3d displacement measurement using ring-beam
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3D Displacement Measurement Using Ring-beam
IntroductionIntroduction
PhD Student: Shin Usuki
Parallel CMMIntroductionIntroduction3D Displacement (Position) Measurementwith High Accuracy and MeasurementFlexibility to Calibrate the End-effector ofthe Complicated 3D Mechanism
Ring-Beam System
dMeasurement PrincipleMeasurement Principle Light sourceBeam Expander
Sphere
l
Ring Slit
λ/4 Plate Image of reflected ray
lens
CCD
Beam Splitter
PC
Displacement of a ball
X X
Y Y
Z Z
Step Displacement Measurement & AnalysisStep Displacement Measurement & Analysis
Change of Reflected Light→ Sphere Displacement
Various Images of Reflected Light
Measurement of Target Sphere with 200nm Step
Ring Slit
CC
Source
Expander
Mirror
Lens
λ/4 200nm
Max Error: 50nm
X direction Displacement by PZT
D l d E i t
150mm
CCD
Height=100mm
Beam Splitter
polarizer
300mm
200nm
Standard deviation: 10nm
Measurement ResultDeveloped Equipment- Compact & Mobile -- Low Center of Gravity -- Easy to Assemble -
Ref.) S. Usuki, et. al., Improving the Accuracy of 3D Displacement Measurement using Ring-Shaped Laser Beam and High Resolution CCD, Proc. 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004), pp328-329, 2004
Measurement Result(X direction repeatability: 10nm, accuracy: 50nm)(Y direction repeatability: 20nm)(Z direction repeatability : 100nm)Range (XD x YD x ZD: 0.1mm x 0.1mm x 0.5mm)