a. electrical and thermal properties of materialspioneer.netserv.chula.ac.th/~ksongpho/308/a.pdf ·...
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Electrical & Thermal Properties
A. Electrical and Thermal Properties of Materials
• Conduction Theory: Drude model
• r(T) – pure metals
– non-pure metals (Matthiessen’s rule)
• r for alloys– 1-phase: Nordheim’s rule
– 2-phase: mixture rules
• r for non-metals– semiconductors, glasses, polymers (plastic)
• special cases for EE– r of amorphous / thin films
– r at high frequencies (skin effect)
– electromigration
• thermal conduction k(T)– metals, non-metals
v.2019.AUG
2102308 1
References:
- S.O. Kasap, 4th edition, Chapter 2
- R.J.D. Tilley, 2nd ed, Chapter 13
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Electrical & Thermal Properties
2.1* Classical Theory: Drude Model
• Key EE materials: metals, semiconductors
– metals (conductors): transport (drift) of very large number of charge carriers, sea of
electrons (at energy ~EF), under electric field E
– semiconductors: transport (drift, diffusion) of large number of electrons (~EC)
and/or holes (~EV), under electric field E
• E → J : when electric field E (V/cm) is applied, conduction electrons
respond, causing current density J (A/cm2)
• Three important questions
Q1) source of conduction electrons
Q2) their location
Q3) their response under electric field
2102308 2
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Electrical & Thermal Properties
Q1) Where do (conduction) electrons in metals come from?
Reminders (band theory):
- electron energy levels in atoms split and form bands in
crystals due to Pauli exclusion principle, at equilibrium
distance, some bands overlap
- most important bands: top-most occupied band () and
bottom-most empty (). Electrons in these bands are
valence (VB) or conduction (CB) electrons, the latter
respond to electric fields
- examples: metallic 11Na, 12Mg, 13Al
2102308 3
12Mg
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Electrical & Thermal Properties 2102308 4
Q1) Where do (conduction) electrons in metals come from?
- materials can be classified according to the type of band diagrams into three main groups:
insulators, semiconductors, metals
- the conduction electrons in metals arise from the partially filled band ()
- 29Cu: electrons in the half-filled 4s band is responsible for conduction (electrons in the filled 3d
band is shielded by 4s band, does not involve in bonding, thus localized around each Cu atom)
insulators semiconductors metals semi-metals
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Electrical & Thermal Properties 2102308 5
Q2) Where are the conduction electrons?
A) “throughout” metal, moving (a) without- or (b) with preferred direction depending on the
presence of external electric fields. The conduction electrons (4s1) are said to be delocalized.
In contrast, the core electrons ([Ar] 3d10) are localized.
E = 0 E 0
Q3) How do they respond to electric field (E)?
The short answer (from 2102385): they move, resulting in current (J)
J (E ) ?
– Drude: J = E = nemE
– : conductivity (W-cm)1
– n: electron concentration (/cm3, cm3)
– m : drift mobility (cm2/V-s) , measures the ease with which charge carriers drift
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Electrical & Thermal Properties
random motion
vd: drift velocity
i/p
o/p: Jx = nevdx
How is vdx related to E ?
Derivation (the long answer)
tA
qJ
t
xv
xAneq
dx
2102308 6
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Electrical & Thermal Properties
1028 m-3
1022 cm-3
1010 mm-3
10 nm-3
mean free time t (or relaxation time)
- time between successive collisions ()
- with each collision (), the electron is
assumed to lose all its velocity ()
- energy transferred to lattice (heat: P = I2R)
- average free time depends on lattice
vibration, defects, impurities, etc
m/e
ne
EJ
tm
m
v = u + at
:
tm
eEv x
dx
&
classical mechanics
F = ma
terms & units
Material Device
2102308 7
J : current density (A/cm2) I : current (A)
: conductivity (/W.cm) G : conductance (/W)
E : field strength (V/cm) V : voltage (V)
r : resistivity (W.cm) R : resistance (W)
m : mobility (cm2/V.s)
Ex: Cu
FCC, a = 3.6 Å
N = 4/a3 =
8.6 × 1022 /cm3
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Electrical & Thermal Properties
Ex. 2.2
Calculate drift mobility and mean scattering time of conduction electrons
in Cu at room temperature, given that (Cu) = 5.9105 W-1 cm-1. The
density of Cu is 8.96 g/cm3 and atomic mass is 63.5 (g/mol).
