strategic initiative program beyond silicon… ape-epri palo alto/ape … · ape initiative lead...

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Beyond Silicon…

Advanced Power Electronics for

FACTS Technology

Jerry Melcher

APE Initiative Lead

Energy Delivery and Utilization

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Initiative Objectives

• Why are we doing this?

• Where are we going?

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Power Electronics

The Thyristor

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Thyristor - SCR

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Power Progress for Si

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Initiative Objectives

• Why are we doing this?

– Si Power Devices are Reaching Their

Fundamental Limits of Performance.

• Where are we going?

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

The “Diamond”

Structure

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Si Electrons

3s 3p

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Physics of

Semiconductors E

k

{ EG

k•p Perturbation Theory

n n

n jj n

n jj n

G v

k

m m

n j

m

m m

n j

m

m mEc v

kk p

pp

pp

b g b g b g b g

b g b g

02

0 0

0 0

12 0 0

0 0

2

2 2 2

2

2

,

,*

*

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Chemistry of

Semiconductors

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Initiative Objectives

• Why are we doing this?

– Si Power Devices are Reaching Their

Fundamental Limits of Performance.

• Where are we going?

– SiC and GaN have Breakdown Electrical

Fields ~10 Times Higher than Si. Both 4

Times the Forward Current…at the

Same Unit Cost! (maybe)

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

EPRI/DARPA

13-18 M$, 3 Years • Nasa-Lewis SiC

• Northrup-Grumman SiC

• Vanderbilt University SiC

• Silicon Power Corp SiC

• University of Florida GaN

• Cal Tech GaN

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Advantages of

Post-Silicon Materials CVD

Property Si 3C SiC (6C SiC) Diamond GaN

Importance

Bandgap (300K) 1.1 2.2 (2.9) 5.5 3.4 Blocking

Voltage

Maximum Operating 500 >900 (>1000) 1400 >800 Limits

Power Flow

Temp (K)

Breakdown Voltage 0.3 4 10 5

Maximum

(Eb, 106 V/cm) Power

Capacity

Hole Mobility 600 40 1600 200

Switching Speed

(RT, cm2/Vs)

Thermal Conductivity 1.5 5 20 1.3 Cooling

Rate

(CT, w/cm)

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

SiC Growth

SiC

Charge

2200 C

Boule

2000 C

Sublimation

6H-SiC Substrate

RF Coils

H2

SiH4

C3H8

HCL

N2

Al(Me)3

CVD

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

SiC: Progress in

Wafer Size

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

SiC: Wafer Price

vs. Year

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

Defects: Micropipes

2 m

Micropipes form to relieve strain around super-screw dislocations.

0

5000

10000

15000

20000

25000

Bu

rger

s vec

tor

squ

are

d,

Å2

30000

0 400 800 1200 1600

core radius, Å

2000

b2

ro

82

Gsurface energy,

= 4 J/m2

shear modulus,

G = 200 GPa b2

ro

16Å

b = 6b0

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

SiC: Micropipe

Density vs. Year

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

SiC:

Record µPipe Density

6

1

2

7

3

4 5

8

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

SiC Thyristor:

Forward Voltage

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

SiC Diode:

Reverse Characterisitics

Advanced Power Electronics -- EPRI Preview

P. M. Grant

13 March 1999

Strategic Initiative

Program

What About GaN

& Diamonds?

See OutPost 8

“Why Diamonds are a Girl’s Best Friend!”