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LTCC TECHNOLOGY FOR MESOSYSTEMS

Mário Ricardo Gongora-Rubio

LTCC TECHNOLOGY

–LTCC was originally developed by Hughes and DuPont for Military Electronic Systems.

– The (LTCC) technology can be defined as a way to produce multilayercircuits with the help of single tapes, which are to be used to apply conductive, dielectric and / or resistive pastes on.

–These single sheets have to be laminated together and fired in one step all.

Multi Chip Module Bluetooth Interface (National)

Meso Meso

SystemSystem

ModuleModule

TECHNOLOGY VISION

ActuatorMicro

Fluidics

LTCC DEVICE FABRICATION PROCESS

LTCC FLOW SENSORS

A-A

Layer

Layer 2 Layer 3

Layer 4 Layer 5 Cross-section A-A

L1

L2

L3

L4

L5

Layer 1

Fabricated Device

0 1 2 3 420

25

30

35

40

45

50

Dissipation factor Vs. Flow velocity k = 18,79 + 31,03 * e(-vf / 1,66) for exponential regression

Diss

ipat

ion

Fact

or (W

att/K

elvin

)

Flow Velocity (SLM)

Experimental Set-Up

Device Lay-out

Front view

Side view2 mm

MESO-SCALE PLASMA GENERATOR

OXYGEN SENSORS

The dissolved oxygen (DO) sensor is one of the most important sensors forenvironmental monitoring.A Clark-type DO sensor using

(LTCC) targeted for continuous monitoring applications wasimplemented.

0 20 40 60 80 1000

100

200

300

400

500

-I(nA

)

dissolved oxygen (%)

3D MICRO MIXERS IN LTCC

3D Serpentine Micromixers can be used for chemical Microreactors in order to fabricateemulsions, particle packaging and nanomaterial fabrication

10 mm

LedFT

A/DSalidas digitalesPCL 812

Puerto serie

LTCC Device

Ordenes y respuestas

LedFT

A/DD/A OUTPUT

CONTROL

LAB ON A PACKAGE APPLICATION TO ANALYTICAL PROCEDURES

HEAVY METAL DETECTION

–Among several electroanalytical methods, differential pulse anodic stripping voltammetry (DPASV) and square-wave anodic stripping voltammetry (SWASV) are candidates for this application due to theirs inherent characteristics of pre-concentration, achieving part-per-billion sensitivity.

–Gold is a chosen material for the detection electrode due its sharp and high stripping peaks.

FIA MANIFOLD WITH SENSOR ELECTRODES

Fluid Merging Passive Mixer Measuring Cavity

Sensor Array

Nozzle

Inlets

Fluid Outlet

CHLORIDE ION WITH POTENTIOMETRIC DETECTION

[Cl-] (ppm)

1 10 100 1000

Pea

k he

ight

(mV

)

0

20

40

60

80

100

120

140

Time (s)

0 20 40 60 80 100 120 140 160 180

Pote

ntia

l (m

V)

-260

-240

-220

-200

-180

-160

-140

-1205ppm

10ppm

20ppm

40ppm

50ppm

80ppm

100ppm

200ppm

250ppm

500ppm

DiscAg2S/AgCl

Cable

599±70603S6

31.2±0.833.2S5

26±222.8S4

17±214S3

11.5±0.87S2

16±212S1

Cl- (ppm)LTCC (n=3, 95%)

Cl- (ppm)CESample

NoInterception:3±3Slope:0.99±0.01 r2=0.9999

Linear regressionLTCC vs CE

Notcal=1.065, ttab=2.571 tcal<ttabPaired t test

LAB ON A PACKAGE APPLICATIONS

Grupo de Sensores y Biosensores

Universidad Autónoma de Barcelona (GSB)

Radiografía RX

Cobalt disc

Cable

3cm

6cm

ab

c

d

e

gh

f

f1 f2

f3

f4

ION PHOSPHATE ANALYZER WITH POTENTIOMETRIC DETECCION

Grupo de Sensores y Biosensores

Universidad Autónoma de Barcelona (GSB)

[H2PO4-] (ppm)

0.1 1 10 100

Pot

enci

al (m

V)

0

20

40

60

80

100

Cali1: E=-21.86+83.94·log(x+1.974); LD=1.57 ppmCali2: E=-22.83+84.85·log(x+1.925); LD=1.78 ppmCali3: E=-13.18+76.91·log(x+1.615); LD=1.65 ppmCali4: E=-16.88+76.61·log(x+1.779); LD=1.62 ppmTemps (min)

0 2 4 6 8 10 12

Pot

enci

al (m

V)

320

340

360

380

400

420

440

0.2ppm 0.5ppm1ppm 2ppm 4ppm 8ppm 10ppm 15ppm 20ppm

Carrier [KHP]=0.025MSample Volumen: 2.4-3.2mlFlow: KHP: 1.6ml/min; Sample: 1.2ml/min

LOD : 1.8±0.3ppm

ION PHOSPHATE ANALYZER WITH POTENTIOMETRIC DETECCION

Grupo de Sensores y Biosensores

Universidad Autónoma de Barcelona (GSB)

NITRITE ION ANALYZER WITH COLORIMETRIC DETECTION

OpticWindow RX

Time (s)

0 20 40 60 80 100 120 140 160 180

Abso

rban

ce

-0,1

0,0

0,1

0,2

0,3

0,4

0,5

0,6

0.1ppm0.5ppm1ppm2ppm5ppm7ppm10ppm

[NO2-] (ppm)

0 2 4 6 8 10 12

AB

SOR

BAN

CIA

0.0

0.5

1.0

1.5

2.0

2.5

Q=5.83µl/sVol. sample & reactant =29µlRange 0.1-10ppmr2=0.9959

Abs=-3.31·10-3+0.048·[NITRITE]

Grupo de Sensores y Biosensores

Universidad Autónoma de Barcelona (GSB)

Lab on a Package

LTCC Device

Conectores: 3Entrada: 3

Canal superior: 2Conexión canales: 3

Canal inferior: 2Base: 2

TOTAL: 15 CAPASMIXER

ION AMMONIUM ANALYZER WITH POTENTIOMETRIC DETECCION

Grupo de Sensores y Biosensores

Universidad Autónoma de Barcelona (GSB)

PVC

PVC

PVDF

NH4+ + OH-

NH3

MostraAigua

NaOHWaste

TRIS

WasteESI REF

MostraAigua

NaOHWaste

TRIS

WasteESI REF

[NH4+] (ppm)

0.1 1 10

Alçada de pic (m

V)0

20

40

60

80

100

120

E=20.27+62.62·log([NH4+]+1.044)

r2=.99318

OPTIMIZED PARAMETRES:Accumulation time: 2minLOD=1.044ppmTRIS: 0.01MNaOH: 0.1M

E=20.27+62.62·log([NH4+]+1.044)

Grupo de Sensores y Biosensores

Universidad Autónoma de Barcelona (GSB)

ION AMMONIUM ANALYZER WITH POTENTIOMETRIC DETECCION