3d lithium ion on chip micro battery for miniature electronic devices
TRANSCRIPT
![Page 1: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/1.jpg)
3D lithium ion on chip micro battery for miniature electronic devices.
E. Strauss D. Golodnitsky, M. Nathan,V. Yufit, T.Ripenbein,I. Shekhtman, S. Menkin, K. Freedman and E. Peled
School of Chemistry, Wolfson Applied Materials Research Center, Department of Physical Electronics
Tel Aviv University, Tel Aviv, 69978, Israel
![Page 2: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/2.jpg)
![Page 3: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/3.jpg)
OUTLINEOUTLINE
The motivation for developing of 3DMBs
Applications of Microbatteries
2D vs.3D design
Interlaced on-Si 3DMBs
Concentric on-Si and glass-3DMBs
Summary
![Page 4: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/4.jpg)
Classification of batteriesClassification of batteries
Type Capacity ApplicationsSLI batteries* 50 Ah Cars, tractors, trucks,
electrical vehicles
Portable batteries
2 Ah Power tools, toy, radio, cellular phones, laptops
Miniature batteries
200 mAh Watches, calculators, medical devices (pacemakers and hearing aids)
Micro-batteries 10μAh –10mAh
MEMS, Sensors, CMOS memories, Smart Cards, Smart dust, DrugDelivery systems, Medical implantable devices
*Starting lighting and ignition
![Page 5: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/5.jpg)
The MEMS industry worldwide reached almost B$ 6 in 2006,and grows with a compound annual growth rate of 14%.
MEMS market forecastMEMS market forecast
![Page 6: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/6.jpg)
http://media.wiley.com/product_data/excerpt/6X/35273074/352730746X.pdf
Autonomous micro powerfor
Micro-system devices
Multidisciplinary; Miniaturization; Mankind needsMultidisciplinary; Miniaturization; Mankind needs
![Page 7: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/7.jpg)
http://www.computerworld.com/mobiletopics/mobile/story/0,10801,79572,00.html
““Smart dustSmart dust”” -- Future WatchFuture Watch
Energy management is a key component:
Thick film Battery - 0.23mWh/mm3
Capacitor - 2.3μWh/mm3
solar cells:Sun light: 0.23mWh/day/mm2
Indoors: 0.23- to 2.3μWh/mm2
![Page 8: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/8.jpg)
MultisensorMultisensor microclustermicrocluster –– device size < 1cmdevice size < 1cm33
Stand-by power -10μWpeak power - 5mWpulse duration 10msPower supply life-time: months to years
multisensor microcluster measures:pressure, temperature, humidity, and vibration/positionIncludes: a microcomputer, and has a 50m RF link.
Footprint<0.1cm2 is suitable for integrated micro system
Power density needed to meet 5mW is 50mW/cm2
Typical thin film lithium ion battery ~0.5mW/cm2
3DMB meet power density specificationsMB for self-sustained hybrid micropower supplies/ J. N. Harb, R. M, LaFollette, R. H. Selfridge, L. L, Howell, J. Power sources 104, (2002), 46
N. Yazdiea al, Sensors and actuators 84 (2000) 351
![Page 9: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/9.jpg)
Micro robotsMicro robots
Size<1cm3 (8X3mm2)Crawling micro robot consumes tens microwatt of power
Legged and winged micro robots will consume total power<10mW provided by on board solar cells
Commercialized smart dustCommercialized smart dustMICA2DOT available Crossbow tech Ltd; Applications: Temperature and Environmental MonitoringQuarter-Sized MICA2DOT(Φ=25mm) ; Battery – 3V coin cell; 7 years battery life
Dust Networks Ltd; Size – matchbook; Power – 2AA batteries5 years battery life
http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=895117
http://ww
w.bauer.uh.edu/rfid/Sm
art%20D
ust.pdf
![Page 10: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/10.jpg)
Vision: Small wireless sensors networks Vision: Small wireless sensors networks are placed everywhereare placed everywhere.
Sensor nodes:self-sustaining, Average power consumption: expected to be <50μWLifestyle assisted living, sports entertainment functions
Prof. Paul Wright, A. Martin Berlin Chair in Mechanical Engineering, Chief Scientist of CITRIS, University of California, Berkeley, Tokyo, Japan, April 10, 2006.(CITRIS project –center for information technology research in the interest of
![Page 11: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/11.jpg)
Expertise in: wireless ultralow power communications, packaging, 3D integration technologies, MEMS energy scavenging techniques Lowpower design techniques.
Human++: Autonomous Wireless Sensors for Body Area Networks; Bert Gyselinckx, Chris Van Hoof, Julien Ryckaert, Refet Firat Yazicioglu,Paolo Fiorini, Vladimir Leonov, IMEC, Kapeldreef 75, B-3000 Leuven, Belgium
Autonomous Wireless Sensors For Body Area Autonomous Wireless Sensors For Body Area Networks BAN (IMEC Ltd)Networks BAN (IMEC Ltd)
![Page 12: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/12.jpg)
Wireless sensor module as miniaturized but conventionally-connectorized (left) or as integrated 1cm3 volume 3D stack (right).
