analysis reporttopmaterial.com/pdf/alti analysis (plansee-xmam).pdf · 2020. 10. 17. · plansee...
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1
Analysis Report
AlTi=50/50at% target of Plansee & XMaM
Issued lab:The Chinese State Key Lab (SKL) of new Materials in
The University of Science and Technology in Beijing (USTB)
Reported by: Dr. Li Qun with Tel: +86-15321111536
Reported date: August 10th, 2017
Remark: The following analysis result is for reporting both the same and different
features of AlTi=50/50at% target made by Plansee & XMaM. The key quality
specification of density, micro grain structure and chemical composition for sputtering
target are included.
Sample A: Made by Plansee SE and provided by Hauzer Shanghai Ltd.
Sample B: Made by Xiamen Advanced & High-tech Materials Co., Ltd.
Density
Manufacturer Actual Density (g/cm3) Density by percent
Plansee 3.60 99.2%
XMaM 3.63 100%
Remark:
1) The theory density for AlTi=50/50at% target made by HIP is 3.63g/cm3.
2) Density by percent means (actual density/theory density) x 100%
2
Micro grain structure
Plansee(×100) XMaM(×100)
Plansee(×200) XMaM(×200)
Plansee(×500) XMaM(×500)
The above micro structure pictures are observed by SEM(scanning electron
microscope) with back scattering mode. The bright parts means Titanium and The
dark parts means Aluminum.
3
Chemical Composition in wt%
AlTi 50/50at% = AlTi 36/64wt%
Magr. Ti Al C N O S Fe Si
Plansee Balance 35.88 0.035 0.013 0.54 <0.005 0.036 <0.01
XMaM Balance 36.07 0.012 0.016 0.28 <0.002 0.054 0.016
The above analysis result means both Plansee and XMaM's chemical composition
are in the same level.
Conclusion:
Both Magrs. have the same quality level for AlTi=50/50at% target. However,
XMaM's target has smaller grain size, more uniform grain distribution and a little
higher density, which will contribute to get solid coating film and maybe longer
coating life.
The end.
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