AMOLED(active-matrix organic light-emitting diode)
LTPS(low-temperature polycrystalline silicon)
TFT(thin film transistor) (backplane)
[1-3]. LCD(liquid crystal display)
a-Si(amorphous silicon) TFT
,
,
AMOED
[4-6].
a-Si TFT ,
TFT
.
AMOLED TFT
OLED
TFT
.
TFT
. AMOLED
LTPS TFT
[7].
4 (730
×920) 2011 5.5 (1500
×1300) .

LTPS TFT IGZO(In-Ga-Zn-O)
TFT AMOLED
[8]. TFT

.
LTPS
.
1] [9]. / (B; boron)
PMOS , LTPS
top-gate . LTPS
a-Si
ELA(excimer laser annealing)
. TFT /
(ILD;
inter-layer dielectric) .

( )
AMOLED LTPS TFT
16
[ 1] AMOLED LTPS TFT [9] (a) NMOS OLED
(b) PMOS OLED
[ 2] AMOLED
[ 3] Secco LTPS SEM
TFT (3 ) .

(Cst;storage capacitor) ,
LTPS /
.
AMOLED [ 2] OLED
2 TFT 1 (Cst) . OLED
TFT OLED
, Cst TFT
.
TFT
TFT Cst
.
[ 2-(a)] NMOS TFT
TFT -
(VGS) OLED - (VOLED)
. OLED
OLED TFT VGS .
VOLED , OLED

(image sticking) .
TFT -
(VGS) . OLED
TFT TFT VGS
, TFT OLED -
.
(image
sticking) .
ELA LTPS [ 3]
(grain) .
(dangling bond)
AMOLED LTPS TFT
2011 12 4 17
[ 5] LTPS TFT 6T-1C
[ 4] LTPS AMOLED
[11]

[10].
TFT
LTPS TFT
. ELA LTPS
TFT
[1,6,8].
LTPS TFT , OLED
[ 4]
[11].
LTPS
TFT
, TFT
. TFT
,
TFT
[1,12]. [ 5] 6 TFT 1
6T-1C , ELA
AMOLED .
. LTPS TFT
1. LTPS TFT
AMOLED LTPS TFT
, [ 6]
.
TFT LTPS
. PECVD(plasma
enhanced chemical vapor deposition) SiO2
.
. ELA
a-Si 450
.
30
a-Si ,

. , 500~600
a-Si
(SPC, solid-phase crystallization)
.

a-Si
[1,6,13]. a-Si
.
(P; phosphorous)
. , [ 1] LTPS
Cst
TFT LTPS
.
. (photolithography)
.
(5)
SiO2 .
.
(Al) . [ 1]
hillock
(Mo/Al/Mo)
.
.
(RTA; rapid thermal annealing)
[6].
SiNX SiO2 .
SiNX , LTPS
(dangling bond)
.
TFT /
contact hole .
.
.
. Mo/Al/Mo
.
.
OLED

.
. spin
coating . SiNX
. TFT
/
via hole .
(11)
ITO
.
AMOLED LTPS TFT
2011 12 4 19
.
OLED
.
, .
[ 1]
. OLED


.
. 7 8
LCD
.
AMOLED LTPS TFT

[9,14]. TFT /
via hole
, /
Cst LTPS
5
LTPS AMOLED .
. LTPS


[15]. a-Si



. ELA
SLS(sequential lateral solidification), A-SPC(advanced
.
) a-Si [8].
,
90
% .
15 .
ELA (500Watt
) 460 [2].
, 4 (730×920)
[ 8]
. 2
,
TFT
. TFT [ 9]
AMOLED .
.
[ 10] (1200Watt ) ELA

750 [16].
[ 11]

[6]. , 4
, 55 AMOLED

[2]
AMOLED [2]
[ 10] Coherent 1200Watt ELA [16]
[ 11]
[6]
.
[ 12] ELA PMOS LTPS TFT
[9]. A-SPC SGS
TFT off
AMOLED .
(2) SLS
[17].
SLS TS-SLS(two-
shot SLS) D-SLS(directional SLS)
[6,15]. [ 13] ELA TS-SLS, D-SLS
LTPS
. TS-SLS D-SLS 6, 15,
17, 18 . ELA<TS-SLS<D-SLS
AMOLED LTPS TFT
2011 12 4 21
LTPS [6]
[ 14] TS-SLS( ) TFT D-SLS( )
TFT [18]
[ 16] A-SPC TFT [20]
TFT on
([ 14]). TS-SLS D-SLS
TFT ELA
AMOLED
.
, .
LTPS TFT
, off [1,13,19].
(1) A-SPC
. A-SPC
[ 15]
a-Si ,
(Joule heat) 1
[20].
,
. [ 16] A-SPC TFT
. [ 12] ELA TFT off .
A-SPC [ 17] 15 AMOLED TV
. A-SPC TFT
ELA TFT on ,

