optical mems for earth observation: an efficient optical

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Frederic Zamkotsian1, Arnaud Liotard2, Patrick Lanzoni1, Thierry Viard2, Wilfried Noell3, Benedikt Guldimann4, Marco Freire4, Stefan Kraft4

Laboratoire d’Astrophysique de Marseille, FranceThales Alenia Space, France

EPFL, Switzerland ESA / ESTEC, Netherlands

Optical MEMS for Earth Observation: an efficient optical cloud removal technique

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Spectrometer

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Reflective slit

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Instrumental needs using micro-opto-electro-mechanical systems (MOEMS)

Wavefront control- Deformable mirrors

Object selection- Programmable slits

Spectral domain application- Programmable gratings

Phase

Intensity

Wavelength

Instrumental needs

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

MOEMS for Earth Observation

First phase: collecting all necessary data Earth observation instruments or payloadsExisting and potential optical MEMS componentsSecond phase Pre-selection of at least 6 optical payloads following

three different philosophies - pre-selection of 2 market-pull concepts- pre-selection of 3 techno-push concepts- pre-selection of 1 concept coming from outside Earth Observation

Final selection of the 2 most promising optical payloadThird phaseDetailed design of the 2 promising conceptsSynthesis of the study

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Tiltable micromirror arrayActive on intensityHigh contrastDigital mode only : light is switched between ON and OFF positions

Tiltable micromirror arrays

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Single crystalline micromirror array for next generation IR multi-object spectrographCollaboration between LAM and EPFL Goal: high contrast 1500:1 Fill factor > 90 % obtainedConcept

Electrostatic actuationPrecise tilt angle (landing beams)

RealizationCombination surface and bulkmicromachiningWafer level bonding of two wafers: one for th mirrors, one for the electrodes

MIRA

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Surface qualityOn 100µm x 200µm micromirrors: deformation < 10 nmTilt angle precision < 1 arcminActuation voltage < 100 V

Environmental testsVacuum (10-6 mbar)92K and 162 K Mirrors tiltSurface quality < 30 nm PtV in cryo

92K0V

92K90V

MIRA

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Most popular MOEMS deviceMicromirrors

2048x1080 mirrors individually adressablesPitch 13,68µm Tilt angle: 12°

Numerous applications Main application: image display Design modification not possible

Spatial qualification test (ESA contract)-40°C in vacuum (10-5 mbar)Micromirrors hold in position during > 1500 sDMD fully operationalLife test during 1038h, radiations, vibrations No showstopper for space use

DMD from Texas Instruments

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Programmable micro-diffraction gratings (PMDG)Action on phaseBased on 200µm x 4µm ribbons, with piston mouvmentDigital mode: light modulated between ON and OFF positionsAnalog mode: ribbons move in order to cancel partially the input light (“gray” scales)

PMDG

Incident lightReflected light

Incident lightReflected light

Incident lightDiffracted light

Incident lightDiffracted light

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

PMDG from Silicon Light Machines (ESA study)1086 pixels

6 ribbons (3 pairs) / pixel3 fixed ribbons / 3 piston ribbonsPixel pitch 25.5µmRibbon width / gap: 3.775µm / 0.475µmRibbon length 220µmActive area 75 x 28254 µm2

Window with visible coatngMonted on PCBHeat sink on the backVmax = 385V Coded on 1024 levels (10 bits)

PMDG from SLM

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Ribbons images / localized sourceFiltering in Fourier plane

PMDG in operation

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

PMDG performances

Device for wavelength selectionFully programmableSteep edge filters, contrast > 30Long term stability and reproducibilityDynamical response (1 MHz)

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Micro-deformable mirrors (MDM), action on wavefront (phase)Actuators arrayContinuous mirrorBoston Micromachines devicesUp to 4096 actuators, up to 5µm stroke.

MDM

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Mirror Surface

ActuatorsSubstrate

Anchoring post

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

First promising concept based on MOEMS : Cloud remover

©ESA Source = MERIS

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

MERIS return of experience :Push-broom spectro-imager for Earth monitoring

Clouds in the field-of-view generates massive straylightSun-glint completely saturates the detector.

