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vacuum
Ultra-high VacuumComponentsFlange Components, Valves and Feedthroughs
C15
181.01.02Excerpt from theLeybold Vacuum Full Line Catalog 2005Product Section C15Edition May 2005
C15
Contents / General
IntroductionAccording to DIN 28400, the term“Ultra-high Vacuum (UHV)”designates the pressure range below10-7 mbar.
Several physical quantities, such asmean free path, monolayer time, flowdensity of the particles impinging onthe walls, leak rate and the degas-sing rate are of significance in thecharacterization of this pressurerange. For the definitions of thesequantities refer to technicalpublications on this subject.
In order to attain or maintainpressures below 10-7 mbar, thefollowing pre-conditions must be met:
� The vapor pressure of the pumpfluid or lubricant should be in
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.02
ProductsCF Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.03
UHV Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.08
Accessories for UHV Components . . . . . . . . . . . . . . . . . . . . . . . . . . C15.11
UHV Observation Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.13
UHV Sapphire Observation Windows . . . . . . . . . . . . . . . . . . . . . . . . C15.14
UHV All-Metal Right-Angle Valves . . . . . . . . . . . . . . . . . . . . . . . . . . C15.15
UHV All-Metal Variable Leak Valves . . . . . . . . . . . . . . . . . . . . . . . . . C15.16
UHV Feedthroughs, Mechanical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.17Electric . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.19
Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C15.21
UHV Liquid Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C15.24
Leybold Vacuum Full Line Catalog 20052
Ultra-high Vacuum Components
vacuum apparatus including itsinstallations, are desorbed.Consequently, components for UHVsystems are generally made of stain-less steel. Metal gaskets, ceramicfeedthroughs and bakeable obser-vation windows are used exclusively.
For applications in the extreme UHVrange (XHV) the outgassing rate ofthe CF flanges and the UHV compo-nents can be reduced by about twoorders of magnitude by a specialdegassing process.
The high standard of developmentand manufacture combined with theuse of high quality materials guaran-tee that UHV components fromLeybold are able to meet even themost demanding requirements.
accordance with the desiredultimate pressure
� the leak and degassing rates ofthe entire apparatus including itsinstallations must be extremelylow.
Generally, both leak rate and back-streaming effects through the pumpcan be kept at sufficiently low levelsby using suitable UHV sealingmaterials and pumps.
However, a sufficiently low out-gassing rate can only be achieved bybaking out the entire apparatus attemperatures of about 300 °C for alonger period of time. It is only underthese conditions that the mono-layersof atoms or molecules, which attachquite firmly to the surfaces of the
Advantages to the User� Stabilized Leybold knife-edge
� High reliability
� Special knife edge profiles ensurethe highest degree of leaktightness
� Flange connection can be bakedout up to 450 °C
� Easy to assemble, helium-tight
� For use either with a flat gasketmade of OFHC copper (oxygen-free) or FPM O-ring
� Self-centering
� Fixed and rotary flanges in almostany size
� Symmetrical flange connection
� Equal sealing profiles
� Small outside diameter withrespect to the nominal width
� Can be joined by welding orbrazing using any desiredprocess, also with other nickelchromium steel grades
Leybold Vacuum Full Line Catalog 2005 C15
CF Flanges Ultra-high Vacuum Components
During this process the coppergasket adapts it-self optimally to themicrostructure of the outer knifeedge. This explains the high sealingeffect and the especially low leakrates of CF flange connections. Aradial grove extending right up to thesealing ring is provided for leaktesting of the flange connection. Inorder to ensure that the sealing knifeedge is not damaged during frequentuse of the flanges, the conventionalgeometry of such knife edges for CFflanges has been developed further.By using the Leybold developedobtuse angled knife edge profile the
The CF flange connection consists oftwo identical flanges with a flatgasket made of OFHC copper, bolts,nuts and washers.
CF Flanges
3
Sealing PrincipleWhen assembling the CF flangeconnection, the flat copper gasket fitswith a slight clearance into the outerrecess of the flanges and thusassures good centering of the flangeconnection. If the flange bolts areproperly tightened according to theinstructions, the knife edge of theflanges penetrates into the flat cop-per gasket, whereby the shear actionof the outer face of the cutting edge -as seen from the flange axis -produces a yield pressure on thecopper gasket, while the inner face ofthe edge produces a cutting action.
strength of the sealing knife edgeshas been significantly stabilized. Inaddition to the actual knife edge, theflanges are provided with a con-centric sealing surface for placementof a FPM gasket or a supporting ringwith FPM O-ring, which may bebaked up to 150 °C (does not applyto observation windows).
This design has the advantage, that itis possible to equip the apparatuswith elastomer gaskets prior to finalassembly, so that the system can betested under normal high vacuumconditions.
Technical Data
DN CF
Outside diameter o. D. inch
Outside diameter o. D. mm
Inside diameter i. D. inch
Inside diameter i. D. mm
Bolt circle diameter k mm
High h mm
Number of holes
Hole diameter mm
16 40 63 100 160 200 250
1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"
34.0 69.5 113.5 152.0 202.5 253.0 305.0
0.33" 1.375" 2.50" 4.00" 6.00" 8" 10.00"
16.0 36.8 66.0 104.0 155.0 200.0 250.0
27.0 58.7 92.2 130.3 181.0 231.8 284.0
7.5 13.0 17.5 20.0 22.0 24.5 24.5
6 6 8 16 20 24 32
4.3 6.6 8.4 8.4 8.4 8.4 8.4
Conversion Factors1. Magnetizing field H, unit:
Previously used unit: Oerstedt (Oe)
2. Strength of the magnetic field B, unit:Previously used unit: Gauß (G)
A x m-1
1 Oe = 79,577 (A x m-1)
Vs x m2 = Tesla (T)1 G = 10-4 Vs x m2 = 10-4 T
o.Dk
i.D
h
Dimensional drawing for CF flanges
C15
CF Flanges
These Arguments Prove Leybold’s QUALITY
� The well-proven Leybold geometry for the cutting edges
Leybold Vacuum Full Line Catalog 20054
Ultra-high Vacuum Components
The stabilized Leybold profile for the cutting edges
Diagrammatic viewPartial view
� Forged steel materials of high tensile strength and density
� Material quality for standard applications DIN 1.4301 corresponds to AISI 304
� Tightly checked, close dimensional tolerances for the entire sealing geometry
� Low degassing rates of the tube material used
Nut
Bolt nut plate
Fixed CF flange
Copper gasket
Copper gasket
Inner part Bolts
Rotatable CF flange
AdvantagesReliable sealing of UHV connections
over hundreds of
heating cycles
Leybold Vacuum Full Line Catalog 2005 C15
CF Flanges Ultra-high Vacuum Components
5
Technical Data
i.D
d1
h1
Dimensional drawing for the CF bore flanges, fixed
DN CF
Outside diameter inch
Inside diameter mm
d1 mm
h1 mm
For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”
Ordering InformationMaterial: DIN 1.4301
Part No.