[ 18] SGS [13]
[ 19] Secco SGS [13]
[ 20] SGS TFT [1]
(hysteresis)
[19]. TV AMOLED

. 6
TFT 1 , [ 5]
.
(2) SGS
(MIC; metal induced crystallization)
(MILC; metal induced lateral
crystallization) ,
TFT off
[1].
. [ 18-(a)] a-Si SiO2
SiNX
[13].
a-Si . a-Si
(silicide)
. [ 19]
,
.
[ 20] SGS PMOS TFT
[1]. LTPS ELA
TFT off
. Off
TFT
dual gate 4-gate .
.
,

AMOLED LTPS TFT
2011 12 4 23
AMOLED
.

[ 1 ] D.Y. Choi, Y.S. Park, B.Y. Chung, B.H. Kim, S.S. Kim,
SID '10 Digest, 802 (2010).
[ 2 ] S.M. Choi, C.K. Kang, S.W. Chung, M.J. Kim, M.H.
Kim, K.N. Kim, B.H. Kim, SID '10 Digest, 798 (2010)
[ 3 ] K.Y. Lee, SID '11 Digest, 175 (2011).
[ 4 ] T. Hasumi, S. Takasugi, K. Kanoh, and Y. Kobayashi,
SID '06 Digest, 1547 (2006).
[ 5 ] J.H. Lee, S.G. Park, J.H. Jeon, J.C. Goh, J.M. Huh,
J. Choi, K. Chung, and M.K. Han, AMFPD 2006, 300
(2006).
[ 6 ] C.W. Kim, J.G. Jung, J.B. Choi, D.H. Kim, C. Yi, H.D.
Kim, Y.H. Choi, J. Im, SID '11 Digest, 862 (2011).
[ 7 ] Y.J. Chang, J.H. Oh, S.H. Jin, S.H. Park, M.H. Choi,
W.K. Lee, J.B. Choi, H.D. Kim, S.S. Kim, SID '11
Digest, 874 (2011).
[ 8 ] H.D. Kim, J.K. Jeong, H.J. Chung, Y.G. Mo, SID '08
Digest, 291 (2008).
[ 9 ] J.H. Choi, C. You, J. Choi, K. Cho, D. Kwon, H.D.
Kim, S.S. Kim, SID '10 Digest, 1352 (2010).
[10] T. Kamins, Polycrystalline Silicon for Integrated Circuits
and Displays (1998).
[11] K.C. Park, J.H. Jeon, Y.I. Kim, J.B. Choi, Y.J. Chang,
Z.F. Zhan, C.W. Kim, Solid State Elect. 52, 1691
(2008).
[12] M.H. Lee, S.M. Seop, J.S. Kim, J.H. Hwang, H.J.
Shin, S.K. Cho, K.W. Min, W.K. Kwak, S.I. Jung, C.S.
Kim, W.S. Choi, S.C. Kim, E.J. Yoo, SID '09 Digest,
802 (2009).
[13] H.K. Chung, K.Y. Lee, SID '05 Digest, 956 (2005).
[14] I. Lee, C. Im, Y. Kim, D. Kwon, J. Kim, M. Ko, J.
Yun, J. Yeo, J. Im, S. Kim, SID '11 Digest, 101 (2011).
[15] , 7 (2), 10 (2006).
[16] Coherent Product Catalog, Excimer LasersUV
Optical Systems (2011).
[17] J.B. Choi, Y.J. Chang, C.H. Park, Y.I. Kim, J.H. Eom,
H.D. Na, I.D. Chung, S.H. Jin, Y.R. Song, B. Choi,
H.S. Kim. K. Park, C.W. Kim, J.H. Souk, Y. Kim, B.
Jung, K.C. Park, SID '08 Digest, 97 (2008).
[18] J.B. Choi, C.H. Park, I.D. Chung, K.H. Lee, H.K. Min,
C.W. Kim, S.S. Kim, SID '09 Digest, 88 (2009).
[19] S.H. Jung, H.K. Lee, C.Y. Kim, S.Y. Yoon, C.D. Kim,
I.B. Kang, SID '08 Digest, 101 (2008).
[20] H.S. Seo, C.D. Kim, I.B. Kang, I.J. Chung, M.C.
Jeong, J.M. Myoung, D.H. Shin, J. of Cryst. Growth,
310, 5317 (2008).

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