jl – 5/4/01 engineering data analysis challenges in semiconductor manufacturing joe lebowitz...
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JL – 5/4/01
Engineering Data Analysis Challenges Engineering Data Analysis Challenges in Semiconductor Manufacturingin Semiconductor Manufacturing
Joe Lebowitz
Director - Yield Engineering
Texas Instruments Inc.
Kilby Fab
5-4-01
(972) 995-2994 jlebowitz@ti.com
© 2001,Texas Instruments, Inc. - All Rights Reserved.
JL – 5/4/01
Our propensity to collect data is unparalleled, our ability to turn that data into useful information is…. catching up
One of our most important and plentiful products - but we don’t sell data!
We need to be able to use our data to maximize our product output – this demands an intuitive knowledge of how to interpret the analysis output.
More Data is Good, Good data is More!
EDA for Semiconductor MfgEDA for Semiconductor Mfg
JL – 5/4/01
EDA for Semiconductor MfgEDA for Semiconductor Mfg Faster data transfer and larger storage capacity is making huge
amounts of data available to engineers In today’s SC Mfg, new data streams are becoming available
Wafer and Die (chip) based data Process tool based data from Equipment Interfaces Advanced Process Control systems, Fault detection dataEvent data from PM’s, chemical batch changes, environmental conditions
Tens-hundreds of thousands of parameters collected on each lot/wafer. Much of this data is esoteric, but at any given moment a small percentage may be crucial!
How do we know what’s important? What isn’t? How do we minimize time to understanding?How do we mine all the data for maximum impact?How can we best visualize the data & translate it into meaningful action?
JL – 5/4/01
Engineering Data Analysis is a vital, integral part of Semiconductor development and manufacturing. The timely detection of problems, centering of complex process
interactions, and yield improvement hinges on efficient data analysis.
Most Engineers, faced with overwhelming amounts of data, will rely upon the analysis system to guide them to the pertinent information. This is becoming a more reliable thing to do as analysis systems become
more sophisticated.However, even the most sophisticated system, relying on rigorous
statistics, is often still far behind an experienced engineer’s intuitive analysis.
To the extent that Spotfire can enhance the experience of the engineers using it the tool will add greatly to the value of the data analysis efforts
EDA for Semiconductor MfgEDA for Semiconductor Mfg
JL – 5/4/01
Today’s highly data intensive semiconductor manufacturing environment requires specialization in the field of data analysis, yet much of the time we desire that our engineers do their own analysis.
Tools such as Spotfire can help ease the burden of doing good analysis quickly
The ability to center in on the important findings is key
EDA for Semiconductor MfgEDA for Semiconductor Mfg
JL – 5/4/01
WW38 Composite 6 lots WW39 Composite 25 lots
Product Engineering investigated a spatial pattern at Probe,
it was getting worse too.
EDA for Semiconductor MfgEDA for Semiconductor MfgEXAMPLEEXAMPLE
JL – 5/4/01
An analysis was run looking at differences in Parametrics in defined wfr areas. Many showed up as significant.
EDA for Semiconductor MfgEDA for Semiconductor MfgEXAMPLEEXAMPLE
JL – 5/4/01
The task at hand: Guide
our Engineers to the true solution as quickly as possible
The Analysis system showed many parameters as being statistically significant, yet only one really was. A lot of time went by while trying to determine which process to fix!
Time to fix = Lost Revenue!
EDA for Semiconductor MfgEDA for Semiconductor Mfg
JL – 5/4/01
Relationship “picked” by the analysis software - Regression line shows
continuous function. Should we even pick a regression through this shotgun
blast?!?
More intuitive Engineering “judged” relationship - Yield Cliff
Engineering Intuition (Experience)Engineering Intuition (Experience) Many Engineers, when faced with massive amounts of data, will
rely upon the analysis system to find a relationship. This may NOT always be the best way to look at the data!
EDA for Semiconductor MfgEDA for Semiconductor Mfg
JL – 5/4/01
Key Elements of a Data Analysis SystemKey Elements of a Data Analysis System
Fast & reliable, easy to learn and use
Provides both canned and customized analysis for the full spectrum of needs and users (Technician to Mgmt)
Capable of handling huge volumes of data from multiple sources
Works as an early warning system, monitoring for important changes
Data sourcing and formatting should be transparent to most users
EDA for Semiconductor MfgEDA for Semiconductor Mfg
JL – 5/4/01
Bitmap
Variable Definition
Limits Information
Device Definitions
Device Set-Up
Wfr Position
Defects
Split Information
Wafer Processing
In-Line Electrical
Parametric
Probe
Reliability
Final Test
Electrical Analysis
Process
Characterization
Physical FA
Customer Returns
Physical Analysis
Factory Automation
Tool State
Design Rules
Layout
APC controller
EDA for Semiconductor MfgEDA for Semiconductor Mfg
JL – 5/4/01
Must enhance the engineer’s knowledge of what the results mean, what actions need to be taken, and how to communicate all this.Easily interpreted results – visualization is key!