CF Bore Flanges, Fixed
16 40 63 100 160 200 250
1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"
16.0 36.8 66.0 104.0 155.0 200.0 250.0
18.3 40.3 70.3 108.5 159.5 205.5 256.5
4.2 5.5 9.5 11.0 12.0 12.5 12.5
835 41 835 37 835 38 835 39 835 40 835 47 835 49
Technical Data
i.D
d1
h1
d2
h2
Dimensional drawing for the CF bore flanges, rota-table
DN CF
Outside diameter inch
Inside diameter mm
d1 mm
d2 mm
h1 mm
h2 mm
For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”
Ordering InformationMaterial: DIN 1.4301
Part No.
CF Bore Flanges, Rotatable
16 40 63 100 160 200 250
1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"
16.0 36.8 66.0 104.0 155.0 200.0 250.0
18.3 40.3 70.3 108.5 159.5 205.5 256.5
18.6 41.0 71.0 109.0 160.0 206.0 257.0
4.2 5.5 9.5 11.0 12.0 12.5 12.5
5.8 7.6 12.6 14.3 15.8 17.1 18.0
835 61 835 58 835 59 835 60 835 69 835 67 835 78
Technical Data
h
i.D
dd
1,4
Dimensional drawing for the CF blank flanges,fixed
DN CF
Outside diameter inch
Inside diameter mm
d mm
h mm
For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”
Ordering InformationMaterial: DIN 1.4301
Part No.
CF Blank Flanges, Fixed
16 40 63 100 160 200 250
1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"
14 38 66 104 155 205 256
34.0 69.5 113.5 152.0 202.5 253.0 305.0
7.5 13.0 17.5 20.0 22.0 24.5 24.5
835 01 835 03 835 04 835 05 835 06 835 07 835 09
Technical Data
i.D
d1
1,4
h1
Dimensional drawing for the CF blank flanges,rotatable
DN CF
Outside diameter inch
Inside diameter mm
d1 mm
h1 mm
For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”
Ordering InformationMaterial: DIN 1.4301
Part No.
CF Blank Flanges, Rotatable
16 40 63 100 160 200 250
1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"
14 38 66 104 155 205 256
18.6 41.0 71.0 109.0 160.0 206.0 257.0
5.8 7.6 12.6 14.3 15.8 17.1 18.0
835 21 835 23 835 24 835 25 835 26 835 27 835 29
C15
CF Flanges
Leybold Vacuum Full Line Catalog 20056
Ultra-high Vacuum Components
Technical Datai.D
s
h
Dimensional drawing for the CF flanges with tubeend; left fixed, right rotatable
DN CF
Outside diameter inch
Inside diameter mm
s mm
h mm
For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”
Ordering InformationMaterial: DIN 1.4301
Tube endfixed Part No.rotatable Part No.
CF Flanges with Tube End
16 40 63 100 160
1.33" 2.75" 4.50" 6.00" 8.00"
16.0 36.8 66.0 104.0 155.0
1.0 1.6 2.0 2.0 2.0
38 63 105 135 167
835 51 835 31 835 32 835 33 835 34835 71 835 82 835 74 835 75 835 76
Technical Data
DN
DN1
ødøk
hh1
d1
Dimensional drawing for the CF reducing flanges,fixed
DN CF
Outside diameter inch
DN1 CF
k mm
h mm
h1 mm
d
d1
For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”
Ordering InformationMaterial: DIN 1.4301
Part No.
Matching stud boltsPart No.
CF Reducing Flanges
40 63 100 100 160 160
2.75" 4.50" 6.00" 6.00" 8.00" 8.00"
16 40 40 63 40 100
27.0 58.7 58.7 92.2 58.7 130.0
13.0 17.5 20.0 20.0 22.0 22.0
5.5 9.0 9.0 11.0 9.0 11.0
16 39 39 66 39 104
M 4 M 6 M 6 M 8 M 6 M 8
836 85 836 86 836 87 836 89 836 90 836 91
839 10 839 11 839 11 839 13 839 11 839 13
Technical Data
DN
hd
DN1
Dimensional drawing for the CF reducing pieces
DN CF
Outside diameter inch
DN1 CF
h mm
d (tube)
For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”
Ordering InformationMaterial: DIN 1.4301
Part No.
CF Reducing Pieces
40 63 100 100 160
2.75" 4.50" 6.00" 6.00" 8.00"
16 40 40 63 100
45 75 75 95 105
18 40 40 70 108
837 10 837 15 837 16 837 19 837 22
Technical Data
DN
hd1
ddDN1
Dimensional drawing for the CF/KF adaptors
DN CF
Outside diameter inch
DN1 CF
d
h mm
d1 (tube)
Ordering InformationMaterial: DIN 1.4301
Part No.
UHV CF/KF Adaptors
16 16 40 40 40 63
1.33" 1.33" 2.75" 2.75" 2.75" 4.50"
16 25 16 25 40 40
16 16 16 26 37 41
35 35 30 30 50 35
20 20 20 30 41 45
837 81 837 83 837 82 837 84 837 36 837 86
Leybold Vacuum Full Line Catalog 2005 C15
CF Flanges Ultra-high Vacuum Components
7
Technical Data
90
DN1
DN
2DN
Dimensional drawing for the CF/ISO-K adaptors
DN CF
Outside diameter inch
DN1 CF
DN2 CF
Ordering InformationMaterial: DIN 1.4301
Part No.
UHV CF/ISO-K Adaptors
63 100 160
4.50" 6.00" 8.00"
63 100 160
66 104 157
837 01 837 02 837 03
C15
UHV Components
UHV Components
UHV components are manufacturedaccording to the requirementsoutlined in the introductory chapter.They are made from selected andcorrosion resistant types of stainlesssteel. Both design and productionmethods are such, that thecomponents meet the requirementsof UHV applications. All componentsare fusion welded from the inside toprevent fissures and pocket holes(virtual leaks which cannot belocated by leak detection methodsfrom the outside). If welding from theoutside cannot be avoided due todesign constraints, the welding seampenetrates to the inner side, the sideof the vacuum.
