time-to-market reduction by optimal integration and test ... · slide 9 9 tangram lines of...

Time-to-market reduction by optimal integration and test planning

Roel Boumen

Ivo de JongAsia van de Mortel-Fronczak

Koos Rooda

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Contents• Introduction• Tangram project

– Outline– Lines of Attentions

• Integration and test planning – Problem– Method

• ASML case studies– Manufacturing test– Prototype integration

• Summary• Conclusions

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Lithographic machineProperties:• >12 M LoC• 13.7 M € average

selling pricePerformance (XT:1900i)• < 40 nm line width• > 131 WPH

throughput

Source: www.asml.com

ASML lithographic machines

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ASML integration and testIntegration and test phases:• First-of-a-kind machine (prototype)

– Performance tests, reliability tests– Multiple prototypes to test different performance criteria

• Software– Weekly Validation Test + Alpha test + Beta test

• Manufacturing– Subsystem test, System qualification @ASML & @customer

• Operation– Diagnosis, Maintenance

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T

T

T

T

T

T

T

T

T

T

T

T

T

T

T

ASML integration and test problem:

• Tight specification– Many components (1000+)– Multi disciplinary components– Incomplete designs

• Time-to-market– Concurrent engineering– Incomplete test phases

…

T

T

T

T

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ASML integration and test

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Challenges

ASML integration and test challenges:• How to balance TTM versus Quality/Cost?• How to construct/maintain integration and test plans?• How to perform tests as early (in parallel) as possible?

timeShipment

date

Development

Integration and test

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Contents• Introduction• Tangram project

– Outline– Lines of Attentions

• Integration and test planning – Problem– Method

• ASML case studies– Manufacturing test– Prototype integration

• Summary• Conclusions

Slide 8 88

Tangram outline• Research project on test and integration performed at

ASML: lithographic systems provide cases

• Duration: 4 years (2003-2007) total of 60 FTE (5 PhD students)

• Partners: ASML, ESI, RUN, S&T, TNO, TUD and TU/e

• Goal: Reduce ASML TTM by integrating and testing earlier/smarter/faster using models while maintaining or improving system quality

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Tangram Lines of Attention

1. Integration and test strategy2. A) Model-based integration and testing

B) Test infrastructure3. Model-based testing4. Model-based diagnosis

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1) Integration and test strategy

Define goal

Planning

Control andexecution

Untested subsystems Tested system

Plan

Objectives/Constraints

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Use formal, executable models for • Model-based system analysis (validation, verification)• Model-based integration and testing with realizations

integrate

designR D

R1

Rn

define

define

design

design

D1

Dn

M1

Zn

model

realize

define

Mnmodel

Z1

infra

stru

ctur

e I

integraterealize

2A) Model-based integration and testing

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SUT

Testdriver

Stub

Middleware to access components

Data driven architecture to connect processes (models and realizations)

2B) Test infrastructure

integrate

designR D

R1

Rn

define

define

design

design

D1

Dn

M1

Zn

model

realize

define

Mnmodel

Z1

infra

stru

ctur

e I

integraterealize

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3) Model-based testing

model

SUT

SUTconf

model

pass fail

testtool

testgeneration

tool

testexecution

toolSUT passes tests

SUT conf model

⇔

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Diagnosis from 60 days to 30 milliseconds

4) Model-based diagnosis

systemunknown

health state h

Model

captures nominal behavior and

possibly explicit fault modes

diagnosis

inferredhealth state h

inputs

outputs

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Contents• Introduction• Tangram project

– Outline– Lines of Attentions

• Integration and test planning – Problem– Method

• ASML case studies– Manufacturing test– Prototype integration

• Summary• Conclusions

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Integration and test plan

Dev Lens

Dev Laser

Dev WS

Dev WH

Dev IL

Dev RS

Dev RH

Time

Integration and test plan

Risk

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Integration and test plan

Dev Lens

Dev Laser

Dev WS

Dev WH

Dev IL

Dev RS

Dev RH

Test

Test

Test

TestTest

TestSequence integration

actions

Select and sequence

tests

Time

Maximize system quality

Minimize total cost

Minimize total time

Risk

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Problem and approach

Goal: Time-to-market and flow time reduction by integration and test time reduction.