...
/105.1 6
pfm
smv
t
m
given (Ex.4.4 p.299 Fermi speed)
Note: conduction electrons in metals travel at Fermi velocity:
(temperature insensitive)FOF Emv 2
2
1
cf: Cu FCC lattice constant 3.610 Å
37 nm
43.3 cm2/Vs
2.5×10-14 s
2102308 8
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Electrical & Thermal Properties
2.2 r (T ) for ideal pure metals
%1327340
273027340int
summer
erwsummer
R
RR
TT A)( r
constant
temperature
Pure metal wire:
Tne
aT
tmr
rmt
111
Lattice scattering
2102308 9
l: mean free pathu: mean speed
t: mean free time
scattering centers(host atoms,
impurity, defects,…)
(99.99% Cu)
- drift of conduction electrons limited mainly by lattice scattering (phonon scattering)
- increasing temperature T results in increased scattering cross-section (yellow shaded area a),
decreased mfp mft, mobility, and conductivity, summarized by
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Electrical & Thermal Properties
2.3 r (T ) for non-pure metals
Impurity scattering
Lattice scattering
2102308 10
- “non-pure” means metals with impurities. When the impurities are unintentional, they are
called contamination. If they are intentional (controlled type and concentration) they are called
dopants (process called doping)
- drift of conduction electrons in non-pure metals are limited by lattice scattering (as in pure
metals) and impurity scattering
- experiments show that scattering rates combine linearly, this is known as Matthiessen’s rule
(next slide)
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Electrical & Thermal Properties
Overall frequency of independent scattering events:
(number of collisions /unit time)
due to lattice vibration
due to impurity scattering
depends on separation between
impurity atoms (concentration, NI)
In general:
Residual resistivity
[impurities, dislocations, vacancies,
interstitial atoms, grain boundaries…]
IT ttt
111
IT rrr
Matthiessen’s Rule
RT TT rrr
BA Tr [A,B temperature independent]
tr
t
tm
1
11
Drude(slide # 7)
temperature sensitive
microstructure sensitive
2102308 11
“Defects”*(see Appendix Defects)
(intrinsic property, cannot be removed)
(extrinsic property, remove by
careful processing)
Let’s check the validity of Matthiessen’s Rule:
1. overall trends, 2. boundary conditions (0 K), 3. many metals
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Electrical & Thermal Properties
Q1) How good is M’s rule?
A) Quite good! Measured results (Fig. 2.8) match well with schematic graphs showing increased
resistivities with (Fig. 13.4) temperature (), presence of impurity (), and (Fig. 13.5) linear
dependence with impurity level
BA TTT RT rrr
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Electrical & Thermal Properties
0Rrfor superconductors
# atoms that vibrate
with sufficient energy
reduced rapidly
RT rr Apredicted
Q2) ... for all temperatures?
A) No, it fails at low T.
Cu
RT rr 5Dexperiments
2102308 13
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Electrical & Thermal Properties
oTo
ooT
n
oo
T
dT
d
TT
T
T
r
r
rr
r
r
1
1
material npure metal =1
Realitymagnetic ~2
non-magnetic ~1
alloy (NiCr) << 1
(B dominates)
BA Tr
Q3) ... for all metals?
A) No, it depends on the nature of
material
temperature coefficient of
resistivity (TCR):
TCurie
Fe = 1,043 K
Ni = 631 K
TCurie
log:
linear:
2102308 14
IDEAL Tr
nTrREAL
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Electrical & Thermal Properties 2102308 15
Example 1:
Example 2:
Which is more accurate? See curve p.13
.mn5.118100208
1180C100@In W
r
97.3273100233
114.15:linear
.mn80.4273
1004.15:log
?
16.1
K 100@Cu
W
r
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Electrical & Thermal Properties
(a) A vacancy in the crystal. (b) A substitutional impurity in the crystal. The
impurity atom is larger than the host atom.
(c) A substitutional impurity in
the crystal. The impurity atom
is smaller than the host atom.
(d) An interstitial impurity in the crystal. It
occupies an empty space between host atoms.
Fig. 1.44: Point defects in the crystal structure. The regions aroundthe point defect become distorted; the lattice becomes strained.
0D: point defects
2102308 16
vacancies are equilibrium
defects (always exist),
concentration in metals is
< 1 in 10,000 atoms
Defects interrupt periodic arrangement of atoms (scatter electrons, reduce mobility, increase resistivity).
