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 Thin Films and Coating Techniques  By:Dr.Modhaffar A.Al-Asadi/Lectures for 4 th class students-Branch of Materials science  REFERENCE 1. Vacuum Technology, Thin Films, and Sputtering, R. V. STUART, ACADEMI PRESS, INC.,Orlando, Florida 32887, 1983.  2.Vacuum Technology, A. Roth, Elsevier Science, 1990.  3. K. L. Chopra,"Thin Film Phenomena" Mc Grow-Hill Book Company, New-York, (1969). 4. K. L. Chopra, I. Kaur,"Thin Devices Application", Plenum Press, New- York, (1983). 5. G. Hodes, "Chemical Solution Deposition of Semiconductor Films", Marcel Dekker (2003). 6. Vacuum Technology, Theory and Laboratory Exercises, Biltoft, Benapfl and Swain, Las Positas College, 2002.  7. John L. Vossen “Materials Science of Thin Films ” Second Edition, Elsevier Elsevier Inc., 2002. 1- Gas Theory for Vacuum Techn ology: 1.1 Physical State of Matter. 1.2 Perfect and Real Gas Laws. 1.3 Motion of Molecules in rarefied Gases. 1.4 Pressure and Mean Free Path. 1.5 Transport Phenomena in Viscous State. 1.6 Transport Phenomena in Molecular State. 1.7 Thermal Diffusion and Energy Transport. 1.8 Conduction and Impedance in V.Tubes. 2- Production of Low Pressures  – Vacuum Pumps: 2.1 Mechanical Pumps: (a) Mechanical Molecular Oil-Sealed Pumps. (b) Roots Pumps. (c) Mechanical Molecular Pumps. 2.2 Vapor Pumps. 2.3 Chemical Pumps. (a) Sputter Ion Pumps. (b) Titanium Sublimation Pumps. (c) Other Chemical Pumps. 2.4 Sorption Pumps. 2.5 Cryo-Pumps. 3- Measurement of Pressure: 3.1 Introduction 3.2 Survey of Types of Gauge Measuring Total Pressure. 3.3 The Mcload Gauge. 3.4 Thermal Conductivity Gauges. 3.5 Hot  – Cathode Ionization Gauges.

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