Problem: The selection and sequencing of integration and test actions within an integration and test plan is – difficult and therefore sub-optimal,– too much manual effort (re-planning).

Approach: Automatic optimization using (mathematical) models.

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Method1. Integration sequencing

Optimize integration sequence on integration time– Model– Algorithm

2. Test sequencingOptimize for each test phase the test sequence on test time, test

cost and/or system quality

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Integration sequencing: model

Integration model:• Modules

– Development time and cost

• Interfaces– Creation time and cost

• Tests that could be performed– Test time and cost– Modules needed to perform test

M3: Laser

M4: IL

M5: RS

M6: Lens

M7: WSM2: WH

M1: RHI1

I2

I3

I4

I5

I6

test 0-test 5

test 8-test 10

test 13-test 16test 20-test 25

test 6-test 7

test 11-test 12

test 17-test 19

Example: ASML wafer scanner

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Integration sequencing: solution

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Method1. Integration sequencing

Optimize integration sequence on integration time

2. Test sequencingOptimize for each test phase the test sequence on test time, test

cost and/or system quality– Model– Algorithm

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Test sequencing: modelFor each test phase: create test model

S \ T t0 t1 t2 t3 t4 t5 Ps1 1 1 0 0 1

10102

10%s2 1 0 1 0

01101

10%s3 1 0 0 1 10%s4 1 0 0 0 10%s5 1 0 0 0 10%C 3 1 1 1 2

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S \ T t0 t1 t2 t3 t4 t5 Ps1 1 1 0 0 1

10102

10%s2 1 0 1 0

01101

10%s3 1 0 0 1 10%s4 1 0 0 0 10%s5 1 0 0 0 10%C 3 1 1 1 2

Multiple fault algorithm

Test sequencing: solution

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Integration and test plan

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Contents• Introduction• Tangram project

– Outline– Lines of Attentions

• Integration and test planning – Problem– Method

• ASML case studies– Manufacturing test– Prototype integration

• Summary• Conclusions

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Case study 1: Manufacturing test sequencing

Manufacturing time

Subsystem test

Reticle handler

Wafer handler

Reticle stage

Dual wafer stage

Lens

Laser

Test at ASML Install at CustomerDisassemble –

ship – assemble Assemble

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Case study 1: Results

Test at ASML Install at customer

Old time

Test phase 1 730 609 17% 730 500 32%

815

-

Old time New time Reduction New time Reduction

Test phase 2 815 784 4%

18%

16%

Test phase 3 33 27

690

- -

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Case study 2: Prototype integration sequencing

Development of a new ASML machine• 2 prototypes for testing:

– Functional requirements– Performance requirements

• Problem statistics:– 105 modules with different delivery times (0 – 22 weeks)– 138 interfaces with assembly times– 67 tests (80% fixed to one of the prototypes, 20% not fixed)

• Goal: Both machines must be at customer ASAP, all tests need to be performed at least once

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Case study 2: results• Manual created sequence duration: 38.4 weeks• Automatic optimized sequence duration: 33.7 weeks• Potential integration time improvement: ~10%• Resulting (MS Project) Gantt chart of proto 1:

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Practical lessons learned

The Test-Diagnose-Fix loop introduces variability on the final shipment date. Keep this loop as short as possible.

The “perfect” test has a 50% fault probability when it is performed. Select the tests that have this property.

Compare integration and test plans with each other. Choose the best suited plan from all solutions you can find.

Risk in the system introduces variability on the final shipment. Therefore, keep the risk as low as possible by controlling the risk. (integration introduces risk while testing reduces risk)

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Summary

• Tangram project– Large research project in industry– Using specific models for different problems

• Integration and test planning:– Integration sequencing algorithm and model– Test sequencing algorithm and model– Optimization on time/cost and/or risk

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Conclusions

• Integration and test sequencing suited to solve real life ASML problems:– Up to 10% integration time reduction– Up to 20% test time reduction

• Models can be used as knowledge container and are intuitive for engineers

• Less planning effort because of automated planning

Time-to-market reduction by optimal integration and test planning

Further information:R.Boumen@tue.nl

orSee you at the 12e Nederlandse Testdag at ASML on 17 November

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Diagnosis from 60 days to 30 milliseconds

Diagnosisengine

LydiaModel

System Under Test

a bd e

c

Diagnosisa,b,c,d,e

4) Model-based diagnosis