Cloud remover

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Spectrometer characteristics (spectrum : 400 nm -> 1020 nm)

Classical design : slit dimensions17mm x 20 microns740 columns

New design : dynamical reflective slitBased on a micro-mirror arrayEnable to reject bright sources

Towards spectrometer

Towards light trap

Cloud remover

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Spectrometer characteristics (spectrum : 400 nm -> 1020 nm)Classical design : transmissive slitNew design : reflective slit

Compliant with the opto-mechanicaldesignEnable to reject bright sources

Spectrometer

FPA

Reflective slit

Cloud remover

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Straylight analysisComplete simulations with ASAPSpectrometer nominal designStraylight ratio :

Straylight level / useful signal

Slit 74x10pLMAX LREF

Pixel 740 Pixel 1

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Straylight without bright sources remover

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Straylight with bright sources remover

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Cloud remover

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

CAD view

Focal plane

Catadioptric objective

Concave grating MEMS / entrance slit

MIRA board

Cloud remover

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Neutral density plates

FOV = clouds + scene

Straylight simulator

L4

Output pupil

CCD camera

White source

DMD

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L2

L3

Input pupil

Slit 74x10pLMAX LREF

T6

Slit 74x10p LMAX LREFT6B (X=10)

T6C (X=20)

T6D (X=30)

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Slit 74x10p LMAX LREFT6Y (X=-38 – out-of-field)

T6Z (X=-30)

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Cloud Ground

Spectrograph simulator

FOV simulator

Cloud remover: demonstration @ LAM

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Bright sources remover experiment results

Profile of the field-of-viewScene @ Lref (left part)Bright source @ Lmax (right part)

green curve: programmable slit is all ONblue curve: the micro-mirrors located on the bright area are switched OFF

Close-up view of the transition areaLight blue curve: perfect scene without the bright source

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Cloud remover: demonstration @ LAM

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Bright sources remover experiment results

Profile of the field-of-viewScene @ Lref (left part)Bright source @ Lmax (right part)

green curve: programmable slit is all ONblue curve: the micro-mirrors located on the bright area are switched OFF

Close-up view of the transition areaLight blue curve: perfect scene without the bright source

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S l i t 7 4 x 1 0 pL M A X L R E F

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Cloud remover: demonstration @ LAM

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Bright sources remover experiment results

Profile of the field-of-viewScene @ Lref (left part)Bright source @ Lmax (right part)

green curve: programmable slit is all ONblue curve: the micro-mirrors located on the bright area are switched OFF

Close-up view of the transition areaLight blue curve: perfect scene without the bright source

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MIRA

Cloud remover: demonstration @ LAM

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Second promising concept based on MOEMS : Tuneable spectrometer with field of view

©ESA Source = MERIS

V sat

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Spectrometer concept for push broom acquisitionUse of a micro mirrors array

One dimension for the FOVOne dimension for the spectral dispersion

Entrance slit

Linear detectorarray

Identical gratings

DMD

DMD for spectral tailoring with FOV

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Entrance slit

Linear detectorarray

Identical gratings

DMD

DMD for spectral tailoring with FOV

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

MOEMS (DMD) characteristicsMicro mirror dimension around 15 µm x 15 µmNumber of micro mirrors in spectral direction around 1000Number of micro mirrors in spatial direction around 2000

Design parameters (other operating points are possible)Spatial resolution = 5 m (for altitude = 700 Km)Total field = 10 Km (2000 pixels)Total bandwidth = 200 nm (ex : from 400 nm to 600 nm)Theoretical spectral resolution can be tuned from 0,2 nm to 200 nm

Instrument characteristics (for here above operating point)Entrance pupil dimension ΦPE = 270 mm Afocal magnification ratio G around 5 (grating size = 54 mm)Focusing focal length fFOC = 380 mm (F-number 7.6)Grating period around 300 lines/mm for visible range

DMD for spectral tailoring with FOV

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

VolumeX :669 Y : 480 Z : 568.

DMD for spectral tailoring with FOV

Bench demonstrator will be developed within a CNES study

Frederic Zamkotsian 8th ESA MNT Round table, Noordwijk, 15 – 18 October 2012

Space optical payloads can benefit from MOEMS technology

Optical MOEMS can bring new services/functionalities in Earth ObservationTwo promising concepts have been proposed and studied:- Cloud removal based on Digital Micro-mirror Array- Tunable spectrometer with field-of-view based on TI’s DMD

frederic.zamkotsian@oamp.fr

MOEMS for Earth Observation

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Spectrometer

FPA

Reflective slit