Defects have many origins; can be grouped according to geometry/dimension (0D, 1D, 2D, 3D)
Appendix Defects: p.1/3
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Electrical & Thermal Properties
Edge dislocation line
(a) Dislocation is a line defect. The dislocation shown runs into the paper.
Compression
Tension
(b) Around the dislocation there is a strain field as the atomic bonds have
been compressed above and stretched below the islocation line
From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002)
http://Materials.Usask.Ca
Fig. 1.46: Dislocation in a crystal is a line defect which is accompaniedby lattice distortion and hence a lattice strain around it.
2102308 17
extra half plane
Dislocations are non-equilibrium defects
(removable with careful process control);
When present, energies are stored in the
distorted regions.
Dislocation in active area of optical emitter
causes dark-line defects, dark pixels
Dislocation in active area of optical detector
causes dead pixels (always black, white, or
whatever color the pixel is associated with)
1D: line defects
Appendix Defects: p.2/3
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Electrical & Thermal Properties 2102308 18
Strained bond
Broken bond (dangling
bond)
Grain boundary
Void, vacancy
Self-interstitial type atom
Foreign impurity
Fig. 1.51: The grain boundaries have broken bonds, voids, vacancies,strained bonds and "interstitial" type atoms. The structure of the grainboundary is disordered and the atoms in the grain boundaries have higherenergies than those within the grains.
From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002)
http://Materials.Usask.Ca
Grain Boundaries
width ~2-5 atoms
Edge dislocation line
(a) Dislocation is a line defect. The dislocation shown runs into the paper.
Compression
Tension
(b) Around the dislocation there is a strain field as the atomic bonds have
been compressed above and stretched below the islocation line
From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002)
http://Materials.Usask.Ca
Fig. 1.46: Dislocation in a crystal is a line defect which is accompaniedby lattice distortion and hence a lattice strain around it.
2D: area defects
3D: volume defects
3D defects include voids (think air bubbles),
inclusions, precipitates
surfaces
2D defects include surfaces, grain boundaries
(in polycrystalline materials), twins (twin
boundary), twists, stacking faults (pile-up
faults)
Appendix Defects: p.3/3
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Electrical & Thermal Properties
Ex. 2.10 (a) Light bulb rated 40W, 120V. Has W filament 0.381 m long with diameter
of 33 mm. Room temperature resistivity of W is 5.51×10-8 Wm. Given that resistivity
of W varies at T1.2, estimate operating temperature of the filament.
120 V
40 W
0.333 A
Fig. 2.9: Power radiated from a light bulb at 2408 °C is
equal to the electrical power dissipated in the filament.
Ans: 2,812 K
2102308 19
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Electrical & Thermal Properties
2.3.2 Nordheim’s Rule (for solid solutions)
2102308 20
- ‘Pure’ metals rarely used in practice, except pure Cu (99.99%) for low r
- Metals are often mixed (alloyed) to achieve functionality, properties, cost advantages
over pure metals
- Alloys: the simple (brass: Cu70 Zn30 wt%), the complex (Inconel 718: 10 elements)
- Simplest type of alloys: solid solution or single-phase alloys
- Single-phase alloys: atoms mixed at atomic level throughtout solid. This is possible only
if the constituent atoms are completely miscible (similar in size and crystalline structure)
- What determine single-phase alloy resistivities?
Alloying effect of rI , rT
IT rrr still applies
Example 1: NiCr (heater wire)
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Electrical & Thermal Properties
RTmatrix
matrix
I
XCX
XCX
rrr
rr
r
1
1
IT rrr
C: Nordheim’s coefficient,
effectiveness of impurity atoms in
increasing resistivity
X: atomic % of solute in solvent
solute ตัวละลาย + solvent ตัวท าละลาย = solution สารละลาย
Example 2: Cu-Ni (thermocouple wire)
~ ppm/K
Cu, Ni are both FCC.
2102308 21
Nordheim
Matthiesen
+
(alloys)
(metals)
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Electrical & Thermal Properties
CX
XCX
I
I
r
r 1
Semi-empirical equation:
for small X:
X
2102308 22
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Electrical & Thermal Properties
* *
Cu & Au randomly mixed
* orderly structure,
viewed as pure compound
Q) How good is Nordheim’s rule?