Power layer-2 small button cell battery V6HR NiMH, 2.4V
Smart band aidSmart band aid––sensing & communicating sensing & communicating with a base station (IMEC Ltd)with a base station (IMEC Ltd)
1cm3 (3D SIP) approachNext generation - Thin film Li-ion
http://ww
w.im
ec.be/ww
winter/m
ediacenter/en/SR2006/681542.htm
l
Include: 1. radio, 2. micro processor, 3. sensor, 4. power source
1st generation 2nd generation
Scientific report, 2006
Problem:Typical capacity < 1mAh power consumption will have to be reducedTAU solution: Improving specification without increasing footprintcomplementary approach: scavengers - can recharge the battery continuously
![Page 13: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/13.jpg)
NOVEL MEMS & NOVEL MEMS & MBsMBs for CLINICAL NEEDS:for CLINICAL NEEDS:surgical tools; implantable e-devices;
sensors and monitors for physiological parameters;
neurostimulators; devices for pain relief;
control over drug delivery from implantable reservoirs
The "Data Knife" Pittsburgh, Verimetra Inc.
L=26, Φ=11 mm
http://ww
w.batteriesdigest.com
/gastro.htm
http://www.smalltimes.com/articles/article_display.cfm?article_id=268501
Neuro-modulator
Companies: ChipRx, MicroCHIPS Inc.
![Page 14: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/14.jpg)
Charge rate
Power density
W/L
Energy densityWh/LDimensions
0.5Cd=4.7mmh=1.4mmV=0.02ml
V=0.7ml 5C
8C
62
925
2550
Varta65011 124
185
Great batch Ltd (medical applic.)
3063DMB*
TAU 3DMB TAU 3DMB –– The Answer To Sub The Answer To Sub ––mmmm33 batterybattery
Tailored to application (foot print, design,
performance)
*after improvement of current collectors
![Page 15: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/15.jpg)
Fundamental problem of 2D-MBs: limited active electrode surface area
High integrity containment & minimum size
Long-term Energy Supply in MEMS need High Power Level
Rechargeability
Minimal internal resistance, SAFETY,
Produceability in large quantity and low cost
MB requirements for MEMS applications:MB requirements for MEMS applications:
![Page 16: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/16.jpg)
Typical performance
TAU
2-4
1-3
2.5-10
4 - 70
1.7-3
100
170
20(500*)
Voltage[V]
Capacity [μAh/mm2]
Energy[μWh/mm2]
Power[μW/mm2]
*- future valueU.S companies have silences the Thin-film MB ORNL tech:Bordeaux Univ.& Hydromech.(HEF)1, Oakridge Lab.2, Eveready Battery Co.1 Cymbet inc., Front edge technology inc., Excellatron solid state Inc. LiTE Star
ThinThin--film batteries film batteries The most advanced of The most advanced of LiBatLiBat systemssystems
![Page 17: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/17.jpg)
3D3D--Interlaced Microbattery (3DInterlaced Microbattery (3D--IMB)IMB)
Bottom current collector
0.5mm
20μm 50μm
50μmCATHODE
ANODE
![Page 18: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/18.jpg)
SEM image of porous Si partitionSEM image of porous Si partition
![Page 19: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/19.jpg)
Cycle life of thinCycle life of thin--film Li/MoOfilm Li/MoOxxSSyy cells with 3D cells with 3D interlaced porous Siinterlaced porous Si
0 5 10 15 20 25 300
10
20
30
40
50
60
Li/3D-PSi(ox) LiPF6 EC:DEC/MoOxSy
Li/Celgard LiPF6 EC:DEC/MoOxSy
disc
harg
e ca
paci
ty, μ
Ah/
cm2
cycle number
0.0 0.2 0.4 0.6 0.8 1.01.2
1.4
1.6
1.8
2.0
2.2
2.4
Li/3D-PSi(ox) LiPF6 EC:DEC/MoOxSy
Li/Celgard LiPF6 EC:DEC/MoOxSy
Vol
tage
(V)
Normalized Capacity
Cycle 15
![Page 20: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/20.jpg)
Optical and SEM images of the interlaced Si formed Optical and SEM images of the interlaced Si formed by doubleby double--side DRIE side DRIE ((deep reactive ion etchingdeep reactive ion etching) )
50μm
![Page 21: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/21.jpg)
Si Si microcontainersmicrocontainers filled by anode and LiCoOfilled by anode and LiCoO22 cathodecathode
Anode composition:MCMB (Meso-Carbon Micro Beads) 6-10μm SB - Shawinigan BlackBinder
cathodeanode
![Page 22: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/22.jpg)
t = 450 μ md = 40 μ m s = 10 μ m, Area Gain (AG)=23
t=500μms = 10μm
( )2. . 22
d dAG td sπ ⎛ ⎞= − +⎜ ⎟
⎝ ⎠+
