200mm etch (tel) - cubit semiconductor · 2020. 2. 5. · biz area: lam retrofit of 300mm dry...

CUBIT Pte Ltd

200mm ETCH (TEL)

32 Ang Mo Kio Industrial Park2#06-02,Sing Industrial Complex

SEMICONDUCTOR LEADING SERVICES

#06-02,Sing Industrial Complex

Singapore 569510

TEL: +65 6555 2395FAX: +65 6555 3173

Visit our website at http://www.cubit.com.sg/

[email protected]

Semiconductor Equipment Refurbishments

Own Core Competence

- Engineers with more than 15 years field experience in semiconductor equipments

- Module-based system design capability

- Field-proven equipment refurbish and diverse sales records on track, stepper, CVD and PVD.

- Highly experienced engineers ready for customer’s any needs

Business Record & Performances

Classification Maker Model Remarks

ETCH TEL TE 5000, TE8500, Unity IIe & Unity Me Series, Oxide, Trench, PolyETCH ASHER

TEL TE 5000, TE8500, Unity IIe & Unity Me Series, Telius(300mm), Vigus(300mm), Vista(300mm)

Oxide, Trench, Poly

AMAT P-5000Series, Centura5200 Series Oxide, Poly, Metal

HITACH M-308, M501A, M-602A Metal, Poly

LAM All Rainbow, All Alliance, 300mm (Kiyo, Versys) Oxide, Poly, Metal

Others Novellus, STS, Shibaura Oxide, Poly, Metal

Photo(with Related)

Track All TEL Mark & ACT (4Inch to 12Inch) Makr5~8, ACT8~12

Stepper Nikon(G, I, EX, Scanner), Canon(I , EX) G, I line, Scanner

CVD & PVD AMAT Centura 5200, Endura 5500 CVD, PVD

FURNACE(with Related)

TEL All Alpha 8, VCF, VDF Diffusion, LP CVD

KOKUSA All DJ & DD Series Diffusion, LP CVD


Biz Area: TEL Telius 300mm System Chamber Overhaul & Annual PM Item

Biz Item Process Cubit Technology Advantages

TEL Telius 300mm System

AnnualPM Item

Overhaul & replacement of process chamber O-ring to maintain the system condition for process reliability.

- Special Jig for the overhaul

(Made by cubit )

- Skilled experience & Technology

-Fast system back up

Sales Record :

- S company(Korea)

- T Company(Japan)

- To keep process reliability

- Easy maintenance against chamber leak

- Low preventive maintenance cost

- Extended application

* LAM & AMAT 300mm system PM

* LAM & AMAT 200mm system PM

Point of Chamber O-ringOverhaul Picturs of Chamber O-ringOverhaul


Biz Area: TEL Unity II Series YASKAWA Robot Repair(Overhaul, one to on exchange) & SmartEPD(New)

Biz Item Product Cubit Technology Advantages

YASKWARobot

Repair&Overhaul

Unity Series Robot Repair

- Robot Ass’y Upgrade

- Robot Controller Repair

- Robot Ass’y Consumable

Parts All change- Robot Program Upload & Download

- Unity System Master

- Robot Install & Set up

- Hardware & Software Supply

- Yaskawa OEM Robot Overhaul

- Life Time enhancement

- Continuous Maintenance Management

and Stable Service Provide

- Productivity enhancement by cost Down

- Easy Maintenance right there

TEL Unity II Series

YASKWA Robot

YASKWA Robot Controller

Robot Moving TestWafer Moving Cycle Transfer Test – 1000cycles

Cubit Smart EPD(End Point Detection)


Biz Area: TEL Unity II Series Magnet Overhaul

Biz Item Purpose CubitTechnology Advantages

Unity Magnet

Overhaul

Magnet Bearing is needed

periodic PM䠄once per 6 months). In case of Greasing only mainten

ance, Magnet vibration is getting

worse when its moving, by grea

se hardness over time

- Mechanism Modify ability

- RIE Sourcing understanding

- Etcher Process Technology


- Overhaul Cost Down(OEM)

