manish yadav

BK BIRLA INSTITUTE OF ENGINEERING & TECHNOLOGY,

PILANI

Department of Electronics and Communication Engineering

A

PROJECT PRESENTATION

ON

“DESIGN AND SIMULATION OF GRAPHENE PIEZORESISTIVE MEMS PRESSURE SENSOR ”

Presented By: Guided by: Manish Kumar 11EBKEC032 Dr. Kulwant Singh

(Assistant Professor)Abhishek Kumar 11EBKEC002 (Dept. of Electronics & Communication)

.

OUTLINES :

1. Introduction 2. Pressure sensor simulations

3. Results4. ConclusionsAcknowledgmentsReferences

Micro Electro Mechanical Systems (MEMS)

Micro(small)

Electro(electric components/functionality)

Mechanical(mechanical components/functionality)

Systems(integrated, system-like functionality)

http://eed.gsfc.nasa.gov/562/SA_MEMs.htm

http://www.memx.com/

http://www.memx.co

m/

http://www.forbes.com/2008/04/22/mems-apple-

nintendo_leadership_clayton_in_jw_0421claytonchristensen_inl_slide.html

Piezoresistive Pressure Sensors

Wheatstone Bridge configuration

PHYSICAL CAUSES OF PIEZORESISTIVITY PRESSURE LEADS CHANGE OF RELATIVE DIMENSION LEADS CHANGE OF RESISTANCE

5

WORKING PRINCIPAL : Wheatstone bridge circuit

R

RVV

RRR

RRR

RRR

RRR

RR

R

RR

RVV

s

s

0

44

33

22

11

43

3

12

20

• 2-dimensional hexagonal lattice of carbon

• sp2 hybridized carbon atoms

• Basis for C-60 (bucky balls), nanotubes, and graphite

• Among strongest bonds in nature

Graphene ?

Ref. A. K. Geim & K. S. Novoselov. The rise of graphene. Nature Materials Vol 6 183-191 (March 2007)

PRESSURE SENSOR SIMULATION

Dimension of the Silicon substrate

The 2D finite element of the sensor chip is established in COMSOL 4.3 and

the model analysis and static analysis are carried out.

Description Value(μm)

Length of Silicon 4000

Width of Silicon 4000

Thickness of Silicon 400

Working flow in COMSOL

1 Model 1 (mod1) 1.1 Definitions 1.2 Geometry 1 1.3 Materials 1.4Electromechanics(emi) 1.5 Mesh 1 2. Study 1 2.1 Stationary 3. Results 3.1 Data Sets 3.2 Plot Groups

STAGE 1: Deals With simple Etched Silicon

STAGE 2: Deals with Etched Silicon with deposited sio2

Stage 3 Mesh

RESULTS

The simulation of MEMS Piezoresistive Pressure sensor lead to

the response frequency will be determine.

**FUTURE WORK

Plot pressure vs displacement

Plot pressure vs change in resistance

Compare Graphene results with silicon

Application of piezoresistive pressure sensor

• Pressure sensing

• Altitude sensing

• Flow sensing

• Level / depth sensing

• Leak testing

CONCLUSIONS *

Graphene show excellent electrical conductivity compared to any other Nano-material super flexibility, and stretch ability up to 20% can be exploited. Furthermore, the resistivity of Graphene varies linearly with strain.

(*) Used for expectation

ACKNOWLEDGMENTS : Prof. L Solanki(Dean ECE/EE/EX BKBIET, Pilani)

- Dr. Kulwant Singh- (Assistant Professor)(Dept. of Electronics & Communication)

REFERENCES :

• Graphene based piezoresistive pressure sensor, Shou-Eu Zhu, Murali Krishna Ghatkesar,Chao Zhang, and G.C.A.M. Janssen

• Cantilever based MEMS pressure sensor using different piezoelectric Materials: A comparative study , Ashish Kumar, C. Periasamy and B.D. pant

THANK YOU