gas mass flowmeters

Gas Mass Flowmeters

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Overview

GFM2 – Gas Mass Flowmeter

GFM3 – Gas Mass Flowmeter

Push Button Configuration

GFM4 – Gas Mass Flowmeter

Temperature and Pressure Monitoring

GFM2 - Specifications

Service: Clean dry gasesAccuracy: ±1% FSTemperature Limits: 0 to 50 °CPower Supply: 11 to 26 VDCLeak Integrity: 1 x 10-9 ml/sec of HeFlow Ranges: From 10 ml/min to 100 l/minCalibration: NIST certificate standard

GFM2 - Features

Programmable totalizer Two user-programmable electromechanical SPDT relays with latching option

GFM2 - Features

User-selectable analog

0 to 5 VDC or 4 to 20 mA outputsInternal conversion factors for up to 32 gasesDigital interface option

RS-232, RS-485, or Profibus

GFM3 - Specifications

Service: Clean dry gasesAccuracy: ±1% FSProcess Temperature Limits: -10 to 50 °CPower Supply: 12 VDC; 15 VDC, or ±24 VDCLeak Integrity: 1 x 10-9 ml/sec of HeFlow Ranges: From 10 ml/min to 100 l/minCalibration: NIST certificate standard

GFM3 - Features

Four button keypad and large LCD with backlightProgrammable 12 digit totalizer Two SPDT relays with latching option for high or low alarm outputs

GFM3 - Features

Internal conversion factors for up to 32 gasesDigital interface option

RS-232, RS-485, or Profibus

GFM4 - Specifications

Service: Clean dry gasesAccuracy: ±1% FSProcess Temperature Limits: -10 to 50 °CPower Supply: 12 VDC; 15 VDC, or ±24 VDCLeak Integrity: 1 x 10-9 ml/sec of HeFlow Ranges: From 10 ml/min to 100 l/minCalibration: NIST certificate standard

GFM4 - Features

Flow, Pressure, and Temperature measurement and outputFour button keypad and large LCD with backlight and programmable 12 digit totalizer

GFM4 - Features

Two SPDT relays with latching option for high or low flow or pressure alarm outputsInternal conversion factors for up to 32 gasesDigital interface option

RS-232, RS-485, or Profibus

Flow Scale OptionsFLOW RATE

BODY SIZE REQUIRED FOR THE GIVEN GASAIR AR C2H2 C3H8 C4H10 CH4 CO CO2 HE HF H2 N2 NH3 O2 SO2

10 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 01020 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 01050 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 010

100 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 010200 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 010500 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 010

1000 ml/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 0102 l/min 010 010 010 010 010 010 010 010 010 010 010 010 010 010 0105 l/min 010 010 010 050 050 010 010 010 010 010 010 010 010 010 010

10 l/min 010 010 050 050 100 050 010 050 010 010 010 010 050 010 05020 l/min 050 050 050 100 100 050 050 050 050 050 050 050 050 050 05030 l/min 050 050 100 100 050 050 050 050 050 050 050 050 050 05040 l/min 050 050 100 100 050 100 050 050 050 050 100 050 10050 l/min 050 050 100 100 050 100 050 050 050 050 100 050 10060 l/min 100 100 100 100 100 100 100 100 100 100 100 10080 l/min 100 100 100 100 100 100 100 100

100 l/min 100 100 100 100 100 100

Applications

Critical flow testing environments such as analytical laboratories

Used to measure and control gas flow rate into environmental chambers to provide accurate gas concentrations

Applications

Gas burner meteringUsed to measure gas flow rate to burner, and totalize gas consumption

Applications

Widely used in equipment for the semiconductor industry

Chemical Vapor DepositionEtchingBackside Wafer Cooling

Applications

Semiconductor Industry:Chemical Vapor Deposition

Precise amounts of precursor gases are flowed into a reaction chamber to create thin film coatings

Applications

Semiconductor Industry:Wafer Etching

Inert gas flow is used in a high flow purge step between the wafer etching process and the cleaning process to limit wafer exposure to moisture or oxygen

Applications

Semiconductor Industry:Backside wafer cooling

Gases, such as helium, flow across the wafer to reduce the temperature during processing

Applications

Pharmaceutical IndustryMass flowmeters are used to monitor precise air flow rates in tablet coating machinery

Applications

Pharmaceutical IndustryMass flowmeters are used to measure the amount of inert and reactant gases into bioreactors

GFM3 – Demonstration

GFM3 with Power and communication connection cable

GFM3 – Demonstration

25 pin connection for power, outputs,

and communication

Process inlet

connection

Process outlet

connectionProduct label showing model, calibrated flow

rate and gas, and serial number

User Interface Buttons

Backlit LCD

Display

GFM3 – Demonstration

Process value

Calibrated gas

Full scale range

Totalizer value

Flow rate units

GFM3 – Demonstration

Display will show some amount of flow while warming up

GFM3 – Demonstration

Within a few minutes the flowmeter will settle at zero

GFM3 – Demonstration

Changing Units of Measure

Press to enter the Main MenuUse the and keys to cycle through the menu and highlight sub-menu “Units of Measure”Press to enter into the sub menu

GFM3 – Demonstration

Changing Units of Measure - Continued

Use the and keys to cyclethrough the menu optionsHighlight “mL/min” and press to select this optionDisplay will return to the Main Menuand “Current Units: mL/min” will be displayed at the bottomPress to exit the main menu

GFM3 – Demonstration

Units changes from % to mL/min

GFM3 – Demonstration

Configuring the TotalizerPress to enter the Main MenuUse the and keys to cycle through the menu and highlight sub-menu “Totalizer”Press to enter into the sub menu

GFM3 – Demonstration

Configuring the TotalizerUse the and keys to cyclethrough the menu optionsHighlight “Mode Run/Stop” and press to select this optionPress once to highlight “Run” and then press to activate thetotalizerTOT: S at the bottom of the display will change to TOT:R to indicate the totalizer is in run mode

GFM3 – Demonstration

Configuring the TotalizerThe “Start at Flow” option is used to set a minimum flow rate before the totalizer will start accumulating the total flowThe “Stop at Total” option is used to set a maximum limit for the total flow accumulationThese values are shown at the bottom of Totalizer menu display for reference

GFM3 – Demonstration

Configuring the TotalizerThe totalizer value can be reset with the “Reset to Zero” option

GFM3 – Demonstration

Totalizer