A1) Good, if solutions are randomly mixed
A2) Bad (over-estimate), if solutions are ordered
Self-check: r of Cu25%-Au75%
22.8 nW.m
note: wt.% at.%
*
22.8 + 450(0.25)(0.75) = 107.2 nW.m
2102308 23
Cu, Au are both FCC.
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Electrical & Thermal Properties
TABLE 2.3
Nordheim Coefficient (at 20 C) for Dilute Alloys
Solute in Solvent
(Element in matrix)
Nordheim
coefficient
C (nW m)
Maximum Solubility at
25C at.%
Au in Cu matrix 500 100 Mn in Cu matrix 2900 24
Ni in Cu matrix 1570 100
Sn in Cu matrix 2900 0.6
Zn in Cu matrix 300 30
Cu in Au matrix 450 100
Mn in Au matrix 2410 25
Ni in Au matrix 790 100
Sn in Au matrix 3360 5
Zn in Au matrix 950 15
Data extracted from various sources: Electronics Engineers’ Handbook, Second Edition, ed.
by D.G. Fink and D. Christiansen (McGraw-Hill, New York, 1982), section 6 (Properties of
Materials by I.A. Blech), J.K. Stanley, Electrical and Magnetic Properties of Metals
(American Society for Metals, Metals Park, Ohio, 1963) and Solubility data from
Constitution of Binary Alloys, Second Edition, M. Hansen and K. Anderko (McGraw-Hill,
New York, 1985)
From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002) http://Materials.Usask.Ca
Brass: 70%Cu – 30%Zn
“solubility limit”ขีดจ ำกดัสภำพละลำยได้
2102308 24
miscibleผสมเขำ้กนัได้
immiscibleผสมเขำ้กนัไม่ได้
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Electrical & Thermal Properties
Phases:physically and chemically distinct material regions ( and b).
Aluminum-
Copper
Alloy
Adapted from
Fig. 9.0,
Callister 3e.
solid solubility limit of
Al in Cu = %
- Single-phase alloys: atoms mixed at atomic level throughtout solid. This is possible only if
the constituent atoms are completely miscible (similar in size and crystalline structure)
- Two-phase alloys: constituent atoms are very different in size and/or have different
crystalline structure. They prefer to phase separate.
Al-Cu
What determine two-phase alloy resistivities?
2102308 25
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Electrical & Thermal Properties
2.4 Mixture Rules (for 2-phase alloy)
bb
bb
rrr
r
rr
eff
eff
eff
A
L
A
L
A
LR bb eff
b
volume fraction of phase
volume fraction of phase b
(a) Rule 1: (b) Rule 2: (c) Rules 3 & 4:
.
.
.
linear combination
2102308 26
- The three scenarios of two-phase alloys: a) ordered mixture in series, use Rule 1, b) ordered
mixture in parallel, use Rule 2, c) disordered mixture apply linear combination (Rules 3,4…).
- Nature = c (not a, b), hence 2-phase region has a linear change in resisitivity between two end
points, (see Cu-Ag, next slide)
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Electrical & Thermal Properties
@ X1 Solubility limit
for Ag in Cu reached
2-phase alloys A-BCu-Ag
2102308 27
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Electrical & Thermal Properties
Electrical materials in power distribution
Ag has high electrical and thermal conductivities best for electrical contacts/switches
(but expensive). Usually use Ag alloy (Ag-Ni preferred over Ag-Pd despite similar
strength because Ag-Ni forms a 2-phase alloy whereas Ag-Pd is a solid solution)
Ag-Pd Ag-Ni
solid solution two-phase alloy
Nordheim’s rule Mixture rule
r r
similar strength
W kg,$
alloy?
r (nW.m)
Ag,16
Ni,70
Pd,100
Criteria:
electrical (low loss)
mechanical (high strength)
chemical (long-term stability)
environmental
Wires: Cu, Al
Plugs: brass (Cu-Zn alloy)
Switches: (Ag-Ni alloy)
2102308 28
… in signal transmission
Criteria: + noise, cross-talk…
hence, twisted pair, shields
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Electrical & Thermal Properties
> temperature dependency
> conductivity
> transport mechanisms: ? drift-diffusion drift
> material
2.7 Electrical Conductivity of Non-metals- previous sections concerned with metals and alloys
- EEE applications also rely heavily on non-metals
- non-metals conducts poorly (semiconductors) or very poorly (insulators), but they conduct
- this section: electrical properties of semiconductors (next 3 slides) and insulators (11 slides)
nem nem
Superinsulators
= 0 r = 0
TAr ?Tr ?Tr
Note the range: 1027. No other physical property has this range. Age of universe: 1010 years or 1017 s.