A carefully implemented cleaningprocess and suitable packaging forthe components are essential pre-requisites for obtaining pressures inthe UHV range within reasonablyshort pump down times afterassembly (providing the remainder ofthe apparatus is clean too).
For applications in the extreme UHVrange (XHV) the outgassing rate ofthe CF flanges and the UHVcomponents can be reduced byabout two orders of magnitude by aspecial degassing process.
Advantages to the User� Low degassing rates
� High degassing temperature
� Leak rates below 1 x 10-11 mbar x l x s-1
� Basic dimensions correspond tothose of the components fromother international manufacturers
� Bolts may be inserted from theside of the body
Leybold Vacuum Full Line Catalog 20058
Ultra-high Vacuum Components
Leybold Vacuum Full Line Catalog 2005 C15
UHV Components Ultra-high Vacuum Components
9
Technical Data
a
a
Dimensional drawing for the 90° elbows/pipe bends
DN CF
Outside diameter inch
a mm
For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”
Ordering InformationElbow 90° with a rotatable flange
Part No.
Elbows 90°; from DN 160 CF Pipe Bend
16 40 63 100 160
1.33" 2.75" 4.50" 6.00" 8.00"
38 63 105 135 167
836 04 836 05 836 06 836 07 836 08
Technical Data
a
a
h
Dimensional drawing for the tees
DN CF
Outside diameter inch
a mm
h mm
For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”
Ordering InformationTee with a rotatable flange on each axis Part No.
Tees
16 40 63 100 160
1.33" 2.75" 4.50" 6.00" 8.00"
38 63 105 135 167
76 126 210 270 334
836 14 836 15 836 16 836 17 836 18
Technical Data
a
a
h
Dimensional drawing for the crosses
DN CF
Outside diameter inch
a mm
h mm
For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”
Ordering InformationCross with a rotatable flange on each axis Part No.
Crosses
16 40 63 100 160
1.33" 2.75" 4.50" 6.00" 8.00"
38 63 105 135 167
76 126 210 270 334
836 34 836 35 836 36 836 37 836 38
Technical Data
a
a
h
Dimensional drawing for the double crosses
DN CF
Outside diameter inch
a mm
h mm
For missing dimensions see “ Technical Data” at the beginning of the Section “CF Flanges”
Ordering InformationDouble cross with a rotatable flange on each axis Part No.
Double Crosses
40 63 100 160
2.75" 4.50" 6.00" 8.00"
63 105 135 167
126 210 270 334
836 45 836 46 836 47 836 48
C15
UHV Components
Leybold Vacuum Full Line Catalog 200510
Ultra-high Vacuum Components
Technical Data
DN
hdh1 h2
x
Dimensional drawing for the ceramic nipples
DN CF
Outside diameter inch
Breakdown voltage 1) kV
d mm
h mm
h1 mm
h2 (length of the ceramic piece) mm
x (allowed length for the screws) mm
Ordering InformationCaramic nipple with one rotatable flange Part No.
1) With reference to the wall thickness of the ceramic material
Ceramic Nipples (1 rotatable Flange)
40 63
2.75" 4.50"
90 140
25 53
70 90
44 55
30 45
35 45
836 71 836 70
Technical Datah
DN
Dimensional drawing for the CF bellows
DN CF
Outside diameter inch
h mm
Ordering InformationCF bellows with onerotatable flange
Part No.
Flexible Connecting Components (CF Bellows)
16 40 63 100 160
1.33" 2.75" 4.50" 6.00" 8.00"
76 ±1.5 126 ±2.0 139 ±2.0 142 ±2.0 250 ±3.0
880 01 880 02 880 03 880 04 880 05
Technical Data
Dimensional drawing for the CF corrugated hoses
DN CF
Outside diameter inch
A = Length mm
Ordering InformationCF corrugated hose with one rotatable flange
Part No.
Flexible Connecting Components (CF Corrugated Hoses)
16 16 16 16
1.33" 1.33" 1.33" 1.33"
250 500 750 1000
885 56 885 68 885 65 885 73
Technical DataDN CF
Outside diameter inch
A = Length mm
Ordering InformationCF corrugated hose with one rotatable flange
Part No.
40 40 40 40
2.75" 2.75" 2.75" 2.75"
250 500 750 1000
885 57 885 69 885 66 885 75
Dimensions
DN CF 16 40
B mm 23 46
C mm 16.0 36.8
D mm 15.0 40.5
E mm 22.5 53.0
F mm 70 130
G mm 50 100
Leybold Vacuum Full Line Catalog 2005 C15
Accessories for UHV Components Ultra-high Vacuum Components
11
Technical Data
DN
hSW
d1
Dimensional drawing for the compensators
DN (both flanges fixed) CF
Outside diameter inch
Type
d1 (inside dia.) mm
hmax. mm
hmin. mm
SW mm
3 joints individually adjustable
Max. angular deviation, approx. °
Permissible temperature of the hinges °C
Bakeout temperature of the bellows without hinges °C
Ordering InformationPart No.
Compensators
40 63 100
2.75" 4.50" 6.00"
bellows bellows bellows
36.8 62.0 92.0
130 150 157
120 130 127
10 13 13
x x x
10 12 12
200 200 200
400 400 400
880 11 880 12 880 13
Technical Data
1
d
d
2
Dimensional drawing for the copper gaskets for CF flanges
DN CF
Outside diameter inch
d mm
d1 mm
Set of 5
Set of 10
Ordering InformationQualität: Standard
Part No.
Copper Gaskets for CF Flanges (OFHC Copper – Oxygen-Free)
16 40 63 100 160 200 250
1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"
16.2 39.0 63.6 101.8 152.6 203.4 254.0
21.3 48.1 82.4 120.5 171.3 222.1 272.7
– – – – – – x
x x x x x x –
839 41 839 43 839 44 839 45 839 46 839 47 839 48
Technical Data
d
d
DN 16 CF DN 40 CF
DN 63 - 200 CF
Dimensional drawing for the profiled gaskets without support ring
DN CF
Outside diameter inch
d mm
Bakeout temperature mm
Set of 2
Set of 5
Ordering InformationPart No.
