Move crosshair to the edge of the bias ring and define as point “A.”

Move to the other side of the detector and define point “B”at the outer edge of the bias ring.

2 point alignment adjusts small angular deviations such that the imaginary line that connects points A and B is parallel to the X axis of the probe station.

Pt A

Pt B

Define home at this point on the detector.

ML DIMENSIONS

Automatic Probe station Work Station

Video/Microscope

Probe Card

Keithley Power Supply and Switching matrix

35 V

35V

Power Supply

Switching Matrix

Detector

Measure the warping by focusing on a position and take of the vacuum the adjusting z direction such that the component comes back into focus. Then measure the displacement in the z direction.

Move to the other side of the detector and define point “B”at the outer edge of the bias ring.