2102308 29
nem
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Electrical & Thermal Properties
Intrinsic semiconductors
- pure, undoped crystals of some elemental (IV), III-V and II-VI compounds
- the greater the size of the component atoms, the smaller the bandgap (see table).
This is due to the orbitals involved are larger, overlap more, easier to break
- the higher the temperature, the more bonds break, the greater number of carriers,
the increased conductivity (see graph)
2102308 30
he pene mm
Reminder (from course 2102385)
- semiconductors: intrinsic vs extrinsic
- carriers origin: intrinsic (thermal) vs extrinsic (doping)
- carriers concentration: equilibrium vs excess (optical, electrical injection)
Semiconductors: key material for electrical/electronic engineer (EEE)
?T
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Electrical & Thermal Properties
50
100
1000
2000
1015 1016 1017 1018 1019 1020
Dopant Concentration, cm-3
ElectronsHoles
From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002)
http://Materials.Usask.Ca
Drif
t M
ob
ilit
y(c
m2 V
-1s-
1)
Fig. 5.19: The variation of the drift mobility with dopant concentration in Si
for electrons and holes
Si Cun = 8.51022 cm-3
m = 43 cm2/Vs
2102308 31
Extrinsic semiconductors
- crystals intentionally doped with small amount of atoms having different valence
- dopant atoms in crystal ionize to donate mobile electron (n-type) or accept valence
electron or equivalently to create mobile hole (p-type)
- though conductivity is lower than metals (conductors), the carriers are more mobile
due to less scattering (see graph and Cu vs Si below)
- temperature-dependent conductivity is a bit more complicated (see next slide), but
can be briefly stated as “it shows the opposite trend to metals”
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Electrical & Thermal Properties
(T) in extrinsic semiconductors
log(n)
INTRINSIC
EXTRINSIC
IONIZATION
log( )
log( )
mT-3/2
mT3/2
Lattice
scattering
Impurity
scattering
1/TLow TemperatureHigh Temperature
T
Metal
Semiconductor
LO
GA
RIT
HM
ICS
CA
LE
Res
isti
vit
y
Temperature dependence of electrical conductivity for a doped (n-
type) semiconductor.
Tr T/1
2102308 32
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Electrical & Thermal Properties 2102308 33
Insulators? Which materials exactly? Why we (as an EE) care?
Two examples: plastics, glasses
- Plastics are by-products of petroleum industry (think C,H—light atoms).
Plastics are flexible, when conduct bring unique applications
- Glasses are (nominally) non-conducting ionic solids. Glasses are transparent,
when doped they conduct and bring unique applications
keywords for the (near) future
- plastic electronics
- flexible electronics
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Electrical & Thermal Properties
Si4+O2-
2102308 34
… glass & ceramics (ionic conduction)
iiiqZn m
- glass: SiO2-framework, depending on purity/manufacturing can be crystalline (quartz) or amorphous (glass)
- example: soda-lime glass 73% SiO2 – 15% Na2O − 7% CaO − 4% MgO − 1% Al2O3
- glass (all solids) framework contains vacancies and interstitials (often ionised or charged)
- VO (oxygen vacancy) introduces an energy level close to the conduction band, thus acts as donor
- glass often contains mobile ions (Na+, for example) from raw materials
- glass EG large (9 eV) hence transparent, for appreciable conduction glass has to be heated up (impractical)
window glass conducts @ > 300C
i : anion, cation
Z: valency
(“drift by diffusion”)
(VO)
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Electrical & Thermal Properties 2102308 35
… transparent conducting oxides (TCO), or oxide semiconductors
- portable devices demand transparency + electrical conductivity (e.g. touch screen)
- typical metals (Cu), semiconductors (Si) are opaque (visible light cannot go through)
- typical glasses are transparent, but electrical conduction at room temperature is negligible
- TCO: combines electrical conduction (metal-like) & transparency (glass like)
- three important TCO materials: ZnO (Wurtzite), In2O3 (cubic), SnO2 (see table below)
- ionic bonding: anion (O) yields localized 2p band (VB), cation (Zn, In) yields delocalized ns band (CB), see
next page, orbitals Fig. 2.2, electronic band model Fig. 3.4a.