FPM Profiled Gasket without Support Ring
16 40 63 100 160 200
1.33" 2.75" 4.50" 6.00" 8.00" 10.00"
16.0 42.0 69.7 107.8 156.0 206.0
160 160 160 160 160 160
– – x x x x
x x – – – –
839 21 839 23 839 34 839 35 839 36 839 37
Technical Data
d
Dimensional drawing for the FPM O-rings withsupport ring
DN CF
Outside diameter inch
d mm
Bakeout temperature °C
Ordering InformationPart No.
FPM O-ring with Support Ring
250
12.00"
248,3
160
839 03
C15
Accessories for UHV Components
Leybold Vacuum Full Line Catalog 200512
Ultra-high Vacuum Components
Technical Data
l
d
Dimensional drawing for the hexagon bolts for CFflanges
DN CF
Outside diameter inch
Dimensions (d x l) mm
Sealing torque 1) Nm(lbf-in)
Quantity per setBoltsNutsWashers
Ordering informationSet Part No.
1) With separating agent2) 2 sets are required
Hexagon Bolts, Set for CF Flanges
16 40 63 100 160 200 250
1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00"
M 4 x 20 M 6 x 35 M 8 x 45 M 8 x 50 M 8 x 55 M 8 x 60 M 8 x 60
4 10 20 20 20 20 2035.40 88.51 177.02 177.02 177.02 177.02 177.02
25 25 25 25 25 25 2525 25 25 25 25 25 2525 25 25 25 25 25 25
839 00 839 01 838 81 839 04 839 05 839 07 839 07 2)
Technical Data
d
ls
Dimensional drawing for the set screws, nuts andwashers for CF flanges
DN CF
Dimensions (d x l) mm
s mm
Sealing torque 1) Nm(lbf-in)
Quantity per setBoltsNutsWashers
Ordering informationSet Part No.
1) With separating agent
Set Screws, Nuts and Washers for CF Flanges
16 40 63 - 100
M 4 x 20 M 6 x 35 M 8 x 45
2 3 4
4 10 2035.40 88.51 177.02
6 6 166 6 166 6 16
839 10 839 11 839 13
Technical Data
Dimensional drawing for the bolts with bolt nutplate and washers
DN CF
Outside diameter inch
Dimensions (d x l) mm
A mm
B mm
C mm
Sealing torque 1) Nm(lbf-in)
Quantity per setBoltsBolt nut plateWashers
Ordering informationSet Part No.
1) With separating agent
Bolts with Bolt Nut Plate and Washers
16 40 63 100/160
1.33" 2.75" 4.50" 6.00"/8.00"
M 4 x 20 M 6 x 35 M 8 x 45 M 8 x 55
20 35 45 55
7 10 12 12
4 5 8 8
4 10 20 2035.40 88.51 177.02 177.02
6 6 8 203 3 4 106 6 8 20
838 87 838 88 838 89 838 91
Technical DataTemperature
Ordering informationLubricant for threads, 28 g tube Part No.
Lubricant for Threads
up to 1000 °C
839 99
This thread lubricant is preferablyapplied to stainless steel joints and isused to prevent bolts from seizingdue to high temperatures or highmechanical stresses.
Leybold Vacuum Full Line Catalog 2005 C15
UHV Observation Windows Ultra-high Vacuum Components
UHV Observation Windows
13
All UHV observation windows with CFflanges are of a flat and embeddeddesign (Zero-length design). Thisdesign provides a much widerviewing angle compared to -observation windows manufacturedaccording to a pot-type design.
Standard types of glass are normallyused for visual observations, fortaking photographs of experimentaldetails and, among other things, forpyrometric measurements.
Advantages to the User� Embedded design
� Optically plane-parallel almost upto the glass/metal seal
� Flange offering a wide viewingangle
Optical transmissivity for the UHV observation windows
Wavelength [nm]
Tran
smis
sivi
ty [%
][%]
––––– Sapphire–– · –– Kodial - - - - - Borosilicate
α
s
50d
h
Dimensional drawing for UHV observation windows
Technical DataDN CF
Thickness of the glass (s) mm
Diameter of viewing area (d) mm
Viewing angle (a) °
Spacing of the glass (h), approx. mm
Viewing distance mm
Wavelength range nm
Material
Mean transmission ratio %
Type of glass
Max. heating ratemin
Max. bakeout temperature °C
Ordering informationUHV observation window
Part No.
40 63 100 160
3.0 3.5 6.0 8.0
38 65 90 135
38 57 71 92
11.0 16.4 8.0 10.0
50 50 50 50
400 to 3000 400 to 3000 400 to 3000 400 to 3000
Vacon Vacon Vacon Vacon(compen- (compen- (compen- (compen-
sation ring) sation ring) sation ring) sation ring)
93 in the 93 in the 93 in the 93 in thevisible range visible range visible range visible range
Kodial Kodial Kodial Kodial
5 5 5 5
400 400 400 400
210 112 210 114 210 115 210 116
C15
UHV Observation Windows
Leybold Vacuum Full Line Catalog 200514
Ultra-high Vacuum Components
UHV Sapphire Observation Windows
All UHV observation windows with CFflanges are of a flat and embeddeddesign (Zero-length design). Thisdesign provides a much widerviewing angle compared toobservation windows manufacturedaccording to a pot-type design.
The transmission range of sapphirelies between 250 nm and 5500 nm.The infrared limit is shifted far into theinfrared range. Therefore theseobservation windows are used, forexample, in solar simulation tests,laser experiments, high-temperatureplasma research and spectro-photometric measurements.
Standard types of glass are normallyused for visual observations, fortaking photographs of experimentaldetails and, among other things, forpyrometric measurements.
Advantages to the User� Embedded design
� Optically plane-parallel almost upto the glass/metal seal
� Flange offering a wide viewingangle
Optical transmissivity for the UHV Sapphire observation windows
Wavelength [nm]
Tran
smis
sivi
ty [%
]
d
h
50
s
α
Dimensional drawing for the UHV sapphire obser-vation windows
Technical DataDN CF
Thickness of the glass (s) mm
Diameter of viewing area (d) mm
Viewing angle (a) °
Spacing of the glass (h), approx. mm
Viewing distance mm
Wavelength range nm
Mean transmission ratio %
Verwendete Glassorte
Max. heating rate min
Max. bakeout temperature °C
Ordering informationUHV sapphire observation windows Part No.
