advisor : cheng-hsien liu reporter : ming-yen chen date : 2008/6/11
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DIGITALLY-TUNABLE MEMS FILTER USING MECHANICALLY-COUPLED
RESONATOR ARRAY
Hengky Chandrahalim and Sunil A. BhaveOxideMEMS Lab, Electrical and Computer Engineering, Cornell University, Ithaca,
New York, USA
Advisor : Cheng-Hsien Liu
Reporter : Ming-Yen Chen
Date : 2008/6/11
Outline
Abstract Introduction Background Experimental setup Experimental results Conclusion
Abstract
Digital tuning Resonator array Band-select filter
Introduction-1
Why band-select filter?
Hz
Introduction-2
Extensional mode resonator
Background-1
S.A. Bhave, and R.T. Howe, “Silicon nitride-on-silicon bar resonator using internal electrostatic transduction,” Transducers’05, Seoul, Korea, June 5-9, 2005, pp. 2139-2142.
100nm SiN
3um SOI
Poly electrode
Background-2
f = (n/2L) (E/ρ)^1/2
E : effective elastic modulus for 2D expansion
ρ: density of the resonator respectively
n : harmonic order
Center frequency : 511 MHz
Experimental setup
1. DC1=DC4=+Vp, DC2=DC3=OFF
2. DC1=DC3=+Vp, DC2=DC4=-Vp
3. DC1=DC2=DC3=DC4=+Vp
Experimental results-1
1. DC1=DC4=50V, DC2=DC3=OFF
4-port filter
Experimental results-2
2. DC1=DC3=40V, DC2=DC4= -40V
resonator 1 and 2 : Out of plane
Lower sub-band filter
Experimental results-3
3. DC1=DC2=DC3=DC4= 40V
resonator 1 and 2 : in plane
higher sub-band filter
Experimental results-4
Conclusion
1. Digital tuning at 509 MHz with 1.4 MHz bandwidth and with sub-bands 700 kHz wide.
2. More resonators will provide finer
sub-bands.
Thanks for Your Attention!
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