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www.reading.ac.uk/EMLab Peter Harris Advanced SEM: ESEM and Cryo-SEM

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Page 1: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

www.reading.ac.uk/EMLab

Peter Harris

Advanced SEM: ESEM and Cryo-SEM

Page 2: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

Electron Microscopy

Specimen

Condenser lens

Objective lens

Specimen

Projector lens

Fluorescent screen

Electron gun

Digital camera

Transmission electron microscopeScanning electron microscope

Adenovirus negatively stained with uranyl acetate

Wasp eye

Page 3: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 20173

• High vacuum (~ 10-6 Torr)

• Dry samples

• Conductive samples

Specimen

Conventional SEM

Page 4: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201744

• Many interesting samples contain water:

– Plant/animal tissues

– Food samples

– Gels/colloids

– Suspensions of particles

Water

Page 5: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 20175

Air drying a hydrated sample

Page 6: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 20176

Leaf cross-section

Drying Damage

Page 7: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

• Drying solutions:

– Freeze Drying

– Critical Point Drying

Workshop 14 November

Solutions to the water problem - 1

Page 8: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

Non-drying solutions:

ESEM:Cool sample & introducewater vapour into chamber

Cryo-SEM:Freeze sample in liquid nitrogen and imagein frozen state

Solutions to the water problem - 2

Page 9: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

• Differentially pumped apertures for pressure separation.

Innovations

1980s: ElectroScan ESEM. First successful commercial ESEM. Gaseous secondary electron detector.

• New (backscattered) electron detector.

Late 1970s: Development of ESEM by D. Danilatos (Australian Wool Corporation)

• Cooled specimen to retain moisture.

Today: FEI Company are at the forefront of ESEM development.

History of ESEM

Ref: V. Robinson, “The development of variable pressure scanning

electron microscopy”, Microscopy and Analysis, Nov/Dec 2016, p.17.

Page 10: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201710

ESEM: how it works

• Differential Pumping

• Pressure limiting aperture: typical

chamber pressure 10 Torr

• Gaseous secondary electron detector

• Sample cooling: typical temperature

5°CCooled specimen

Page 11: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201711

Secondary electronsfrom sample strike watermolecules.

Positively charged watermolecules are attracted tonegatively charged sample.

Negative charge at samplesurface is neutralized.

ESEM samples don’t have to be coated!

Page 12: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201712

ESEM – plant specimens

Cocoa embryo torpedo stage Basil leaf

Page 13: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

• Raspberry buds : Hiroyuki Imanishi, Plant Sciences

ESEM – plant specimens

Page 14: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

ESEM – plant specimens

Drosera adelae stigma, ESEM

Page 15: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

ESEM – plant specimens

Wild strawberry flower in early stages of growth - Rashed Alzahrani, SBS.

Page 16: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201716

Potato, starch grains in situ Potato, starch grains washed out

ESEM – food specimens

Page 17: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201717

ESEM: other samples

Fat crystals Preserved nematode

Page 18: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201718

ESEM: imaging water

Condensation on ostrich feathers

Page 19: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201719

ESEM: limitations

• Limited Resolution ~10x worse

than conventional SEM

• Limited field of view

• Lack of contrast

Page 20: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201720

1. Sample is frozen

2. Frozen sample is handled under vacuum

3. Fractured/sublimation/coating

4. Frozen sample transferred to SEM cryo

stage

5. Normal high vacuum imaging

Cryo-stage

Cryo-SEM: how it works

Page 21: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201721

• SEM mounted preparation

chamber

• Quorum: PolarPrep 2000

Cryo-SEM: how it works

Page 22: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201722

Cryo-SEM: how it works

Page 23: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201723

Cryo-SEM: how it works

Page 24: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

Preparation chamber:Fracturing/sublimation/coating

Cryo-SEM: how it works

Page 25: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

Cryo-SEM: how it works

Page 26: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201726

Cryo-SEM: fracturing liquid samples

Xanthan Gum in water Natural Greek yogurt

Page 27: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201727

Cryo-SEM: freeze fracturing

Cotoneaster leaf fractured at -140°C Grass leaf fractured at -190°C

Page 28: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

Cryo-SEM: freeze fracturing

Short dough biscuit - Dr Veronica Giacintucci FNS. Green areas are starch particles.

Page 29: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201729

Cryo-SEM: sublimation

Ice cream (-90°C for 15mins @ ~10-3 Pa)Ice cream (-90°C for 5mins@ ~10-3 Pa)

Page 30: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201730

Cryo-SEM

60% oil in water emulsionCappuccino foam

Page 31: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201731

Cryo-SEM & ESEM: Summary

• Both: hydrated samples

• ESEM: less sample preparation

• ESEM: faster

• Cryo-SEM: higher magnifications

• Cryo-SEM: liquid samples

Page 32: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

Becoming an EMLab user

Sherrie Foo

Page 33: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201733

Remaining workshops

Date Topic

14 November 2017Biological specimen

preparation for SEM

21 November 2017X-ray Analysis and

Elemental Mapping

28 November 2017Biological specimen

preparation for TEM

Page 34: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 2017

Presentations available on website

Page 35: Advanced SEM: ESEM and Cryo-SEM · EM Workshops 2017 • Differentially pumped apertures for pressure separation. Innovations 1980s: ElectroScan ESEM.First successful commercial ESEM

EM Workshops 201735

► Questions?

Electron Microscopy Laboratory