STRATEGY: Max PD&ED within the footprint areaSTRATEGY: Max PD&ED within the footprint area
![Page 23: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/23.jpg)
3D3D--Concentric MB on perforated substrateConcentric MB on perforated substrate
Perforated silicon prepared by ICP-Bosch process
Glass capillary arrays
Photosensitive glass (Foturan)
Substrates:
![Page 24: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/24.jpg)
1. Surface pretreatment of substrate sidewalls.2. Electroless deposition of a current collector. 3. Electrodeposition of a thin-film molybdenum sulfide cathode. 4. Hybrid-polymer electrolyte (HPE) membrane coating. 5. Filling of the remain volume of holes by graphite based anode 6. Mounting of lithium foil at the top of the conformally coated perforated
substrate.7. Charging of the cell with liquid electrolyte and packing8. Testing and Characterization (XPS, TOF SIMS, XRD, SEM, AIC)
3D3D--MB sequential fabrication stagesMB sequential fabrication stages
Muli-chanel plates- glass substrate
![Page 25: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/25.jpg)
Electrodeposited CathodeElectroless depostion of Ni current collector
Feasibility of 3D concentric microbattery fabricationFeasibility of 3D concentric microbattery fabrication
Conformal Membrane coating Filled Graphite anode
![Page 26: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/26.jpg)
Cycle life of planar and 3DCycle life of planar and 3D--CMBsCMBs
500 1000 15000.01
0.1
1
1020 40 60 80 100
(60μAh/cm2)
(25μAh/cm2)
2D-V2O5 cryst
2D-V2O5 amorph
2D-MoOxSy
High Energy 3DMB-MoOxSy
High power 3DMB-MoOxSy
Cap
acity
[mA
h/cm
2 ]
Number of cycles
2D-MoO3
(160μAh/cm2)
0 1 2 3 41.2
1.6
2.0
2.4
Vol
tage
, V
Capacity, mAh
![Page 27: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/27.jpg)
0.2 0.4 0.6 0.8 1.0 1.20.0
0.2
0.4
0.6
0.8
1.0
1.2
1.4
1.6
1.8
V-13 V-8 MoOxSy
Pow
er [m
W/c
m2 ]
Current [mA/cm2]
2D-MB
Cathode thickness 2-4 μm
Polarization curvePolarization curve
0.01 0.1 1 100.01
0.1
1
10
1
2
10C
Pow
er [m
W*c
m2 ]
Current [mA/cm2)
3D-CMB
Planar
Vol
tage
[V]
ES206_polarization_A
τpulse=2min
![Page 28: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/28.jpg)
Power
[μ W/mm2]
Energy
[μ Wh/mm2]
Capacity
[μAh/mm2]
OperatingVoltage
[V]
~20*
200**1701001.7
Present High-energy configuration
~500120403Future TAUHigh-power
configuration
1500180603 After improvement of current collectors
4-702.5-101-32-4Typical performance of 2D Li thin film Battery
TAU 3D-MB present and predicted performance
* Continuous operation** polarization pulseAVG density of battery is 2.5gr/ml
![Page 29: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/29.jpg)
Safety of High Power Lithium Ion BatteriesSafety of High Power Lithium Ion Batteries
Causes:Overcharge; Internal or external short-circuit; Mechanical impact (abuse); External heat (abuse) etc.
3DMB battery consists of ~30,000 holes/cm2. In each one there is a complete lithium ion micro-cell. All these “micro-cells” are connected in parallel.
It is projected that such as multi-cell battery will be safer than the traditional ones as there is a 10-20 micron insulating wall (coated by 2 micron nickel film on both sides) between neighboring micro-cells (surrounding each one of them).
High power lithium ion batteries can supply 15C of current. However they are not safe enough (see for example 120 fire / explosion incidents reported in;http://www.rcgroups.com/forums/showthread.php?t=209187
![Page 30: 3D lithium ion on chip micro battery for miniature electronic devices](https://reader031.vdocuments.us/reader031/viewer/2022020703/61fb449a2e268c58cd5c2805/html5/thumbnails/30.jpg)
SummarySummary1. A technology for the manufacturing of 3DMB based on the interlaced Si
has been developed, complete cells to be tested soon
2. The 3D-CMBs with modified MoOySz cathode exhibited stable cycle life with about 100100 μAh/mm2 reversible capacity, ~100 times higher than that of a planar 2D thin-film cell of the same footprint with non-modified cathode.
3. The 3D-CMBs with electrodeposited V2O5 are under testing
4. High-power 3DMBs on perforated substrates are expected to be safer than the ordinary batteries