©2012 university of californiaberkeley sensor & actuator center fall 2011 tristan o. rocheleau...
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©2012 University of California Berkeley Sensor & Actuator Center
Fall 2011
Tristan O. Rocheleau
Advisor: Prof. Clark T.-C. Nguyen
RF MEMS: Enabling the Next Generation of Wireless
Communications
©2012 University of California Berkeley Sensor & Actuator Center
Fall 2011
Conformal Photovoltaics
Magnetic Immunosensor
Smart Dust
Nanocavity LEDs Optical
Interconnects
Nanocomposite Energy Harvesting
& Storage
Harsh Environment Sensing
Electrospun Active Fabrics
Cell Culture Array
MEMS RF Multiband Frontend
Large Area Nanostructural Printed Electronics
BSAC Research Areas
©2012 University of California Berkeley Sensor & Actuator Center
Fall 2011
Quartz Resonators: They’re Everywhere3mm
©2012 University of California Berkeley Sensor & Actuator Center
Fall 2011
Next-Gen Devices Must Do Everything
Each additional radio channel requires more filters, oscillator -> more bulky resonators(space and $$)
©2012 University of California Berkeley Sensor & Actuator Center
Fall 2011
Enter RF-MEMS
Vs.
30µm
©2012 University of California Berkeley Sensor & Actuator Center
Fall 2011
Capacitive-Gap MEMS Resonators
vi
VP
iout
30µm• Tiny! May be integrated
on-chip
• Capable of extremely high Q
©2012 University of California Berkeley Sensor & Actuator Center
Fall 2011
Fabricated Device
𝟖𝟎𝒏𝒎Drive Electrode
Sense Electrode
𝑹=𝟏𝟕𝝁𝒎Anchor Stem
1µm
©2012 University of California Berkeley Sensor & Actuator Center
Fall 2011
MEMS-Based Oscillator
toutV
• MEMS resonator acts as frequency feedback element in oscillator
©2012 University of California Berkeley Sensor & Actuator Center
Fall 2011
RQ
viRQ
vo
Electro-mechanical Coupling
Resonator TankCoupling Beam
Rd
MEMS-Based Filter
©2012 University of California Berkeley Sensor & Actuator Center
Fall 2011
BSAC Posters in Cory Hall
©2012 University of California Berkeley Sensor & Actuator Center
Fall 2011
Poster Session Location: 4th Floor Cory Hall
Conference Room Swarm Lab