Adding Optical Processing to the SEM/FIB

Cheryl Hartfield*, Herschel Marchman, Tom Moore*Senior Applications Specialist, Omniprobe

hartfield@omniprobe.com

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Why add photonsHowApplicationsSummary

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Photons enable improvements to existing procedures and enable new methods involving combining photons with electrons, ions, and gases in the SEM-FIBExisting commercial capability confined to white light or IR imaging (co-axial optical and FIB columns, “telescope” accessory, parallel columns) and spectroscopy (CL, PL)The potential applications of photons in the SEM-FIB are largely untapped

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Flexible solution with integrated strategy◦

Compatible with various back-end light sources◦

Dual imaging (receive) AND processing (send) capability

Optic Delivery Vacuum ChamberBackend Source

processing, illumination

imaging, light collection

UVIR

Broad beamFocused

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Femtosecond

Simultaneous optical/electron or ion imaging

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2nd

generation prototype

Desired Capabilities◦

High flux photon delivery◦

Bright field or dark field imaging◦

Fluorescence, cathodoluminescence◦

Full color, 4 mega-pixel◦

Multiple magnifications

Bridging hi-mag. optical to large field of view◦

Imaging at oblique angle of incidence

Works on any port

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Visualization for navigation/co-localization◦

Circuit edit and failure analysis: image structures in buried layers◦

Interpret highly charged electron image◦

Accurately and rapidly navigate large areas without CAD◦

Easily identify specific tissue architecture for EM analysis

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Intermediate magnification bridging to SEM

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NBS 1963A Test Target –

chrome on glass

12.5 line pairs per mm(80um pitch); FOV~3mm2

118x lowest SEM mag.

Data acquired on FEI 865

500um

50um

20um particle

High resolution, monochromatic

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NIST traceable SRM473 optical line width measurement standard

1um pitch

Same optics, continuous magnification set by the working distance between the lens and the sample.

Data acquired on bread board

WD1 WD2

WD3 WD4NA = 0.6

Lighting varied as function of sample tilt

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Resin embedded OsO4 stained yeast block

0 deg tilt 45 deg tilt 50 deg tilt

Block Face

Data acquired on FEI 865

Lighting varied as function of sample tilt

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Semiconductor sample, subsurface imaging

10 deg stage tilt 41 deg stage tilt30 deg stage tilt

“dark field” “bright field”

Simultaneous Imaging and Processing

405nm laser spot visible inside image generated by broad band white light source

Simultaneous in situ Correlative Light and Electron Microscopy (CLEM, ILEM)

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Integrated fluorescence and transmission electron microscopy

Journal of Structural Biology, Volume 164, Issue 2, November 2008, Pages 183-189

Alexandra V.

Agronskaia, Jack A. Valentijn, Linda F. van Driel, Chris T.W.M. Schneijdenberg, Bruno M. Humbel, Paul M.P. van Bergen en Henegouwen, Arie

J. Verkleij, Abraham J. Koster, Hans C. Gerritsen

Advanced Electron Microscopy in Life Sciences -Finding the Place of InterestG.I.T. Imaging & Microscopy 02/2007, pp 48–50Bruno M. Humbel

40um

4um

2um

2um

20um

0.4um

Laser-Assisted CVDLaser-Assisted CleaningLaser Ablation

In situ monitoring of material processing by a pulsed laser beam coupled via a lensed

fiber into a scanning electron microscope. J. Vac. Sci. Technol. A Volume 26, Issue 6, pp. 1432-

1438 (November 2008) Hwang DJ, Misra

N, Grigoropoulos

CP, Minor AM, Mao SS.

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Laser-Assisted FEBIP and FIBIP◦

Omniprobe/U Tenn

(Philip Rack) SBIR Phase I

Award No. IIP-0839497:

Photon Enhanced SEM Platform for Nano-Manufacturing◦

Goal: investigate laser assisted electron beam induced directed assembly to achieve unprecedented material quality◦

2nd

generation OptoProbe™

device upgrade Feb. 2009

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Rocky Kruger, Mechanical DesignAaron Smith, Software

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