photolithography - university of minnesota 04... · fig. 2.4 resist and silicon dioxide patterns...

div class=ts-pagebuttonPage 1button div class=ts-image amp-img class=ts-thumb alt=Page 1: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails1jpg width=142 height=106 layout=responsive amp-img divpPhotolithographyp pProf Tianhong Cui Mechanical Engineeringp pME 8254pdivdiv class=ts-pagebuttonPage 2button div class=ts-image amp-img class=ts-thumb alt=Page 2: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails2jpg width=142 height=106 layout=responsive amp-img divpStandard IC Processesp pPhotolithography Source:Jaegerpdivdiv class=ts-pagebuttonPage 3button div class=ts-image amp-img class=ts-thumb alt=Page 3: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails3jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 4button div class=ts-image amp-img class=ts-thumb alt=Page 4: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails4jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 5button div class=ts-image amp-img class=ts-thumb alt=Page 5: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails5jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 6button div class=ts-image amp-img class=ts-thumb alt=Page 6: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails6jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 7button div class=ts-image amp-img class=ts-thumb alt=Page 7: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails7jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 8button div class=ts-image amp-img class=ts-thumb alt=Page 8: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails8jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 9button div class=ts-image amp-img class=ts-thumb alt=Page 9: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails9jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 10button div class=ts-image amp-img class=ts-thumb alt=Page 10: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails10jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 11button div class=ts-image amp-img class=ts-thumb alt=Page 11: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails11jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 12button div class=ts-image amp-img class=ts-thumb alt=Page 12: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails12jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 13button div class=ts-image amp-img class=ts-thumb alt=Page 13: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails13jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 14button div class=ts-image amp-img class=ts-thumb alt=Page 14: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails14jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 15button div class=ts-image amp-img class=ts-thumb alt=Page 15: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails15jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 16button div class=ts-image amp-img class=ts-thumb alt=Page 16: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails16jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 17button div class=ts-image amp-img class=ts-thumb alt=Page 17: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails17jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 18button div class=ts-image amp-img class=ts-thumb alt=Page 18: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails18jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 19button div class=ts-image amp-img class=ts-thumb alt=Page 19: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails19jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 20button div class=ts-image amp-img class=ts-thumb alt=Page 20: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails20jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 21button div class=ts-image amp-img class=ts-thumb alt=Page 21: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails21jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 22button div class=ts-image amp-img class=ts-thumb alt=Page 22: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails22jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 23button div class=ts-image amp-img class=ts-thumb alt=Page 23: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails23jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 24button div class=ts-image amp-img class=ts-thumb alt=Page 24: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails24jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 25button div class=ts-image amp-img class=ts-thumb alt=Page 25: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails25jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 26button div class=ts-image amp-img class=ts-thumb alt=Page 26: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails26jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 27button div class=ts-image amp-img class=ts-thumb alt=Page 27: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails27jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 28button div class=ts-image amp-img class=ts-thumb alt=Page 28: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails28jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 29button div class=ts-image amp-img class=ts-thumb alt=Page 29: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails29jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 30button div class=ts-image amp-img class=ts-thumb alt=Page 30: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails30jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 31button div class=ts-image amp-img class=ts-thumb alt=Page 31: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails31jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 32button div class=ts-image amp-img class=ts-thumb alt=Page 32: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails32jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 33button div class=ts-image amp-img class=ts-thumb alt=Page 33: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails33jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 34button div class=ts-image amp-img class=ts-thumb alt=Page 34: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails34jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 35button div class=ts-image amp-img class=ts-thumb alt=Page 35: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails35jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 36button div class=ts-image amp-img class=ts-thumb alt=Page 36: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails36jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 37button div class=ts-image amp-img class=ts-thumb alt=Page 37: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails37jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 38button div class=ts-image amp-img class=ts-thumb alt=Page 38: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails38jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 39button div class=ts-image amp-img class=ts-thumb alt=Page 39: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails39jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 40button div class=ts-image amp-img class=ts-thumb alt=Page 40: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails40jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 41button div class=ts-image amp-img class=ts-thumb alt=Page 41: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails41jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 42button div class=ts-image amp-img class=ts-thumb alt=Page 42: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails42jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 43button div class=ts-image amp-img class=ts-thumb alt=Page 43: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails43jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 44button div class=ts-image amp-img class=ts-thumb alt=Page 44: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails44jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 45button div class=ts-image amp-img class=ts-thumb alt=Page 45: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails45jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 46button div class=ts-image amp-img class=ts-thumb alt=Page 46: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails46jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 47button div class=ts-image amp-img class=ts-thumb alt=Page 47: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails47jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 48button div class=ts-image amp-img class=ts-thumb alt=Page 48: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails48jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 49button div class=ts-image amp-img class=ts-thumb alt=Page 49: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails49jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 50button div class=ts-image amp-img class=ts-thumb alt=Page 50: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails50jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 51button div class=ts-image amp-img class=ts-thumb alt=Page 51: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails51jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 52button div class=ts-image amp-img class=ts-thumb alt=Page 52: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails52jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 53button div class=ts-image amp-img class=ts-thumb alt=Page 53: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails53jpg width=142 height=106 layout=responsive amp-img divdivdiv class=ts-pagebuttonPage 54button div class=ts-image amp-img class=ts-thumb alt=Page 54: Photolithography - University of Minnesota 04 · Fig 24 Resist and silicon dioxide patterns following photolithography with positive and nega- tiye resists Photomasks Master src=https:reader036vdocumentsusreader036viewer20220706105af7bc757f8b9a5f588bf0e2html5thumbnails54jpg width=142 height=106 layout=responsive amp-img divpVacuum Systemspdiv

photolithography - university of minnesota 04... · fig. 2.4 resist and silicon dioxide patterns...

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