40
3.0
23
23
10
50
250 to 5500
> 80
Sapphire
5
400
210 122
––––– Sapphire–– · –– Kodial - - - - - Borosilicate
Leybold Vacuum Full Line Catalog 2005 C15
Valves Ultra-high Vacuum Components
15
UHV All-Metal Right-Angle Valves
The all-metal right-angle valves are ofa fully welded design. The valve diskmay be exchanged through the sideflange.
Due to the selection of suitablematerials, the valve stem need not belubricated after every bake-out cycle.
The drive spindle of the valvestransfers the motion via a pressureplate onto the sleeve-guided valvestem carrying the screwed-on valvedisk. The valve disk consists of acopper plate.
Due to the specific properties ofcopper (ductility) this design offersgreat advantages over othermaterials: long service life and lowclosing forces when operating thevalve.
A very high leak tightness achieved,even with a low closing force.
The compact design offers goodoperational characteristics also inview of temperature changes, offers ashort flow path and hence improvedconductance.
Advantages to the User� Leak rate at the valve seat below
10-11 mbar x l x s-1
� Absolutely reliable sealing of valveseat
Technical Data
Dimensional drawing for the UHV all-metal right-angle valve
DN CF
Connection flange rotatable DN
Service life cycles
Conductance for molecularflow l/ s
Pressure, absolutemin. mbarmax. bar
Mounting orientation mm
Bake out temperature without handwheel °C
Bake out temperature with handwheel °C
Max. heating and cooling rate °C/min
Bellows Material
Housing Material
Valve disk Material
Valve disk seal Material
Weight kg (lbs)
Ordering informationUHV all-metal right-angle valves
Spare valve disk, 2 pieces
Spare hand wheel, plastic
1) = AISI Type 3162) = AISI Type 304
UHV All-Metal Right-Angle Valves, with Rotatable Flanges on Both Sides
16 40 63
16 CF-R 40 CF-R 63 CF-R
1000 1000 1000
3 38 100
1 x 10-11 1 x 10-11 1 x 10-11
4 4 4
any any any
300 300 300
80 80 80
4 4 2
Stainless steel Stainless steel Stainless steel1.4541 1) 1.4541 1) 1.4541 1)
Stainless steel Stainless steel Stainless steel1.4301 2) 1.4301 2) 1.4301 2)
welded welded welded
Copper Copper Copper
Copper Copper Copper
0.4 (0.88) 2.0 (4.42) 5.0 (11.04)
Part No. 289 80 Part No. 289 81 Part No. 289 82Part No. 215 410 Part No. 215 440 Part No. 215 470
Part No. 215 412 Part No. 215 442 Part No. 215 472
� Simplest operation
� No lubrication of the spindle isnecessary after bakeout
� Large removable handwheel foreasy operation
DimensionsDN A B C SW
16 CF-R 88.0 38.0 15.5 8.0
40 CF-R 140 63 26 17
63 CF-R 211.0 105.0 36.4 22.0
C15
Valves
Leybold Vacuum Full Line Catalog 200516
Ultra-high Vacuum Components
UHV All-Metal Variable Leak Valves
85,5 (3.37") 50 (2")
ø46(1.81")
DN 40 CF-F
DN
16
CF
-R32
,5(1
.28"
) 98,2
(3.
87")
M5
Dimensional drawing for the all-metal variable leakvalves
Technical Data UHV Al l-Metal Var iable Leak Valves
Ordering information
Part No. 289 90
Part No. 289 87
Part No. 289 88
Part No. 290 97
Connection flanges
Input DN
Output DN
Gas flow, min. for
Pure gas mbar x l x s-1
Air mbar x l x s-1
Gas flow
max. mbar x l x s-1
adjustable, max. mbar x l x s-1
Tightness mbar x l x s-1
Pressure absolute
min. mbar
max. bar
Conductance for molecular flow l x s-1
Operating temperature °C
Bakeout temperature °C
Valve seat Material
Valve plate Material
Housing Material
Weight kg (lbs)
UHV all-metal variable leak valve
Spare valve plate
Spare valve seat
Tool kit for valve seat
UHV Al l-Metal Var iable Leak Valves
16 CF-R
40 CF-R
10-10
10-9
600
100
1 x 10-11
1 x 10-10
30
0,7
200
350
Copper alloy
Sapphire
Stainless steel
1.4 (3.09)
Leybold Vacuum Full Line Catalog 2005 C15
Feedthroughs Ultra-high Vacuum Components
UHV Feedthroughs
17
Abbreviations used in
connection with
feedthroughs:F Feedthrough
E Electric
L Liquid
N Normal
P Precision
F Frequency
HC Current
HV Voltage
L Linear
R Rotary
A stainless steel bellows is used toseal off the UHV linear, rotary andmulti-motion feedthroughs against theatmosphere.
All feedthroughs can be installed inthe vacuum systems in anyorientation.
