introduction to mems and mems pro
Post on 04-Feb-2015
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MEMS & MEMS PRO
Presenter: Abdelrahman Samy El-Tamawy
AGENDA
• MEMS Overview• Modeling and Simulating MEMS• Finite Element Method• MEMS PRO Tool
MEMS OVERVIEW
Micro
Electro
Mechanical
Systems
Definition
MEMS OVERVIEW• Size μ
MEMS OVERVIEW
• Biotechnology• Vehicles• Smart devices• Printers• Projectors
APPLICATIONS
MEMS OVERVIEW
• Vehicles
APPLICATIONS
VIDEO
MEMS OVERVIEW
• Silicon• Polymers• Metals• Ceramic
FABRICATION MATERIAL
MEMS OVERVIEW
• Deposition• Lithography• Etching
FABRICATION PROCESS
MEMS OVERVIEWFABRICATION PROCESS
MODELING AND SIMULATING MEMS
• Real experiments cost• Physical model• Mathematical models • numerical models
• FEM (Finite Element Method)
• BEM (Boundary Element Method)
MODELING AND SIMULATING MEMS
• Approximate solution• Dividing• Simpler approximation• Global approximate solution• Tools (COMSOL/ANSYS)
FINITE ELEMENT METHOD
MEMS PRO
MEMS PRO
• Set of CAD tools• Allow data sharing• Design and Analysis• 3D model generation• Powerful optimization
algorithms• For MEMS and IC devices
WHAT IS MEMS PRO
MEMS PRO
• Behavioral model from FEA• Different formats• 3D Modeling w.r.t Fab sequence• Cross section viewer
MODELING TOOLS
MEMS PRO
• Cell view• Symbol Mode
• Schematic Mode
• Objects• Primitives
• Instance
S-EDIT (SCHEMATIC-EDIT)
MEMS PROS-EDIT
MEMS PROS-EDIT
• Mechanical elements
MEMS PROS-EDIT
• Optical elements
MEMS PRO
• Functionality• Tracing specific node• Collapsing charts
W-EDIT (WAVE-EDIT)
MEMS PROW-EDIT
MEMS PRO
• Functionality• Library Palette
L-EDIT (LAYOUT-EDIT)
MEMS PRO
• Library paletteL-EDIT
MEMS PROL-EDIT
• Plate• Comb drive
MEMS PROL-EDIT
MEMS PROL-EDIT• Technology
manager
MEMS PROL-EDIT• 2D/3D Model view
MEMS PROL-EDIT• 2D/3D
Model view
MEMS PROL-EDIT• Running
simulation
MEMS PRO
• Layout vs. Fabrication• Flexible DRC
DESIGN RULE CHECKER
MEMS PRODRC• Complete set of DRC
MEMS PRODRC• Specific DRC
command
MEMS PRODRC• Min Distance• Min Overlap• Min spacing• Min surround
MEMS PRODRC
• Run• Verification
Error Navigator
MEMS PRODRC• Current distance:
2um.• Rule distance:
> 4um.
MEMS PROOPTIMIZATION
MEMS PROEXPORTING MODEL
MEMS PROWHAT NEXT?
• Analysis (FEM – BEM)• Pre-Fabrication• Fabrication
MEMS PROANSYS
MEMS PROEND
NEXT: ANSYS TOOL WITH IBRAHIM AWAD
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