- carriers come from defects: for examples
- VO (oxygen vacancy, anion cavancy) in ZnO acts as donor, Ed close to CB, hence n-type ZnO
- VCu (copper vacancy, cation cavancy) in Cu2O acts as acceptor, Ea close to VB, hence p-type Cu2O
- ideal: n-TCO for electron side, p-TCO for hole side – think light-emitting glass (new industry?)
source: Transparent Oxide Electronics: From Materials to Devices (Barquinha, Martins, Pereira, Fortunato) John Wiley & Sons, 2012.
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Electrical & Thermal Properties 2102308 36
source: Transparent Oxide Electronics: From Materials to Devices (Barquinha, Martins, Pereira, Fortunato) John Wiley & Sons, 2012.
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Electrical & Thermal Properties 2102308 37
… polymers / organic / plastic electronics
- “polymers” means repeating unit of monomers or [monomer]n; “organic” means carbon-based
- material advantages: low-cost processings (plastics), and light weight (1H, 6C vs 13Al, 14Si, 29Cu)
- first conducting polymer: polyacetylene (C2H2)n = n units of acetylene (C2H2) (Fig. 13.2)
- electronic conduction possible due to conjugated double and single bond (Figs. 13.2b-c, 13.1)
- conjugated system: a system of atoms covalently bonded (connected p orbitals) with alternating single and
multiple bonds, with delocalized electrons in a molecule, and in general lowers the overall energy of the
molecule and increases stability. Conjugated systems may be cyclic, acyclic, linear or mixed.
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Electrical & Thermal Properties 2102308 38
plastics/polymers
insulating semiconducting
non-conjugated conjugated: cyclic, acyclic, linear, mixed
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Electrical & Thermal Properties 2102308 39
-bonding
p-bonding
bonding
anti-bonding
- when two atoms are brought together, bonding will occur if electron in each has opposite spin (Fig. 2.3a,b),
otherwise anti-bonding will occur (Fig. 2.3c,d)
- two main bonding types (name , p represent shape of resulting bond s-like or p-like)
-bond: s—p (Fig. 2.4a), end-on p—p (Fig. 2.4b), electrons fixed (shared between two connecting nuclei)
p-bond: sideways-on p—p (Fig. 2.5), electrons delocalized (not belong to particular atom)
- for large molecules (polymers) need to consider hybridized bonds (sp, sp2, sp3—see next slide)
- polymers that are potentially conducting must have monomers with delocalized p-bondings (Figs. 2.9-2.11)
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Electrical & Thermal Properties 2102308 40
s1 + p1
s1 + p2
s1 + p3 (or s2 + p2)
bonding between
before
atoms bond (approximately) in such a way that the orbital overlaps are maximum
*concerned mostly with6C: 1s2 2s2 2p2 and 1H: 1s1
orbital hybridization*
after
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Electrical & Thermal Properties 2102308 41
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Electrical & Thermal Properties 2102308 42
… polyacetylene (C2H2)n revisited
- in polymer forms, they take either trans- or cis- configuration (Fig. 13.20)
- the two configurations are similar (alternating double [short] and single [long] bonds), but different
(periodicity) different energy gaps (Fig. 13.20)
- doping is possible, with orders of magnitude increase in conductivity (Fig. 13.21) by
- n-type: dope with alkali (Group I)
- p-type: dope with halogens (Group VII)
1.8 eV
2.0 eV
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Electrical & Thermal Properties
kT
Eo
exp
E = activation energy
(Conductivity is thermally activated)
Corresponds to m ~ 10-10 cm2/V.s
[c.f. Ag: 40 and Si: 1500 cm2/V.s]
soda silica glass
2102308 43
Tg: glass transition temperature(softening point)
borosilicate
Tm 1600 °C
… glasses & polymers
Tg
Tm melting temperature
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Electrical & Thermal Properties 2102308 44
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Electrical & Thermal Properties
2.9 Thin Metal Films in IC Interconnects
2102308 45
mfp
r (material property) generally does not depend on dimensions, unless dim ~ mfp
- shrinking electronics results in nm-scale interconnection
- conduction electrons are scattered by the usual mechanisms (lattice scattering,
impurity scattering), plus additional ones (at grain boundaries and surfaces)
reminder: mfp (Cu) 40 nm, slide #6
source: Intel, IEDM Dec 2017
latest MOSFET
(aka FinFET)
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Electrical & Thermal Properties 2102308 46
Manufacturing method:
• thin films: deposited by evaporation grainy
• bulk: thermal processes, annealing
r (film) > r (bulk) due to:
grain boundary scattering
ttr
rrr
11
//
R
RT
x,y,z mfp
x
y
Matthiessen’s:
r is a function of structure/morphology
d: mean grain size
d
l1
0r
r
mean grain size
mfp in single crystal
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Electrical & Thermal Properties
Significant in very thin films only, when thickness is comparable to the mean free path
(usually 10 nm or less—note that mfp of electrons in Cu @ room temperature is ~ 37nm)
surface scattering
Thin film (< 10 nm) formed by:
- deposition discontinuous lose conduction (r )
- epitaxy t very resistive (r )materialbulk in path freemean
1.0
B
B
l
l
D
z
Table 2.6 Typical resistivity values for thin metal films (polycrystalline) in microelectronics.
