determining the refractive index of scandium oxide in the euv using kramers-kronig on thin-film...

Determining the refractive index of scandium oxide in the EUV using Kramers-Kronig on thin-film transmission data

Jacque Jackson

multilayer mirror

normalized data

Kramers-Kronig Dispersion Relations

Graph of delta from synthetic data and the KK calculated from the synthetic beta data

Graph of the percent difference between the two

Graph of RTdelta and the KK calculated from the RT beta

Graph of the percent difference between the two

Results of truncating the data set

Results of truncating the data set

Results of KK analysis on RT beta data that has not been smoothed

Results of KK analysis on RT beta data that has been smoothed

Results of KK analysis on RT beta data that has not been augmented with CXRO data – plotted with the RT and CXRO delta data

Results of KK analysis for density of 3.2 g/cm3 – For this density, the KK calculation is less than the experimental calculation, but with a similar shape, at lower energies and follows

neither CXRO nor experimental values at higher energies.

Results of KK analysis for density of 3.86 g/cm3 – For this density, the KK calculation is greater than the experimental calculation, but with a similar shape, at

lower energies and matches CXRO values more closely at higher energies.

Percent difference between RT delta and delta calculated from KK analysis on RT beta augmented with synthetic data

Graph of the delta calculated from KK analysis on RT beta augmented with synthetic data, plotted with the RT delta and the delta provided by CXRO for

the density being used (3.86 g/cm^3)

Future Research

• Obtain data below 30 eV• Account for roughness in calculations• Use this method on other materials with

features at different energies• Check on the reliability of data obtained

from CXRO

Acknowledgements

• Dr. Allred• Dr. Turley• Guillermo Acosta