UHV feedthroughs are available in avariety of field-proven designs,specifically:
� Linear motion mechanical feed-throughs,
� Rotary motion mechanical feed-throughs,
Dimensional drawing for the FNL 16/25 linearmotion feedthrough
Linear Motion Mechanical Feedthroughs
15
5077
,510
5,5
ø33
M6x10
ø10 0 -0.1
183
Dimensional drawing for the FNL 40/50 linearmotion feedthrough
Technical Data FNL 16/25 FNL 40/50
Ordering information
Part No. 210 250 Part No. 210 251
Nominal width DN
Shaft connection mm
Feedthrough/seal
Actuator
Travel mm
Scale division mm
Shaft loadRadial at max. displacement NAxial, against vacuum NAxial, against vatmoshere NTorsion Nm (lbf-in)
Tightness mbar x l x s-1
Pressure absolute
Bakeout temperatureFeedthrough °C
Weight kg (lbs)
Materials exposed to process media
Linear motion feedthrough
FNL 16/25 FNL 40/50
16 CF-R 40 CF-R
M 4 x 16 M 6 x 10, ˇ 10
bellow bellow
manually manually
25 50
5 10
20 20085 140100 200
0.2 (1.77) 0.5 (4.43)
1 x 10-10 1 x 10-10
1 x 10-9 mbar to 2 bar 1 x 10-9 mbar to 2 bar
300 300
0.15 (0.33) 0.75 (1.66)
Stainless steel Stainless steel
C15
Feedthroughs
Leybold Vacuum Full Line Catalog 200518
Ultra-high Vacuum Components
Dimensional drawing for the FPR 16/5 N rotaryfeedthrough
Linear Motion Mechanical Feedthroughs
Dimensional drawing for the FNR 40/20 N rotaryfeedthrough
Technical Data FPR 16/5 N FNR 40/20 N
Ordering information
Part No. 210 154 Part No. 210 155
Nominal width DN
Shaft connection mm
Feedthrough/seal
Transferable torque
Dynamic Nm (lbf-in)
Dynamic, at 300 °C Nm (lbf-in)
Static Nm (lbf-in)
Rotational speed rpm
at max. torque rpm
Scale division mm
Shaft load
Radial N
Axial N
Tightness mbar x l x s-1
Pressure absolute
Operating temperature °C
Bakeout temperature °C
Weight kg (lbs)
Materials exposed to process media
Rotary feedthrough
FPR 16/5 N FNR 40/20 N
16 CF-F 40 CF-F
ˇ 4 ˇ 8
bellow bellow
0.4 (3.54) 4.0 (35.40)
0.2 (1.77) 2.0 (17.70)
0.2 (1.77) 3.0 (26.55)
200 1000
– 500
10° –
10 60
5 20
1 x 10-10 1 x 10-10
1 x 10-9 mbar to 2 bar 1 x 10-9 mbar to 2 bar
300 300
300 300
0.3 (0.66) 1.5 (3.31)
Stainless steel Stainless steel
The rotation of the drive knob istranslated via a gearless drivesystem to the shaft on the vacuumside. This shaft runs on ball bearingswhich do not require any mainte-nance during the entire service life.
Leybold Vacuum Full Line Catalog 2005 C15
Feedthroughs Ultra-high Vacuum Components
19
Electrical FeedthroughsThe electric UHV feedthroughscomply with the relevant VDEregulations.
Concerning the air gaps andcreepage paths, they have beendesigned in accordance with VDE 0100, i.e. both sides of thefeedthrough are tested underatmospheric pressure conditions.
Technical NoteAll electric specifications of thedescribed voltage and current feed-throughs are rated in accordancewith overvoltage class 1 and conta-mination grade 2.
Dimensional drawing for the electrical feeedthrough FE 40/4 (left), FE 40/9 (middle) and FEHC 16/1(right)
Technical Data FE 40/4 FE 40/9 FEHC 16/1 FEHC 40/1 FEHC 40/2
Ordering information
Part No. Part No. Part No. Part No. Part No.210 310 210 313 210 335 210 338 210 342Part No. Part No. Part No. Part No. Part No.210 312 2x 210 312 210 337 210 340 210 337
Part No. Part No. Part No. Part No. Part No.210 311 2x 210 311 210 336 210 339 210 336
Part No.– – – 210 341 –
Nominal width DN
Number of feedthroughs
Number of connection piecesvacuum side (set)atmospheric side (set)
Voltage per pole 1) kV
Current per pole 1) A
Bakeout temperature °C
Temperature rise at max. current °C/min
Tightness mbar x l x s-1
Pressure absolute
Flange
Conductor
Insulator
Weight kg (lbs)
Current feedthrough
Connection piece, vacuum side (set)
Connector, atmospheric side (set)
Connector, atmospheric side, H2O cooled
1) Local safety regulations must be met2) with water-cooling
FE 40/4 FE 40/9 FEHC 16/1 FEHC 40/1 FEHC 40/2
CF 40-F CF 40-F CF 16-F CF 40-F CF 40-F
4 9 1 1 2
5 10 2 1 25 10 2 1 2
1 1 4 1 4
8 1 150 250/1000 2) 150
400 400 400 400 400
5 5 5 4 4
1 x 10-10 1 x 10-10 1 x 10-10 1 x 10-10 1 x 10-10
1 x 10-10 mbar 1 x 10-10 mbar 1 x 10-10 mbar 1 x 10-10 mbar 1 x 10-10 mbarto 2 bar to 2 bar to 2 bar to 2 bar to 2 bar
Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel
Stainless steel Stainless steel Copper Copper Copper
Al2O3 Al2O3 Al2O3 Al2O3 Al2O3
0.3 (0.66) 0.4 (0.88) 0.15 (0.33) 0.5 (1.10) 0.45 (0.91)
Dimensional drawing for the electrical feeedthrough FEHC 40/1 (left) and FEHC 40/2 (right)
C15
Feedthroughs
Leybold Vacuum Full Line Catalog 200520
Ultra-high Vacuum Components
Electrical FeedthroughsThe electric UHV feedthroughscomply with the relevant VDEregulations.
Concerning the air gaps andcreepage paths, they have beendesigned in accordance with VDE 0100, i.e. both sides of thefeedthrough are tested under atmos-pheric pressure conditions.