Metal Bulk r (W m)
10-8)
Film r (W m)
10-8)
Comment
Aluminum 2.67 2.8 - 3.3 Vacuum evaporated
Gold 2.2 2.4 Vacuum evaporated or sputtered
Nickel 6.9 12 Vacuum evaporated or sputtered
Molybdenum 5.7 10 Sputtered and annealed
Film thickness (D) vs mean free path.(l)
- on board (PCB), D >> l, use bulk r- in chip (IC), D << l, be careful with r
ttr
rrr
11
//
R
RT
2102308 47
D
l
pr
r1
0
film thickness
film thickness
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Electrical & Thermal Properties
0 0.05 0.01
1/d (1/micron)
0.015 0.02 0.025
15
20
25
30
35
50
Annealed at 100 C
Annealed at 150 C
As deposited
100 50010510
50
100
rbulk
= 16.7 n m
300
Film thickness (nm)
(a) (b)
(a) rfilm of the Cu polycrystalline films vs. reciprocal mean grain size (diameter), 1/d. Film
thickness D = 250 nm - 900 nm does not affect the resistivity. The straight line is rfilm = 17.8
n m + (595 n m nm)(1/d),
(b) rfilm of the Cu thin polycrystalline films vs. film thickness D. In this case, annealing (heat
treating) the films to reduce the polycrystallinity does not significantly affect the resistivity
because rfilm is controlled mainly by surface scattering.
|SOURCE: Data extracted from (a) S. Riedel et al, Microelec. Engin. 33, 165, 1997 and (b). W. Lim et al,
Appl. Surf. Sci., 217, 95, 2003)
large
grain
size (d) small
surfacegrainT rrrr
improve by annealing improve by increasing thickness
Cu
2102308 48
dominates dominates
varies slightly with deposition technique, substrate, etc…
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Electrical & Thermal Properties
2.8 Skin Effect
Low inductance
High inductance
Inductance = total magnetic flux threaded per unit currentปริมำณของเสน้แรงแม่เหลก็ต่อหน่ึงหน่วยกระแส
linked to B1 and B2
linked to B2 only
Skin depth is due to the circulating
eddy currents cancelling the current
flow in the center of a conductor and
reinforcing it in the skin.
Lenz's law: the current induced in a
circuit due to a change in the magnetic
field is so directed as to oppose the
change in flux or to exert a mechanical
force opposing the motion.
r is a material property, normally should not depend on excitation (voltage, electric field), except
when excitation is ac with very high frequency
2102308 49
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Electrical & Thermal Properties
Implications: 1. HF signal Tx should not use solid conductor use pipes (waveguide) to
reduce weight & cost.
2. Ag-coated copper wire for audio applications.
2/
1
m
p
rr
p
pp
aAr
a
aaA
ac2
2
22
(per unit length)
HF signals prefer low impedance path current confined to skin
typermeabili magnetic
ormmm
frequency independent
(dc upto 1/t, mean free time,
see Ex. 2.2)
From solvingMaxwell’s eq
2102308 50
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Electrical & Thermal Properties
2/
1
m
Q1) what is the skin depth of Cu wire at 50 Hz?
A1) 9.3 mm
Q2) what is the largest diameter of Cu wire available commercially?
A2) Wiki(AWG: American wire gauge)
Q3) materials suitable as magnetic core for LF vs HF applications?
