17 fiber based high pwr lasers-galvanauskas
TRANSCRIPT
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EUV Source Workshop, San Diego, November 10th, 2005
High Power Pulsed High Power Pulsed Fiber LasersFiber LasersAlmantas GalvanauskasAlmantas Galvanauskas
University of MichiganUniversity of Michigan
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EUV Source Workshop, San Diego, November 10th, 2005
CoauthorsCoauthors
University of MichiganUniversity of MichiganAghapi Mordovanakis, KaiAghapi Mordovanakis, Kai--Chung Hou , Chung Hou , YuYu--Chung Chang, John Nees, Bixue Hou, Chung Chang, John Nees, Bixue Hou, Anatoly Maksimchuk, Gerard MourouAnatoly Maksimchuk, Gerard Mourou
University of Central FloridaUniversity of Central FloridaProf. Martin RichardsonProf. Martin Richardson
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EUV Source Workshop, San Diego, November 10th, 2005
Fiber Laser Technology Fiber Laser Technology High Power Fiber Laser Sources:High Power Fiber Laser Sources:
Very high Very high cwcw powers already achieved:powers already achieved:SingleSingle--emitter singleemitter single--mode 3 kWmode 3 kW>20 kW from combined>20 kW from combined--fiber sourcefiber source
Practical technology:Practical technology:Robust and compactRobust and compactEfficient (20% Efficient (20% -- 40% electrical40% electrical--toto--optical)optical)ReliableReliableLow costLow cost
Pulsed Fiber laser LPP Sources•ns pulses Achievable intensities on target: 1010 - 1011 W/cm2
already demonstrated 1% CE EUV generation with FLPP
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EUV Source Workshop, San Diego, November 10th, 2005
Fiber Laser Power RevolutionFiber Laser Power Revolution
0
500
1000
1500
2000
1992 1994 1996 1998 2000 2002 2004 2006
Year
Sing
le-m
ode
cw p
ower
, W
SDL IPGJena
SPIMichigan
SPI
IPG
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EUV Source Workshop, San Diego, November 10th, 2005
Origin of Fiber Laser Power Origin of Fiber Laser Power Revolution Revolution -- Thermal Advantage:Thermal Advantage:High surfaceHigh surface--toto--volume volume ratio:ratio:
R
surfacevolume = 2/R
typically R ~ 200 - 400 μm
High Optical EfficiencyHigh Optical Efficiency
0
300
600
900
0 400 800 1200
Coupled pump power, W
Lase
r out
put,
W
Yb-fibers 70%-80%
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EUV Source Workshop, San Diego, November 10th, 2005
Pulsed Fiber Laser Energy MapPulsed Fiber Laser Energy Map
0.001
0.01
0.1
1
10
100
0.001 0.01 0.1 1 10 100
Pulse duration, ns
Puls
e en
ergy
, mJ
100 W
1 kW10
kW100 k
W1 MW
3.7 MW –
Self-Focusing Lim
it
Southampton
IMRA
Jena
MichiganSingle ModeSingle Mode
Multi ModeMulti Mode
UofMUofM::2.4 MW MM 2.4 MW MM (4(4--ns)ns)82 82 mJmJ MM MM (500(500--ns)ns)
~1 MW SM ~1 MW SM (1(1--ns)ns)9 9 mJmJ SM SM (10(10--ns)ns)
AculightFiberTek
LPP requirements
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EUV Source Workshop, San Diego, November 10th, 2005
Demonstration of Pulsed Fiber Laser EUV Demonstration of Pulsed Fiber Laser EUV Generation @ 13.5Generation @ 13.5--nmnm
2% bandwidth at 13.5nm
34nm22nm13.5nm10nm
Intensity on target ~10Intensity on target ~101010
W/cmW/cm22
Conversion Efficiency: 0.9 Conversion Efficiency: 0.9 % within 2% within 2ππ
Currently Currently -- up to 2x10up to 2x101111
W/cmW/cm22 on target on target →→conversion is only target conversion is only target limitedlimited
EUV Spectrum
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EUV Source Workshop, San Diego, November 10th, 2005
nsns--Pulsed Single Fiber Laser EUV Pulsed Single Fiber Laser EUV DriverDriver
AOM
SM AmplifierSM Amplifier
980nmPump diode
Band-pass filter
50/350um Yb-doped MM Amplifier, 1.4m
115/350um Yb-dopedMM Amplifier, 2.7m
980nmPump diode
1064nm Seed diode
50Hz
Band-pass filter
200W915nmpumpdiode
50W980nmpumpdiodeProtection
end-cap
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EUV Source Workshop, San Diego, November 10th, 2005
Flexibility of DiodeFlexibility of Diode--Seeded Fiber Seeded Fiber SystemSystem
Arbitrarily controllable pulse durationArbitrarily controllable pulse durationElectronically defined 1ns Electronically defined 1ns –– >100ns at the output>100ns at the output
Arbitrarily selectable repetition rateArbitrarily selectable repetition rateFrom < 1From < 1--kHz to > 1kHz to > 1--MHzMHz
Electronically controllable pulse shapeElectronically controllable pulse shape
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EUV Source Workshop, San Diego, November 10th, 2005
Power Scaling Strategy for 10kWPower Scaling Strategy for 10kW--20kW Laser Source20kW Laser Source
λ1