Technical NoteAll electric specifications of thedescribed voltage and current feed-throughs are rated in accordancewith overvoltage class 1 andcontamination grade 2.Dimensional drawing for the electrical feeedthrough FEF 16/1 (left), FEHV 16/1 (middle) und FEHV 40/3 (right)
Technical Data FEF 16/1 FEHC 16/1 FEHV 40/3
Ordering information
Part No. 210 404 Part No. 210 402 Part No. 210 403Part No. 846 47 Part No. 846 47 Part No. 846 47
BNC MHV MHVU6 88/U U6 932/U U6 932/U
Nominal width DN
Number of feedthroughs
VoltageAC, 50 Hz kVDC kV
Current A
Frequency MHz
Impedance Ö
Insulation resistance at 20 °C Ö
Bakeout temperaturewith connector °Cwithout connector °C
Temperature rise at max. current °C/min
Tightness mbar x l x s-1
Pressure absolute
Housing, flange, conductor
Feedthrough, seal
Weight kg (lbs)
Current feedthrough
Inside plug
Outside plug
1) with elastomer seal up to 150 °C
FEF 16/1 FEHC 16/1 FEHV 40/3
CF 16-F CF 16-F CF 40-F
1 1 3
0.35 3.5 3.50.5 5.0 5.0
3 3 3
150 – –
50 - 60 – –
10-10 10-10 10-10
50 50 50400 400 400
5 5 5
1 x 10-10 1 x 10-10 1 x 10-10
1 x 10-8 mbar – 10 bar 1 x 10-8 mbar – 10 bar 1 x 10-8 mbar – 10 bar
Stainless steel Stainless steel Stainless steel
Al2O3 Al2O3 Al2O3
0.14 (0.31) 0.14 (0.31) 0.5 (1.10)
Leybold Vacuum Full Line Catalog 2005 C15
Feedthroughs Ultra-high Vacuum Components
21
Dimensional drawing for the connector used on FE 40/4 / FE 40/9
Connectors, vacuum side
Dimensional drawing for the connector used on FEHC 40/1
Dimensional drawing for the connector used on FE 16/1, FEHC 40/2 and FEHC 16/1
12
863
M3
2,4
Dimensional drawing for the connector used on FEHV 16/1, FEHV 40/3 and FEF 16/1
Technical Data
Ordering information
Part No. Part No.– – 210 340 846 47
Part No. 210 312 – – –
Part No.– 210 337 – –
Connector for feedthrough
Current max. A
Bakeout temperature °C
Material
Connector, vacuum side
Connector, vacuum side
(Set of 5)
Connector, vacuum side
(Set of 2)
Connectors, Vacuum Side
FE 40/4 / FE 40/9 FE 16/1 / FEHC 40/1 FEHV 16/1 / FEHV 40/3
FEHC 40/2 / FEHC 16/1 FEF 16/1
12 90 1000 3
400 400 400 350
Stainless steel Stainless steel Copper Copper
Connectors, Vacuum Side
C15
Feedthroughs
Leybold Vacuum Full Line Catalog 200522
Ultra-high Vacuum Components
Dimensional drawing for the outside plug used on FE 40 /4 and FE 40/9
Connectors, atmospheric side
M6
SW
819
,5
25
53
ø10
Dimensional drawing for the outside plug used on FE 16/1, FEHC 40/2 and FEHC 16/1
Dimensional drawing for the outside plug used on FEHC 40/1
Technical Data Connectors, Atmospheric Side
Ordering information
Part No. – – 210 339
2 xPart No. 210 311 – –
– Part No. 210 336 –
Connector for feedthrough
Current max. A
Not insulated, for use up to V
Bakeout temperature °C
Material
Connector, atmospheric side
Connector, atmospheric side
(Set of 5 )
Connector, atmospheric side
(Set of 2 )
Connectors, Atmospheric Side
FE 40/4 / FE 40/9 FE 16/1 / FEHC 40/2 / FEHC 16/1 FEHC 40/1
12 90 250
50 50 50
50 150 150
gold-plated brass silver-plated brass silver-plated brass
Leybold Vacuum Full Line Catalog 2005 C15
Feedthroughs Ultra-high Vacuum Components
23
Dimensional drawing for the connectorused on FEHC 40/1
Connectors, atmospheric side, H2O cooled
Technical Data Connectors, Atmospheric Side
Ordering information
Part No. 210 341
Connector for feedthrough
Current max. A
Not insulated, for use up to V
Bakeout temperature °C
Material
Connector, atmospheric side,
with water-cooling
Connectors, Atmospheric Side
FEHC 40/1
1000
24
120
silver-plated brass
C15
Feedthroughs
Leybold Vacuum Full Line Catalog 200524
Ultra-high Vacuum Components
UHV Liquid FeedthroughsThe thermally insulated UHV liquidfeedthroughs are used to conveycold or hot gases, liquids or liquidnitrogen.
Dimensional drawing for the FL 40C/2 UHV liquidfeedthrough
Technical Data FL 40C/2
Ordering information
Part No. 210 276
Nominal width DN
Feedthrough / seal
Connection mm
Number of tubes
Tightness mbar x l x s-1
Pressure absolute
Temperature range °C
Material
Weight kg (lbs)
UHV liquid feedthrough
FL 40C/2
40 CF-F
welded / brazed
ˇ 8 x 1
2
1 x 10-10
10-9 mbar to 10 bar (at 400 °C max. 2 bar)
-400 to +400
Stainless steel
0.4 (0.88)
Technical NoteThe ends of the tubes are longenough that they may be bent apartso that an UHV compatibleconnection can be provided.
Leybold Vacuum Full Line Catalog 2005 C15
Ultra-high Vacuum Components
25
Notes
vacuumLeybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-221 347-0Fax: +49-221 347-1250info@leybold.com w w w . l e y b o l d . c o m
P.R. China
Leybold Vacuum (Tianjin) International Trade Co., Ltd.Beichen Economic Development Area (BEDA),No. 8 Western Shuangchen RoadTianjin 300400, ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 2017leybold@leybold.com.cn
Leybold Vacuum (Tianjin)Equipment Manufacturing Co., Ltd.Beichen Economic Development Area (BEDA),No. 8 Western Shuangchen RoadTianjin 300400, ChinaPhone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 2017leybold@leybold.com.cn
Leybold Vacuum (Tianjin) International Trade Co., Ltd.Beijing Branch:1-908, Beijing Landmark Towers8 North Dongsanhuan RoadChaoyang DistrictBeijing 100004, ChinaSales and Service:Phone: +86-10-6590-7607Fax: +86-10-6590-7622
Leybold Vacuum (Tianjin) International Trade Co., Ltd.Shanghai Branch:Add: No. 33, 76 Futedong SanRd., Waigaoqiao FTZ , Shanghai 200131, ChinaSales and Service:Phone: +86-21-5064-4666Fax: +86-21-5064-4668leybold_sh@leybold.com.cn
