mso mso –– multi site optimizer multi site optimizer · presenter’s name june 12 to 15, 2011...
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Presenter’s Name June 12 to 15, 2011S Di CACompany
Kevin Fredriksen /Kevin Fredriksen /
San Diego, CA
Kevin Fredriksen / Kevin Fredriksen / MSO MSO –– Multi Site Optimizer Multi Site Optimizer
FF IEEE SW T t W k hIEEE SW T t W k hFor For IEEE SW Test WorkshopIEEE SW Test Workshop
CompanyLogo
Kevin Kevin FredriksenFredriksen, SPA GmbH , SPA GmbH GermanyGermany
Customer support / SalesCustomer support / Sales
OVERVIEWOVERVIEW
MSO HISTORYMSO HISTORYMSO basics and facts
Optimization exampleOptimization example
Multi site layouts & touchdown options
Stepping path algorithmsStepping path algorithms
MEMS wafer test – a multi site quest!
SummarySummary
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 2222
MSO HISTORYMSO HISTORY
Prober Multi site test on prober
Multi site test
p
Wafer= NON-OPTIMIZED
touchdown positioning
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 3333
MSO HISTORYMSO HISTORY
Prober Multi site test on prober
Multi site test
p
?
= NON-OPTIMIZEDtouchdown positioning
Wafer
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 4444
MSO HISTORYMSO HISTORY
MULTI SITE TEST SITUATIONMULTI SITE TEST SITUATIONMulti site test on prober
Most probers do not supply any intelligent stepping algorithms
MULTI SITE TEST SITUATIONMULTI SITE TEST SITUATIONp
Unnecessary high amount of touchdowns to process
As a result: long process times
Highlighted fields signalizepotential touchdown
surplus !
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 5555
surplus !
MSO HISTORYMSO HISTORY
Create a program that minimizes p gtouchdowns by automatic shifting
of touchdown coordinates.
IS-TESTGmbH
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 6666
PRIMARY GOAL: minimize total amount of touchdowns
MSO HISTORYMSO HISTORY
Optimized touchdown positioningTouchdown column shift
o a a ou o ouc do s
Touchdown
Touchdown surplus/fall-out
afterTouchdown row shift
aftercolumn/row shift
6 out of 56 touchdowns saved!
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 7777
MSO
Basics and factsThe benefits and usability of MSO
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 8888
INTRODUCTIONINTRODUCTIONINTRODUCTIONINTRODUCTION
The Multi Site Layout Optimizer (MSO) is an easy to use
software for optimizing multisite layouts.
Less touchdowns The benefits:
Optimized probing path
Optimized hot probing
Find ideal probecard layout
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 9999
MSO workflow AMSO workflow A
Controlmap Physical wafer Multisite probecard
+ +
Optimized steppingOptimized touchdowns
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 10101010
MSO workflow BMSO workflow B
Controlmap Physical wafer Multisite params
+ +
Ideal multi site probecard layout
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 11111111
MSOMSOE l
Complete OptimizationExample
Touchdowns and stepping path
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 12121212
MINIMIZE TOUCHDOWNS
Prober: 44 Tochdowns MSO: 38 Touchdowns
= 14,6 % TD reduction!
Technology: automatic column / row shift
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 13131313
OPTIMIZE PROBING PATH
Prober stepping: 1680mm MSO stepping: 1056mm
= ~37 % Stepping reduction!
Technology: shortest way
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 14141414
TESTTEST--COST REDUCTIONCOST REDUCTIONSS COS UC OCOS UC OWafertype/Prober parameters
Dies to test / Wafer = 3 823 Test Time / TD = 5 sec.Dies to test / Wafer 3.823
Number of DUT = 128
NonNon--optimizedoptimized MSOMSO
Test Time / TD 5 sec.
X/Y Stepping / sec = 100mm
Number of TD / Wafer 44 TD 38 TD
Test time / Wafer 220 sec. 190 sec.
X/Y Stepping / Wafer 1680 mm 1056 mm
Stepping Time / Wafer 17 sec. 11 sec.
Total Test Time / Wafer 237 sec. 201 sec.
Process time reduction /wafer = 36 sec.36 sec. = ~15%
TEST COST REDUCTION!
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 15151515
MSOMSO
Feature Overview
Multi site layouts and touchdown options
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 16161616
MSO TOUCHDOWN OPTIONSMSO TOUCHDOWN OPTIONS
Multi siteshape options:shape options:
Touchdown shifting algorithms:g
COL shift ROW shift
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 17171717
MSO TOUCHDOWN OPTIONSMSO TOUCHDOWN OPTIONS
Untouchable die zones
(=> overlappings/untested)
Manual touchdown edit
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 18181818
MSO MSO RESULT DATARESULT DATA
Touchdown data Stepping path data
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 19191919
MSOMSO
Feature Overview
Stepping path algorithms
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 20202020
MSO STEPPING OPTIONSMSO STEPPING OPTIONS
Meander stepping options
Meander Meander_shift(North-East shift)
Meander_shift(Column shift)
Time optimized stepping
(North East shift) (Co u s t)
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 21212121
Shortest way
MSO STEPPING OPTIONSMSO STEPPING OPTIONS
Hot probing optimizations *
Optimized stepping for more uniform heat expansion
Longest waySpiralRadial
of probe card, tester interface and prober head plate.
