upgrade kit gasonics aura 1000 - allwin21...comparing 39 no. description original system upgraded...

Upgrade KitGasonics Aura 1000

220 Cochrane CircleMorgan Hill, CA95037

U.S.A.Tel.:+1-408-778-7788

Fax.:+1-408-904-7168www.allwin21.com

sales@allwin21.com© 2015 Allwin21 Corp. All Rights Reserved.

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Why Upgrade Kit

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1. Low cost solution of obsolete components and parts.

2. Requirement of stability of the system

3. Requirement of network function (GEM/SECSII).

4. Requirement of PC control for data storage.

5. Requirement of GUI.

6. Requirement of more precise control.

7. Requirement of CLTC (Closed Loop Temperature Control)

8. Requirement of better repeatability, uniformity.

9. Requirement of easier maintenance, calibration, and trouble

shooting

Wafer Handling

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1. Equipe Robot

2. Robot Controller

3. Robot Arm

4. Fixed Cassette

Station

Fixed Cassette Station

4

Hinged Panel

5

Quartz Tray and Door

6

Quartz Tray and Door

7

Installed Thermocouple Assembly

8

AC Box and Lamp Control

9

Lamp Tray

10

045-0121 LAMP, 120V, 1000W

Main PCB and DC Power

11

PC Screens

12

Main Menu

PC Screens

13

Recipe Edit Selection screen

PC Screens

14

Recipe Editor

PC Screens

15

Process for Production screen, basic functions

PC Screens

16

Process for Engineer screen

PC Screens

17

Robot Auto Sequence Setup screen

PC Screens

18

WTM Manual Operation

PC Screens

19

Process Monitor screen

PC Screens

20

Maintenance Menu

PC Screens

21

RS-232 Configure screen

PC Screens

22

Board Configuration screen

PC Screens

23

Robot Station Configure

PC Screens

24

Robot Speed Setup

PC Screens

25

Robot Teach Screen

PC Screens

26

Factory Setup screen

PC Screens

27

Throttle Valve Test screen

PC Screens

28

System Setup screen

PC Screens

29

Modular Parameter Description menu

PC Screens

30

Password Setup screen

PC Screens

31

Level Setup

PC Screens

32

Calibration Menu

PC Screens

33

Thermocouple Calibration screen

PC Screens

34

Gas Calibration screen

PC Screens

35

Pressure Calibration Screen

PC Screens

36

System Diagnostics Screen

PC Screens

37

Board Test screen

Video

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https://www.youtube.com/watch?v=9FY64se3njI

Comparing

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No. Description Original system Upgraded System

1 Controller 68000 CPU controller

Pentium computer

2 User interface No GUI

3 Data Storage No Hard Disk

4 Recipe edit Not Easy Easy

5 Diagnostic Limited More functions and I/O hardware “exposed” for easier maintenance and trouble shooting

6 Temperature measurement and control

No New advanced adaptive temperature control (CLTC)

7 Wafer Transfer Index Robot (Optional)

8 Cassette Station Elevator Fixed Station

9 Lamp Tower No Optional

10 GEM/SEC II No Optional

11 A/D precision 12bits 14-16bits

12 EOP Basic Advanced (Optional)

220 Cochrane Circle

Morgan Hill, CA95037,U.S.A.

Tel.:+1-408-778-7788

Fax.:+1-408-904-7168

www.allwin21.com

sales@allwin21.com

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