sensors with high resolution
speeds up many inspection tasks considerably and
some applications may become finally possible thanks
to this all new micro inspection system.
Ideal areas of application:
Semiconductor industry
Display inspection
PCB inspection
Universities, laboratories
Technical microscopy
Material science
Micro measurement
Biomedical applications
NA: Numerical aperture in the object space = n · sin (σ)WD: Working distancef'obj: Focal length of the objectivef'tub: Focal length of the tube lensδobj: Depth of field at 546 nm δobj = ±n · λ/(2 · NA2)R0, ima: Cut off frequency in image space at 546 nmR0, obj: Cut off frequency in object space at 546 nm Rcut, obj = (2 · NA)/λ
R0, ima: Cut off frequency in image space 546 nm2y': Image field size (maximum detector diagonal)2y: Object field sizeM: Magnification of the overall system M = Vobj · Vtub
Image of USAF-test chart taken with 5x objective lens and .25x tube
lens and blue light. Camera for this image was 8k TDI in area mode.
Group 9, element 3 represents 645 lp/mm resolution.
07
Tube system –
Polarizing filter, rotatable
Turret –
Objective –
– Filter
– Polarizing filter, rotatable
– Light guide adapter
Illumination unit
Configuration example: Base unit with integrated illumination
SpecificationsObjective
Plan apochromatTube lens
1x 2.25x
f‘tub = 250 mm f‘tub = 563 mm
2y‘ = 25 mm 2y‘ = 56.25 mm
Magn. / NAWD f‘obj δobj R0, obj
M2y
NA'R0, ima
M2y
NA'R0, ima
mm mm µm lp/mm mm lp/mm mm lp/mm
2x / 0.08 24.8 125.0 ± 42.7 293 2.0 12.5 0.040 147 4.5 12.5 0.018 65
5x / 0.20 13.0 50.0 ± 6.8 733 5.0 5.0 0.040 147 11.25 5.0 0.018 65
–
–
Performance GraphsThe following graph displays the optical performance
of the mag.x system 125 micro inspection system,
showing the polychromatic MTF versus field height.
Values for object y and image heights y’ are given
under the horizontal axis. Note that the high contrast
values close to the diffraction limit are maintained
over the entire field!
06
Variable micro-inspection system
Integrated IlluminationHigh resolution inspection needs defined illumination
that is optimally adjusted. This is why mag.x system 125
sports built-in coupled illumination for coaxial bright
field illumination. The illumination system operates
on the Koehler principle, with adjustable aperture
and field stops. Thus the illumination and coherence
parameters of the image (relationship of illumination
and imaging aperture) can be appropriately adjusted
for individual inspection tasks. If coaxial bright field
illumination is not appropriate the system can be set
up without integrated illumination as well using direct
adapter or customized solutions.
ApplicationsThere are numerous applications that benefit from
the versatility and the high optical performance of the
system. The usage of large sensors with high resolution
speeds up many inspection tasks considerably and
some applications may become finally possible thanks
to this all new micro inspection system.
Ideal areas of application:
Semiconductor industry
Display inspection
PCB inspection
Universities, laboratories
Technical microscopy
Material science
Micro measurement
Biomedical applications
NA: Numerical aperture in the object space = n · sin (σ)WD: Working distancef'obj: Focal length of the objectivef'tub: Focal length of the tube lensδobj: Depth of field at 546 nm δobj = ±n · λ/(2 · NA2)R0, ima: Cut off frequency in image space at 546 nmR0, obj: Cut off frequency in object space at 546 nm Rcut, obj = (2 · NA)/λ
R0, ima: Cut off frequency in image space 546 nm2y': Image field size (maximum detector diagonal)2y: Object field sizeM: Magnification of the overall system M = Vobj · Vtub
Image of USAF-test chart taken with 5x objective lens and .25x tube
lens and blue light. Camera for this image was 8k TDI in area mode.
Group 9, element 3 represents 645 lp/mm resolution.
07
Discover the Q!Discover the capabilities, knowledge, equipment
and technology of Qioptiq
Photonics for Innovation
Sales contact:
North AmericaQioptiq Inc.Info@us.qioptiq.comPhone +1 (585) 223-2370Toll free 1 (800) 429-0257
Asia (China, Taiwan, Singapore, Malaysia)Qioptiq Singapore Pte LtdCustomer.service@sg.qioptiq.comPhone +65 6499 7766Fax + 65 6265 1479
South KoreaENVISION Co., Ltd.Phone +82-2-2624-5500Fax +82-2-2082-6428info@envision.co.kr
Europe and Technical SupportQioptiq Photonics GmbH & Co.KGThomas Schäfflerthomas.schaeffler@qioptiq.dePhone +49 (0) 89 255 458-0
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