A3) magnets (Fe,….), conductivity
2102308 51
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Electrical & Thermal Properties
Ex 2.26: What is the change in the dc resistance of a Cu wire of radius 1 mm for
an ac signal at 10 MHz? And at 1 GHz?
[Cu has rdc = 1.7 10-8 W m or dc = 5.9 107 W-1m-1 and a relative permeability
mr ~ 1. Given that mo = 4p 10-7 H/m.]
Soln:
dcac
ac
dc
rr
r
r
/
@ (mm) rac/rdc
10MHz 20.7 24.2
1GHz 2.07 242note: H = Wb/A = V.s/A = W.s
2102308 52
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Electrical & Thermal Properties 2102308 53
SUMMARY
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Electrical & Thermal Properties
2.6 Thermal Conduction
• metals conduct electricity
and heat well
• In metals, free electrons
play role in heat conduction
• In nonmetals, heat
conducted by lattice
vibrations (phonons).
Metals
thermal carriers: electrons
T1 T2
heat flow
x
TAQ
x
T
A
k
x
le kkk
2102308 54
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Electrical & Thermal Properties
Rate of heat flow Rate of charge flow
Fourier’s law of thermal
conduction
Ohm’s law, Drude
(J = E)
x
TA
dt
dQQ
k
x
VA
dt
dqI
note:
I=JA
J=E
2102308 55
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Electrical & Thermal Properties
In metals, electrons participate in charge () and heat (k) transport
processes and k must be related!
WFL lawLorenz number or
Wiedemann-Franz-Lorenz coefficient
T
TT
?
1
k
r
20C CWFL = 2.44x10-8 WWK-2
In pure metal:
(= p2k2/3e2)
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Electrical & Thermal Properties
Relatively constant @ > 100K due to
almost constant mean speed of electrons
frozen electrons
electron-phonon
interactions
cf. r(T) of alloy
Fig.2.6 p.15
Note: kalloy < kelement (remember Nordheim?)
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Electrical & Thermal Properties
Non-metals:
thermal carriers: phonons
Coupling in k (W / m-K)
GOOD Diamonds 1000
POOR Polymers < 1
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Electrical & Thermal Properties
Table 2.5 Typical thermal conductivities of various classes of materials at 25 °C.
k (W m-1 K-1)
Pure metal Nb Fe Zn W Al Cu Ag
52 80 113 178 250 390 420
Metal alloys Stainless Steel 55Cu-45Ni 70Ni-30Cu Steel Bronze Brass Dural
12 - 16 19.5 25 50 80 125 147
Ceramics
and glasses
Glass-
borosilicate
Silica-fused
(SiO2)
S3N4 Alumina
(Al2O3)
Saphire
(Al2O3)
Beryllia
(BeO)
Diamond
0.75 1.5 20 30 37 260 ~1000
Polymers Polypropylene PVC Polycarbonate Nylon
6,6
Teflon Polyethylene
low density
Polyethylene
high density
0.12 0.17 0.22 0.24 0.25 0.3 0.5
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Electrical & Thermal Properties
From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002)
http://Materials.Usask.Ca
1
10
100
1000
10000
100000
1 10 100 1000
Temperature (K)
MgO
Sapphire
k (
W m
-1 K
-1)
Fig. 4.46: Thermal conducitivity of Sapphire and MgO as afunction of temperature
k(T) of
non-metals
From Principles of Electronic Materials and Devices, Second Edition, S.O. Kasap (© McGraw-Hill, 2002)
http://Materials.Usask.Ca
Hot Cold
Unharmonic
interaction
Direction of heat flow
1
2
3
Fig. 4.45: Phonons generated in the hot region travel towards thecold region and thereby transport heat energy. Phonon-phononunharmonic interaction generates a new phonon whose momentumis towards the hot region.
phonons not coupled
phonons bouced back
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Electrical & Thermal Properties
Ohm’s Law Fourier’s Law
k AL
TTQ
/
AL
V
R
VI
/
k
A
L
Thermal resistance ()
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Electrical & Thermal Properties
Ex. 2.19: A brass disk of electrical resistivity 50 nW-m conducts heat
from a heat source to a heat sink at a rate of 10 W. If its diameter is 20mm
and thickness is 30mm, what is the temperature drop across the disk?
CWFL = 2.44x10-8 WWK-2
Ans: 6.52 K
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