Leybold Vacuum (Tianjin)Guangzhou Branch:Add: G/F,#301 Building, 110 Dongguangzhuang Rd.Tianhe District, Guangzhou 510610, ChinaSales:Phone: +86-20-8723-7873Phone: +86-20-8723-7597Fax: +86-20-8723-7875leybold_gz@leybold.com.cn
India
Leybold Vacuum India Pvt Ltd.A-215 Road No. 30MIDC Wagle Industrial EstateThane(W) - 400 604 MaharashtraIndiaSales and Service:Phone: +91-22-2581 2929Fax: +91-22-2581 2626ivt2004@yahoo.com
Netherlands
Leybold Vacuum Nederland B.V.Computerweg 7NL-3542 DP UtrechtSales and Service: Phone: +31-346-58 39 99 Fax: +31-346-58 39 90 sales.netherlands@leybold.comservice.netherlands@leybold.com
Spain
Leybold Vacuum España S.A.C/. Huelva, 7E-08940 Cornella de Llobregat (Barcelona)Sales: Phone: +34-93-666 46 16Fax: +34-93-666 43 70sales.spain@leybold.com Service: Phone: +34-93-666 49 51Fax: +34-93-685 40 10
Sweden
Leybold Vacuum Scandinavia ABBox 9084SE-40092 GöteborgSales and Service: Phone: +46-31-68 84 70 Fax: +46-31-68 39 39 info@leybold.seVisiting/delivery address:Datavägen 57BSE-43632 Askim
Switzerland
Leybold Vacuum Schweiz AGLeutschenbachstrasse 55CH-8050 ZürichSales: Phone: +41-1-308 40 50 Fax: +41-1-302 43 73 sales@leybold.chService: Phone: +41-1-308 40 62 Fax: +41-1-308 40 60
USA
Leybold Vacuum USA Inc.5700 Mellon RoadExport, PA 15632info@leyboldvacuum.comSales: Eastern & Central time zonesPhone: +1-724-327-5700Fax: +1-724-733-1217Pacific, Mountain, Alaskan & Hawaiian time zonesPhone: +1-480-752-9191Fax: +1-480-752-9494Service: Phone: +1-724-327-5700Fax: +1-724-733-3799
Belgium
Leybold Vacuum Nederland B.V.Belgisch bijkantoorLeuvensesteenweg 542-9AB-1930 ZaventemSales: Phone: +32-2-711 00 83 Fax: +32-2-720 83 38 sales.belgium@leybold.comService: Phone: +32-2-711 00 82 Fax: +32-2-720 83 38 service.belgium@leybold.com
France
Leybold Vacuum France S.A.7, Avenue du QuébecZ.A. de Courtaboeuf, B.P. 42F-91942 Courtaboeuf CedexSales and Service: Phone: +33-1-69 82 48 00 Fax: +33-1-69 07 57 38 sales.france@leybold.com
Leybold Vacuum France S.A.Valence Factory640, Rue A. Bergès - B.P. 107 F-26501 Bourg-lès-Valence CedexPhone: +33-4-75 82 33 00 Fax: +33-4-75 82 92 69 marketing.valence@leybold.fr
Great Britain
Leybold Vacuum UK Ltd.Waterside Way, Plough LaneGB-London SW17 0HBSales: Phone: +44-20-8971 7000 Fax: +44-20-8971 7001 sales@leybold.comService: Phone: +44-20-8971 7030 Fax: +44-20-8971 7003 service@leybold.com
Italy
Leybold Vacuum Italia S.p.A.8, Via Trasimeno I-20128 MilanoSales: Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 sales@leybold.itService:Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 service@leybold.it
Field Service BaseZ.I.Le CapanneI-05021 Acquasparta (TR)Phone: +39-0744-93 03 93Fax: +39-0744-94 42 87service@leybold.it
Leybold Vacuum GmbHBonner Strasse 498 D-50968 ColognePhone: +49-221-347 1234 Fax: +49-221-347 1245 sales@leybold.com
Leybold Vacuum GmbHSales Area North/EastBranch office BerlinBuschkrugallee 331. ObergeschossD-12359 BerlinPhone: +49-30-435 609 0 Fax: +49-30-435 609 10 sales.berlin@leybold.com
Leybold Vacuum GmbHSales Area South/SouthwestBranch office MunicKarl-Hammerschmidt-Strasse 38D-85609 Aschheim/DornachPhone: +49-89-357 33 90 Fax: +49-89-357 33 933 sales.muenchen@leybold.comservice.muenchen@leybold.com
Leybold Vacuum GmbHSales Area WestBranch office CologneEmil-Hoffmann-Straße 43D-50996 Cologne-SuerthPhone: +49-221-347 1270 Fax: +49-221-347 1291 sales.koeln@leybold.com
Leybold Vacuum GmbHService CenterEmil-Hoffmann-Straße 43D-50996 Cologne-SuerthPhone: +49-221-347 1439 Fax: +49-221-347 1945 service@leybold.com
Leybold Vacuum GmbHMobile after sales serviceEmil-Hoffmann-Straße 43 D-50996 Cologne-SuerthPhone: +49-221-347 1765 Fax: +49-221-347 1944 kundendienst@leybold.com
Leybold Vacuum Dresden GmbHZur Wetterwarte 50, Haus 304D-01109 DresdenService: Phone: +49-351-88 55 00 Fax: +49-351-88 55 041 info@leybold-dresden.dewww.leybold-dresden.de
Japan
Leybold Vacuum Japan Co., Ltd.Head OfficeTobu A.K. Bldg. 4th Floor23-3, Shin-Yokohama 3-chomeKohoku-ku, Yokohama-shiKanagawa-ken 222-0033Sales:Phone: +81-45-4713330Fax: +81-45-4713323
Leybold Vacuum Japan Co., Ltd.Osaka Branch OfficeMURATA Bldg. 7F2-7-53, Nihi-MiyaharaYodogawa-ku Osaka-shi 532-0004Sales:Phone: +81-6-6393-5211Fax: +81-6-6393-5215
Leybold Vacuum Japan Co., Ltd.Tsukuba Technical S.C.Tsukuba Minami Daiichi Kogyo Danchi21, Kasumi-no-Sato, Ami-machi, Inashiki-gunIbaraki-ken, 300-0315Service:Phone: +81-298-89-2841Fax: +81-298-89-2838
Korea
Leybold Vacuum Korea Ltd.#761-4, Yulkeum-ri,SungHwan-eup, Cheonan-CityChoongchung-Namdo,330-807, KoreaSales:Phone: +82-41-580-4420Fax: +82-41-588-3737Service:Phone: +82-41-580-4415Fax: +82-41-588-3737
Singapore
Leybold Vacuum Singapore Pte Ltd.No.1, International Business Park,B1-20B, The SynergySingapore 609917Sales and Service:Phone: +65-66652910Fax: +65-65668202vacuum@leyboldvac.com.sg
Taiwan
Leybold Vacuum Taiwan Ltd.No 416-1, Sec. 3Chung-Hsin Rd., Chu-TungHsin-Chu, Taiwan, R.O.C.Sales and Service:Phone: +886-3-5833988Fax: +886-3-5833999
Germany Europe Asia
America
HotlineSales: +49-221-347 1234Service: +49-221-347 1765sales@leybold.comservice@leybold.com
LV_0
7322
_200
5
05
.05
Sales and Service Net Worldwide
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