- Uniformity 䠃Selectivity Providearea)

3) Magnet bearing (Before Overhaul)Data(Chamber external area)

4) Magnet Bearing(After Overhaul ) Data( Chamberexternal area)

Magnet (Before rotation) Magnet (After Rotation) Magnet (Before rotation) Magnet (After Rotation)

Magnet (Before rotation) Magnet (After Rotation) Magnet (Before rotation) Magnet (After Rotation)

Comparative Data of Bearing Overhaul Vibration Change

1) Magnet bearing (Before Overhaul) Data(ESC 2) Magnet Bearing(After Overhaul ) Data( ESC area)

Unity DRM Magnet

Unity DRM Chamber


Biz Area: TEL Unity GAP Overhaul

Biz Item Product CUBITechnology Advantages

GapOverhaul

Unity Series

Unity II Series

: DRM, DP, SCCM,DI

TE Series

: TE 8500 , K Series

- OEM Parts Supply

- System Install & Set-up

- Mechanism Modify ability

- Overhaul Cost Down(OEM)

- gap Balance improvement , Uniformity &

Selectivity improves

- Process accident prevention

Ring

Gap Overhaul Point

Bottom base

Ring bottom chamber

Holder housing

Ball lead screw

Sprocket

Bearing

Bearin g

Bearing

Chai n

Suppor t unit holder

Gap Ass’y Drawing


Biz Area: TEL Etch System ESC Type Conversion

Biz Item Product CUBIT Technology Advantages

ESC Upgrade

(Ceramic <->Poly imide)

- TEL Unity DRM ,IEM - Etch Process Technology

- RF Matching Technology

- ESC Repair Technology


- Proven Process Capability

- Plasma Arcing prevention

- Available high Power

HV (2000~3000W)

M-Chuck To ESC - Unity II DP Series - Mechanical Design - Life Time enhancementM-Chuck To ESC - Unity II DP Series

- TE Series

- Mechanical Design

Modification

- Software Modification

- Cable Modification

- Chamber Process Tech


- Yield Improvement

- Productivity enhancement

by cost Down

- Particle Decrease

TEL 200mm Etch Process - Polyimide ˧ Ceramic ESC

Unity ESCPolyimide Unity ESCCeramic

M-Chuck

Insulator BTM

Parts Modify

ESC

Insulator BTM


Advantages

Pumping

System

Upgrade

Unity II Series

DRM, DP, SCCM, DI

Etc..

- Mechanical Design Modification

- Software Modification

- Cable Modification


- Production loss reduction by System Down

- Productivity enhancement by Cost Down

- Easy Maintenance right there

¬225¬300

¬165 ¬215¬225

¬162Exhaust Modify SystemDescription

Biz Area: Exhaust System Upgrade(Modify)

Biz Item Product CUBIT Technology

&855(17 703 1(: 703

0$.(5 (%$5$ 6(,.2 6(,.2

;ΠΕΖΝ (7bOO:6 673–+8O3& 673–$13O3&

ΟΝΖΥ7<3( ,6O1bO ,621bO) 9*²OO

Ϳ ͶΩΙΒΦΤΥ ΡΖΖΕͽΤbOO 8OO 13OO

ͶΠΥΒΥΚΠΟΣΡΞ 35OOO 3²5OO 3²5OO

¬225

342mm

¬270

304mm

¬300

¬237¬237

¬270

¬225

¬250

¬214

ET600WS STP-A1303CSTP-H803C

TMP 324mm

APC GATE

73mm

60mm

30mm

179mm81mm

ISO160 VG200

M12Tap

81mm16mm

16mm


Biz Area: LAM Refurbish(Relocation) of 200, 300mm DryEtch

200mm(refurbishment) 300mm(re-location)