λ2
λn
Single fiberIntegrated system0.5kW – 1kW
Spectrally combinedblock (SC)2.5kW – 5kW
Spatially mutliplexedSC blocks10kW – 20kW
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EUV Source Workshop, San Diego, November 10th, 2005
Operational CharacteristicsOperational Characteristics
Single Emitter Spectrally-Combined (SC)
Spatially Multiplexed
Pulse energy 4mJ – 10mJ*4mJ
20mJ – 40mJ*20mJ
80mJ – 160mJ*80mJ
Pulse duration 5ns – 10ns*5ns
Repetition rate 1kHz - >1MHz*100kHz
Power 0.5kW – 1kW*0.5kW
2.5kW – 5kW*2.5kW
10kW – 20kW*10kW
Beam quality M2 = 1.1 – 10*1.1
M2 = 1.5 – 12*1.5
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EUV Source Workshop, San Diego, November 10th, 2005
Pump diode costs (current and Pump diode costs (current and projected)projected)
Diode type/Diode type/
configurationconfiguration
Current priceCurrent price Projected priceProjected price**
Diode Bars:Diode Bars:
chipchip--onon--mountmount
fiber coupledfiber coupled
15 15 -- 25 $/W25 $/W
~100 $/W~100 $/W
5 5 –– 8 $/W8 $/W
15 15 –– 24 $/W24 $/W
Single emitters:Single emitters:
chipchip--onon--mountmount
fiber coupledfiber coupled
10 10 –– 20 $/W20 $/W
30 30 –– 60 $/W60 $/W
~2 $/W~2 $/W
~10 $/W~10 $/W
*Projection is based on expected radical changes in the industry:(a) full capacity operation of semiconductor foundries (compared to 10%-20% currently), and (b) automation of optical assembly and fiber pig-tailing processes.
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EUV Source Workshop, San Diego, November 10th, 2005
Estimated High Power Fiber Laser Estimated High Power Fiber Laser CostCost
SingleSingle--emitter emitter diode diode pumping pumping costcost for 10for 10--kW kW laser:laser:
Current:Current:625k$625k$
Projected:Projected:125k$125k$
Individualpumps
Signal Signal
Total cost of 10kW – 20kW source:1M$ (10kW) - 2M$ (20kW)
Individual fiber amplifier stage
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EUV Source Workshop, San Diego, November 10th, 2005
Efficiency and reliabilityEfficiency and reliability
SingleSingle--emitter diode lifetime >emitter diode lifetime >200.000 hours200.000 hours MTBF MTBF (best claim at present);(best claim at present);>40.000 hours>40.000 hours (conservative).(conservative).
Overall plugOverall plug--wall efficiency:wall efficiency:25% to 40%25% to 40%
Heat dissipation in the laser:Heat dissipation in the laser:<30%<30% (due to >70% optical efficiency)(due to >70% optical efficiency)
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EUV Source Workshop, San Diego, November 10th, 2005
Commercial 20Commercial 20--kW kW cwcw multiplexedmultiplexed--fiber sources are available alreadyfiber sources are available already
Nominal laser power 20.0 kW(at the workpiece)
Maximum laser power 21.0 kW
Wavelength: 1070 nm
Fiber core: ø 200 µm
Fiber Length up to 50m
BPP 11mmxmrad
Foot Print 800 x 1.460 mm
Height 1.500 mm
Cooling capacity 64 kW
Wallplug Efficiency > 29%
Nominal laser power 20.0 kW(at the workpiece)
Maximum laser power 21.0 kW
Wavelength: 1070 nm
Fiber core: ø 200 µm
Fiber Length up to 50m
BPP 11mmxmrad
Foot Print 800 x 1.460 mm
Height 1.500 mm
Cooling capacity 64 kW
Wallplug Efficiency > 29%
YLR-20000
Model YLR-20000-P by IPG Photonics
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EUV Source Workshop, San Diego, November 10th, 2005
Qualitative Comparison of Qualitative Comparison of Lasers for Material ProcessingLasers for Material Processing
Courtesy: S. Heinemann, Fraunhofer USA
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EUV Source Workshop, San Diego, November 10th, 2005
Main challengesMain challenges
HighHigh--Power Fiber Laser Driven EUV Power Fiber Laser Driven EUV generation is needed!generation is needed!
Fiber laser + Practical Target (Fiber laser + Practical Target (SnSn droplet)droplet)~10W EUV in less than 1 year~10W EUV in less than 1 yearDemonstrate scalability into >100W EUV Demonstrate scalability into >100W EUV
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EUV Source Workshop, San Diego, November 10th, 2005
SummarySummary
High power fiber lasers High power fiber lasers –– a new pathway to a new pathway to affordable high radiation power for EUV affordable high radiation power for EUV lithographylithography
10kW 10kW -- >20kW average powers>20kW average powersAffordable (1M$ Affordable (1M$ -- 2M$)2M$)Efficient (25%Efficient (25%--40% PWE and low heat dissipation)40% PWE and low heat dissipation)Small footprint (~10 Small footprint (~10 sqftsqft))
This work is partially supported by SRC through Task #1180.001.This work is partially supported by SRC through Task #1180.001.