Reduce “false” signals which translate into lost revenue and opportunity
Engineering oversight on analysis resultsThe ability to interact with the data real time during the analysis
is key to keeping engineers involved in the analysis – this is a core strength of Spotfire
Key Elements of a Data Analysis SystemKey Elements of a Data Analysis SystemEDA for Semiconductor MfgEDA for Semiconductor Mfg
JL – 5/4/01
Key Elements of a Data Analysis SystemKey Elements of a Data Analysis SystemTo maximize effectiveness an analysis system should be
adaptive, learning what is and is not important and adjusting accordingly. Building an intelligent relational data base (i.e. last time the
PVt was 2mV off there was a problem with IMP02’s flood gun)
Must be able to comprehend how the Semiconductor Fab really runs Dedication schemes, process tweaks, non-centered to limits,
Bottleneck tools etc…
EDA for Semiconductor MfgEDA for Semiconductor Mfg
JL – 5/4/01
Provide high level capabilities for most engineers yet also function as an expert system for statisticians and Data Analysis experts.High level capabilities needed for routine, quick analysisMore detailed capabilities for deeper, searching kinds of
applications
The data analysis system must enhance the engineer’s experience and allow intuition to be used, pointing them in the right direction to find significant signals as fast as possible and communicating them effectively.
Key Elements of a Data Analysis SystemKey Elements of a Data Analysis SystemEDA for Semiconductor MfgEDA for Semiconductor Mfg
JL – 5/4/01
Imm
edia
cy a
nd
Sim
pli
city
Breadth and Depth
SAS
Web Tools
Mid Level Tools
Web
Rep
ortsWeb Reports
And Tools
Webtools
Mid Level Packages
High Level / User Customizable
Packages
• Few PE / PI / PDE• Analysis Specialists• Statisticians
Broad and Deep Analysis
• Large Scale Correlation• Cross Platform Analysis • Data Mining
• Advanced Training in Stats & Analysis methods
• Auto Reports• Browse able• Yields & Trends
• All Engineers• Product Lines• Management
• No special training
Point/Click Standards
Rapid Routine Analysis
• Process Integration• Product Engineering• Equip & Process Eng.
• Variable Correlation• Split Analysis• Simple Statistics
• General Technical Training
Complex and Specialty Analysis • Most PI / PDE/YE• Limited PE/EE• Analysis Specialists
• Complex Analysis• DD Test die• Rigorous Statistics
• More Specific Statistical & Analytical Training
Semiconductor Data Analysis Tool BoxSemiconductor Data Analysis Tool Box
JL – 5/4/01
Scatter Plot
LOG_DATE
005100510051
2336
4396
6054
7506
7896
8396
8716
12/16/00 11:59:26 PM 12/27/00 1/6/01 1/16/01 1/26/01 2/5/01 2/15/01
ILD2 loop Process Commonality:
ILD 2 Liner depo: DC49-2.
ILD2 HSQ depo: LT01C
Spotfire “Lot collision” curve
0343166 Lnom: 23.8%, Vcc 22.2%, Gross 27.8%
0343151 Lnom: 38.5%, Vcc 17.9%, Gross 5.1%
0348500 Lnom: 20.7%, Vcc 33.8%, Gross 16.7%
SRAM Fail vs ILD1 HSQ Edge Thickness
Thickness (A)
468
101214161820
35203540356035803600362036403660 3680
Old metal
New metal
SR
AM
fai
l rat
e (%
)
EDA for Semiconductor MfgEDA for Semiconductor Mfg
Early examples of Spotfire used in Semiconductor Mfg at TI that have helped visualize
problems and reach resolution
JL – 5/4/01
SummarySummaryToday’s Engineering Analysis systems are becoming
more proficient at providing meaningful resultsHowever, due to ever increasing volumes of data there is
more “noise” in the analysis due to random correlationsEngineers must be able to utilize their experience and
intuition in interpreting analysis results - “What makes sense?”
The unique ability to visualize the data and analysis results embedded in Spotfire allows it to be immediately useful in the SC environment
EDA for Semiconductor MfgEDA for Semiconductor Mfg
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