• R4520i• R4520SMIF• A96DFM• Aexelan HPT• TCP9400• R4420XL• A94PTX• A94PTX

• Flex

• Flex45

• Metal

• Kiyo poly

• Versys Metal

2Stage DGF

Developments

High Temp Kit

Repair Jig (samples)

ADIO Hine Indexer

Match ESC_PS


Biz Area: LAM Retrofit of 300mm Dry etcher – OxideEtch

0001 716-037794-003 RING,INSLTR,FACIL PL,FLEX 45

0002 839-037792-004 PL,FACIL,F60

0031 715-033514-010 LINER.GRD.INNER BIAS HSGANOD

0032 715-033517-012 COV,BIAS HSG

0010 713-041773-001 SLV,ROD, RF DELIV, 300MM

0020 839-038814-001 STRAP,RF DELIV

0030 715-025593-011 ROD,RF FEED, 1.50 O.D X 11


Biz Area: RF Generator & Matcher Repair(TEL, LAM, AMAT, Others Equipment)

Biz Item Process CUBIT Technology Advantages

RFGenerator Repair & Overhaul

- RF Generator Repair

TEL : Unity & TE Series

LAM : Rainbow Series

Alliance Series

AMAT : P-5000 Series

Centura Series

- RF Generator/Matcher Overhaul

Technology : ENI, AE, DAIHEN, ADTEC, etc

- System Install & Communication Technology

: TEL, LAM, AMAT

- Repair Parts Keep : Capacitor, Motor, etc

- Fast Delivery

- Lower cost

- Quality Guarantee

(Warranty 6 Month)

RF Generator Repair & Overhaul (Possibility Items) RF Generator Repair & Overhaul (Possibility Items)

ENIMatcher AEMatcher DAIHENMatcher

ENIGenerator AE Generator DAIHENGenerator


Biz Area: Used Parts Supply (TEL, LAM, AMAT, Others)

Biz Item Process CUBIT Technology Advantages

OEM/

UsedParts Supply

- Etch : TEL, LAM, AMAT

- CVD : Novellus, AMAT

- CMP : AMAT

- Metal, PVD : AMAT

- Diffusion : TEL, KE

- Have many kinds equipment

(by Process)

- for a long time, a lot of sales net work

- Fast Delivery

- lower cost

- Quality Guarantee

(Warranty 6 Month)

NO Product MAKER MODEL

Used Parts Supply


1 ESC

TEL Unity Series, TE Series

LAM Rainbow Series, Alliance Series

AMAT P-5000 Series, Centura Series

2 Generator

TEL ENI, COMDEL, DAIHEN, AE, ADTEC, etc

LAM ENI, COMDEL, AE, RFPP, etc

AMAT ENI, AE, RFPP, etc

3 Matcher

TEL MWD-25LD, MHW-25-04, MWM-25, etc

LAM TCP Top, TCP Bottom, etc

AMAT Poly, DPS, Oxide, Metal, CVD, PVD, etc


1 ROBOT YASKAWA, RORZE, etc VS2A, VS2B, RR701L90, etc

2 ROBOT CONTROLLER YSSKAWA, RORZE UTC801P, TMC-3202LMC-K1, etc


A lot of parts stock

3 TMP EBARA, EDWARD, SHIMADZU ET600WS, STP-XH2603P, etc

4 RF MATCHER ENI, PEARL, COMDEL MWD-25LD, MHW-25-04, MWM-25, M-30A2VS, MFM-20SA,CPMX-3500, DAUMA 10N2H, MW2-30, etc

5 RF GENERATOR COMDEL, ENI, PEARL CX-2000, CV-2000, CX-2500, CV-3000,PDW2200, NPG5000A , etc

6 BOARD

TEL UNITY Series, TE Series

LAM RAINBOW Series, Alliance Series, etc

AMAT P-5000 Series, Centura Series, etc

Parts List Total 700 EA

200mm etch (tel) - cubit semiconductor · 2020. 2. 5. · biz area: lam retrofit of 300mm dry...

Documents