* BLEYL, et al, SWTW 2011
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 22222222
, ,
MEMS wafer testMEMS wafer test:: a multi site quest :::: a multi site quest ::
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 23232323
MEMS Waferprocess
MEMS MEMS WaferWaferCAPCAP
SENSORSENSORSENSORSENSOR
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 24242424
MEMS chip structure
SENSOR CAP wafer
electrical testing
b d dlNO-contact area for
test pads surface
probecard needlescontact area probecard needles
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 25252525
MEMS test pads
Probecardneedles
position #1position #1
Probecardneedles
position #2position #2position #1position #1
on MEMS die
position #2position #2
on MEMS die180° DIE rotation!!
Alternating needle position on dies!
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 26262626
MEMS wafer test
Single Single SiteSiteprobingprobing
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 27272727
MEMS single site test
Probecard layoutNeedles contactingupper sensor pads
MEMS die
Chip type a Chip type bChip type a Chip type b
Needle damageby collision withCAP f
Electrical test OKCAP surface test OK
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 28282828
MEMS single site test1. Test 2. Test
2 3 411 2 3 4
180° f
Long wafer process time !
180° wafer rotation!!
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 29292929
MEMS Wafertest
Wh tWhy not process MEMS wafer withinMEMS wafer within
ONEOtest cycle ?
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 30303030
MEMS Wafertest
Multi SiteProbing
!!!!!!
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 31313131
MEMS multi site test
Wh t th t ti l bl kiWhat are the potential blocking points p
for multi site testing
MEMS devices?
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 32323232
MEMS multi site test
Blocking points?Probecard site needles
touching the CAP Wafertouching the CAP Wafersurface (causing damage)
Needles touching CAP area of die Needles touching wafer EDGE area Needles touching wafer EDGE area
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 33333333
MEMS multi site testExample
One touchdown
2x22x2 lti itlti it2x22x2 lti itlti it2x22x2 multi sitemulti sitelayoutlayout
with 1 skip columnwith 1 skip column
2x22x2 multi sitemulti sitelayoutlayout
with 1 skip columnwith 1 skip column
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 34343434
MEMS multi site test
First touchdownFirst touchdown
MS layout
1
2
3
4 Special steppingl ith f MEMS1 3 algorithm for MEMS
to avoid CAP contact
MEMS device can be tested in ONE probing cycle!
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 35353535
MEMS multi site test
WAFER EDGE ZONE !!!WAFER EDGE ZONE !!! Needle damage!
SOLUTION → see next page
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 36363636
MEMS multi site testUNTOUCHABLE DIES
Automatic touchdown repositioning → creating 2 double touched dies!
=> Safe needle contacting via untouchable die zones !
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 37373737
MEMS multi site test
WAFER EDGE ZONE !!!
26 241
2
26
27
28 12
25
24
2726
2829
30 25
1
Automatic touchdown repositioning → creating 6 double touched dies here !
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 38383838
MEMS multi site testBlocking points?Blocking points?
Contact of probecard and
CAP/EDGE wafer can
be a oided b intelligentbe avoided by intelligent
touchdown positioning!p g
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 39393939
SUMMARYSUMMARYSUMMARYSUMMARYMSO optimized touchdown positioning increases prober test efficiency and saves process time!
MSO is able to provide special stepping pathMSO is able to provide special stepping path algorithms, which are useful to:
compensate probing-related problems such as needle expansions during HOT PROBING (already used by customer NXP)
handle wafer-specific features and optimize the handle wafer specific features and optimize the test process (e.g. MEMS / future prospect)
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 40404040
ACKNOWLEDGEMENTSACKNOWLEDGEMENTSACKNOWLEDGEMENTSACKNOWLEDGEMENTS
Jan Martens (NXP Germany)Jan Martens (NXP Germany)
Torsten Liese (IS-TEST)
Axel Dressel (SPA GmbH)
Georg Sauer (SPA GmbH)
Thomas Schäfer (SPA GmbH)
l d d k ( G b )Roland Fredriksen (TRF GmbH)
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 41414141
THANK YOUTHANK YOUVERY MUCH FOR YOURVERY MUCH FOR YOURVERY MUCH FOR YOUR VERY MUCH FOR YOUR
ATTENTION! ATTENTION!
Questions?Questions?Questions?Questions?
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 42424242
SPA Software Entwicklungs GmbHSeifartshofstr. 12-1496450 CoburgGERMANYGERMANY
Phone: +49(0) 9561/79 47 0Fax: +49(0) 9561/79 47 77
Web: www.spa.deMail: info@spa.de
June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011June 12 to 15, 2011 IEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test WorkshopIEEE SW Test Workshop 43434343
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